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Journal Articles

Plasma atomic layer etching for titanium nitride at low temperatures

Dahee Shim, Jihyun Kim, Yongjae Kim, Heeyeop Chae
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022208 (2022)
https://doi.org/10.1116/6.0001602
Published: February 2022
View article titled, Plasma atomic layer etching for titanium nitride at low temperatures
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Journal Articles

Development of two-color resonant ionization sputtered neutral mass spectrometry and microarea imaging for Sr

Yue Zhao, Takeru Yoshida, Yuzuka Ohmori, Yuta Miyashita, Masato Morita, Tetsuo Sakamoto, Kotaro Kato, Ryohei Terabayashi, Volker Sonnenschein, Hideki Tomita, Toshihide Kawai, Takeo Okumura, Yukihiko Satou, Masabumi Miyabe, Ikuo Wakaida
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 044001 (2020)
https://doi.org/10.1116/6.0000006
Published: May 2020
View article titled, Development of two-color resonant ionization sputtered neutral mass spectrometry and microarea imaging for Sr
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Journal Articles

Bismuth vanadate photoanodes for water splitting deposited by radio frequency plasma reactive co-sputtering

Editor’s Pick
Matteo Pedroni, Gian Luca Chiarello, Niloofar Haghshenas, Maurizio Canetti, Dario Ripamonti, Elena Selli, Espedito Vassallo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 012203 (2020)
https://doi.org/10.1116/1.5129612
Published: December 2019
View article titled, Bismuth vanadate photoanodes for water splitting deposited by radio frequency plasma reactive co-sputtering
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Journal Articles

Effect of sputtering yield changes on the depth resolution in cluster beam depth-profiling of polymers

Nunzio Tuccitto, Alessandra Bombace, Alberto Torrisi, Antonino Licciardello
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 03F124 (2018)
https://doi.org/10.1116/1.5019698
Published: March 2018
View article titled, Effect of sputtering yield changes on the depth resolution in cluster beam depth-profiling of polymers
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Includes: Supplementary data
Journal Articles

Nanopore formation in TiN membranes by the focused electron beam of a transmission electron microscope

Hyun-Mi Kim, Seong-Yong Cho, Ki-Bum Kim
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06F502 (2015)
https://doi.org/10.1116/1.4935504
Published: November 2015
View article titled, Nanopore formation in TiN membranes by the focused electron beam of a transmission electron microscope
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Journal Articles

Co-implantation of Al+, P+, and S+ with Si+ implants into In0.53Ga0.47As

Aaron G. Lind, Henry L. Aldridge, Jr., Kevin S. Jones, Christopher Hatem
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 051217 (2015)
https://doi.org/10.1116/1.4931030
Published: September 2015
View article titled, Co-implantation of Al<sup>+</sup>, P<sup>+</sup>, and S<sup>+</sup> with Si<sup>+</sup> implants into In<sub>0.53</sub>Ga<sub>0.47</sub>As
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Journal Articles

In-situ optical microscopy observations of the growth of individual carbon nanocoils

Takehiro Gohara, Kuniharu Takei, Takayuki Arie, Seiji Akita
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 031807 (2014)
https://doi.org/10.1116/1.4874004
Published: April 2014
View article titled, <em>In-situ</em> optical microscopy observations of the growth of individual carbon nanocoils
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Journal Articles

X-ray photoelectron spectroscopy analysis of the effect of temperature upon surface composition of InP etched in Cl2-based inductively coupled plasma

Romain Chanson, Sophie Bouchoule, Christophe Cardinaud, Camille Petit-Etienne, Edmond Cambril, Ahmed Rhallabi, Stephane Guilet, Elisabeth Blanquet
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 011219 (2014)
https://doi.org/10.1116/1.4862256
Published: January 2014
View article titled, X-ray photoelectron spectroscopy analysis of the effect of temperature upon surface composition of InP etched in Cl<sub>2</sub>-based inductively coupled plasma
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Journal Articles

Residue-free plasma etching of polyimide coatings for small pitch vias with improved step coverage

Benjamin Mimoun, Hoa T. M. Pham, Vincent Henneken, Ronald Dekker
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 021201 (2013)
https://doi.org/10.1116/1.4788795
Published: January 2013
View article titled, Residue-free plasma etching of polyimide coatings for small pitch vias with improved step coverage
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Journal Articles

Release layer-free acrylate resins with segregation auxiliary agents for ultraviolet nanoimprinting

Shunya Ito, Cheol Min Yun, Kei Kobayashi, Masaru Nakagawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06FB05 (2012)
https://doi.org/10.1116/1.4758769
Published: October 2012
View article titled, Release layer-free acrylate resins with segregation auxiliary agents for ultraviolet nanoimprinting
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Journal Articles

Low resistance and thermally stable Ti/Al-based Ohmic contacts to N-face n-GaN for vertical light-emitting diodes by using Ti(Ga) solid solution and TiN layers

Joon-Woo Jeon, Woong-Sun Yum, Tae-Yeon Seong, Sang Youl Lee, June-O Song
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 020601 (2012)
https://doi.org/10.1116/1.3678490
Published: January 2012
View article titled, Low resistance and thermally stable Ti/Al-based Ohmic contacts to N-face n-GaN for vertical light-emitting diodes by using Ti(Ga) solid solution and TiN layers
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Journal Articles

Influence of sputtering pressure on band gap of Zn1−xMgxO thin films prepared by radio frequency magnetron sputtering

Dapeng Wang, Tadashi Narusawa, Toshiyuki Kawaharamura, Mamoru Furuta, Chaoyang Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 051205 (2011)
https://doi.org/10.1116/1.3622316
Published: August 2011
View article titled, Influence of sputtering pressure on band gap of Zn<sub>1−<em>x</em></sub>Mg<sub><em>x</em></sub>O thin films prepared by radio frequency magnetron sputtering
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Journal Articles

Synthesis and characterization of DyScO films deposited on Si and Si-rich SiN by atomic layer deposition for blocking layer replacement in TANOS stack

A. Lamperti, E. Cianci, U. Russo, S. Spiga, O. Salicio, G. Congedo, M. Fanciulli
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 01AE03 (2011)
https://doi.org/10.1116/1.3534024
Published: January 2011
View article titled, Synthesis and characterization of DyScO films deposited on Si and Si-rich SiN by atomic layer deposition for blocking layer replacement in TANOS stack
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Journal Articles

Piezoresistive effect in the three-dimensional diamondlike carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition

Reo Kometani, Kouki Yusa, Shin’ichi Warisawa, Sunao Ishihara
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C6F38–C6F41 (2010)
https://doi.org/10.1116/1.3504584
Published: December 2010
View article titled, Piezoresistive effect in the three-dimensional diamondlike carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition
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Journal Articles

X-ray photoelectron spectroscopy investigation of oxidation states in molybdenum thin films for Cu ( InGa ) Se 2 applications

Y. C. Kang, R. Khanal, J. Y. Park, R. D. Ramsier, H. Khatri, S. Marsillac
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, 545–548 (2010)
https://doi.org/10.1116/1.3425634
Published: May 2010
View article titled, X-ray photoelectron spectroscopy investigation of oxidation states in molybdenum thin films for Cu ( InGa ) Se 2 applications
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Journal Articles

Ultrahigh selective etching of Si 3 N 4 films over Si O 2 films for silicon nitride gate spacer etching

Sunghoon Lee, Jinho Oh, Kyumin Lee, Hyunchul Sohn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, 131–137 (2010)
https://doi.org/10.1116/1.3290752
Published: January 2010
View article titled, Ultrahigh selective etching of Si 3 N 4 films over Si O 2 films for silicon nitride gate spacer etching
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Journal Articles

Process and properties of the carbon nanotube assisted LiCoO 2 thin-film battery electrode by pulsed laser deposition

An-Ya Lo, Chuan-Shu Sun, Wen-Shou Tseng, Cheng-Tzu Kuo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 3067–3072 (2009)
https://doi.org/10.1116/1.3264678
Published: December 2009
View article titled, Process and properties of the carbon nanotube assisted LiCoO 2 thin-film battery electrode by pulsed laser deposition
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Journal Articles

Molecular beam epitaxy of high mobility In 0.75 Ga 0.25 As for electron spin transport applications

P. J. Simmonds, S. N. Holmes, H. E. Beere, I. Farrer, F. Sfigakis, D. A. Ritchie, M. Pepper
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 2066–2070 (2009)
https://doi.org/10.1116/1.3156736
Published: July 2009
View article titled, Molecular beam epitaxy of high mobility In 0.75 Ga 0.25 As for electron spin transport applications
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Journal Articles

Tool wear study in diamond turning of steels

T. F. Dai, F. Z. Fang, X. T. Hu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 1335–1339 (2009)
https://doi.org/10.1116/1.3049516
Published: May 2009
View article titled, Tool wear study in diamond turning of steels
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Journal Articles

Design of a magnetic-assistance superfinish module for freeform machining

P. S. Pa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 1221–1225 (2009)
https://doi.org/10.1116/1.3072887
Published: May 2009
View article titled, Design of a magnetic-assistance superfinish module for freeform machining
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