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Journal Articles

Fabrication of silicon sharp nanocones using dry etch with periodic oxygen plasma shrinking and wet etch

Renqiang Kang, Aixi Pan, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 033002 (2024)
https://doi.org/10.1116/6.0003516
Published: April 2024
View article titled, Fabrication of silicon sharp nanocones using dry etch with periodic oxygen plasma shrinking and wet etch
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Journal Articles

CuO-ZnO nanocomposite for photocatalytic application

Joanna Rymarczyk, Izabela Stępińska
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032801 (2024)
https://doi.org/10.1116/6.0003482
Published: March 2024
View article titled, CuO-ZnO nanocomposite for photocatalytic application
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Journal Articles

High current field emission from Si nanowires on pillar structures

Philipp Buchner, Matthias Hausladen, Mathias Bartl, Michael Bachmann, Rupert Schreiner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022208 (2024)
https://doi.org/10.1116/6.0003384
Published: February 2024
View article titled, High current field emission from Si nanowires on pillar structures
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Journal Articles

Influence of vacuum annealing on mechanical characteristics of focused ion beam fabricated silicon nanowires

Hiromichi Ando, Takahiro Namazu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062808 (2023)
https://doi.org/10.1116/6.0002983
Published: November 2023
View article titled, Influence of vacuum annealing on mechanical characteristics of focused ion beam fabricated silicon nanowires
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Journal Articles

Nanoscale strain gauges on flexible polymer substrates

Editor’s Pick
Devin K. Brown, Isha Lodhi, Biya Haile, David R. Myers, Wilbur A. Lam, Oliver Brand
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 063001 (2023)
https://doi.org/10.1116/6.0003030
Published: October 2023
View article titled, Nanoscale strain gauges on flexible polymer substrates
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Includes: Supplementary data
Journal Articles

Multipurpose active scanning probe cantilevers for near-field spectroscopy, scanning tunnel imaging, and atomic-resolution lithography

Isaac Stricklin, Teodor Gotszalk, Mahmoud Behzadirad, Eberhard Manske, Thomas Kissinger, Ivo W. Rangelow, Tito L. Busani
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042601 (2023)
https://doi.org/10.1116/6.0002486
Published: June 2023
View article titled, Multipurpose active scanning probe cantilevers for near-field spectroscopy, scanning tunnel imaging, and atomic-resolution lithography
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Journal Articles

Morphologic and electronic changes induced by thermally supported hydrogen cleaning of GaAs(110) facets

D. S. Rosenzweig, M. Schnedler, R. E. Dunin-Borkowski, Ph. Ebert, H. Eisele
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044202 (2023)
https://doi.org/10.1116/6.0002733
Published: May 2023
View article titled, Morphologic and electronic changes induced by thermally supported hydrogen cleaning of GaAs(110) facets
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Journal Articles

Effect of substrate rotation speed on AlGaN nanowire deep ultraviolet light-emitting diodes by molecular beam epitaxy

Mohammad Fazel Vafadar, Rezoana Bente Arif, Qihua Zhang, Songrui Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 030601 (2023)
https://doi.org/10.1116/6.0002494
Published: April 2023
View article titled, Effect of substrate rotation speed on AlGaN nanowire deep ultraviolet light-emitting diodes by molecular beam epitaxy
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Journal Articles

Thickness dependent field emission study of LaB6 coated Si nanowire arrays

Amol Deore, Krishna Jagtap, Onkar Bhorade, Angela Vella, Mahendra More
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022806 (2023)
https://doi.org/10.1116/6.0002464
Published: March 2023
View article titled, Thickness dependent field emission study of LaB<sub>6</sub> coated Si nanowire arrays
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Includes: Supplementary data
Journal Articles

Numerical simulations of heterojunction GaN nanopillar light emitting diodes

Zbigniew Lisik, Janusz Wozny, Ewa Raj, Jacek Podgorski
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 023204 (2023)
https://doi.org/10.1116/5.0121997
Published: March 2023
View article titled, Numerical simulations of heterojunction GaN nanopillar light emitting diodes
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Journal Articles

Application of deep-learning based techniques for automatic metrology on scanning and transmission electron microscopy images

FeaturedScilight
J. Baderot, M. Grould, D. Misra, N. Clément, A. Hallal, S. Martinez, J. Foucher
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 054003 (2022)
https://doi.org/10.1116/6.0001988
Published: September 2022
View article titled, Application of deep-learning based techniques for automatic metrology on scanning and transmission electron microscopy images
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Journal Articles

AlGaN nanowire deep ultraviolet LEDs with polarization enhanced tunnel junction and p-AlGaN layer by molecular beam epitaxy

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Mohammad Fazel Vafadar, Songrui Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 050602 (2022)
https://doi.org/10.1116/6.0002037
Published: September 2022
View article titled, AlGaN nanowire deep ultraviolet LEDs with polarization enhanced tunnel junction and p-AlGaN layer by molecular beam epitaxy
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Journal Articles

Resistive switching of two-dimensional Ag2S nanowire networks for neuromorphic applications

Editor’s Pick
Mahshid Hosseini, Nikolay Frick, Damien Guilbaud, Ming Gao, Thomas H. LaBean
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 043201 (2022)
https://doi.org/10.1116/6.0001867
Published: June 2022
View article titled, Resistive switching of two-dimensional Ag<sub>2</sub>S nanowire networks for neuromorphic applications
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Journal Articles

Fabrication of black GaAs by maskless inductively coupled plasma etching in Cl2/BCl3/O2/Ar chemistry

Editor’s Pick
Yidi Bao, Wen Liu, Yongqiang Zhao, Lei Wei, Xiaoling Chen, Fuhua Yang, Xiaodong Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022205 (2022)
https://doi.org/10.1116/6.0001570
Published: February 2022
View article titled, Fabrication of black GaAs by maskless inductively coupled plasma etching in Cl<sub>2</sub>/BCl<sub>3</sub>/O<sub>2</sub>/Ar chemistry
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Journal Articles

Negative differential resistance in photoassisted field emission from Si nanowires

M. Choueib, A. Derouet, P. Vincent, A. Ayari, S. Perisanu, P. Poncharal, C. S. Cojocaru, R. Martel, S. T. Purcell
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022802 (2022)
https://doi.org/10.1116/6.0001650
Published: February 2022
View article titled, Negative differential resistance in photoassisted field emission from Si nanowires
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Includes: Supplementary data
Journal Articles

High current silicon nanowire field emitter arrays

Michael Bachmann, Felix Düsberg, Andreas Pahlke, Simon Edler, Andreas Schels, Florian Herdl, Robert Ławrowski, Rupert Schreiner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 010605 (2022)
https://doi.org/10.1116/6.0001639
Published: January 2022
View article titled, High current silicon nanowire field emitter arrays
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Journal Articles

Ni3Si2 nanowires for efficient electron field emission and limitations of the Fowler–Nordheim model

Amina Belkadi, Emma Zeng, A. F. Isakovic
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 013202 (2022)
https://doi.org/10.1116/6.0001248
Published: December 2021
View article titled, Ni<sub>3</sub>Si<sub>2</sub> nanowires for efficient electron field emission and limitations of the Fowler–Nordheim model
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Journal Articles

Intermetallic compound formation inhibiting electromigration-based micro/nanowire growth

Yasuhiro Kimura, Yang Ju
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062803 (2021)
https://doi.org/10.1116/6.0001271
Published: October 2021
View article titled, Intermetallic compound formation inhibiting electromigration-based micro/nanowire growth
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Journal Articles

PHIDL: Python-based layout and geometry creation for nanolithography

Adam N. McCaughan, Alexander N. Tait, Sonia M. Buckley, Dylan M. Oh, Jeffrey T. Chiles, Jeffrey M. Shainline, Sae Woo Nam
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062601 (2021)
https://doi.org/10.1116/6.0001203
Published: September 2021
View article titled, PHIDL: <sc>Python</sc>-based layout and geometry creation for nanolithography
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Journal Articles

Electrical characterization of gate stack charge traps in floating body gate-all-around field-effect-transistors

Manh-Cuong Nguyen, An Hoang-Thuy Nguyen, Jiyong Yim, Anh-Duy Nguyen, Mingyu Kim, Jeonghan Kim, Jongyeon Beak, Rino Choi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 032203 (2021)
https://doi.org/10.1116/6.0000906
Published: April 2021
View article titled, Electrical characterization of gate stack charge traps in floating body gate-all-around field-effect-transistors
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