1-20 of 56
Optical instruments
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

An Invar-based dual Fabry–Perot cavity refractometer for assessment of pressure with a pressure independent uncertainty in the sub-mPa region

Open Access
I. Silander, J. Zakrisson, M. Zelan, O. Axner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 064206 (2023)
https://doi.org/10.1116/6.0003149
Published: December 2023
View articletitled, An Invar-based dual Fabry–Perot cavity refractometer for assessment of pressure with a pressure independent uncertainty in the sub-mPa region
Open the PDF for An Invar-based dual Fabry–Perot cavity refractometer for assessment of pressure with a pressure independent uncertainty in the sub-mPa region in another window
Includes: Supplementary data
Journal Articles

Retraction: “Fabry–Perot-cavity-based refractometry without influence of mirror penetration depth” [J. Vac. Sci. Technol. B 39, 065001 (2021)]

Free
C. Forssén, I. Silander, J. Zakrisson, M. Zelan, O. Axner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 037001 (2022)
https://doi.org/10.1116/6.0001829
Published: March 2022
View articletitled, Retraction: “Fabry–Perot-cavity-based refractometry without influence of mirror penetration depth” [J. Vac. Sci. Technol. B 39, 065001 (2021)]
Open the PDF for Retraction: “Fabry–Perot-cavity-based refractometry without influence of mirror penetration depth” [J. Vac. Sci. Technol. B 39, 065001 (2021)] in another window
Journal Articles

Fabry–Perot-cavity-based refractometry without influence of mirror penetration depth

Open Access
C. Forssén, I. Silander, J. Zakrisson, M. Zelan, O. Axner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 065001 (2021)
https://doi.org/10.1116/6.0001501
Published: December 2021
View articletitled, Fabry–Perot-cavity-based refractometry without influence of mirror penetration depth
Open the PDF for Fabry–Perot-cavity-based refractometry without influence of mirror penetration depth in another window
Journal Articles

Optical realization of the pascal—Characterization of two gas modulated refractometers

Open Access
Isak Silander, Clayton Forssén, Johan Zakrisson, Martin Zelan, Ove Axner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 044201 (2021)
https://doi.org/10.1116/6.0001042
Published: June 2021
View articletitled, Optical realization of the pascal—Characterization of two gas modulated refractometers
Open the PDF for Optical realization of the pascal—Characterization of two gas modulated refractometers in another window
Journal Articles

Procedure for robust assessment of cavity deformation in Fabry–Pérot based refractometers

Open Access
Johan Zakrisson, Isak Silander, Clayton Forssén, Martin Zelan, Ove Axner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 054202 (2020)
https://doi.org/10.1116/6.0000375
Published: September 2020
View articletitled, Procedure for robust assessment of cavity deformation in Fabry–Pérot based refractometers
Open the PDF for Procedure for robust assessment of cavity deformation in Fabry–Pérot based refractometers in another window
Includes: Supplementary data
Journal Articles

Nonideal optical response of liquid crystal variable retarders and its impact on their performance as polarization modulators

Open Access
Pilar García Parejo, Antonio Campos-Jara, Enric García-Caurel, Oriol Arteaga, Alberto Álvarez-Herrero
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014009 (2020)
https://doi.org/10.1116/1.5122749
Published: December 2019
View articletitled, Nonideal optical response of liquid crystal variable retarders and its impact on their performance as polarization modulators
Open the PDF for Nonideal optical response of liquid crystal variable retarders and its impact on their performance as polarization modulators in another window
Journal Articles

Ultrasensitive broadband infrared 4 × 4 Mueller-matrix ellipsometry for studies of depolarizing and anisotropic thin films

Open Access
Andreas Furchner, Christoph Kratz, Wojciech Ogieglo, Ingo Pinnau, Jörg Rappich, Karsten Hinrichs
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014003 (2020)
https://doi.org/10.1116/1.5129800
Published: December 2019
View articletitled, Ultrasensitive broadband infrared 4 × 4 Mueller-matrix ellipsometry for studies of depolarizing and anisotropic thin films
Open the PDF for Ultrasensitive broadband infrared 4 × 4 Mueller-matrix ellipsometry for studies of depolarizing and anisotropic thin films in another window
Journal Articles

Optimization of the response time measuring method for liquid crystal variable retarders

Open Access
Antonio Campos-Jara, Pilar García Parejo, Alberto Álvarez-Herrero
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062930 (2019)
https://doi.org/10.1116/1.5122786
Published: December 2019
View articletitled, Optimization of the response time measuring method for liquid crystal variable retarders
Open the PDF for Optimization of the response time measuring method for liquid crystal variable retarders in another window
Journal Articles

Completing an experimental nondepolarizing Mueller matrix whose column or row is missing

Available to Purchase
Razvigor Ossikovski, Oriol Arteaga
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 052905 (2019)
https://doi.org/10.1116/1.5120342
Published: September 2019
View articletitled, Completing an experimental nondepolarizing Mueller matrix whose column or row is missing
Open the PDF for Completing an experimental nondepolarizing Mueller matrix whose column or row is missing in another window
Journal Articles

Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision

Open Access
Isak Silander, Thomas Hausmaninger, Clayton Forssén, Martin Zelan, Ove Axner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 042901 (2019)
https://doi.org/10.1116/1.5090860
Published: May 2019
View articletitled, Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision
Open the PDF for Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision in another window
Includes: Supplementary data
Journal Articles

Substrate temperature effect on migration behavior of fluorocarbon film precursors in high-aspect ratio structures

Free
Andrew J. Knoll, Adam Pranda, Hoki Lee, Gottlieb S. Oehrlein
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 031802 (2019)
https://doi.org/10.1116/1.5092969
Published: April 2019
View articletitled, Substrate temperature effect on migration behavior of fluorocarbon film precursors in high-aspect ratio structures
Open the PDF for Substrate temperature effect on migration behavior of fluorocarbon film precursors in high-aspect ratio structures in another window
Journal Articles

Optical properties of Bi2(Te1−xSex)3 thin films

Free
Frank C. Peiris, Ellen T. Holmgren, John W. Lyons, Xiang Li, Xinyu Liu, Margaret Dobrowolska, Jacek K. Furdyna
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 031205 (2019)
https://doi.org/10.1116/1.5088990
Published: April 2019
View articletitled, Optical properties of Bi2(Te1−xSex)3 thin films
Open the PDF for Optical properties of Bi2(Te1−xSex)3 thin films in another window
Journal Articles

Enhanced green luminescence from ZnO nanorods

Available to Purchase
Emad H. H. Hasabeldaim, Odireleng M. Ntwaeaborwa, Robin E. Kroon, Elizabeth Coetsee, Hendrik C. Swart
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 011201 (2019)
https://doi.org/10.1116/1.5052543
Published: January 2019
View articletitled, Enhanced green luminescence from ZnO nanorods
Open the PDF for Enhanced green luminescence from ZnO nanorods in another window
Journal Articles

Phenol-functionalized polymerization control additives for negative tone epoxide crosslinking molecular resists

Free
Hannah Narcross, Brandon L. Sharp, Peter J. Ludovice, Laren M. Tolbert, Clifford L. Henderson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 06JC02 (2018)
https://doi.org/10.1116/1.5057442
Published: November 2018
View articletitled, Phenol-functionalized polymerization control additives for negative tone epoxide crosslinking molecular resists
Open the PDF for Phenol-functionalized polymerization control additives for negative tone epoxide crosslinking molecular resists in another window
Journal Articles

Light absorption and scattering of 40–170 nm gold nanoparticles on glass substrates

Available to Purchase
Ranveig Flatabø, Vårin R. A. Holm, Håkon Eidsvåg, Bodil Holst, Martin M. Greve
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G403 (2017)
https://doi.org/10.1116/1.4994113
Published: November 2017
View articletitled, Light absorption and scattering of 40–170 nm gold nanoparticles on glass substrates
Open the PDF for Light absorption and scattering of 40–170 nm gold nanoparticles on glass substrates in another window
Journal Articles

Fifty nanometer lines patterned into silica using water developable chitosan bioresist and electron beam lithography

Available to Purchase
Mathieu Caillau, Pierre Crémillieu, Emmanuelle Laurenceau, Yann Chevolot, Jean-Louis Leclercq, Sergeï Alekseev, Céline Chevalier, Thierry Delair
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06GE01 (2017)
https://doi.org/10.1116/1.4996870
Published: October 2017
View articletitled, Fifty nanometer lines patterned into silica using water developable chitosan bioresist and electron beam lithography
Open the PDF for Fifty nanometer lines patterned into silica using water developable chitosan bioresist and electron beam lithography in another window
Journal Articles

Deposition of Mo/Si multilayers onto MEMS micromirrors and its utilization for extreme ultraviolet maskless lithography

Available to Purchase
Nikolay Chkhalo, Vladimir Polkovnikov, Nikolay Salashchenko, Mikhail Toropov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 062002 (2017)
https://doi.org/10.1116/1.4995369
Published: October 2017
View articletitled, Deposition of Mo/Si multilayers onto MEMS micromirrors and its utilization for extreme ultraviolet maskless lithography
Open the PDF for Deposition of Mo/Si multilayers onto MEMS micromirrors and its utilization for extreme ultraviolet maskless lithography in another window
Journal Articles

ScAlN etch mask for highly selective silicon etching

Free
Michael David Henry, Travis R. Young, Ben Griffin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 052001 (2017)
https://doi.org/10.1116/1.4994841
Published: September 2017
View articletitled, ScAlN etch mask for highly selective silicon etching
Open the PDF for ScAlN etch mask for highly selective silicon etching in another window
Journal Articles

Fast and accurate solution of inverse problem in optical scatterometry using heuristic search and robust correction

Available to Purchase
Jinlong Zhu, Hao Jiang, Yating Shi, Chuanwei Zhang, Xiuguo Chen, Shiyuan Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 031807 (2015)
https://doi.org/10.1116/1.4919713
Published: May 2015
View articletitled, Fast and accurate solution of inverse problem in optical scatterometry using heuristic search and robust correction
Open the PDF for Fast and accurate solution of inverse problem in optical scatterometry using heuristic search and robust correction in another window
Journal Articles

Large-scale fabrication of a simple cubic metal-oxide photonic crystal for light-trapping applications

Available to Purchase
Brian J. Frey, Ping Kuang, Shawn-Yu Lin, Jian-Hua Jiang, Sajeev John
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 021804 (2015)
https://doi.org/10.1116/1.4913873
Published: March 2015
View articletitled, Large-scale fabrication of a simple cubic metal-oxide photonic crystal for light-trapping applications
Open the PDF for Large-scale fabrication of a simple cubic metal-oxide photonic crystal for light-trapping applications in another window