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Journal Articles

Deposition and optical properties investigation of components for multilayer electrochromic system

Janusz Rybak, Konstanty W. Marszalek
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 063401 (2023)
https://doi.org/10.1116/6.0003138
Published: October 2023
View article titled, Deposition and optical properties investigation of components for multilayer electrochromic system
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Journal Articles

Investigation of polymer template removal techniques in three-dimensional thin-shell nanolattices

Vijay Anirudh Premnath, Chih-Hao Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062805 (2023)
https://doi.org/10.1116/6.0003036
Published: October 2023
View article titled, Investigation of polymer template removal techniques in three-dimensional thin-shell nanolattices
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Journal Articles

Temperature dependent correlation of Hall effect and optical measurements of electron concentration in degenerate InN thin film

Fernando M. de Oliveira, Chen Li, Pijush K. Ghosh, Andrian V. Kuchuk, Morgan E. Ware, Yuriy I. Mazur, Gregory J. Salamo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052805 (2023)
https://doi.org/10.1116/6.0002866
Published: August 2023
View article titled, Temperature dependent correlation of Hall effect and optical measurements of electron concentration in degenerate InN thin film
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Includes: Supplementary data
Journal Articles

Self-alignment of whole wafers using patterning for capillary forces

Ernest M. Walker, III, Ako Emanuel, Hans D. Hallen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032203 (2023)
https://doi.org/10.1116/6.0002518
Published: April 2023
View article titled, Self-alignment of whole wafers using patterning for capillary forces
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Includes: Supplementary data
Journal Articles

Large-area 1D selective emitter for thermophotovoltaic applications in the mid-infrared

Minsu Oh, Kevin Grossklaus, Thomas E. Vandervelde
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012203 (2023)
https://doi.org/10.1116/6.0002198
Published: December 2022
View article titled, Large-area 1D selective emitter for thermophotovoltaic applications in the mid-infrared
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Journal Articles

Impact of the growth environment in inductively coupled plasma on the synthesis and morphologies of carbon nanohorns

Fanny Casteignau, Taki Aissou, Jérôme Menneveux, Jocelyn Veilleux, Richard Martel, Nadi Braidy
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 062806 (2022)
https://doi.org/10.1116/6.0002134
Published: November 2022
View article titled, Impact of the growth environment in inductively coupled plasma on the synthesis and morphologies of carbon nanohorns
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Includes: Supplementary data
Journal Articles

Simplified CVD route to near-zero thickness silicon nitride films

Barry Arkles, Chad Brick, Jonathan Goff, Alain E. Kaloyeros
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 040601 (2022)
https://doi.org/10.1116/6.0001820
Published: June 2022
View article titled, Simplified CVD route to near-zero thickness silicon nitride films
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Journal Articles

Effect of plasma-species to functionalize isocyanate-groups on multiwalled carbon nanotubes

Daisuke Ogawa, Essam Mohammed Abdel-Fattah, Keiji Nakamura
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 012804 (2022)
https://doi.org/10.1116/6.0001373
Published: December 2021
View article titled, Effect of plasma-species to functionalize isocyanate-groups on multiwalled carbon nanotubes
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Journal Articles

Strain engineering in III-V photonic components through structuration of SiNx films

Brahim Ahammou, Aysegul Abdelal, Jean-Pierre Landesman, Christophe Levallois, Peter Mascher
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 012202 (2022)
https://doi.org/10.1116/6.0001352
Published: December 2021
View article titled, Strain engineering in III-V photonic components through structuration of SiN<sub>x</sub> films
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Journal Articles

Optical metrology of characterizing wetting states

Deming Meng, Yifei Wang, Hao Yang, Buyun Chen, Pan Hu, Boxiang Song, Yunxiang Wang, Zerui Liu, Tse-Hsien Ou, Ximing Zheng, Yichen Gong, Wei Wu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 064001 (2021)
https://doi.org/10.1116/6.0001187
Published: October 2021
View article titled, Optical metrology of characterizing wetting states
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Journal Articles

Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy

Arnoud J. Onnink, Ramazan O. Apaydin, Antonius A. I. Aarnink, Michel P. de Jong, Dirk J. Gravesteijn, Alexey Y. Kovalgin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 044009 (2020)
https://doi.org/10.1116/6.0000193
Published: July 2020
View article titled, Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy
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Includes: Supplementary data
Journal Articles

Thickness dependence of infrared lattice absorption and excitonic absorption in ZnO layers on Si and SiO2 grown by atomic layer deposition

Nuwanjula S. Samarasingha, Stefan Zollner, Dipayan Pal, Rinki Singh, Sudeshna Chattopadhyay
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 042201 (2020)
https://doi.org/10.1116/6.0000184
Published: May 2020
View article titled, Thickness dependence of infrared lattice absorption and excitonic absorption in ZnO layers on Si and SiO<sub>2</sub> grown by atomic layer deposition
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Includes: Supplementary data
Journal Articles

Analytic solutions for calculating the surface inclination of isotropic media and bare substrates by using reflection-based generalized ellipsometry

Christian Negara, Thomas Längle, Jürgen Beyerer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 034012 (2020)
https://doi.org/10.1116/1.5144506
Published: April 2020
View article titled, Analytic solutions for calculating the surface inclination of isotropic media and bare substrates by using reflection-based generalized ellipsometry
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Includes: Supplementary data
Journal Articles

Nondestructive characterization of nanoscale subsurface features fabricated by selective etching of multilayered nanowire test structures using Mueller matrix spectroscopic ellipsometry based scatterometry

Madhulika Korde, Subhadeep Kal, Cheryl Alix, Nick Keller, G. Andrew Antonelli, Aelan Mosden, Alain C. Diebold
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 024007 (2020)
https://doi.org/10.1116/1.5136291
Published: March 2020
View article titled, Nondestructive characterization of nanoscale subsurface features fabricated by selective etching of multilayered nanowire test structures using Mueller matrix spectroscopic ellipsometry based scatterometry
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Journal Articles

Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines

Shirly Espinoza, Fabio Samparisi, Fabio Frassetto, Steffen Richter, Mateusz Rebarz, Ondrej Finke, Martin Albrecht, Matej Jurkovic, Ondrej Hort, Nicola Fabris, Anna Zymaková, Dong Du Mai, Roman Antipenkov, Jaroslav Nejdl, Luca Poletto, Jakob Andreasson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 024005 (2020)
https://doi.org/10.1116/1.5129674
Published: February 2020
View article titled, Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines
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Journal Articles

Imaging ellipsometry for curved surfaces

Christian Negara, Thomas Längle, Jürgen Beyerer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014016 (2020)
https://doi.org/10.1116/1.5129654
Published: January 2020
View article titled, Imaging ellipsometry for curved surfaces
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Journal Articles

Mid-IR and UV-Vis-NIR Mueller matrix ellipsometry characterization of tunable hyperbolic metamaterials based on self-assembled carbon nanotubes

Stefan Schöche, Po-Hsun Ho, John A. Roberts, Shangjie J. Yu, Jonathan A. Fan, Abram L. Falk
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014015 (2020)
https://doi.org/10.1116/1.5130888
Published: January 2020
View article titled, Mid-IR and UV-Vis-NIR Mueller matrix ellipsometry characterization of tunable hyperbolic metamaterials based on self-assembled carbon nanotubes
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Journal Articles

Gold nanoparticles growing in a polymer matrix: What can we learn from spectroscopic imaging ellipsometry?

Corentin Guyot, Philippe Leclère, Michel Voué
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 013602 (2020)
https://doi.org/10.1116/1.5129578
Published: January 2020
View article titled, Gold nanoparticles growing in a polymer matrix: What can we learn from spectroscopic imaging ellipsometry?
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Journal Articles

In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition

Franziska Naumann, Johanna Reck, Hassan Gargouri, Bernd Gruska, Adrian Blümich, Ali Mahmoodinezhad, Christoph Janowitz, Karsten Henkel, Jan Ingo Flege
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014014 (2020)
https://doi.org/10.1116/1.5122797
Published: January 2020
View article titled, <em>In situ</em> real-time and <em>ex situ</em> spectroscopic analysis of Al<sub>2</sub>O<sub>3</sub> films prepared by plasma enhanced atomic layer deposition
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Journal Articles

Formation and optical response of self-assembled gold nanoparticle lattices on oxidized silicon synthesized using block copolymers

Alberto Alvarez-Fernandez, Guillaume Fleury, Virginie Ponsinet, Per Magnus Walmsness, Morten Kildemo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 013601 (2020)
https://doi.org/10.1116/1.5129667
Published: January 2020
View article titled, Formation and optical response of self-assembled gold nanoparticle lattices on oxidized silicon synthesized using block copolymers
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