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Journal Articles

Constant period line gratings as a metric for patterning fidelity in electron beam lithography

Editor’s Pick
C. R. Fasano, F. Cruz Aguirre, C. T. DeRoo, K. Hoadley, J. A. B. Termini
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 064001 (2024)
https://doi.org/10.1116/6.0003958
Published: October 2024
View article titled, Constant period line gratings as a metric for patterning fidelity in electron beam lithography
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Journal Articles

An Invar-based dual Fabry–Perot cavity refractometer for assessment of pressure with a pressure independent uncertainty in the sub-mPa region

I. Silander, J. Zakrisson, M. Zelan, O. Axner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 064206 (2023)
https://doi.org/10.1116/6.0003149
Published: December 2023
View article titled, An Invar-based dual Fabry–Perot cavity refractometer for assessment of pressure with a pressure independent uncertainty in the sub-mPa region
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Includes: Supplementary data
Journal Articles

Integrated interferometry for in-process monitoring of critical dimension in vertical NAND flash memory dry etch

Se-Jin Oh
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 044201 (2022)
https://doi.org/10.1116/6.0001883
Published: May 2022
View article titled, Integrated interferometry for in-process monitoring of critical dimension in vertical NAND flash memory dry etch
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Journal Articles

Optimized ultraviolet grayscale process for high vertical resolution applied to spectral imagers

Nadine Gerges, Camille Petit-Etienne, Marie Panabière, Jumana Boussey, Yann Ferrec, Cécile Gourgon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062602 (2021)
https://doi.org/10.1116/6.0001273
Published: October 2021
View article titled, Optimized ultraviolet grayscale process for high vertical resolution applied to spectral imagers
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Journal Articles

Interferometric in-situ III/V semiconductor dry-etch depth-control with ±0.8 nm best accuracy using a quadruple-Vernier-scale measurement

Guilherme Sombrio, Emerson Oliveira, Johannes Strassner, Christoph Doering, Henning Fouckhardt
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052204 (2021)
https://doi.org/10.1116/6.0001209
Published: August 2021
View article titled, Interferometric <em>in-situ</em> III/V semiconductor dry-etch depth-control with ±0.8 nm best accuracy using a quadruple-Vernier-scale measurement
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Journal Articles

Optical realization of the pascal—Characterization of two gas modulated refractometers

Isak Silander, Clayton Forssén, Johan Zakrisson, Martin Zelan, Ove Axner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 044201 (2021)
https://doi.org/10.1116/6.0001042
Published: June 2021
View article titled, Optical realization of the pascal—Characterization of two gas modulated refractometers
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Journal Articles

Phase errors reduction in multi-angle illumination digital holographic microscopy

Junsheng Lu, Yanan Zeng, Xinyu Chang, Yujian Hong, Xiaodong Hu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 064003 (2020)
https://doi.org/10.1116/6.0000478
Published: October 2020
View article titled, Phase errors reduction in multi-angle illumination digital holographic microscopy
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Journal Articles

Design and fabrication of large-area tunable MOEMS-based shortwave infrared Fabry-Pérot filters

Jyun-Hao Liao, Wen Wang, Chien-Ju Chen, Chia-Jui Yu, Meng-Chyi Wu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 032002 (2019)
https://doi.org/10.1116/1.5085259
Published: April 2019
View article titled, Design and fabrication of large-area tunable MOEMS-based shortwave infrared Fabry-Pérot filters
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Journal Articles

Generalized method for probing ideal initial polarization states in multibeam Lloyd's mirror interference lithography of 2D scale gratings

Xiuguo Chen, Yuki Shimizu, Chong Chen, Yuan-Liu Chen, Wei Gao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 021601 (2018)
https://doi.org/10.1116/1.5016505
Published: January 2018
View article titled, Generalized method for probing ideal initial polarization states in multibeam Lloyd's mirror interference lithography of 2D scale gratings
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Journal Articles

Electron beam lithography using fixed beam moving stage

Iman Khodadad, Nathan Nelson-Fitzpatrick, Kevin Burcham, Arsen Hajian, Simarjeet S. Saini
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 051601 (2017)
https://doi.org/10.1116/1.4997018
Published: August 2017
View article titled, Electron beam lithography using fixed beam moving stage
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Journal Articles

Employing refractive beam shaping in a Lloyd's interference lithography system for uniform periodic nanostructure formation

Yung-Jr Hung, Han-Jung Chang, Ping-Chien Chang, Jia-Jin Lin, Tzu-Chieh Kao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 030601 (2017)
https://doi.org/10.1116/1.4980134
Published: April 2017
View article titled, Employing refractive beam shaping in a Lloyd's interference lithography system for uniform periodic nanostructure formation
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Journal Articles

Nanoimprint-induced orientation of localized wrinkles with SU-8

Christian Steinberg, Manuel Runkel, Marc Papenheim, Si Wang, Andre Mayer, Hella-Christin Scheer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06K402 (2016)
https://doi.org/10.1116/1.4962162
Published: September 2016
View article titled, Nanoimprint-induced orientation of localized wrinkles with SU-8
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Journal Articles

Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices

Markus Reusch, Katarzyna Holc, Wilfried Pletschen, Lutz Kirste, Agnė Žukauskaitė, Taro Yoshikawa, Dimitre Iankov, Oliver Ambacher, Vadim Lebedev
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 052001 (2016)
https://doi.org/10.1116/1.4959580
Published: July 2016
View article titled, Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices
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Journal Articles

Compact mirror-tunable laser interference system for wafer-scale patterning of grating structures with flexible periodicity

Editor’s Pick
Yung-Jr Hung, Ping-Chien Chang, Yu-Nung Lin, Jia-Jin Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 040609 (2016)
https://doi.org/10.1116/1.4955172
Published: June 2016
View article titled, Compact mirror-tunable laser interference system for wafer-scale patterning of grating structures with flexible periodicity
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Journal Articles

In-situ monitoring of etch uniformity using plasma emission interferometry

Vladimir Samara, Jean-Francois de Marneffe, Ziad el Otell, Demetre J. Economou
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 031206 (2015)
https://doi.org/10.1116/1.4917168
Published: April 2015
View article titled, <em>In-situ</em> monitoring of etch uniformity using plasma emission interferometry
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Journal Articles

Simple fabrication of ultrahigh aspect ratio nanostructures for enhanced antireflectivity

Sagrario Dominguez, Ignacio Cornago, Javier Bravo, Jesus Pérez-Conde, Hyungryul J. Choi, Jeong-Gil Kim, George Barbastathis
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 030602 (2014)
https://doi.org/10.1116/1.4869302
Published: March 2014
View article titled, Simple fabrication of ultrahigh aspect ratio nanostructures for enhanced antireflectivity
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Journal Articles

Control of stress in tantalum thin films for the fabrication of 3D MEMS structures

Enrico Mastropaolo, Rhonira Latif, Eldad Grady, Rebecca Cheung
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06FD02 (2013)
https://doi.org/10.1116/1.4824697
Published: October 2013
View article titled, Control of stress in tantalum thin films for the fabrication of 3D MEMS structures
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Journal Articles

Lloyd's mirror interferometer using a single-mode fiber spatial filter

Yi-Lin Sun, David Mikolas, En-Chiang Chang, Pao-Te Lin, Chien-Chung Fu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 021604 (2013)
https://doi.org/10.1116/1.4790660
Published: February 2013
View article titled, Lloyd's mirror interferometer using a single-mode fiber spatial filter
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Journal Articles

Low frequency tantalum electromechanical systems for biomimetical applications

Rhonira Latif, Enrico Mastropaolo, Andrew Bunting, Rebecca Cheung, Thomas Koickal, Alister Hamilton, Michael Newton, Leslie Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06FE05 (2011)
https://doi.org/10.1116/1.3662408
Published: November 2011
View article titled, Low frequency tantalum electromechanical systems for biomimetical applications
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Journal Articles

Anisotropic filling phenomenon of cavities in UV nanoimprint lithography

Qing Wang, Hiroshi Hiroshima
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06FC19 (2011)
https://doi.org/10.1116/1.3662889
Published: November 2011
View article titled, Anisotropic filling phenomenon of cavities in UV nanoimprint lithography
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