1-20 of 408
Geometrical optics
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

A novel design of a retarding field electron energy analyzer with a cavity electrode providing extremely high energy resolution

Kazuhiro Honda, Hiroyuki Ito, Souichi Katagiri, Takashi Doi, Masahiro Sasaki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044006 (2023)
https://doi.org/10.1116/6.0002597
Published: June 2023
View article titled, A novel design of a retarding field electron energy analyzer with a cavity electrode providing extremely high energy resolution
Open the PDF for A novel design of a retarding field electron energy analyzer with a cavity electrode providing extremely high energy resolution in another window
Includes: Supplementary data
Journal Articles

Accuracy requirements of the microarrayed Einzel lens

Lixin Zhang, Yulu Zhang, Weixia Zhao, Junbiao Liu, Bohua Yin, Li Han
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 014203 (2022)
https://doi.org/10.1116/6.0001620
Published: January 2022
View article titled, Accuracy requirements of the microarrayed Einzel lens
Open the PDF for Accuracy requirements of the microarrayed Einzel lens in another window
Journal Articles

Multiple criteria optimization of electrostatic electron lenses using multiobjective genetic algorithms

Neda Hesam Mahmoudi Nezhad, Mohamad Ghaffarian Niasar, Ali Mohammadi Gheidari, Pieter Kruit, Cornelis Wouter Hagen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062605 (2021)
https://doi.org/10.1116/6.0001274
Published: November 2021
View article titled, Multiple criteria optimization of electrostatic electron lenses using multiobjective genetic algorithms
Open the PDF for Multiple criteria optimization of electrostatic electron lenses using multiobjective genetic algorithms in another window
Journal Articles

Ga-contamination-free scanning transmission electron microscope sample preparation by rectangular-shaped oxygen-ion-beam thinning using projection ion beam optical system

Hiroyasu Shichi, Satoshi Tomimatsu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 054003 (2020)
https://doi.org/10.1116/6.0000297
Published: September 2020
View article titled, Ga-contamination-free scanning transmission electron microscope sample preparation by rectangular-shaped oxygen-ion-beam thinning using projection ion beam optical system
Open the PDF for Ga-contamination-free scanning transmission electron microscope sample preparation by rectangular-shaped oxygen-ion-beam thinning using projection ion beam optical system in another window
Journal Articles

Mueller matrix ellipsometry of waveplates for control of their properties and alignment

Pierre Koleják, Daniel Vala, Kamil Postava, Pavlína Provazníková, Jaromír Pištora
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014006 (2020)
https://doi.org/10.1116/1.5129615
Published: December 2019
View article titled, Mueller matrix ellipsometry of waveplates for control of their properties and alignment
Open the PDF for Mueller matrix ellipsometry of waveplates for control of their properties and alignment in another window
Journal Articles

Tip-based electron beam induced deposition using active cantilevers

Mathias Holz, Frances I. Allen, Christoph Reuter, Ahmad Ahmad, Martin Hofmann, Alexander Reum, Tzvetan Ivanov, Ivo W. Rangelow
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061812 (2019)
https://doi.org/10.1116/1.5123287
Published: November 2019
View article titled, Tip-based electron beam induced deposition using active cantilevers
Open the PDF for Tip-based electron beam induced deposition using active cantilevers in another window
Journal Articles

Optical angular scatterometry: In-line metrology approach for roll-to-roll and nanoimprint fabrication

Juan J. Faria-Briceno, Ruichao Zhu, Vineeth Sasidharan, Alexander Neumann, Shrawan Singhal, S. V. Sreenivasan, S. R. J. Brueck
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 052904 (2019)
https://doi.org/10.1116/1.5119707
Published: September 2019
View article titled, Optical angular scatterometry: In-line metrology approach for roll-to-roll and nanoimprint fabrication
Open the PDF for Optical angular scatterometry: In-line metrology approach for roll-to-roll and nanoimprint fabrication in another window
Journal Articles

Lithium ion beams from liquid metal alloy ion sources

Wolfgang Pilz, Nico Klingner, Lothar Bischoff, Paul Mazarov, Sven Bauerdick
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 021802 (2019)
https://doi.org/10.1116/1.5086271
Published: March 2019
View article titled, Lithium ion beams from liquid metal alloy ion sources
Open the PDF for Lithium ion beams from liquid metal alloy ion sources in another window
Journal Articles

Analysis of multipole fields for a practical wire lens of an aberration corrector

Tomonori Nakano, Yu Yamazawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 012901 (2019)
https://doi.org/10.1116/1.5065554
Published: December 2018
View article titled, Analysis of multipole fields for a practical wire lens of an aberration corrector
Open the PDF for Analysis of multipole fields for a practical wire lens of an aberration corrector in another window
Journal Articles

Variations of the field of view depending on the Si deflector shape in a microcolumn

Hyung Woo Kim, Young Bok Lee, Dae-Wook Kim, Seungjoon Ahn, Tae Sik Oh, Ho Seob Kim, Young Chul Kim
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 06J902 (2018)
https://doi.org/10.1116/1.5048128
Published: November 2018
View article titled, Variations of the field of view depending on the Si deflector shape in a microcolumn
Open the PDF for Variations of the field of view depending on the Si deflector shape in a microcolumn in another window
Journal Articles

Brightness measurements of the nano-aperture ion source

Leon van Kouwen, Pieter Kruit
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 06J901 (2018)
https://doi.org/10.1116/1.5048054
Published: October 2018
View article titled, Brightness measurements of the nano-aperture ion source
Open the PDF for Brightness measurements of the nano-aperture ion source in another window
Journal Articles

Low-voltage coherent electron microscopy based on a highly coherent electron source built from a nanoemitter

Chun-Yueh Lin, Wei-Tse Chang, Wei-Hao Hsu, Mu-Tung Chang, Yi-Sheng Chen, En-Te Hwu, Wun-Cin Huang, Ing-Shouh Hwang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 032901 (2018)
https://doi.org/10.1116/1.5024852
Published: March 2018
View article titled, Low-voltage coherent electron microscopy based on a highly coherent electron source built from a nanoemitter
Open the PDF for Low-voltage coherent electron microscopy based on a highly coherent electron source built from a nanoemitter in another window
Journal Articles

Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction

Aiden A. Martin, Philip J. Depond, Michael Bagge-Hansen, Jonathan R. I. Lee, Jae-Hyuck Yoo, Selim Elhadj, Manyalibo J. Matthews, Tony van Buuren
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 020601 (2018)
https://doi.org/10.1116/1.5019742
Published: March 2018
View article titled, Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction
Open the PDF for Rapid feedback of chemical vapor deposition growth mechanisms by operando X-ray diffraction in another window
Journal Articles

Practical design of the electron gun for a microfocus x-ray source

W. P. Li, P. F. Wang, J. B. Liu, W. X. Zhao, L. Han
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 061604 (2017)
https://doi.org/10.1116/1.5010897
Published: November 2017
View article titled, Practical design of the electron gun for a microfocus x-ray source
Open the PDF for Practical design of the electron gun for a microfocus x-ray source in another window
Journal Articles

Three-dimensional photolithography using built-in lens mask

Toshiki Tanaka, Daiki Sugihara, Masaru Sasago, Hisao Kikuta, Hiroaki Kawata, Yoshihiko Hirai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G308 (2017)
https://doi.org/10.1116/1.4995693
Published: November 2017
View article titled, Three-dimensional photolithography using built-in lens mask
Open the PDF for Three-dimensional photolithography using built-in lens mask in another window
Journal Articles

Tip-to-tip variation mitigation in extreme ultraviolet lithography for 7 nm and beyond metallization layers and design rule analysis

Yulu Chen, Lei Sun, Zhengqing John Qi, Shuo Zhao, Francis Goodwin, Itty Matthew, Vince Plachecki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G601 (2017)
https://doi.org/10.1116/1.4994908
Published: November 2017
View article titled, Tip-to-tip variation mitigation in extreme ultraviolet lithography for 7 nm and beyond metallization layers and design rule analysis
Open the PDF for Tip-to-tip variation mitigation in extreme ultraviolet lithography for 7 nm and beyond metallization layers and design rule analysis in another window
Journal Articles

Monte Carlo simulations of secondary electron emission due to ion beam milling

Kyle Mahady, Shida Tan, Yuval Greenzweig, Richard Livengood, Amir Raveh, Jason D. Fowlkes, Philip Rack
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 041805 (2017)
https://doi.org/10.1116/1.4994801
Published: July 2017
View article titled, Monte Carlo simulations of secondary electron emission due to ion beam milling
Open the PDF for Monte Carlo simulations of secondary electron emission due to ion beam milling in another window
Includes: Supplementary data
Journal Articles

Structural and optical properties of alumina passivated amorphous Si slanted columnar thin films during electrochemical Li-ion intercalation and deintercalation observed by in situ generalized spectroscopic ellipsometry

Derek Sekora, Rebecca Y. Lai, Daniel Schmidt, Mathias Schubert, Eva Schubert
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 031401 (2017)
https://doi.org/10.1116/1.4982880
Published: May 2017
View article titled, Structural and optical properties of alumina passivated amorphous Si slanted columnar thin films during electrochemical Li-ion intercalation and deintercalation observed by <em>in situ</em> generalized spectroscopic ellipsometry
Open the PDF for Structural and optical properties of alumina passivated amorphous Si slanted columnar thin films during electrochemical Li-ion intercalation and deintercalation observed by <em>in situ</em> generalized spectroscopic ellipsometry in another window
Journal Articles

Probing kinetically excited hot electrons using Schottky diodes

Dhruva D. Kulkarni, Daniel A. Field, Daniel B. Cutshall, James E. Harriss, William R. Harrell, Chad E. Sosolik
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 03D103 (2017)
https://doi.org/10.1116/1.4979003
Published: March 2017
View article titled, Probing kinetically excited hot electrons using Schottky diodes
Open the PDF for Probing kinetically excited hot electrons using Schottky diodes in another window
Journal Articles

Ultralow voltage imaging using a miniature electron beam column

James Spallas, Dan Meisburger, Lawrence Muray
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06KB02 (2016)
https://doi.org/10.1116/1.4965024
Published: October 2016
View article titled, Ultralow voltage imaging using a miniature electron beam column
Open the PDF for Ultralow voltage imaging using a miniature electron beam column in another window