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Journal Articles

Constant period line gratings as a metric for patterning fidelity in electron beam lithography

Editor’s Pick
C. R. Fasano, F. Cruz Aguirre, C. T. DeRoo, K. Hoadley, J. A. B. Termini
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 064001 (2024)
https://doi.org/10.1116/6.0003958
Published: October 2024
View article titled, Constant period line gratings as a metric for patterning fidelity in electron beam lithography
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Journal Articles

Fabrication of hollow silicon microneedles using grayscale lithography and deep reactive ion etching

Dong Zhang, Wenhan Hu, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 053001 (2024)
https://doi.org/10.1116/6.0003711
Published: August 2024
View article titled, Fabrication of hollow silicon microneedles using grayscale lithography and deep reactive ion etching
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Journal Articles

Lithography mask thermal and stress effect for the machine overlay compensation

Dinghai Rui, Libin Zhang, Hao Shen, Huwen Ding, Shuang Liu, Yayi Wei, Yajuan Su
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042601 (2024)
https://doi.org/10.1116/6.0003693
Published: July 2024
View article titled, Lithography mask thermal and stress effect for the machine overlay compensation
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Journal Articles

Science challenges and research opportunities for plasma applications in microelectronics

FeaturedScilight
David B. Graves, Catherine B. Labelle, Mark J. Kushner, Eray S. Aydil, Vincent M. Donnelly, Jane P. Chang, Peter Mayer, Lawrence Overzet, Steven Shannon, Shahid Rauf, David N. Ruzic
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042202 (2024)
https://doi.org/10.1116/6.0003531
Published: June 2024
View article titled, Science challenges and research opportunities for plasma applications in microelectronics
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Journal Articles

Fabrication of silicon sharp nanocones using dry etch with periodic oxygen plasma shrinking and wet etch

Renqiang Kang, Aixi Pan, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 033002 (2024)
https://doi.org/10.1116/6.0003516
Published: April 2024
View article titled, Fabrication of silicon sharp nanocones using dry etch with periodic oxygen plasma shrinking and wet etch
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Journal Articles

Cryogenic etching of positively tapered silicon pillars with controllable profiles

Xiaoli Zhu, Aixi Pan, Babak Shokouhi, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032206 (2024)
https://doi.org/10.1116/6.0003372
Published: April 2024
View article titled, Cryogenic etching of positively tapered silicon pillars with controllable profiles
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Journal Articles

Multi-step plasma etching of high aspect ratio silicon nanostructures for metalens fabrication

Xiaoli Zhu, Zihao Wang, Chenxu Zhu, Jiashi Shen, Babak Shokouhi, Huseyin Ekinci, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032203 (2024)
https://doi.org/10.1116/6.0003429
Published: April 2024
View article titled, Multi-step plasma etching of high aspect ratio silicon nanostructures for metalens fabrication
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Journal Articles

Investigation of silicon-on-insulator back-gate nano vacuum channel transistor array

Kaifang Weng, Changsheng Shen, Zhaofu Chen, Ningfeng Bai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 023201 (2024)
https://doi.org/10.1116/6.0003346
Published: February 2024
View article titled, Investigation of silicon-on-insulator back-gate nano vacuum channel transistor array
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Journal Articles

Novel wet transfer technology of manufacturing flexible suspended two-dimensional material devices

Editor’s Pick
Yingtao Wang, Mona Savalia, Xian Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062810 (2023)
https://doi.org/10.1116/6.0003087
Published: December 2023
View article titled, Novel wet transfer technology of manufacturing flexible suspended two-dimensional material devices
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Journal Articles

In situ monitoring of sapphire nanostructure etching using optical emission spectroscopy

Kun-Chieh Chien, Noah Graff, Dragan Djurdjanovic, Chih-Hao Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062807 (2023)
https://doi.org/10.1116/6.0003023
Published: November 2023
View article titled, <em>In situ</em> monitoring of sapphire nanostructure etching using optical emission spectroscopy
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Journal Articles

Nanoscale strain gauges on flexible polymer substrates

Editor’s Pick
Devin K. Brown, Isha Lodhi, Biya Haile, David R. Myers, Wilbur A. Lam, Oliver Brand
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 063001 (2023)
https://doi.org/10.1116/6.0003030
Published: October 2023
View article titled, Nanoscale strain gauges on flexible polymer substrates
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Includes: Supplementary data
Journal Articles

Investigation of polymer template removal techniques in three-dimensional thin-shell nanolattices

Vijay Anirudh Premnath, Chih-Hao Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062805 (2023)
https://doi.org/10.1116/6.0003036
Published: October 2023
View article titled, Investigation of polymer template removal techniques in three-dimensional thin-shell nanolattices
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Journal Articles

Fabrication of hierarchical nanostructures using binary colloidal nanosphere assembly

Ethan Flores, Saurav Mohanty, Andrew Tunell, Chih-Hao Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062803 (2023)
https://doi.org/10.1116/6.0003027
Published: October 2023
View article titled, Fabrication of hierarchical nanostructures using binary colloidal nanosphere assembly
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Journal Articles

Focused ion beams from GaBiLi liquid metal alloy ion sources for nanofabrication and ion imaging

Achim Nadzeyka, Torsten Richter, Paul Mazarov, Fabian Meyer, Alexander Ost, Lars Bruchhaus
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062802 (2023)
https://doi.org/10.1116/6.0002918
Published: October 2023
View article titled, Focused ion beams from GaBiLi liquid metal alloy ion sources for nanofabrication and ion imaging
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Journal Articles

Characterization of porosity in periodic 3D nanostructures using spectroscopic scatterometry

Kwon Sang Lee, Kun-Chieh Chien, Barbara Groh, I-Te Chen, Michael Cullinan, Chih-Hao Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 064001 (2023)
https://doi.org/10.1116/6.0003035
Published: October 2023
View article titled, Characterization of porosity in periodic 3D nanostructures using spectroscopic scatterometry
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Journal Articles

High-efficiency metalenses for zone-plate-array lithography

Henry I. Smith, Mark Mondol, Feng Zhang, Timothy Savas, Michael Walsh
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062601 (2023)
https://doi.org/10.1116/6.0003024
Published: September 2023
View article titled, High-efficiency metalenses for zone-plate-array lithography
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Journal Articles

Generalized performance optimization for massively-parallel electron-beam systems

Soo-Young Lee, Md Nabid Hasan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042603 (2023)
https://doi.org/10.1116/6.0002653
Published: June 2023
View article titled, Generalized performance optimization for massively-parallel electron-beam systems
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Journal Articles

Hardmask engineering by mask encapsulation for enabling next generation reactive ion etch scaling

Roshan J. Tirukkonda, Mark D. Kraman, Rahul Sharangpani, Kartik Sondhi, Aaron N. Fancher, Stephen R. Ross, Joyeeta Nag, Alexei L. Bogdanov, Raghuveer S. Makala, Senaka K. Kanakamedala
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 043202 (2023)
https://doi.org/10.1116/6.0002709
Published: June 2023
View article titled, Hardmask engineering by mask encapsulation for enabling next generation reactive ion etch scaling
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Includes: Supplementary data
Journal Articles

Effect of praseodymium coating on electron emission from a nanoscale gold field emitter array

L. B. De Rose, D. H. Catanzaro, C. Choi, A. Scherer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042801 (2023)
https://doi.org/10.1116/6.0002700
Published: May 2023
View article titled, Effect of praseodymium coating on electron emission from a nanoscale gold field emitter array
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Journal Articles

Effect of substrate rotation speed on AlGaN nanowire deep ultraviolet light-emitting diodes by molecular beam epitaxy

Mohammad Fazel Vafadar, Rezoana Bente Arif, Qihua Zhang, Songrui Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 030601 (2023)
https://doi.org/10.1116/6.0002494
Published: April 2023
View article titled, Effect of substrate rotation speed on AlGaN nanowire deep ultraviolet light-emitting diodes by molecular beam epitaxy
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