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Journal Articles

Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy

Glenn G. Jernigan, John P. Murphy, Nadeemullah A. Mahadik, Alex J. Grede, Eric M. Jackson, Jill A. Nolde
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052209 (2024)
https://doi.org/10.1116/6.0003585
Published: September 2024
View article titled, Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy
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Journal Articles

Electronic and optical properties of lithium-doped boron nitride nanoribbons using density functional theory

Farzaneh Safdarian, Farzad Ahmadian, Rohollah Zare Hasan Abad, Hojat Allah Badehian
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042201 (2024)
https://doi.org/10.1116/6.0003635
Published: May 2024
View article titled, Electronic and optical properties of lithium-doped boron nitride nanoribbons using density functional theory
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Journal Articles

Excitonic effects in the optical absorption of gapless semiconductor α-tin near the direct bandgap

Editor’s Pick
Stefan Zollner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022203 (2024)
https://doi.org/10.1116/6.0003278
Published: February 2024
View article titled, Excitonic effects in the optical absorption of gapless semiconductor <em>α</em>-tin near the direct bandgap
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Includes: Supplementary data
Journal Articles

Strain-tuned optical properties of bilayer silicon at midinfrared wavelengths

Editor’s Pick
K. Vishal, Z. H. Ji, Y. Zhuang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022201 (2024)
https://doi.org/10.1116/6.0003202
Published: February 2024
View article titled, Strain-tuned optical properties of bilayer silicon at midinfrared wavelengths
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Journal Articles

Optical properties of copper oxide thin films implanted with chromium ions

Katarzyna Ungeheuer, Konstanty W. Marszalek
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062208 (2023)
https://doi.org/10.1116/6.0003135
Published: December 2023
View article titled, Optical properties of copper oxide thin films implanted with chromium ions
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Journal Articles

X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline

Scilight
Kanta Yamamoto, Yuichi Utsumi, Ikuya Sakurai, Ikuo Okada, Kenji Hanada, Hidehiro Ishizawa, Masahiro Takeo, Taki Watanabe, Sho Amano, Satoru Suzuki, Koji Sumitomo, Akinobu Yamaguchi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062602 (2023)
https://doi.org/10.1116/6.0003021
Published: October 2023
View article titled, X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline
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Journal Articles

Physical vapor deposition of Yb-doped Cs2AgSbBr6 films

Yukun Liu, Minh N. Tran, Iver J. Cleveland, Eray S. Aydil
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022206 (2023)
https://doi.org/10.1116/6.0002475
Published: March 2023
View article titled, Physical vapor deposition of Yb-doped Cs<sub>2</sub>AgSbBr<sub>6</sub> films
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Includes: Supplementary data
Journal Articles

Study of simulations of double graded InGaN solar cell structures

Mirsaeid Sarollahi, Mohammad Zamani-Alavijeh, Rohith Allaparthi, Manal A. Aldawsari, Malak Refaei, Reem Alhelais, Md Helal Uddin Maruf, Yuriy I. Mazur, Morgan E. Ware
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 042203 (2022)
https://doi.org/10.1116/6.0001841
Published: June 2022
View article titled, Study of simulations of double graded InGaN solar cell structures
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Journal Articles

Optical properties of Mo and amorphous MoOx, and application to antireflection coatings for metals

David V. Tsu, Matthias Muehle, Harald Köstenbauer, Christian Linke, Jörg Winkler
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022209 (2022)
https://doi.org/10.1116/6.0001659
Published: March 2022
View article titled, Optical properties of Mo and amorphous MoOx, and application to antireflection coatings for metals
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Journal Articles

Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy

Arnoud J. Onnink, Ramazan O. Apaydin, Antonius A. I. Aarnink, Michel P. de Jong, Dirk J. Gravesteijn, Alexey Y. Kovalgin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 044009 (2020)
https://doi.org/10.1116/6.0000193
Published: July 2020
View article titled, Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy
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Includes: Supplementary data
Journal Articles

In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition

Franziska Naumann, Johanna Reck, Hassan Gargouri, Bernd Gruska, Adrian Blümich, Ali Mahmoodinezhad, Christoph Janowitz, Karsten Henkel, Jan Ingo Flege
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014014 (2020)
https://doi.org/10.1116/1.5122797
Published: January 2020
View article titled, <em>In situ</em> real-time and <em>ex situ</em> spectroscopic analysis of Al<sub>2</sub>O<sub>3</sub> films prepared by plasma enhanced atomic layer deposition
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Journal Articles

Electrical and optical properties of copper oxide thin films prepared by DC magnetron sputtering

Anmar H. Shukor, Haider A. Alhattab, Ichiro Takano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 012803 (2020)
https://doi.org/10.1116/1.5131518
Published: December 2019
View article titled, Electrical and optical properties of copper oxide thin films prepared by DC magnetron sputtering
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Journal Articles

Mueller matrix ellipsometry study of a circular polarizing filter

Nina Hong, James N. Hilfiker
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014012 (2020)
https://doi.org/10.1116/1.5129691
Published: December 2019
View article titled, Mueller matrix ellipsometry study of a circular polarizing filter
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Journal Articles

Assessing stability of metal tellurides as alternative photomask materials for extreme ultraviolet lithography

Vu Luong, Vicky Philipsen, Karl Opsomer, Jens Rip, Eric Hendrickx, Marc Heyns, Christophe Detavernier, Christian Laubis, Frank Scholze
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061607 (2019)
https://doi.org/10.1116/1.5125662
Published: November 2019
View article titled, Assessing stability of metal tellurides as alternative photomask materials for extreme ultraviolet lithography
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Journal Articles

Revised wavelength-by-wavelength inversion of ellipsometry data of semiconductor thin films

Mickaël Gilliot, Aomar Hadjadj, Michel Stchakovsky
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062925 (2019)
https://doi.org/10.1116/1.5122737
Published: November 2019
View article titled, Revised wavelength-by-wavelength inversion of ellipsometry data of semiconductor thin films
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Journal Articles

Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model

Ivan Ohlídal, Jiří Vohánka, Vilma Buršíková, Jaroslav Ženíšek, Petr Vašina, Martin Čermák, Daniel Franta
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062921 (2019)
https://doi.org/10.1116/1.5122014
Published: November 2019
View article titled, Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model
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Journal Articles

Effect of heating treatment and mixture on optical properties of coating materials used in gravitational-wave detectors

Editor’s Pick
Alex Amato, Silvana Terreni, Massimo Granata, Christophe Michel, Laurent Pinard, Gianluca Gemme, Maurizio Canepa, Gianpietro Cagnoli
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062913 (2019)
https://doi.org/10.1116/1.5122661
Published: October 2019
View article titled, Effect of heating treatment and mixture on optical properties of coating materials used in gravitational-wave detectors
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Journal Articles

Growth of well-oriented InN nanodots by magnetron sputtering with varying sputtering temperature

Hui Wang, Yang Zhao, Xinzhong Li, Jingjie Li, Ziming Zhang, Shuai Wan, Weizhao Gu, Fan Yang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 041204 (2018)
https://doi.org/10.1116/1.5028165
Published: July 2018
View article titled, Growth of well-oriented InN nanodots by magnetron sputtering with varying sputtering temperature
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Journal Articles

Near-infrared light absorption enhancement in Ge nanostructures prepared by nanosphere lithography

Wenyi Shao, Jun Xu, Jiaming Chen, Xiaoxiang Wu, Kunji Chen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 041601 (2018)
https://doi.org/10.1116/1.5029435
Published: June 2018
View article titled, Near-infrared light absorption enhancement in Ge nanostructures prepared by nanosphere lithography
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Journal Articles

Buffer insensitive optoelectronic quality of InP-on-Si with templated liquid phase growth

Debarghya Sarkar, Wei Wang, Qingfeng Lin, Jun Tao, Matthew Mecklenburg, Jayakanth Ravichandran, Rehan Kapadia
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 031204 (2018)
https://doi.org/10.1116/1.5026503
Published: April 2018
View article titled, Buffer insensitive optoelectronic quality of InP-on-Si with templated liquid phase growth
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