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Journal Articles

Influence of etching profile on pattern collapse in complementary metal oxide semiconductor image sensor pixel with deep trench isolation

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Clément Sart, Jérôme Dubois, Emilie Prevost, Philippe Garnier, Benjamin Vianne, Frédéric Giovannoni, Caroline Bringolf-Penner, Sébastien Gallois-Garreignot
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 033203 (2025)
https://doi.org/10.1116/6.0004309
Published: April 2025
View articletitled, Influence of etching profile on pattern collapse in complementary metal oxide semiconductor image sensor pixel with deep trench isolation
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Journal Articles

Line wiggling due to plasma-induced film stress and prevention by surface roughness modification

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Amelia Turnquist, Naoyuki Kofuji, Joseph Sebastian, Hiroshi Kou, Takahiro Arai, Hideaki Fukuda, Yoann Tomczak, Yiting Sun, Daniele Piumi, David De Roest
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 012203 (2025)
https://doi.org/10.1116/6.0004116
Published: January 2025
View articletitled, Line wiggling due to plasma-induced film stress and prevention by surface roughness modification
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Journal Articles

Modeling of water outgassing from polymers incorporating surface adsorption and desorption

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Wenbing Wang, Hailin Bi, Yuhao Cui, Junru Zhang, Xudi Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 014201 (2025)
https://doi.org/10.1116/6.0004175
Published: January 2025
View articletitled, Modeling of water outgassing from polymers incorporating surface adsorption and desorption
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Journal Articles

Filtering the beam from an ionic liquid ion source

Open Access
Alexander C. G. Storey, Aydin Sabouri, Rohit Khanna, Usama Ahmed, Carla Sofia Perez-Martinez
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 064201 (2024)
https://doi.org/10.1116/6.0004029
Published: December 2024
View articletitled, Filtering the beam from an ionic liquid ion source
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Journal Articles

Overcoming challenges in single electron charge detection of nanoscale dipoles

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Mohammad Istiaque Rahaman, R. A. McManus, D. J. Noronha, G. P. Szakmany, A. O. Orlov, G. L. Snider
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 063208 (2024)
https://doi.org/10.1116/6.0004052
Published: December 2024
View articletitled, Overcoming challenges in single electron charge detection of nanoscale dipoles
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Journal Articles

Fabrication and characteristics of double-gate zinc oxide nanowire field emitter arrays

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Zhuoran Ou, Chengyun Wang, Guofu Zhang, Xinran Li, Hai Ou, Shaozhi Deng, Ningsheng Xu, Juncong She, Jun Chen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 063206 (2024)
https://doi.org/10.1116/6.0004043
Published: November 2024
View articletitled, Fabrication and characteristics of double-gate zinc oxide nanowire field emitter arrays
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Journal Articles

Thermal analysis with high accuracy of multi-beam mask fabrication

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Yanjun Zhang, Kaijun Dong, Zhuming Liu, Delong Chen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032602 (2024)
https://doi.org/10.1116/6.0003477
Published: April 2024
View articletitled, Thermal analysis with high accuracy of multi-beam mask fabrication
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Journal Articles

Investigation on the heat transfer characteristics of flexible vacuum glass based on cross-laminated microcavities

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Jun Zhang, Chenhui Liu, Chenchen Song, Xudi Wang, Rui Huang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 063403 (2023)
https://doi.org/10.1116/6.0002937
Published: December 2023
View articletitled, Investigation on the heat transfer characteristics of flexible vacuum glass based on cross-laminated microcavities
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Includes: Supplementary data
Journal Articles

3D structure of box-and-grid electron multiplier with higher electron collection efficiency

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Zhangcong Xia, Yunrong Wang, Youwei Peng, Jie Li, Wenbo Hu, Xin Zhong, Shengli Wu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 064205 (2023)
https://doi.org/10.1116/6.0003162
Published: December 2023
View articletitled, 3D structure of box-and-grid electron multiplier with higher electron collection efficiency
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Journal Articles

Maximizing the performance of a field emission device by profiling the emitter’s height distribution

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Sergey V. Filippov, Fernando F. Dall’Agnol, Eugeni O. Popov, Anatoly G. Kolosko, Thiago A. de Assis
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 050601 (2023)
https://doi.org/10.1116/6.0003016
Published: September 2023
View articletitled, Maximizing the performance of a field emission device by profiling the emitter’s height distribution
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Journal Articles

Deviation of photoelectron intensity from Beer-Lambert law in near-ambient pressure hard x-ray photoelectron spectroscopy

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Kento Takenaka, Koji Takahara, Tomoki Eguchi, Hirosuke Sumida, Satoru Suzuki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044204 (2023)
https://doi.org/10.1116/6.0002662
Published: June 2023
View articletitled, Deviation of photoelectron intensity from Beer-Lambert law in near-ambient pressure hard x-ray photoelectron spectroscopy
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Journal Articles

Numerical simulations of heterojunction GaN nanopillar light emitting diodes

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Zbigniew Lisik, Janusz Wozny, Ewa Raj, Jacek Podgorski
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 023204 (2023)
https://doi.org/10.1116/5.0121997
Published: March 2023
View articletitled, Numerical simulations of heterojunction GaN nanopillar light emitting diodes
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Journal Articles

In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires

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Lucas B. Spejo, José L. Arrieta-Concha, Marcos V. Puydinger dos Santos, Angélica D. Barros, José A. Diniz, Renato A. Minamisawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 024002 (2023)
https://doi.org/10.1116/6.0002246
Published: March 2023
View articletitled, In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires
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Includes: Supplementary data
Journal Articles

Computational study of mechanical stresses in a cell interacting with micromechanical cues and microfabrication of such cues in Nervous system-on-Chips

Open Access
Rahman Sabahi-Kaviani, Daan van Boekel, Regina Luttge
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022801 (2023)
https://doi.org/10.1116/6.0002291
Published: February 2023
View articletitled, Computational study of mechanical stresses in a cell interacting with micromechanical cues and microfabrication of such cues in Nervous system-on-Chips
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Includes: Supplementary data
Journal Articles

Processing of experimental current-voltage characteristics of single tip emitters taking into account the functional dependence of the emission area on the applied voltage

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Eugeni O. Popov, Sergey V. Filippov, Anatoly G. Kolosko
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012801 (2023)
https://doi.org/10.1116/6.0002305
Published: December 2022
View articletitled, Processing of experimental current-voltage characteristics of single tip emitters taking into account the functional dependence of the emission area on the applied voltage
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Journal Articles

Exploring electromechanical utility of GaAs interdigitated transducers; using finite-element-method-based parametric analysis and experimental comparison

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Brian D. Rummel, Leonid Miroshnik, Andrew B. Li, Grant D. Heilman, Ganesh Balakrishnan, Talid Sinno, Sang M. Han
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 013203 (2023)
https://doi.org/10.1116/6.0002169
Published: December 2022
View articletitled, Exploring electromechanical utility of GaAs interdigitated transducers; using finite-element-method-based parametric analysis and experimental comparison
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Includes: Supplementary data
Journal Articles

Transmission conductance of a cylindrical tube with wall pumping

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Hyeongrae Noh, Jeehoon Kim, Chongdo Park, Taekyun Ha
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 014202 (2023)
https://doi.org/10.1116/6.0002177
Published: December 2022
View articletitled, Transmission conductance of a cylindrical tube with wall pumping
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Journal Articles

Computational analysis of vertical comb-drive microactuator with extended mirror for manipulation of light

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Varun P. Sharma, Tapas Ganguli, Rahul Shukla
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 063001 (2022)
https://doi.org/10.1116/6.0002190
Published: November 2022
View articletitled, Computational analysis of vertical comb-drive microactuator with extended mirror for manipulation of light
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Journal Articles

Micromirror fabrication for co-packaged optics using 3D nanoimprint technology

Editor’s PickOpen Access
Fumi Nakamura, Kenta Suzuki, Akihiro Noriki, Takeru Amano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 063203 (2022)
https://doi.org/10.1116/6.0002119
Published: November 2022
View articletitled, Micromirror fabrication for co-packaged optics using 3D nanoimprint technology
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Journal Articles

Comparison of temperature, current density, and light intensity distributions of nano-resistor patterns for an improved solid state incandescent light emitting device simulation model

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Adam Samuel, Yue Kuo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052209 (2022)
https://doi.org/10.1116/6.0002074
Published: September 2022
View articletitled, Comparison of temperature, current density, and light intensity distributions of nano-resistor patterns for an improved solid state incandescent light emitting device simulation model
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