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Journal Articles

Atomic layer deposition of YSZ electrolytes for solid-state battery development: Beyond lithium

Joel Molina-Reyes, Adriana M. Cuellar-Juarez, Jorge L. Vazquez-Arce, Hugo Tiznado-Vazquez
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 030801 (2025)
https://doi.org/10.1116/6.0004291
Published: March 2025
View articletitled, Atomic layer deposition of YSZ electrolytes for solid-state battery development: Beyond lithium
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Journal Articles

Thermal evaporation of thin Li films

Andrew S. Westover, Ritu Sahore, Katie L. Browning, Sergiy Kalnaus
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022401 (2025)
https://doi.org/10.1116/6.0004174
Published: March 2025
View articletitled, Thermal evaporation of thin Li films
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Journal Articles

Interfacial reaction between the nickel-based superalloy and the Al2O3 crucible during vacuum induction melting

Guodong Zhang, Jinhong Zhang, Haoxue Yang, Jun Wang, Xianghong Liu, Jinshan Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 054203 (2024)
https://doi.org/10.1116/6.0003860
Published: August 2024
View articletitled, Interfacial reaction between the nickel-based superalloy and the Al2O3 crucible during vacuum induction melting
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Journal Articles

Thermal analysis of implanter source head in radio-frequency inductively coupled plasma

Chang-Won Jeong, Choong-Mo Ryu, Hee-Lak Lee, Jong Jin Hwang, Seung Jae Moon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 024001 (2024)
https://doi.org/10.1116/6.0003060
Published: January 2024
View articletitled, Thermal analysis of implanter source head in radio-frequency inductively coupled plasma
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Includes: Supplementary data
Journal Articles

Effect of sputtering-target composition on the structure, dielectric, ferroelectric, and energy storage properties of highly (00l)-oriented Ba(ZrxTi1–x)O3 films

Lei Li, Daili Gong, Fangren Hu, Hongbo Cheng, Wei Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 043801 (2023)
https://doi.org/10.1116/6.0002547
Published: June 2023
View articletitled, Effect of sputtering-target composition on the structure, dielectric, ferroelectric, and energy storage properties of highly (00l)-oriented Ba(ZrxTi1–x)O3 films
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Journal Articles

Theoretical prediction of mechanical, thermodynamic, and surface oxygen adsorption properties of anti-perovskite Ti3AC (A = Tl and Al) ceramics for thermal barrier coating materials

Diyou Jiang, Wei Hu, Haiqing Wan, Sanqiu Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042207 (2023)
https://doi.org/10.1116/6.0002623
Published: June 2023
View articletitled, Theoretical prediction of mechanical, thermodynamic, and surface oxygen adsorption properties of anti-perovskite Ti3AC (A = Tl and Al) ceramics for thermal barrier coating materials
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Journal Articles

Effect of charge-up of surfaces of sintered Y2O3 and yttrium oxyfluoride on their erosion rates due to ion bombardment

Tetsuya Goto, Yoshinobu Shiba, Akinobu Teramoto, Yukio Kishi, Shigetoshi Sugawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 062205 (2022)
https://doi.org/10.1116/6.0002162
Published: November 2022
View articletitled, Effect of charge-up of surfaces of sintered Y2O3 and yttrium oxyfluoride on their erosion rates due to ion bombardment
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Journal Articles

ZnO piezoelectric coatings used for the ultrasonic excitation of longitudinal-transverse waves and their application for smart bolts

Editor’s Pick
Yanghui Jiang, Jingyu Li, Guangming Jiao, Wensheng Li, Yan Liu, Chuan Wang, Binhong Xia, Binhua Wan, Jun Zhang, Vasiliy Pelenovich, Sheng Liu, Bing Yang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 043002 (2022)
https://doi.org/10.1116/6.0001845
Published: June 2022
View articletitled, ZnO piezoelectric coatings used for the ultrasonic excitation of longitudinal-transverse waves and their application for smart bolts
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Journal Articles

Rapid preparation of amorphous Al2O3 on graphene surface by plasma electrolysis technology

Yongfu Zhang, Yunjie Yang, Xiaolin Wei, Ben Ma, Weiwei Chen, Huanwu Cheng, Lu Wang, Tianyu Hou, Maoyuan Li, Lin Lu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 013601 (2022)
https://doi.org/10.1116/6.0001361
Published: January 2022
View articletitled, Rapid preparation of amorphous Al2O3 on graphene surface by plasma electrolysis technology
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Journal Articles

Exploration of a Ca1−x(NaCe)x/2Bi4Ti3.98(WNb)0.01O15 ceramic intermediate phase by temperature-dependent spectroscopic ellipsometry and Raman scattering

Qiong Ding (丁穷), Liping Xu (徐丽萍), Jinzhong Zhang (张金中), Kai Jiang (姜凯), Zhigao Hu (胡志高), Zhiyong Zhou (周志勇), Xianlin Dong (董显林), Junhao Chu (褚君浩)
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061211 (2019)
https://doi.org/10.1116/1.5118791
Published: November 2019
View articletitled, Exploration of a Ca1−x(NaCe)x/2Bi4Ti3.98(WNb)0.01O15 ceramic intermediate phase by temperature-dependent spectroscopic ellipsometry and Raman scattering
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Journal Articles

In situ voltage-application system for active voltage contrast imaging in helium ion microscope

Chikako Sakai, Nobuyuki Ishida, Shoko Nagano, Keiko Onishi, Daisuke Fujita
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 042903 (2018)
https://doi.org/10.1116/1.5031086
Published: July 2018
View articletitled, In situ voltage-application system for active voltage contrast imaging in helium ion microscope
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Journal Articles

Minimizing open-loop piezoactuator nonlinearity artifacts in atomic force microscope measurements

Chi-Fu Yen, Sanjeevi Sivasankar
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 053201 (2017)
https://doi.org/10.1116/1.4994315
Published: September 2017
View articletitled, Minimizing open-loop piezoactuator nonlinearity artifacts in atomic force microscope measurements
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Includes: Supplementary data
Journal Articles

Miniaturized magnet-less RF electron trap. II. Experimental verification

Shiyang Deng, Scott R. Green, Aram H. Markosyan, Mark J. Kushner, Yogesh B. Gianchandani
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 042002 (2017)
https://doi.org/10.1116/1.4984752
Published: June 2017
View articletitled, Miniaturized magnet-less RF electron trap. II. Experimental verification
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Journal Articles

Growth of ordered and disordered ZnSnN2

Robert Allen Makin, Nancy Senabulya, James Mathis, N. Feldberg, P. Miska, Roy Clarke, Steven M. Durbin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 02B116 (2017)
https://doi.org/10.1116/1.4978021
Published: March 2017
View articletitled, Growth of ordered and disordered ZnSnN2
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Journal Articles

Dielectric and piezoelectric properties of percolative three-phase piezoelectric polymer composites

Udhay Sundar, Kimberly Ann Cook-Chennault, Sankha Banerjee, Eric Refour
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 041232 (2016)
https://doi.org/10.1116/1.4955315
Published: July 2016
View articletitled, Dielectric and piezoelectric properties of percolative three-phase piezoelectric polymer composites
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Journal Articles

Silicon etching in a pulsed HBr/O2 plasma. I. Ion flux and energy analysis

Moritz Haass, Maxime Darnon, Gilles Cunge, Olivier Joubert, David Gahan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 032202 (2015)
https://doi.org/10.1116/1.4917230
Published: April 2015
View articletitled, Silicon etching in a pulsed HBr/O2 plasma. I. Ion flux and energy analysis
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Journal Articles

Inductively coupled reactive ion etching studies on sputtered yttria stabilized zirconia thin films in SF6, Cl2, and BCl3 chemistries

Kiruba Mangalam Subramaniam, Langoju Lakshmi Rajeswara Rao, Nagaraju Jampana
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 022003 (2015)
https://doi.org/10.1116/1.4907707
Published: February 2015
View articletitled, Inductively coupled reactive ion etching studies on sputtered yttria stabilized zirconia thin films in SF6, Cl2, and BCl3 chemistries
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Journal Articles

Inductively coupled plasma reactive ion etching of GaAs wafer pieces with enhanced device yield

Michael K. Connors, Leo J. Missaggia, William S. Spencer, George W. Turner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 021207 (2014)
https://doi.org/10.1116/1.4867356
Published: March 2014
View articletitled, Inductively coupled plasma reactive ion etching of GaAs wafer pieces with enhanced device yield
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Journal Articles

HfC(310) high brightness sources for advanced imaging applications

William A. Mackie, Josh M. Lovell, Todd W. Curtis, Gerald G. Magera
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 02B106 (2014)
https://doi.org/10.1116/1.4862444
Published: January 2014
View articletitled, HfC(310) high brightness sources for advanced imaging applications
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Journal Articles

Microwave-induced nucleation of conducting graphitic domains on silicon carbide surfaces

Thomas E. O'Loughlin, Sean W. Depner, Brian J. Schultz, Sarbajit Banerjee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 011215 (2014)
https://doi.org/10.1116/1.4861383
Published: January 2014
View articletitled, Microwave-induced nucleation of conducting graphitic domains on silicon carbide surfaces
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