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Journal Articles

Noise reduction and peak detection in x-ray diffraction data by linear and nonlinear methods

Editor’s Pick
Long V. Le, Jeroen A. Deijkers, Young D. Kim, Haydn N. G. Wadley, David E. Aspnes
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044004 (2023)
https://doi.org/10.1116/6.0002526
Published: June 2023
View article titled, Noise reduction and peak detection in x-ray diffraction data by linear and nonlinear methods
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Includes: Supplementary data
Journal Articles

Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines

Shirly Espinoza, Fabio Samparisi, Fabio Frassetto, Steffen Richter, Mateusz Rebarz, Ondrej Finke, Martin Albrecht, Matej Jurkovic, Ondrej Hort, Nicola Fabris, Anna Zymaková, Dong Du Mai, Roman Antipenkov, Jaroslav Nejdl, Luca Poletto, Jakob Andreasson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 024005 (2020)
https://doi.org/10.1116/1.5129674
Published: February 2020
View article titled, Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines
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Journal Articles

Temperature dependent dielectric function and direct bandgap of Ge

Carola Emminger, Farzin Abadizaman, Nuwanjula S. Samarasingha, Thomas E. Tiwald, Stefan Zollner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 012202 (2020)
https://doi.org/10.1116/1.5129685
Published: December 2019
View article titled, Temperature dependent dielectric function and direct bandgap of Ge
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Includes: Supplementary data
Journal Articles

Sub-rf period electrical characterization of a pulsed capacitively coupled argon plasma

Alex F. Press, Matthew J. Goeckner, Lawrence J. Overzet
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062926 (2019)
https://doi.org/10.1116/1.5132753
Published: November 2019
View article titled, Sub-rf period electrical characterization of a pulsed capacitively coupled argon plasma
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Journal Articles

Combined interpolation, scale change, and noise reduction in spectral analysis

Van L. Le, Tae J. Kim, Young D. Kim, David E. Aspnes
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 052903 (2019)
https://doi.org/10.1116/1.5120358
Published: September 2019
View article titled, Combined interpolation, scale change, and noise reduction in spectral analysis
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Journal Articles

Linear and nonlinear filtering of spectra

David E. Aspnes, Van L. Le, Young D. Kim
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 051205 (2019)
https://doi.org/10.1116/1.5118230
Published: September 2019
View article titled, Linear and nonlinear filtering of spectra
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Journal Articles

Periodically pulsed laser-assisted tunneling may generate terahertz radiation

Mark J. Hagmann, Dmtrij G. Coombs, Dmitry A. Yarotski
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 03D109 (2017)
https://doi.org/10.1116/1.4979549
Published: April 2017
View article titled, Periodically pulsed laser-assisted tunneling may generate terahertz radiation
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Journal Articles

High-resolution x-ray reflection Fourier analysis of metamorphic Si/SiGe quantum wells

Christopher J. K. Richardson, Clayton A. Jackson, Lisa F. Edge, Peter W. Deelman
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 02B113 (2017)
https://doi.org/10.1116/1.4978595
Published: March 2017
View article titled, High-resolution x-ray reflection Fourier analysis of metamorphic Si/SiGe quantum wells
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Journal Articles

Transmission microwave spectroscopy for local characterization of dielectric materials

Andrea Lucibello, Christopher Hardly Joseph, Emanuela Proietti, Giovanni Maria Sardi, Giovanni Capoccia, Romolo Marcelli
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 01A113 (2017)
https://doi.org/10.1116/1.4973635
Published: January 2017
View article titled, Transmission microwave spectroscopy for local characterization of dielectric materials
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Journal Articles

Noise filtering for accurate measurement of line edge roughness and critical dimension from SEM images

Dehua Li, Rui Guo, Soo-Young Lee, Jin Choi, Seom-Beom Kim, Sung-Hoon Park, In-Kyun Shin, Chan-Uk Jeon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06K604 (2016)
https://doi.org/10.1116/1.4968184
Published: November 2016
View article titled, Noise filtering for accurate measurement of line edge roughness and critical dimension from SEM images
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Journal Articles

Experimental constructions of binary matrices with good peak-sidelobe distances

Jerod Michel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 061604 (2016)
https://doi.org/10.1116/1.4967995
Published: November 2016
View article titled, Experimental constructions of binary matrices with good peak-sidelobe distances
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Journal Articles

Prediction of surface topography due to finite pixel spacing in FIB milling of rectangular boxes and trenches

Nikolay I. Borgardt, Alexander V. Rumyantsev
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 061803 (2016)
https://doi.org/10.1116/1.4967249
Published: November 2016
View article titled, Prediction of surface topography due to finite pixel spacing in FIB milling of rectangular boxes and trenches
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Journal Articles

Lithography via electrospun fibers with quantitative morphology analysis

Joshua D. Beisel, John P. Murphy, Jessica M. Andriolo, Emily A. Kooistra-Manning, Sean Nicolaysen, Orrin Boese, Jake Fleming, Wataru Nakagawa, Jack L. Skinner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06KG02 (2016)
https://doi.org/10.1116/1.4964636
Published: October 2016
View article titled, Lithography via electrospun fibers with quantitative morphology analysis
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Journal Articles

Phase-control of a rising sun magnetron using a modulated, addressable, current source

Sulmer Fernandez-Gutierrez, Jim Browning, Ming-Chieh Lin, David N. Smithe, Jack Watrous
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 031203 (2015)
https://doi.org/10.1116/1.4916631
Published: April 2015
View article titled, Phase-control of a rising sun magnetron using a modulated, addressable, current source
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Journal Articles

Binary matrices of optimal autocorrelations as alignment marks

Scott A. Skirlo, Ling Lu, Marin Soljačić
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 021601 (2015)
https://doi.org/10.1116/1.4913316
Published: February 2015
View article titled, Binary matrices of optimal autocorrelations as alignment marks
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Journal Articles

Morphological effect of light emission from gold nanoparticles on Si(111)

Seong Joon Lim, Sungwoo Jo, Minjun Lee, Seong Heon Kim, Young Kuk
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 02B103 (2015)
https://doi.org/10.1116/1.4902097
Published: November 2014
View article titled, Morphological effect of light emission from gold nanoparticles on Si(111)
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Journal Articles

Simulation of a rising sun magnetron employing a faceted cathode with a continuous current source

Sulmer Fernandez-Gutierrez, Jim Browning, Ming-Chieh Lin, David N. Smithe, Jack Watrous
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 061205 (2014)
https://doi.org/10.1116/1.4900636
Published: October 2014
View article titled, Simulation of a rising sun magnetron employing a faceted cathode with a continuous current source
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Journal Articles

Comprehensive characterization of interface and oxide states in metal/oxide/semiconductor capacitors by pulsed mode capacitance and differential isothermal capacitance spectroscopy

Pierre R. Muret
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 03D114 (2014)
https://doi.org/10.1116/1.4865912
Published: February 2014
View article titled, Comprehensive characterization of interface and oxide states in metal/oxide/semiconductor capacitors by pulsed mode capacitance and differential isothermal capacitance spectroscopy
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Journal Articles

Study of thermal stability of distributed Bragg reflectors based on epitaxial rare-earth oxide and silicon heterostructures

Rytis Dargis, Jeffrey Leathersich, Andrew Clark, Erdem Arkun
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 02C103 (2014)
https://doi.org/10.1116/1.4862951
Published: January 2014
View article titled, Study of thermal stability of distributed Bragg reflectors based on epitaxial rare-earth oxide and silicon heterostructures
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Journal Articles

Directed self-assembly of ternary blends of block copolymer and homopolymers on chemical patterns

Ling-Shu Wan, Paulina A. Rincon Delgadillo, Roel Gronheid, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06F301 (2013)
https://doi.org/10.1116/1.4818882
Published: September 2013
View article titled, Directed self-assembly of ternary blends of block copolymer and homopolymers on chemical patterns
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