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Journal Articles

Co-optimizing of H-curing, stress, and thermal annealing—A more effective way for realizing FEOL-BEOL compatible eMRAM chip

Zhimeng Yu, Xiaolei Yang, Xiaonan Zhao, Yanjie Li, Shikun He, Yewu Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062202 (2024)
https://doi.org/10.1116/6.0003934
Published: October 2024
View article titled, Co-optimizing of H-curing, stress, and thermal annealing—A more effective way for realizing FEOL-BEOL compatible eMRAM chip
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Journal Articles

Nanoscale strain gauges on flexible polymer substrates

Editor’s Pick
Devin K. Brown, Isha Lodhi, Biya Haile, David R. Myers, Wilbur A. Lam, Oliver Brand
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 063001 (2023)
https://doi.org/10.1116/6.0003030
Published: October 2023
View article titled, Nanoscale strain gauges on flexible polymer substrates
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Includes: Supplementary data
Journal Articles

High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining

Roghayeh Nikbakht, Xitong Xie, Arnaud Weck, Raphael St-Gelais
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 023002 (2023)
https://doi.org/10.1116/5.0124150
Published: March 2023
View article titled, High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining
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Journal Articles

Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies

Pavani Vamsi Krishna Nittala, Karthika Haridas, Shivam Nigam, Saba Tasneem, Prosenjit Sen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052207 (2021)
https://doi.org/10.1116/6.0001160
Published: August 2021
View article titled, Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies
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Journal Articles

Investigations of internal stresses in high-voltage devices with deep trenches

Scilight
Ellen Hieckmann, Uwe Mühle, Paul Chekhonin, Ehrenfried Zschech, Jeff Gambino
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 064004 (2020)
https://doi.org/10.1116/6.0000515
Published: November 2020
View article titled, Investigations of internal stresses in high-voltage devices with deep trenches
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Journal Articles

Fabrication of Mo microcones for volcano-structured double-gate Spindt-type emitter cathodes using triode high power pulsed magnetron sputtering

Takeo Nakano, Tomoki Narita, Kei Oya, Masayoshi Nagao, Hisashi Ohsaki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 022204 (2017)
https://doi.org/10.1116/1.4978506
Published: March 2017
View article titled, Fabrication of Mo microcones for volcano-structured double-gate Spindt-type emitter cathodes using triode high power pulsed magnetron sputtering
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Journal Articles

Volume-expansion polymerization for UV-curable nanoimprinting

Bingqing Luo, Zengju Fan, Ziping Li, Yulong Chen, Yanqing Tian, Xing Cheng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 011604 (2017)
https://doi.org/10.1116/1.4973301
Published: January 2017
View article titled, Volume-expansion polymerization for UV-curable nanoimprinting
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Journal Articles

Crystallization of nanoscale NiTi alloy thin films using rapid thermal annealing

Editor’s Pick
Huilong Hou, Reginald F. Hamilton, Mark W. Horn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06KK01 (2016)
https://doi.org/10.1116/1.4963375
Published: September 2016
View article titled, Crystallization of nanoscale NiTi alloy thin films using rapid thermal annealing
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Journal Articles

Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices

Markus Reusch, Katarzyna Holc, Wilfried Pletschen, Lutz Kirste, Agnė Žukauskaitė, Taro Yoshikawa, Dimitre Iankov, Oliver Ambacher, Vadim Lebedev
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 052001 (2016)
https://doi.org/10.1116/1.4959580
Published: July 2016
View article titled, Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices
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Journal Articles

On the formation of cleaved mirror facets of GaN-based laser diodes—A comparative study of diamond-tip edge-scribing and laser scribing

Ji Hye Kang, Olaf Krüger, Uwe Spengler, Ute Zeimer, Sven Einfeldt, Michael Kneissl
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 041222 (2016)
https://doi.org/10.1116/1.4953885
Published: June 2016
View article titled, On the formation of cleaved mirror facets of GaN-based laser diodes—A comparative study of diamond-tip edge-scribing and laser scribing
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Journal Articles

Device characteristics comparisons for the InGaZnO thin film transistors fabricated on two-type surfaces of the plastic poly(ethylene naphthalate) substrates with hybrid barrier layers

Min-Ji Park, Da-Jeong Yun, Min-Ki Ryu, Jong-Heon Yang, Jae-Eun Pi, Oh-Sang Kwon, Gi Heon Kim, Chi-Sun Hwang, Sung-Min Yoon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 051209 (2015)
https://doi.org/10.1116/1.4929414
Published: August 2015
View article titled, Device characteristics comparisons for the InGaZnO thin film transistors fabricated on two-type surfaces of the plastic poly(ethylene naphthalate) substrates with hybrid barrier layers
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Journal Articles

TiO2 membrane high-contrast grating reflectors for vertical-cavity light-emitters in the visible wavelength regime

Ehsan Hashemi, Jörgen Bengtsson, Johan S. Gustavsson, Stefan Carlsson, Georg Rossbach, Åsa Haglund
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 050603 (2015)
https://doi.org/10.1116/1.4929416
Published: August 2015
View article titled, TiO<sub>2</sub> membrane high-contrast grating reflectors for vertical-cavity light-emitters in the visible wavelength regime
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Journal Articles

Macroscopic and nanometer scale stress measurement of Ni(Pt)Si silicide: Impact of thermal treatments ranging from millisecond to several hours

Pierre Francois Morin, Remi Beneyton, Magali Gregoire, Alexandre Pofelski, Laurent Clement, Shankar Muthukrishnan, Abhilash J. Mayur
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 011211 (2014)
https://doi.org/10.1116/1.4855175
Published: December 2013
View article titled, Macroscopic and nanometer scale stress measurement of Ni(Pt)Si silicide: Impact of thermal treatments ranging from millisecond to several hours
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Journal Articles

Silicon nitride zoneplates and packaging for extreme ultraviolet instruments

Erik H. Anderson, Weilun Chao, Eric M. Gullikson, Senajith Rekawa, Nord Andresen, Patrick Naulleau
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06F606 (2013)
https://doi.org/10.1116/1.4826695
Published: October 2013
View article titled, Silicon nitride zoneplates and packaging for extreme ultraviolet instruments
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Journal Articles

Analysis of strain in dielectric coated three dimensional Si micropillar arrays

Lars F. Voss, Cathy E. Reinhardt, Robert T. Graff, Adam M. Conway, Qinghui Shao, Rebecca J. Nikolic, Mushtaq A. Dar, Chin L. Cheung
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 060602 (2013)
https://doi.org/10.1116/1.4826500
Published: October 2013
View article titled, Analysis of strain in dielectric coated three dimensional Si micropillar arrays
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Journal Articles

Bimaterial electromechanical systems for a biomimetical acoustic sensor

Enrico Mastropaolo, Rhonira Latif, Thomas Koickal, Alister Hamilton, Rebecca Cheung, Michael Newton, Leslie Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06FD01 (2012)
https://doi.org/10.1116/1.4764094
Published: October 2012
View article titled, Bimaterial electromechanical systems for a biomimetical acoustic sensor
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Journal Articles

Enormous shrinkage of carbon nanotubes by supersonic stress and low-acceleration electron beam irradiation

Jun-ichi Fujita, Teppei Takahashi, Ryuichi Ueki, Takeshi Hikata, Soichiro Okubo, Risa Utsunomiya, Teruaki Matsuba
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 03D105 (2012)
https://doi.org/10.1116/1.3694027
Published: March 2012
View article titled, Enormous shrinkage of carbon nanotubes by supersonic stress and low-acceleration electron beam irradiation
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Journal Articles

Stress mapping in strain-engineered silicon p-type MOSFET device: A comparison between process simulation and experiments

Christophe D. Krzeminski
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 022203 (2012)
https://doi.org/10.1116/1.3683079
Published: February 2012
View article titled, Stress mapping in strain-engineered silicon p-type MOSFET device: A comparison between process simulation and experiments
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Journal Articles

Low frequency tantalum electromechanical systems for biomimetical applications

Rhonira Latif, Enrico Mastropaolo, Andrew Bunting, Rebecca Cheung, Thomas Koickal, Alister Hamilton, Michael Newton, Leslie Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06FE05 (2011)
https://doi.org/10.1116/1.3662408
Published: November 2011
View article titled, Low frequency tantalum electromechanical systems for biomimetical applications
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Journal Articles

Quality factor enhancement on nanomechanical resonators utilizing stiction phenomena

Hiroki Ashiba, Reo Kometani, Shin’ichi Warisawa, Sunao Ishihara
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06FE02 (2011)
https://doi.org/10.1116/1.3660384
Published: November 2011
View article titled, Quality factor enhancement on nanomechanical resonators utilizing stiction phenomena
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