1-20 of 78
Optical interference
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask

FeaturedOpen Access
Shiyang Li, Shuhu Huan, Tao Ren, Ying Liu, Yilin Hong, Shaojun Fu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062603 (2024)
https://doi.org/10.1116/6.0003946
Published: November 2024
View articletitled, Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask
Open the PDF for Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask in another window
Journal Articles

Compositional dependence of direct transition energies in SixGe1−x−ySny alloys lattice-matched to Ge/GaAs

Editor’s PickOpen Access
Phoebe M. Pearce, Sheau Wei Ong, Andrew D. Johnson, Eng Soon Tok, Nicholas J. Ekins-Daukes
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042206 (2024)
https://doi.org/10.1116/6.0003737
Published: June 2024
View articletitled, Compositional dependence of direct transition energies in SixGe1−x−ySny alloys lattice-matched to Ge/GaAs
Open the PDF for Compositional dependence of direct transition energies in SixGe1−x−ySny alloys lattice-matched to Ge/GaAs in another window
Journal Articles

Understanding the origin of micro/nanoporous thin films of PMMA

Available to Purchase
Sadie M. Flagg, Sarah E. Colbert, Sarah S. Jiudice, Erik S. Peterson, Brian H. Augustine
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052801 (2023)
https://doi.org/10.1116/6.0002787
Published: July 2023
View articletitled, Understanding the origin of micro/nanoporous thin films of PMMA
Open the PDF for Understanding the origin of micro/nanoporous thin films of PMMA in another window
Includes: Supplementary data
Journal Articles

Integrated interferometry for in-process monitoring of critical dimension in vertical NAND flash memory dry etch

Available to Purchase
Se-Jin Oh
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 044201 (2022)
https://doi.org/10.1116/6.0001883
Published: May 2022
View articletitled, Integrated interferometry for in-process monitoring of critical dimension in vertical NAND flash memory dry etch
Open the PDF for Integrated interferometry for in-process monitoring of critical dimension in vertical NAND flash memory dry etch in another window
Journal Articles

Fabrication of suspended antenna-coupled nanothermocouples

Available to Purchase
Gergo P. Szakmany, Alexei O. Orlov, Gary H. Bernstein, Wolfgang Porod
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 052201 (2019)
https://doi.org/10.1116/1.5113506
Published: July 2019
View articletitled, Fabrication of suspended antenna-coupled nanothermocouples
Open the PDF for Fabrication of suspended antenna-coupled nanothermocouples in another window
Journal Articles

Generalized method for probing ideal initial polarization states in multibeam Lloyd's mirror interference lithography of 2D scale gratings

Available to Purchase
Xiuguo Chen, Yuki Shimizu, Chong Chen, Yuan-Liu Chen, Wei Gao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 021601 (2018)
https://doi.org/10.1116/1.5016505
Published: January 2018
View articletitled, Generalized method for probing ideal initial polarization states in multibeam Lloyd's mirror interference lithography of 2D scale gratings
Open the PDF for Generalized method for probing ideal initial polarization states in multibeam Lloyd's mirror interference lithography of 2D scale gratings in another window
Journal Articles

Principle and observation of fluorescence moiré fringes for alignment in print and imprint methods

Available to Purchase
Eri Kikuchi, Yota Ishito, Shinya Matsubara, Takahiro Nakamura, Masayuki Abe, Masaru Nakagawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G303 (2017)
https://doi.org/10.1116/1.4990844
Published: September 2017
View articletitled, Principle and observation of fluorescence moiré fringes for alignment in print and imprint methods
Open the PDF for Principle and observation of fluorescence moiré fringes for alignment in print and imprint methods in another window
Journal Articles

Employing refractive beam shaping in a Lloyd's interference lithography system for uniform periodic nanostructure formation

Available to Purchase
Yung-Jr Hung, Han-Jung Chang, Ping-Chien Chang, Jia-Jin Lin, Tzu-Chieh Kao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 030601 (2017)
https://doi.org/10.1116/1.4980134
Published: April 2017
View articletitled, Employing refractive beam shaping in a Lloyd's interference lithography system for uniform periodic nanostructure formation
Open the PDF for Employing refractive beam shaping in a Lloyd's interference lithography system for uniform periodic nanostructure formation in another window
Journal Articles

Optical constants of germanium and thermally grown germanium dioxide from 0.5 to 6.6eV via a multisample ellipsometry investigation

Free
Timothy Nathan Nunley, Nalin S. Fernando, Nuwanjula Samarasingha, Jaime M. Moya, Cayla M. Nelson, Amber A. Medina, Stefan Zollner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 061205 (2016)
https://doi.org/10.1116/1.4963075
Published: September 2016
View articletitled, Optical constants of germanium and thermally grown germanium dioxide from 0.5 to 6.6eV via a multisample ellipsometry investigation
Open the PDF for Optical constants of germanium and thermally grown germanium dioxide from 0.5 to 6.6eV via a multisample ellipsometry investigation in another window
Includes: Supplementary data
Journal Articles

Compact mirror-tunable laser interference system for wafer-scale patterning of grating structures with flexible periodicity

Editor’s PickAvailable to Purchase
Yung-Jr Hung, Ping-Chien Chang, Yu-Nung Lin, Jia-Jin Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 040609 (2016)
https://doi.org/10.1116/1.4955172
Published: June 2016
View articletitled, Compact mirror-tunable laser interference system for wafer-scale patterning of grating structures with flexible periodicity
Open the PDF for Compact mirror-tunable laser interference system for wafer-scale patterning of grating structures with flexible periodicity in another window
Journal Articles

Effect of extreme ultraviolet photoresist underlayer optical properties on imaging performance

Available to Purchase
Jung Sik Kim, Han Ku Cho, Seongchul Hong, Jinho Ahn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 061603 (2015)
https://doi.org/10.1116/1.4936121
Published: November 2015
View articletitled, Effect of extreme ultraviolet photoresist underlayer optical properties on imaging performance
Open the PDF for Effect of extreme ultraviolet photoresist underlayer optical properties on imaging performance in another window
Journal Articles

Fabrication of pyramidal probes with various periodic patterns and a single nanopore

Available to Purchase
Seong Soo Choi, Myoung Jin Park, Chul Hee Han, Sae Joong Oh, Sang Hun Han, Nam Kyou Park, Yong-Sang Kim, Hyuck Choo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06F203 (2015)
https://doi.org/10.1116/1.4935560
Published: November 2015
View articletitled, Fabrication of pyramidal probes with various periodic patterns and a single nanopore
Open the PDF for Fabrication of pyramidal probes with various periodic patterns and a single nanopore in another window
Includes: Supplementary data
Journal Articles

Optical properties of pseudomorphic Ge1−xSnx (x = 0 to 0.11) alloys on Ge(001)

Available to Purchase
Manasa Medikonda, Gangadhara R. Muthinti, Relja Vasić, Thomas N. Adam, Alexander Reznicek, Matthew Wormington, Girish Malladi, Yihwan Kim, Yi-Chiau Huang, Alain C. Diebold
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 061805 (2014)
https://doi.org/10.1116/1.4901254
Published: November 2014
View articletitled, Optical properties of pseudomorphic Ge1−xSnx (x = 0 to 0.11) alloys on Ge(001)
Open the PDF for Optical properties of pseudomorphic Ge1−xSnx (x = 0 to 0.11) alloys on Ge(001) in another window
Journal Articles

Semiempirical method of suppressing interference effects in photoluminescence spectra of GaN heterostructures

Available to Purchase
Yu-Li Wang, Kuan-Yu Chen, Wei-Chen Yang, Shao-Yen Chiu, Keh-Yung Cheng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 02C107 (2014)
https://doi.org/10.1116/1.4864054
Published: February 2014
View articletitled, Semiempirical method of suppressing interference effects in photoluminescence spectra of GaN heterostructures
Open the PDF for Semiempirical method of suppressing interference effects in photoluminescence spectra of GaN heterostructures in another window
Journal Articles

Pattern-integrated interference lithography: Vector modeling and 1D, 2D, and 3D device structures

Available to Purchase
Matthieu C. R. Leibovici, Thomas K. Gaylord
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06F501 (2013)
https://doi.org/10.1116/1.4826560
Published: October 2013
View articletitled, Pattern-integrated interference lithography: Vector modeling and 1D, 2D, and 3D device structures
Open the PDF for Pattern-integrated interference lithography: Vector modeling and 1D, 2D, and 3D device structures in another window
Journal Articles

High precision dynamic alignment and gap control for optical near-field nanolithography

Available to Purchase
Xiaolei Wen, Luis M. Traverso, Pornsak Srisungsitthisunti, Xianfan Xu, Euclid E. Moon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 041601 (2013)
https://doi.org/10.1116/1.4809519
Published: June 2013
View articletitled, High precision dynamic alignment and gap control for optical near-field nanolithography
Open the PDF for High precision dynamic alignment and gap control for optical near-field nanolithography in another window
Journal Articles

Improved imaging properties of thin attenuated phase shift masks for extreme ultraviolet lithography

Available to Purchase
Sangsul Lee, Inhwan Lee, Jong Gul Doh, Jae Uk Lee, Seongchul Hong, Jinho Ahn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 021606 (2013)
https://doi.org/10.1116/1.4793298
Published: February 2013
View articletitled, Improved imaging properties of thin attenuated phase shift masks for extreme ultraviolet lithography
Open the PDF for Improved imaging properties of thin attenuated phase shift masks for extreme ultraviolet lithography in another window
Journal Articles

Defect tolerant extreme ultraviolet lithography technique

Available to Purchase
Lukasz Urbanski, Wei Li, Jorge J. Rocca, Carmen S. Menoni, Mario C. Marconi, Artak Isoyan, Aaron Stein
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06F502 (2012)
https://doi.org/10.1116/1.4758758
Published: October 2012
View articletitled, Defect tolerant extreme ultraviolet lithography technique
Open the PDF for Defect tolerant extreme ultraviolet lithography technique in another window
Journal Articles

Hot embossing of thick amorphous fluoropolymer for back end processing of infrared arrays

Available to Purchase
Justin K. Markunas, Peter J. Smith, John Melngailis
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 061601 (2012)
https://doi.org/10.1116/1.4757287
Published: October 2012
View articletitled, Hot embossing of thick amorphous fluoropolymer for back end processing of infrared arrays
Open the PDF for Hot embossing of thick amorphous fluoropolymer for back end processing of infrared arrays in another window
Journal Articles

Multi-phase model for reflection anisotropy spectra of copper phthalocyanine films on anisotropic silicon substrates

Available to Purchase
Falko Seidel, Li Ding, Ovidiu D. Gordan, Dietrich R. T. Zahn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 012401 (2012)
https://doi.org/10.1116/1.3677823
Published: January 2012
View articletitled, Multi-phase model for reflection anisotropy spectra of copper phthalocyanine films on anisotropic silicon substrates
Open the PDF for Multi-phase model for reflection anisotropy spectra of copper phthalocyanine films on anisotropic silicon substrates in another window