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Journal Articles

Characterizing profile tilt of nanoscale deep-etched gratings via x-ray diffraction

Jungki Song, Ralf K. Heilmann, Alexander R. Bruccoleri, Mark L. Schattenburg
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062917 (2019)
https://doi.org/10.1116/1.5119713
Published: October 2019
View article titled, Characterizing profile tilt of nanoscale deep-etched gratings via x-ray diffraction
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Journal Articles

Process window modeling using focus balancing technique

Artak Isoyan, Ebo Croffie, Lawrence S. Melvin, III
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06F903 (2011)
https://doi.org/10.1116/1.3662407
Published: November 2011
View article titled, Process window modeling using focus balancing technique
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Journal Articles

Analysis of a scheme for de-magnified Talbot lithography

L. Urbanski, M. C. Marconi, A. Isoyan, A. Stein, C. S. Menoni, J. J. Rocca
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06F504 (2011)
https://doi.org/10.1116/1.3653507
Published: November 2011
View article titled, Analysis of a scheme for de-magnified Talbot lithography
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Journal Articles

Progress in extreme ultraviolet interferometric and holographic lithography

A. Isoyan, Y.-C. Cheng, F. Jiang, J. Wallace, F. Cerrina, S. Bollepalli
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2145–2150 (2007)
https://doi.org/10.1116/1.2794069
Published: December 2007
View article titled, Progress in extreme ultraviolet interferometric and holographic lithography
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Journal Articles

Edge effects characterization of phase shift mask

Gek Soon Chua, Cho Jui Tay, Chenggen Quan, Qunying Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 23, 417–424 (2005)
https://doi.org/10.1116/1.1865112
Published: March 2005
View article titled, Edge effects characterization of phase shift mask
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Journal Articles

Real-time composition control of InAlAs grown on InP using spectroscopic ellipsometry

M. Beaudoin, E. Grassi, S. R. Johnson, K. Ramaswamy, K. Tsakalis, T. L. Alford, Y.-H. Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 18, 1435–1438 (2000)
https://doi.org/10.1116/1.591398
Published: May 2000
View article titled, Real-time composition control of InAlAs grown on InP using spectroscopic ellipsometry
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Journal Articles

Correlation between dynamic magnetic hysteresis loops and nanoscale roughness of ultrathin Co films

Q. Jiang, H.‐N. Yang, G.‐C. Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 14, 3180–3188 (1996)
https://doi.org/10.1116/1.588804
Published: July 1996
View article titled, Correlation between dynamic magnetic hysteresis loops and nanoscale roughness of ultrathin Co films
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Journal Articles

Lithographic tolerances based on vector diffraction theory

D. G. Flagello, A. E. Rosenbluth
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 10, 2997–3003 (1992)
https://doi.org/10.1116/1.585959
Published: November 1992
View article titled, Lithographic tolerances based on vector diffraction theory
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Journal Articles

Modeling and experimental verification of illumination and diffraction effects on image quality in x‐ray lithography

Scott D. Hector, M. L. Schattenburg, E. H. Anderson, W. Chu, Vincent V. Wong, Henry I. Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 10, 3164–3168 (1992)
https://doi.org/10.1116/1.585904
Published: November 1992
View article titled, Modeling and experimental verification of illumination and diffraction effects on image quality in x‐ray lithography
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Journal Articles

Extending scalar aerial image calculations to higher numerical apertures

Daniel C. Cole, Eytan Barouch, Uwe Hollerbach, Steven A. Orszag
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 10, 3037–3041 (1992)
https://doi.org/10.1116/1.585925
Published: November 1992
View article titled, Extending scalar aerial image calculations to higher numerical apertures
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Journal Articles

Electromagnetic calculation of soft x‐ray diffraction from 0.1‐μm scale gold structures

M. L. Schattenburg, K. Li, R. T. Shin, J. A. Kong, D. B. Olster, Henry I. Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 9, 3232–3236 (1991)
https://doi.org/10.1116/1.585293
Published: November 1991
View article titled, Electromagnetic calculation of soft x‐ray diffraction from 0.1‐μm scale gold structures
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Journal Articles

Graded‐index strained multiquantum‐well GaInAsP lasers grown by gas‐source molecular‐beam epitaxy: Growth and characterization

Jari Keskinen, Harry Asonen, Minna Hovinen, Kirsi Tappura, Jari Näppi, Markus Pessa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 9, 239–242 (1991)
https://doi.org/10.1116/1.585600
Published: March 1991
View article titled, Graded‐index strained multiquantum‐well GaInAsP lasers grown by gas‐source molecular‐beam epitaxy: Growth and characterization
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Journal Articles

Surface characterization of multilayer x‐ray diffraction specimens

P. G. Burkhalter, D. B. Brown, J. V. Gilfrich, J. H. Konnert, P. D’Antonio, H. Rosenstock, L. M. Shirey, M. Thompson, V. Elings
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 9, 845–852 (1991)
https://doi.org/10.1116/1.585525
Published: March 1991
View article titled, Surface characterization of multilayer x‐ray diffraction specimens
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Journal Articles

The effect of process coatings on the alignment signal in a proximity lithography system

G. Chen, J. Wallace, S. Palmer, F. Cerrina, J. Randall
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 8, 2012–2016 (1990)
https://doi.org/10.1116/1.584893
Published: November 1990
View article titled, The effect of process coatings on the alignment signal in a proximity lithography system
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