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Journal Articles

Scalable fabrication approach and fill factor optimization for single pixel microlens arrays

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Jens Bonitz, Christian Helke, Nils Dittmar, Sebastian Schermer, Micha Haase, Lutz Hofmann, Danny Reuter
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062203 (2024)
https://doi.org/10.1116/6.0004036
Published: October 2024
View article titled, Scalable fabrication approach and fill factor optimization for single pixel microlens arrays
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Journal Articles

Flexible refractive and diffractive micro-optical films shaped by fitting aspherical microprofiles with featured aperture and depth and their spatial arrangement for imaging applications

Wenhai Huang, Taige Liu, Zhe Wang, Xiangdong Yuan, Bo Zhang, Chai Hu, Kewei Liu, Jiashuo Shi, Xinyu Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022804 (2022)
https://doi.org/10.1116/6.0001586
Published: March 2022
View article titled, Flexible refractive and diffractive micro-optical films shaped by fitting aspherical microprofiles with featured aperture and depth and their spatial arrangement for imaging applications
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Journal Articles

Ultradeep microaxicons in lithium niobate by focused Xe ion beam milling

Sergey Gorelick, Alex de Marco
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052602 (2021)
https://doi.org/10.1116/6.0001232
Published: August 2021
View article titled, Ultradeep microaxicons in lithium niobate by focused Xe ion beam milling
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Journal Articles

Medusa 82—Hydrogen silsesquioxane based high sensitivity negative-tone resist with long shelf-life and grayscale lithography capability

Mandy Grube, Benjamin Schille, Matthias Schirmer, Maik Gerngroß, Uwe Hübner, Paul Voigt, Sascha Brose
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 012602 (2021)
https://doi.org/10.1116/6.0000542
Published: January 2021
View article titled, Medusa 82—Hydrogen silsesquioxane based high sensitivity negative-tone resist with long shelf-life and grayscale lithography capability
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Journal Articles

Neural network-based model of photoresist reflow

Charmaine Chia, Joel Martis, Stefanie S. Jeffrey, Roger T. Howe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061604 (2019)
https://doi.org/10.1116/1.5116857
Published: October 2019
View article titled, Neural network-based model of photoresist reflow
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Journal Articles

Thin-film metrology of tilted and curved surfaces by imaging Mueller-matrix ellipsometry

Matthias Duwe, Jan-Henrik Quast, Stefan Schneider, Daniel Fischer, Uwe Beck
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062908 (2019)
https://doi.org/10.1116/1.5122757
Published: October 2019
View article titled, Thin-film metrology of tilted and curved surfaces by imaging Mueller-matrix ellipsometry
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Includes: Supplementary data
Journal Articles

Hybrid refractive-diffractive microlenses in glass by focused Xe ion beam

Sergey Gorelick, Alex de Marco
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 051601 (2019)
https://doi.org/10.1116/1.5114953
Published: August 2019
View article titled, Hybrid refractive-diffractive microlenses in glass by focused Xe ion beam
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Journal Articles

Fast ultra-deep silicon cavities: Toward isotropically etched spherical silicon molds using an ICP-DRIE

Etienne Herth, Maciej Baranski, Djaffar Berlharet, Samson Edmond, David Bouville, Laurie E. Calvet, Christophe Gorecki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 021206 (2019)
https://doi.org/10.1116/1.5081503
Published: February 2019
View article titled, Fast ultra-deep silicon cavities: Toward isotropically etched spherical silicon molds using an ICP-DRIE
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Journal Articles

Effect of resin accumulation on filling process in roll-to-roll UV imprint lithography

Youquan Zhou, Mujun Li, Lianguan Shen, Huichun Ye, Jianping Wang, Shengzhou Huang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 031602 (2017)
https://doi.org/10.1116/1.4982719
Published: May 2017
View article titled, Effect of resin accumulation on filling process in roll-to-roll UV imprint lithography
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Includes: Supplementary data
Journal Articles

Fabrication of Mo microcones for volcano-structured double-gate Spindt-type emitter cathodes using triode high power pulsed magnetron sputtering

Takeo Nakano, Tomoki Narita, Kei Oya, Masayoshi Nagao, Hisashi Ohsaki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 022204 (2017)
https://doi.org/10.1116/1.4978506
Published: March 2017
View article titled, Fabrication of Mo microcones for volcano-structured double-gate Spindt-type emitter cathodes using triode high power pulsed magnetron sputtering
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Journal Articles

High fidelity 3D thermal nanoimprint with UV curable polydimethyl siloxane stamps

Nachiappan Chidambaram, Robert Kirchner, Mirco Altana, Helmut Schift
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06K401 (2016)
https://doi.org/10.1116/1.4961250
Published: August 2016
View article titled, High fidelity 3D thermal nanoimprint with UV curable polydimethyl siloxane stamps
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Journal Articles

Study on bubble defects in roll-to-roll UV imprinting process for micropyramid arrays II: Numerical study

Linfa Peng, Hao Wu, Peiyun Yi, Xinmin Lai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 051203 (2016)
https://doi.org/10.1116/1.4960693
Published: August 2016
View article titled, Study on bubble defects in roll-to-roll UV imprinting process for micropyramid arrays II: Numerical study
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Journal Articles

Control of edge bulge evolution during photoresist reflow and its application to diamond microlens fabrication

Hangyu Liu, Johannes Herrnsdorf, Erdan Gu, Martin D. Dawson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 021602 (2016)
https://doi.org/10.1116/1.4943558
Published: March 2016
View article titled, Control of edge bulge evolution during photoresist reflow and its application to diamond microlens fabrication
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Journal Articles

Polymer lenses with antireflection structures prepared using anodic porous alumina molds

Takashi Yanagishita, Takeshi Hidaka, Mari Suzuki, Hideki Masuda
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 021804 (2016)
https://doi.org/10.1116/1.4943044
Published: March 2016
View article titled, Polymer lenses with antireflection structures prepared using anodic porous alumina molds
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Journal Articles

Study on bubble defects in roll-to-roll UV imprinting process for micropyramid arrays. I. Experiments

Hao Wu, Peiyun Yi, Linfa Peng, Xinmin Lai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 021201 (2016)
https://doi.org/10.1116/1.4941445
Published: February 2016
View article titled, Study on bubble defects in roll-to-roll UV imprinting process for micropyramid arrays. I. Experiments
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Journal Articles

Design and fabrication of a SAW device with Ta filled microcavities inserted into its delay path for improved power transfer

Mandek Richardson, Surya Cheemalapati, Richard Everly, Subramanian K. R. S. Sankaranarayanan, Anna Pyayt, Venkat R. Bhethanabotla
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 022001 (2015)
https://doi.org/10.1116/1.4906515
Published: January 2015
View article titled, Design and fabrication of a SAW device with Ta filled microcavities inserted into its delay path for improved power transfer
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Journal Articles

Integration of a MEMS-type vacuum pump with a MEMS-type Pirani pressure gauge

Tomasz Grzebyk, Anna Górecka-Drzazga, Jan A. Dziuban, Khodr Maamari, Seyoung An, Tatjana Dankovic, Alan Feinerman, Heinz Busta
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 03C103 (2015)
https://doi.org/10.1116/1.4903448
Published: December 2014
View article titled, Integration of a MEMS-type vacuum pump with a MEMS-type Pirani pressure gauge
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Journal Articles

Fabrication of polydimethylsiloxane microlens arrays on a plastic film by proton beam writing

Hijiri Kato, Junichi Takahashi, Hiroyuki Nishikawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 06F506 (2014)
https://doi.org/10.1116/1.4900419
Published: October 2014
View article titled, Fabrication of polydimethylsiloxane microlens arrays on a plastic film by proton beam writing
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Journal Articles

Light extraction enhancement in GaN-based vertical light-emitting diodes with hemispherical bumps

Yujin Wang, Chuanrui Zhu, Yan Shen, Haifang Yang, Zhe Liu, Changzhi Gu, Baoli Liu, Xiangang Xu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 051804 (2014)
https://doi.org/10.1116/1.4893437
Published: August 2014
View article titled, Light extraction enhancement in GaN-based vertical light-emitting diodes with hemispherical bumps
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Journal Articles

Self-rolled-up InGaAs/GaAs microtubes fabricated directly on Si (100) substrates

Qi Wang, Eryang Wang, Zhihong Pan, Yunxia Gao, Bochang Li, Zhigang Jia, Yifan Wang, Xiaoyi Li, Xia Zhang, Xiaomin Ren, Yongqing Huang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 030603 (2014)
https://doi.org/10.1116/1.4869557
Published: March 2014
View article titled, Self-rolled-up InGaAs/GaAs microtubes fabricated directly on Si (100) substrates
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