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Journal Articles

Ellipsometric characterization of Bi and Al₂O₃ coatings for plasmon excitation in an optical fiber sensor

Eva Rodríguez-Schwendtner, Alberto Álvarez-Herrero, Antonio Mariscal, Rosalía Serna, Agustín González-Cano, María-Cruz Navarrete, Natalia Díaz-Herrera

J. Vac. Sci. Technol. B 37, 062914 (2019)

https://doi.org/10.1116/1.5121590

Published: October 2019

View article titled, Ellipsometric characterization of Bi and Al2O3 coatings for plasmon excitation in an optical fiber sensor

Journal Articles

Compact mirror-tunable laser interference system for wafer-scale patterning of grating structures with flexible periodicity

Yung-Jr Hung, Ping-Chien Chang, Yu-Nung Lin, Jia-Jin Lin

J. Vac. Sci. Technol. B 34, 040609 (2016)

https://doi.org/10.1116/1.4955172

Published: June 2016

View article titled, Compact mirror-tunable laser interference system for wafer-scale patterning of grating structures with flexible periodicity

Journal Articles

Amorphous Si/SiO₂ distributed Bragg reflectors with transfer printed single-crystalline Si nanomembranes

Minkyu Cho, Jung-Hun Seo, Deyin Zhao, Jaeseong Lee, Kanglin Xiong, Xin Yin, Yonghao Liu, Shih-Chia Liu, Munho Kim, Tong J. Kim, Xudong Wang, Weidong Zhou, Zhenqiang Ma

J. Vac. Sci. Technol. B 34, 040601 (2016)

https://doi.org/10.1116/1.4945998

Published: April 2016

View article titled, Amorphous Si/SiO2 distributed Bragg reflectors with transfer printed single-crystalline Si nanomembranes

Journal Articles

Voltage induced acoustic resonance in metal organic chemical vapor deposition SrTiO₃ thin film

Nick M. Sbrockey, Gary S. Tompa, Thottam S. Kalkur, Jialan Zhang, S. Pamir Alpay, Melanie W. Cole

J. Vac. Sci. Technol. B 30, 061202 (2012)

https://doi.org/10.1116/1.4757129

Published: October 2012

View article titled, Voltage induced acoustic resonance in metal organic chemical vapor deposition SrTiO3 thin film

Journal Articles

Gas chopping etching process for InP based nanostructures with high aspect ratios

Sohaib Afzal, Johann Peter Reithmaier

J. Vac. Sci. Technol. B 30, 060601 (2012)

https://doi.org/10.1116/1.4754293

Published: September 2012

View article titled, Gas chopping etching process for InP based nanostructures with high aspect ratios

Journal Articles

High power 1.25 μ m InAs quantum dot vertical external-cavity surface-emitting laser

Alexander R. Albrecht, Christopher P. Hains, Thomas J. Rotter, Andreas Stintz, Kevin J. Malloy, Ganesh Balakrishnan, Jerome V. Moloney

J. Vac. Sci. Technol. B 29, 03C113 (2011)

https://doi.org/10.1116/1.3555379

Published: February 2011

View article titled, High power 1.25 μ m InAs quantum dot vertical external-cavity surface-emitting laser

Journal Articles

Strong exciton-photon coupling in ZnO based resonators

C. Sturm, H. Hilmer, R. Schmidt-Grund, C. Czekalla, J. Sellmann, J. Lenzner, M. Lorenz, M. Grundmann

J. Vac. Sci. Technol. B 27, 1726–1730 (2009)

https://doi.org/10.1116/1.3086661

Published: May 2009

View article titled, Strong exciton-photon coupling in ZnO based resonators

Journal Articles

Research on the influence of membrane on the performance of vibration sensor

Rui Li, Wen Xiao, Xiaosu Yi, Bingshi Xu, Junlei Chang

J. Vac. Sci. Technol. B 27, 1428–1430 (2009)

https://doi.org/10.1116/1.3123303

Published: May 2009

View article titled, Research on the influence of membrane on the performance of vibration sensor

Journal Articles

Focused ion beam fabrication of metallic nanostructures on end faces of optical fibers for chemical sensing applications

A. Dhawan, J. F. Muth, D. N. Leonard, M. D. Gerhold, J. Gleeson, T. Vo-Dinh, P. E. Russell

J. Vac. Sci. Technol. B 26, 2168–2173 (2008)

https://doi.org/10.1116/1.3013329

Published: December 2008

View article titled, Focused ion beam fabrication of metallic nanostructures on end faces of optical fibers for chemical sensing applications

Journal Articles

Focused ion beam etching for the fabrication of micropillar microcavities made of III-V semiconductor materials

Y.-L. D. Ho, R. Gibson, C. Y. Hu, M. J. Cryan, J. G. Rarity, P. J. Heard, J. A. Timpson, A. M. Fox, M. S. Skolnick, M. Hopkinson, A. Tahraoui

J. Vac. Sci. Technol. B 25, 1197–1202 (2007)

https://doi.org/10.1116/1.2749528

Published: June 2007

View article titled, Focused ion beam etching for the fabrication of micropillar microcavities made of III-V semiconductor materials

Journal Articles

Low bias reactive ion etching of GaAs with a Si Cl 4 ∕ N 2 ∕ O 2 time-multiplexed process

S. Golka, S. Schartner, W. Schrenk, G. Strasser

J. Vac. Sci. Technol. B 25, 839–844 (2007)

https://doi.org/10.1116/1.2737439

Published: May 2007

View article titled, Low bias reactive ion etching of GaAs with a Si Cl 4 ∕ N 2 ∕ O 2 time-multiplexed process

Journal Articles

Two-dimensional Bragg grating lasers defined by electron-beam lithography

Guy A. DeRose, Lin Zhu, John M. Choi, Joyce K. S. Poon, Amnon Yariv, Axel Scherer

J. Vac. Sci. Technol. B 24, 2926–2930 (2006)

https://doi.org/10.1116/1.2375080

Published: November 2006

View article titled, Two-dimensional Bragg grating lasers defined by electron-beam lithography

Journal Articles

Fabrication and molecular beam epitaxy regrowth of first-order, high contrast Al Ga As ∕ Ga As gratings

C. S. Wang, G. B. Morrison, E. J. Skogen, L. A. Coldren

J. Vac. Sci. Technol. B 24, 1559–1563 (2006)

https://doi.org/10.1116/1.2190679

Published: May 2006

View article titled, Fabrication and molecular beam epitaxy regrowth of first-order, high contrast Al Ga As ∕ Ga As gratings

Journal Articles

Lithographically fabricated optical cavities for refractive index sensing

Mark Adams, Guy A. DeRose, Marko Loncar, Axel Scherer

J. Vac. Sci. Technol. B 23, 3168–3173 (2005)

https://doi.org/10.1116/1.2127945

Published: December 2005

View article titled, Lithographically fabricated optical cavities for refractive index sensing

Journal Articles

Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography

J. T. Hastings, Michael H. Lim, J. G. Goodberlet, Henry I. Smith

J. Vac. Sci. Technol. B 20, 2753–2757 (2002)

https://doi.org/10.1116/1.1521744

Published: December 2002

View article titled, Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography

Journal Articles

Very-low-temperature molecular beam epitaxial growth of GaP/AlAs heterostructures for distributed Bragg reflector applications

G. W. Pickrell, K. L. Chang, H. C. Lin, K. C. Hsieh, K. Y. Cheng

J. Vac. Sci. Technol. B 19, 1536–1540 (2001)

https://doi.org/10.1116/1.1376385

Published: July 2001

View article titled, Very-low-temperature molecular beam epitaxial growth of GaP/AlAs heterostructures for distributed Bragg reflector applications

Journal Articles

Enhanced magneto-optical effect in a GaAs:MnAs nanoscale hybrid structure combined with GaAs/AlAs distributed Bragg reflectors

H. Shimizu, M. Miyamura, M. Tanaka

J. Vac. Sci. Technol. B 18, 2063–2065 (2000)

https://doi.org/10.1116/1.1303855

Published: July 2000

View article titled, Enhanced magneto-optical effect in a GaAs:MnAs nanoscale hybrid structure combined with GaAs/AlAs distributed Bragg reflectors

Journal Articles

Improvement of AlAs–GaAs interface roughness grown with high As overpressures

D. E. Wohlert, K. L. Chang, H. C. Lin, K. C. Hsieh, K. Y. Cheng

J. Vac. Sci. Technol. B 18, 1590–1593 (2000)

https://doi.org/10.1116/1.591433

Published: May 2000

View article titled, Improvement of AlAs–GaAs interface roughness grown with high As overpressures

Journal Articles

High-aspect-ratio nanophotonic components fabricated by Cl 2 reactive ion beam etching

W. J. Zubrzycki, G. A. Vawter, J. R. Wendt

J. Vac. Sci. Technol. B 17, 2740–2744 (1999)

https://doi.org/10.1116/1.591055

Published: November 1999

View article titled, High-aspect-ratio nanophotonic components fabricated by Cl 2 reactive ion beam etching

Journal Articles

Control of wet-etching thickness in the vertical cavity surface emitting laser structure by in situ laser reflectometry

H. K. Cho, J. Y. Lee, B. Lee, J. H. Baek, W. S. Han

J. Vac. Sci. Technol. B 17, 2626–2629 (1999)

https://doi.org/10.1116/1.591036

Published: November 1999

View article titled, Control of wet-etching thickness in the vertical cavity surface emitting laser structure by in situ laser reflectometry

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Ellipsometric characterization of Bi and Al₂O₃ coatings for plasmon excitation in an optical fiber sensor

Compact mirror-tunable laser interference system for wafer-scale patterning of grating structures with flexible periodicity

Amorphous Si/SiO₂ distributed Bragg reflectors with transfer printed single-crystalline Si nanomembranes

Voltage induced acoustic resonance in metal organic chemical vapor deposition SrTiO₃ thin film

Gas chopping etching process for InP based nanostructures with high aspect ratios

High power 1.25 μ m InAs quantum dot vertical external-cavity surface-emitting laser

Strong exciton-photon coupling in ZnO based resonators

Research on the influence of membrane on the performance of vibration sensor

Focused ion beam fabrication of metallic nanostructures on end faces of optical fibers for chemical sensing applications

Focused ion beam etching for the fabrication of micropillar microcavities made of III-V semiconductor materials

Low bias reactive ion etching of GaAs with a Si Cl 4 ∕ N 2 ∕ O 2 time-multiplexed process

Two-dimensional Bragg grating lasers defined by electron-beam lithography

Fabrication and molecular beam epitaxy regrowth of first-order, high contrast Al Ga As ∕ Ga As gratings

Lithographically fabricated optical cavities for refractive index sensing

Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography

Very-low-temperature molecular beam epitaxial growth of GaP/AlAs heterostructures for distributed Bragg reflector applications

Enhanced magneto-optical effect in a GaAs:MnAs nanoscale hybrid structure combined with GaAs/AlAs distributed Bragg reflectors

Improvement of AlAs–GaAs interface roughness grown with high As overpressures

High-aspect-ratio nanophotonic components fabricated by Cl 2 reactive ion beam etching

Control of wet-etching thickness in the vertical cavity surface emitting laser structure by in situ laser reflectometry

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