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Journal Articles

Comparative study on variable axis lens systems based on tapered deflectors

Qingmao Zhang, Qirui Wang, Delong Chen, Junbiao Liu, Yanjun Zhang, Quantong Li, Zhuming Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042801 (2024)
https://doi.org/10.1116/6.0003605
Published: June 2024
View article titled, Comparative study on variable axis lens systems based on tapered deflectors
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Journal Articles

Multiple criteria optimization of electrostatic electron lenses using multiobjective genetic algorithms

Neda Hesam Mahmoudi Nezhad, Mohamad Ghaffarian Niasar, Ali Mohammadi Gheidari, Pieter Kruit, Cornelis Wouter Hagen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062605 (2021)
https://doi.org/10.1116/6.0001274
Published: November 2021
View article titled, Multiple criteria optimization of electrostatic electron lenses using multiobjective genetic algorithms
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Journal Articles

Ultradeep microaxicons in lithium niobate by focused Xe ion beam milling

Sergey Gorelick, Alex de Marco
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052602 (2021)
https://doi.org/10.1116/6.0001232
Published: August 2021
View article titled, Ultradeep microaxicons in lithium niobate by focused Xe ion beam milling
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Journal Articles

Wider vision capability provided by a curved surface sample holder for TOF-SIMS imaging

Shin-ichi Iida, Hsun-Yun Chang, Gregory L. Fisher, Takuya Miyayama, Ibuki Tanaka
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 034013 (2020)
https://doi.org/10.1116/6.0000039
Published: April 2020
View article titled, Wider vision capability provided by a curved surface sample holder for TOF-SIMS imaging
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Includes: Supplementary data
Journal Articles

High-brightness source of energetic He atoms

Venu S. Jonnalagadda, Navjot S. Randhawa, Apeksha Awale, Pratik Motwani, John C. Wolfe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 012601 (2020)
https://doi.org/10.1116/1.5124838
Published: December 2019
View article titled, High-brightness source of energetic He atoms
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Journal Articles

Thin-film metrology of tilted and curved surfaces by imaging Mueller-matrix ellipsometry

Matthias Duwe, Jan-Henrik Quast, Stefan Schneider, Daniel Fischer, Uwe Beck
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062908 (2019)
https://doi.org/10.1116/1.5122757
Published: October 2019
View article titled, Thin-film metrology of tilted and curved surfaces by imaging Mueller-matrix ellipsometry
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Includes: Supplementary data
Journal Articles

Electron beam lithography on curved or tilted surfaces: Simulations and experiments

Kerim T. Arat, Aernout C. Zonnevylle, Wilhelmus S. M. M. Ketelaars, Nikola Belic, Ulrich Hofmann, Cornelis W. Hagen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 051604 (2019)
https://doi.org/10.1116/1.5120632
Published: September 2019
View article titled, Electron beam lithography on curved or tilted surfaces: Simulations and experiments
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Journal Articles

Rapid reflectance difference microscopy based on liquid crystal variable retarder

Chunguang Hu, Hao Wang, Shuchun Huo, Wanfu Shen, Xiaotang Hu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 050604 (2019)
https://doi.org/10.1116/1.5122694
Published: September 2019
View article titled, Rapid reflectance difference microscopy based on liquid crystal variable retarder
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Journal Articles

Hybrid refractive-diffractive microlenses in glass by focused Xe ion beam

Sergey Gorelick, Alex de Marco
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 051601 (2019)
https://doi.org/10.1116/1.5114953
Published: August 2019
View article titled, Hybrid refractive-diffractive microlenses in glass by focused Xe ion beam
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Journal Articles

Analysis of multipole fields for a practical wire lens of an aberration corrector

Tomonori Nakano, Yu Yamazawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 012901 (2019)
https://doi.org/10.1116/1.5065554
Published: December 2018
View article titled, Analysis of multipole fields for a practical wire lens of an aberration corrector
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Journal Articles

Low-voltage coherent electron microscopy based on a highly coherent electron source built from a nanoemitter

Chun-Yueh Lin, Wei-Tse Chang, Wei-Hao Hsu, Mu-Tung Chang, Yi-Sheng Chen, En-Te Hwu, Wun-Cin Huang, Ing-Shouh Hwang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 032901 (2018)
https://doi.org/10.1116/1.5024852
Published: March 2018
View article titled, Low-voltage coherent electron microscopy based on a highly coherent electron source built from a nanoemitter
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Journal Articles

Generalized method for probing ideal initial polarization states in multibeam Lloyd's mirror interference lithography of 2D scale gratings

Xiuguo Chen, Yuki Shimizu, Chong Chen, Yuan-Liu Chen, Wei Gao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 021601 (2018)
https://doi.org/10.1116/1.5016505
Published: January 2018
View article titled, Generalized method for probing ideal initial polarization states in multibeam Lloyd's mirror interference lithography of 2D scale gratings
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Journal Articles

Three-dimensional photolithography using built-in lens mask

Toshiki Tanaka, Daiki Sugihara, Masaru Sasago, Hisao Kikuta, Hiroaki Kawata, Yoshihiko Hirai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G308 (2017)
https://doi.org/10.1116/1.4995693
Published: November 2017
View article titled, Three-dimensional photolithography using built-in lens mask
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Journal Articles

Study of CO2 ashing for porous SiOCH film using 100 MHz/13.56 MHz dual frequency superimposed capacitive coupled plasma

Tsubasa Imamura, Katsumi Yamamoto, Kazuaki Kurihara, Hisataka Hayashi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 062201 (2017)
https://doi.org/10.1116/1.4987020
Published: October 2017
View article titled, Study of CO<sub>2</sub> ashing for porous SiOCH film using 100 MHz/13.56 MHz dual frequency superimposed capacitive coupled plasma
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Journal Articles

Low reflection Fresnel lenses via double imprint combined with vacuum-UV surface hardening

Christian Steinberg, Nour Al-Hussainawi, Marc Papenheim, Andre Mayer, Hella-Christin Scheer, Maria Matschuk, Henrik Pranov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G306 (2017)
https://doi.org/10.1116/1.4991863
Published: October 2017
View article titled, Low reflection Fresnel lenses via double imprint combined with vacuum-UV surface hardening
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Journal Articles

Deposition of Mo/Si multilayers onto MEMS micromirrors and its utilization for extreme ultraviolet maskless lithography

Nikolay Chkhalo, Vladimir Polkovnikov, Nikolay Salashchenko, Mikhail Toropov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 062002 (2017)
https://doi.org/10.1116/1.4995369
Published: October 2017
View article titled, Deposition of Mo/Si multilayers onto MEMS micromirrors and its utilization for extreme ultraviolet maskless lithography
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Journal Articles

Two-beam interference patterning of biodegradable magnesium alloy: Influence of number of passes and spots overlap

Valentina Furlan, Marco Biondi, Ali Gökhan Demir, Barbara Previtali, Giorgio Pariani, Andrea Bianco
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 01A102 (2018)
https://doi.org/10.1116/1.4996504
Published: October 2017
View article titled, Two-beam interference patterning of biodegradable magnesium alloy: Influence of number of passes and spots overlap
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Journal Articles

Principle and observation of fluorescence moiré fringes for alignment in print and imprint methods

Eri Kikuchi, Yota Ishito, Shinya Matsubara, Takahiro Nakamura, Masayuki Abe, Masaru Nakagawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G303 (2017)
https://doi.org/10.1116/1.4990844
Published: September 2017
View article titled, Principle and observation of fluorescence moiré fringes for alignment in print and imprint methods
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Journal Articles

Camera for transmission He+ ion microscopy

Editor’s Pick
Karen L. Kavanagh, Christoph Herrmann, John A. Notte
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G902 (2017)
https://doi.org/10.1116/1.4991898
Published: September 2017
View article titled, Camera for transmission He<sup>+</sup> ion microscopy
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Journal Articles

High quality semicontinuous deep reactive ion etching of silicon for the creation of x-ray lenses

Karola Richter, André Mocker, Johann-Wolfgang Bartha
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 031206 (2017)
https://doi.org/10.1116/1.4982712
Published: May 2017
View article titled, High quality semicontinuous deep reactive ion etching of silicon for the creation of x-ray lenses
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