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Journal Articles

Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy

Glenn G. Jernigan, John P. Murphy, Nadeemullah A. Mahadik, Alex J. Grede, Eric M. Jackson, Jill A. Nolde

J. Vac. Sci. Technol. B 42, 052209 (2024)

https://doi.org/10.1116/6.0003585

Published: September 2024

View article titled, Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy

Journal Articles

Role of the oxidation conditions on the orientation of TiN_xO_y grown by atomic layer deposition: Impact on the optical and electrical properties

Kou Ihara, Julien Cardin, Maxime Leménager, Xavier Portier, Hind Bousbia, Christophe Labbé

J. Vac. Sci. Technol. B 42, 054001 (2024)

https://doi.org/10.1116/6.0003646

Published: August 2024

View article titled, Role of the oxidation conditions on the orientation of TiNxOy grown by atomic layer deposition: Impact on the optical and electrical properties

Journal Articles

Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates

B. Claflin, G. J. Grzybowski, S. Zollner, B. R. Rogers, T. A. Cooper, D. C. Look

J. Vac. Sci. Technol. B 42, 052204 (2024)

https://doi.org/10.1116/6.0003689

Published: August 2024

View article titled, Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates

Journal Articles

Compositional dependence of direct transition energies in Si_xGe_1−x−ySn_y alloys lattice-matched to Ge/GaAs

Phoebe M. Pearce, Sheau Wei Ong, Andrew D. Johnson, Eng Soon Tok, Nicholas J. Ekins-Daukes

J. Vac. Sci. Technol. B 42, 042206 (2024)

https://doi.org/10.1116/6.0003737

Published: June 2024

View article titled, Compositional dependence of direct transition energies in SixGe1−x−ySny alloys lattice-matched to Ge/GaAs

Journal Articles

Excitonic effects in the optical absorption of gapless semiconductor α-tin near the direct bandgap

Stefan Zollner

J. Vac. Sci. Technol. B 42, 022203 (2024)

https://doi.org/10.1116/6.0003278

Published: February 2024

View article titled, Excitonic effects in the optical absorption of gapless semiconductor α-tin near the direct bandgap

Includes: Supplementary data

Journal Articles

Growth of CdS heterojunctions on Cd_0.9Zn_0.1Te single crystals with H₂S

Hao Yuan, T. Tiedje, Jingye Chen, Hui Wang, Brad Aitchison, Pawan Kumar, Yuxin Song

J. Vac. Sci. Technol. B 42, 012206 (2024)

https://doi.org/10.1116/6.0003265

Published: January 2024

View article titled, Growth of CdS heterojunctions on Cd0.9Zn0.1Te single crystals with H2S

Journal Articles

Optical properties of copper oxide thin films implanted with chromium ions

Katarzyna Ungeheuer, Konstanty W. Marszalek

J. Vac. Sci. Technol. B 41, 062208 (2023)

https://doi.org/10.1116/6.0003135

Published: December 2023

View article titled, Optical properties of copper oxide thin films implanted with chromium ions

Journal Articles

Deposition and optical properties investigation of components for multilayer electrochromic system

Janusz Rybak, Konstanty W. Marszalek

J. Vac. Sci. Technol. B 41, 063401 (2023)

https://doi.org/10.1116/6.0003138

Published: October 2023

View article titled, Deposition and optical properties investigation of components for multilayer electrochromic system

Journal Articles

Investigation of polymer template removal techniques in three-dimensional thin-shell nanolattices

Vijay Anirudh Premnath, Chih-Hao Chang

J. Vac. Sci. Technol. B 41, 062805 (2023)

https://doi.org/10.1116/6.0003036

Published: October 2023

View article titled, Investigation of polymer template removal techniques in three-dimensional thin-shell nanolattices

Journal Articles

Temperature dependent correlation of Hall effect and optical measurements of electron concentration in degenerate InN thin film

Fernando M. de Oliveira, Chen Li, Pijush K. Ghosh, Andrian V. Kuchuk, Morgan E. Ware, Yuriy I. Mazur, Gregory J. Salamo

J. Vac. Sci. Technol. B 41, 052805 (2023)

https://doi.org/10.1116/6.0002866

Published: August 2023

View article titled, Temperature dependent correlation of Hall effect and optical measurements of electron concentration in degenerate InN thin film

Includes: Supplementary data

Journal Articles

Self-alignment of whole wafers using patterning for capillary forces

Ernest M. Walker, III, Ako Emanuel, Hans D. Hallen

J. Vac. Sci. Technol. B 41, 032203 (2023)

https://doi.org/10.1116/6.0002518

Published: April 2023

View article titled, Self-alignment of whole wafers using patterning for capillary forces

Includes: Supplementary data

Journal Articles

Large-area 1D selective emitter for thermophotovoltaic applications in the mid-infrared

Minsu Oh, Kevin Grossklaus, Thomas E. Vandervelde

J. Vac. Sci. Technol. B 41, 012203 (2023)

https://doi.org/10.1116/6.0002198

Published: December 2022

View article titled, Large-area 1D selective emitter for thermophotovoltaic applications in the mid-infrared

Journal Articles

Impact of the growth environment in inductively coupled plasma on the synthesis and morphologies of carbon nanohorns

Fanny Casteignau, Taki Aissou, Jérôme Menneveux, Jocelyn Veilleux, Richard Martel, Nadi Braidy

J. Vac. Sci. Technol. B 40, 062806 (2022)

https://doi.org/10.1116/6.0002134

Published: November 2022

View article titled, Impact of the growth environment in inductively coupled plasma on the synthesis and morphologies of carbon nanohorns

Includes: Supplementary data

Journal Articles

Simplified CVD route to near-zero thickness silicon nitride films

Barry Arkles, Chad Brick, Jonathan Goff, Alain E. Kaloyeros

J. Vac. Sci. Technol. B 40, 040601 (2022)

https://doi.org/10.1116/6.0001820

Published: June 2022

View article titled, Simplified CVD route to near-zero thickness silicon nitride films

Journal Articles

Effect of plasma-species to functionalize isocyanate-groups on multiwalled carbon nanotubes

Daisuke Ogawa, Essam Mohammed Abdel-Fattah, Keiji Nakamura

J. Vac. Sci. Technol. B 40, 012804 (2022)

https://doi.org/10.1116/6.0001373

Published: December 2021

View article titled, Effect of plasma-species to functionalize isocyanate-groups on multiwalled carbon nanotubes

Journal Articles

Strain engineering in III-V photonic components through structuration of SiN_x films

Brahim Ahammou, Aysegul Abdelal, Jean-Pierre Landesman, Christophe Levallois, Peter Mascher

J. Vac. Sci. Technol. B 40, 012202 (2022)

https://doi.org/10.1116/6.0001352

Published: December 2021

View article titled, Strain engineering in III-V photonic components through structuration of SiNx films

Journal Articles

Optical metrology of characterizing wetting states

Deming Meng, Yifei Wang, Hao Yang, Buyun Chen, Pan Hu, Boxiang Song, Yunxiang Wang, Zerui Liu, Tse-Hsien Ou, Ximing Zheng, Yichen Gong, Wei Wu

J. Vac. Sci. Technol. B 39, 064001 (2021)

https://doi.org/10.1116/6.0001187

Published: October 2021

View article titled, Optical metrology of characterizing wetting states

Journal Articles

Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy

Arnoud J. Onnink, Ramazan O. Apaydin, Antonius A. I. Aarnink, Michel P. de Jong, Dirk J. Gravesteijn, Alexey Y. Kovalgin

J. Vac. Sci. Technol. B 38, 044009 (2020)

https://doi.org/10.1116/6.0000193

Published: July 2020

View article titled, Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy

Includes: Supplementary data

Journal Articles

Thickness dependence of infrared lattice absorption and excitonic absorption in ZnO layers on Si and SiO₂ grown by atomic layer deposition

Nuwanjula S. Samarasingha, Stefan Zollner, Dipayan Pal, Rinki Singh, Sudeshna Chattopadhyay

J. Vac. Sci. Technol. B 38, 042201 (2020)

https://doi.org/10.1116/6.0000184

Published: May 2020

View article titled, Thickness dependence of infrared lattice absorption and excitonic absorption in ZnO layers on Si and SiO2 grown by atomic layer deposition

Includes: Supplementary data

Journal Articles

Analytic solutions for calculating the surface inclination of isotropic media and bare substrates by using reflection-based generalized ellipsometry

Christian Negara, Thomas Längle, Jürgen Beyerer

J. Vac. Sci. Technol. B 38, 034012 (2020)

https://doi.org/10.1116/1.5144506

Published: April 2020

View article titled, Analytic solutions for calculating the surface inclination of isotropic media and bare substrates by using reflection-based generalized ellipsometry

Includes: Supplementary data

NARROW

Topics

Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy

Role of the oxidation conditions on the orientation of TiN_xO_y grown by atomic layer deposition: Impact on the optical and electrical properties

Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates

Compositional dependence of direct transition energies in Si_xGe_1−x−ySn_y alloys lattice-matched to Ge/GaAs

Excitonic effects in the optical absorption of gapless semiconductor α-tin near the direct bandgap

Growth of CdS heterojunctions on Cd_0.9Zn_0.1Te single crystals with H₂S

Optical properties of copper oxide thin films implanted with chromium ions

Deposition and optical properties investigation of components for multilayer electrochromic system

Investigation of polymer template removal techniques in three-dimensional thin-shell nanolattices

Temperature dependent correlation of Hall effect and optical measurements of electron concentration in degenerate InN thin film

Self-alignment of whole wafers using patterning for capillary forces

Large-area 1D selective emitter for thermophotovoltaic applications in the mid-infrared

Impact of the growth environment in inductively coupled plasma on the synthesis and morphologies of carbon nanohorns

Simplified CVD route to near-zero thickness silicon nitride films

Effect of plasma-species to functionalize isocyanate-groups on multiwalled carbon nanotubes

Strain engineering in III-V photonic components through structuration of SiN_x films

Optical metrology of characterizing wetting states

Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy

Thickness dependence of infrared lattice absorption and excitonic absorption in ZnO layers on Si and SiO₂ grown by atomic layer deposition

Analytic solutions for calculating the surface inclination of isotropic media and bare substrates by using reflection-based generalized ellipsometry

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