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Journal Articles

Tip-to-tip variation mitigation in extreme ultraviolet lithography for 7 nm and beyond metallization layers and design rule analysis

Yulu Chen, Lei Sun, Zhengqing John Qi, Shuo Zhao, Francis Goodwin, Itty Matthew, Vince Plachecki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G601 (2017)
https://doi.org/10.1116/1.4994908
Published: November 2017
View article titled, Tip-to-tip variation mitigation in extreme ultraviolet lithography for 7 nm and beyond metallization layers and design rule analysis
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Journal Articles

Two-beam interference patterning of biodegradable magnesium alloy: Influence of number of passes and spots overlap

Valentina Furlan, Marco Biondi, Ali Gökhan Demir, Barbara Previtali, Giorgio Pariani, Andrea Bianco
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 01A102 (2018)
https://doi.org/10.1116/1.4996504
Published: October 2017
View article titled, Two-beam interference patterning of biodegradable magnesium alloy: Influence of number of passes and spots overlap
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Journal Articles

Pulsed laser assisted synthesis of Ho3+/Yb3+ codoped CaMoO4 nanocolloid and its upconversion luminescence

Kyoungwon Cho, Jaeha Choi, Sungwook Mhin, Kang Min Kim, Jung-Il Lee, Jeong Ho Ryu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 041201 (2015)
https://doi.org/10.1116/1.4922024
Published: June 2015
View article titled, Pulsed laser assisted synthesis of Ho<sup>3+</sup>/Yb<sup>3+</sup> codoped CaMoO<sub>4</sub> nanocolloid and its upconversion luminescence
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Journal Articles

Fabrication of large-scale spherical-cap structure and the application on n-GaN based light-emitting diodes

Hong-Xing Yin, Chuan-Rui Zhu, Yan Shen, Hai-Fang Yang, Zhe Liu, Chang-Zhi Gu, Bao-Li Liu, Xian-Gang Xu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 031208 (2014)
https://doi.org/10.1116/1.4874611
Published: May 2014
View article titled, Fabrication of large-scale spherical-cap structure and the application on n-GaN based light-emitting diodes
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Journal Articles

Growth properties and resistive switching effects of diamond-like carbon films deposited using a linear ion source

Wei Dai, Peiling Ke, Aiying Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 031207 (2013)
https://doi.org/10.1116/1.4803741
Published: May 2013
View article titled, Growth properties and resistive switching effects of diamond-like carbon films deposited using a linear ion source
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Journal Articles

Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays

Serhiy Danylyuk, Hyun-su Kim, Sascha Brose, Carsten Dittberner, Peter Loosen, Thomas Taubner, Klaus Bergmann, Larissa Juschkin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 021602 (2013)
https://doi.org/10.1116/1.4789445
Published: January 2013
View article titled, Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays
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Journal Articles

Selective laser ablation of radiation exposed methyl acetoxy calix(6)arene

Pradeep N. Perera, Adam M. Schwartzberg, Dimas G. de Oteyza, Scott D. Dhuey, Bruce D. Harteneck, Stefano Cabrini, Deirdre L. Olynick
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06FI02 (2012)
https://doi.org/10.1116/1.4767347
Published: November 2012
View article titled, Selective laser ablation of radiation exposed methyl acetoxy calix(6)arene
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Journal Articles

Scanned-spot-array extreme ultraviolet imaging for high-volume maskless lithography

Kenneth C. Johnson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 051606 (2012)
https://doi.org/10.1116/1.4752112
Published: September 2012
View article titled, Scanned-spot-array extreme ultraviolet imaging for high-volume maskless lithography
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Journal Articles

Probing temporal evolution of extreme ultraviolet assisted contamination on Ru mirror by x-ray photoelectron spectroscopy

A. Al-Ajlony, A. Kanjilal, M. Catalfano, M. Fields, S. S. Harilal, A. Hassanein, B. Rice
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 021601 (2012)
https://doi.org/10.1116/1.3680122
Published: February 2012
View article titled, Probing temporal evolution of extreme ultraviolet assisted contamination on Ru mirror by x-ray photoelectron spectroscopy
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Journal Articles

Flexible poly(dimethyl siloxane) support layers for the evanescent characterization of near-field lithography systems

Ciaran P. Moore, Richard J. Blaikie
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06FH02 (2011)
https://doi.org/10.1116/1.3653511
Published: October 2011
View article titled, Flexible poly(dimethyl siloxane) support layers for the evanescent characterization of near-field lithography systems
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Journal Articles

3D Nanostructuring of hydrogen silsesquioxane resist by 100 keV electron beam lithography

Joan Vila-Comamala, Sergey Gorelick, Vitaliy A. Guzenko, Christian David
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06F301 (2011)
https://doi.org/10.1116/1.3629811
Published: August 2011
View article titled, 3D Nanostructuring of hydrogen silsesquioxane resist by 100 keV electron beam lithography
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Journal Articles

Optimizing photon sieves to approach Fresnel diffraction limit via pixel-based inverse lithography

Mosong Cheng, Chenggang Zhou
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 041002 (2011)
https://doi.org/10.1116/1.3605473
Published: July 2011
View article titled, Optimizing photon sieves to approach Fresnel diffraction limit via pixel-based inverse lithography
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Journal Articles

Circular apertures for contact hole patterning in 193 nm immersion lithography

C. J. Tay, C. Quan, M. L. Ling, G. S. Chua, S. K. Tan, Q. Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 021003 (2011)
https://doi.org/10.1116/1.3546100
Published: January 2011
View article titled, Circular apertures for contact hole patterning in 193 nm immersion lithography
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Journal Articles

Wavelength-specific reflections: A decade of extreme ultraviolet actinic mask inspection research

K. A. Goldberg, I. Mochi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C6E1–C6E10 (2010)
https://doi.org/10.1116/1.3498757
Published: November 2010
View article titled, Wavelength-specific reflections: A decade of extreme ultraviolet actinic mask inspection research
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Journal Articles

Optical and computed evaluation of keyhole diffractive imaging for lensless x-ray microscopy

Bing Dai, Diling Zhu, Ronnachai Jaroensri, Kanokwan Kulalert, Piero Pianetta, R. Fabian W. Pease
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C6Q1–C6Q5 (2010)
https://doi.org/10.1116/1.3501340
Published: October 2010
View article titled, Optical and computed evaluation of keyhole diffractive imaging for lensless x-ray microscopy
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Journal Articles

Effects of argon ion bombardment on the structure and magnetic properties of ultrathin Fe films

Shivaraman Ramaswamy, C. Gopalakrishnan, K. R. Ganesh, K. Jeganathan, M. Ponnavaikko
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, 795–798 (2010)
https://doi.org/10.1116/1.3457935
Published: July 2010
View article titled, Effects of argon ion bombardment on the structure and magnetic properties of ultrathin Fe films
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Journal Articles

Electron wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition

K. Murakami, T. Matsuo, F. Wakaya, M. Takai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C2A9–C2A12 (2010)
https://doi.org/10.1116/1.3333440
Published: March 2010
View article titled, Electron wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition
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Journal Articles

Mask observation results using a coherent extreme ultraviolet scattering microscope at NewSUBARU

Tetsuo Harada, Junki Kishimoto, Takeo Watanabe, Hiroo Kinoshita, Dong Gun Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 3203–3207 (2009)
https://doi.org/10.1116/1.3258633
Published: December 2009
View article titled, Mask observation results using a coherent extreme ultraviolet scattering microscope at NewSUBARU
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Journal Articles

Easy mask-mold fabrication for combined nanoimprint and photolithography

Helmut Schift, Christian Spreu, Arne Schleunitz, Jens Gobrecht, Anna Klukowska, Freimut Reuther, Gabi Gruetzner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 2850–2853 (2009)
https://doi.org/10.1116/1.3250260
Published: December 2009
View article titled, Easy mask-mold fabrication for combined nanoimprint and photolithography
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Journal Articles

Talbot lithography: Self-imaging of complex structures

A. Isoyan, F. Jiang, Y. C. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, M. Marconi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 2931–2937 (2009)
https://doi.org/10.1116/1.3258144
Published: December 2009
View article titled, Talbot lithography: Self-imaging of complex structures
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