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Journal Articles

Efficient mask optimization for enhanced digital maskless lithography quality by improved particle swarm optimization algorithm

Shengzhou Huang, Dongjie Wu, Yuanzhuo Tang, Bowen Ren, Jiani Pan, Zhaowei Tian, Zhi Li, Jinjin Huang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052603 (2024)
https://doi.org/10.1116/6.0003919
Published: September 2024
View article titled, Efficient mask optimization for enhanced digital maskless lithography quality by improved particle swarm optimization algorithm
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Journal Articles

Numerical investigation of flow and particles contamination in reticle mini environment for extreme ultraviolet lithography

Qi Wang, Kuibo Wang, Xiaobin Wu, Zixiang Gao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052602 (2024)
https://doi.org/10.1116/6.0003791
Published: August 2024
View article titled, Numerical investigation of flow and particles contamination in reticle mini environment for extreme ultraviolet lithography
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Journal Articles

Analysis of temperature-dependent current–voltage characteristics of Schottky diodes by the modified thermionic emission current model

Abdulmecit Turut
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032201 (2024)
https://doi.org/10.1116/6.0003463
Published: March 2024
View article titled, Analysis of temperature-dependent current–voltage characteristics of Schottky diodes by the modified thermionic emission current model
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Journal Articles

Thermal analysis of implanter source head in radio-frequency inductively coupled plasma

Chang-Won Jeong, Choong-Mo Ryu, Hee-Lak Lee, Jong Jin Hwang, Seung Jae Moon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 024001 (2024)
https://doi.org/10.1116/6.0003060
Published: January 2024
View article titled, Thermal analysis of implanter source head in radio-frequency inductively coupled plasma
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Includes: Supplementary data
Journal Articles

Investigation on the heat transfer characteristics of flexible vacuum glass based on cross-laminated microcavities

Jun Zhang, Chenhui Liu, Chenchen Song, Xudi Wang, Rui Huang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 063403 (2023)
https://doi.org/10.1116/6.0002937
Published: December 2023
View article titled, Investigation on the heat transfer characteristics of flexible vacuum glass based on cross-laminated microcavities
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Includes: Supplementary data
Journal Articles

Theoretical approach to thermal sensitivity capability of metal-semiconductor diodes with different Schottky contact area

Abdulmecit Turut
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062202 (2023)
https://doi.org/10.1116/6.0002976
Published: September 2023
View article titled, Theoretical approach to thermal sensitivity capability of metal-semiconductor diodes with different Schottky contact area
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Journal Articles

Simulation analyses of carrier dynamics in npn-type GaN-heterojunction bipolar transistors with different hole-concentration p-base layers

Akira Mase, Yusuke Iida, Masaya Takimoto, Yutaka Nikai, Takashi Egawa, Makoto Miyoshi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052206 (2023)
https://doi.org/10.1116/6.0002577
Published: September 2023
View article titled, Simulation analyses of carrier dynamics in <em>npn</em>-type GaN-heterojunction bipolar transistors with different hole-concentration <em>p</em>-base layers
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Journal Articles

Heat-transfer modeling of the gas gap under a wafer

E. Gonzalez-Juez
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044206 (2023)
https://doi.org/10.1116/6.0002851
Published: July 2023
View article titled, Heat-transfer modeling of the gas gap under a wafer
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Journal Articles

Deviation of photoelectron intensity from Beer-Lambert law in near-ambient pressure hard x-ray photoelectron spectroscopy

Kento Takenaka, Koji Takahara, Tomoki Eguchi, Hirosuke Sumida, Satoru Suzuki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044204 (2023)
https://doi.org/10.1116/6.0002662
Published: June 2023
View article titled, Deviation of photoelectron intensity from Beer-Lambert law in near-ambient pressure hard x-ray photoelectron spectroscopy
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Journal Articles

On the origin and evolution of hotspots in multipatterning processes

Prem Panneerchelvam, Chad M. Huard, Trey Graves, Alessandro Vaglio Pret, Roel Gronheid, Ankur Agarwal, Mark D. Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 043201 (2023)
https://doi.org/10.1116/6.0002601
Published: June 2023
View article titled, On the origin and evolution of hotspots in multipatterning processes
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Journal Articles

Effect of the kinetic energy on particle ejection process from carbon nanotubes bombarded by kilo-electron-volt C60

Sviatoslav Hrabar, Michał Kański, Soukaina Louerdi, Zbigniew Postawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032803 (2023)
https://doi.org/10.1116/6.0002575
Published: April 2023
View article titled, Effect of the kinetic energy on particle ejection process from carbon nanotubes bombarded by kilo-electron-volt C<sub>60</sub>
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Includes: Supplementary data
Journal Articles

Field emitter electrostatics: Efficient improved simulation technique for highly precise calculation of field enhancement factors

Fernando F. Dall’Agnol, Thiago A. de Assis, Richard G. Forbes
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022803 (2023)
https://doi.org/10.1116/6.0002317
Published: March 2023
View article titled, Field emitter electrostatics: Efficient improved simulation technique for highly precise calculation of field enhancement factors
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Journal Articles

Processing of experimental current-voltage characteristics of single tip emitters taking into account the functional dependence of the emission area on the applied voltage

Eugeni O. Popov, Sergey V. Filippov, Anatoly G. Kolosko
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012801 (2023)
https://doi.org/10.1116/6.0002305
Published: December 2022
View article titled, Processing of experimental current-voltage characteristics of single tip emitters taking into account the functional dependence of the emission area on the applied voltage
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Journal Articles

System for interpolating work function for a cold-field emitter

A. Bahm
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 014201 (2023)
https://doi.org/10.1116/6.0002283
Published: December 2022
View article titled, System for interpolating work function for a cold-field emitter
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Journal Articles

Pneumatic controlled nanosieve for efficient capture and release of nanoparticles

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Animesh Nanaware, Taylor Kranbuhl, Jesus Ching, Janice S. Chen, Xinye Chen, Qingsong Tu, Ke Du
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 063002 (2022)
https://doi.org/10.1116/6.0002107
Published: December 2022
View article titled, Pneumatic controlled nanosieve for efficient capture and release of nanoparticles
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Includes: Supplementary data
Journal Articles

Fluorescence alignment simulation for atomic-scale position adjustment in ultraviolet nanoimprint lithography

Hiromasa Niinomi, Subaru Harada, Toshiaki Hayakawa, Masaru Nakagawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 062602 (2022)
https://doi.org/10.1116/6.0002099
Published: November 2022
View article titled, Fluorescence alignment simulation for atomic-scale position adjustment in ultraviolet nanoimprint lithography
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Includes: Supplementary data
Journal Articles

Optical metrology of characterizing wetting states

Deming Meng, Yifei Wang, Hao Yang, Buyun Chen, Pan Hu, Boxiang Song, Yunxiang Wang, Zerui Liu, Tse-Hsien Ou, Ximing Zheng, Yichen Gong, Wei Wu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 064001 (2021)
https://doi.org/10.1116/6.0001187
Published: October 2021
View article titled, Optical metrology of characterizing wetting states
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Journal Articles

Determining the field enhancement factors of various field electron emitters with high numerical accuracy

Fernando F. Dall’Agnol, Sergey V. Filippov, Eugeni O. Popov, Anatoly G. Kolosko, Thiago A. de Assis
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 032801 (2021)
https://doi.org/10.1116/6.0000949
Published: March 2021
View article titled, Determining the field enhancement factors of various field electron emitters with high numerical accuracy
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Includes: Supplementary data
Journal Articles

Particle-in-cell simulation of an industrial magnetron with electron population analysis

Andong Yue, Marcus Pearlman, Mike Worthington, John Cipolla, Jim Browning
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 022201 (2021)
https://doi.org/10.1116/6.0000809
Published: February 2021
View article titled, Particle-in-cell simulation of an industrial magnetron with electron population analysis
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Journal Articles

Evidence of improved power conversion efficiency in lead-free CsGeI3 based perovskite solar cell heterostructure via scaps simulation

Abhishek Raj, Manish Kumar, Hemant Bherwani, Ankit Gupta, Avneesh Anshul
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 012401 (2021)
https://doi.org/10.1116/6.0000718
Published: December 2020
View article titled, Evidence of improved power conversion efficiency in lead-free CsGeI<sub>3</sub> based perovskite solar cell heterostructure via <sc>scaps</sc> simulation
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Includes: Supplementary data