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Journal Articles
Study of zinc doped In0.53Ga0.47As/InP/InAlAs/InP heterostructures by time-of-flight; magnetic secondary ion spectrometry and high-energy x-ray photoelectron spectroscopy
Available to PurchaseG. Tsamo Tagougue, M. Veillerot, E. Martinez, V. Thoréton, M. Martin, T. Baron, G. Lefevre, S. Cavalaglio, F. Bassani
J. Vac. Sci. Technol. B 43, 033204 (2025)
Published: May 2025
Journal Articles
TiN and TaN cointegration for 300 mm superconducting back end of line
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J. Vac. Sci. Technol. B 43, 022216 (2025)
Published: March 2025
Journal Articles
Does the blue luminescence of Eu-doped β-NaYF4 originate from Eu2+ ions?
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J. Vac. Sci. Technol. B 43, 022213 (2025)
Published: March 2025
Journal Articles
Enzymatic degradation of cellulosic fabrics modified with atomic layer deposited aluminum oxide thin films
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J. Vac. Sci. Technol. B 43, 022806 (2025)
Published: March 2025
Journal Articles
Suppressing oxygen vacancy formation in ZrO2 to improve electrical properties by employing MoO2 bottom electrode
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J. Vac. Sci. Technol. B 43, 022209 (2025)
Published: February 2025
Journal Articles
Cathodoluminescence from Y2O3:Er3+: A metal oxide-based green nanophosphor for field emission displays
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J. Vac. Sci. Technol. B 43, 024201 (2025)
Published: February 2025
Journal Articles
Rate-controlled cycle etching of GaN by cycle exposure to BCl3 and F2-added Ar plasma at a substrate temperature of 400 °C
J. Vac. Sci. Technol. B 43, 022202 (2025)
Published: January 2025
Journal Articles
Epitaxial SiGeSn grown on Si by ion implantation
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J. Vac. Sci. Technol. B 42, 062206 (2024)
Published: November 2024
Journal Articles
Structural, surface, and upconversion luminescence properties of pulsed laser-deposited Y2O3:Ho3+,Yb3+ thin films
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J. Vac. Sci. Technol. B 42, 054004 (2024)
Published: September 2024
Journal Articles
X-ray photoelectron spectroscopy surface oxidation study of remote plasma-enhanced chemical vapor deposition-grown Ge1−xSnx/Si alloys
Available to PurchaseKevin Choe, Jeremy Hunter, Christopher Sutphin, Daniel Felker, Bruce Claflin, Gordon Grzybowski, Christina Dugan
J. Vac. Sci. Technol. B 42, 042207 (2024)
Published: July 2024
Journal Articles
D. D’Ubaldo, M. Sbroscia, V. C. A. Ficca, E. Stellino, A. Pasqualetti, D. Sentenac, J. Gargiulo, L. Francescon, L. Pinard, E. Placidi
J. Vac. Sci. Technol. B 42, 034003 (2024)
Published: April 2024
Journal Articles
Treatment and aging studies of GaAs(111)B substrates for van der Waals chalcogenide film growth
Mingyu Yu, Jiayang Wang, Sahani A. Iddawela, Molly McDonough, Jessica L. Thompson, Susan B. Sinnott, Danielle Reifsnyder Hickey, Stephanie Law
J. Vac. Sci. Technol. B 42, 033201 (2024)
Published: March 2024
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. B 42, 022209 (2024)
Published: February 2024
Includes: Supplementary data
Journal Articles
Electron emission properties of titanium nitride coated volcano-structured silicon emitters
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J. Vac. Sci. Technol. B 42, 013203 (2024)
Published: January 2024
Journal Articles
Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy
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J. Vac. Sci. Technol. B 41, 062806 (2023)
Published: November 2023
Journal Articles
Effect of atomic-scale microstructures on TiZrV non-evaporable getter film activation
Available to PurchaseQingzhi Shi, Sihui Wang, Pengcheng Wang, Yongsheng Ma, Biao Tan, Shiyuan Shi, Tao Huang, Tao Huang, Fei Sun, Lixin Wang, Xiaoguang Zhao, Shuping Chen, Meitong Lu
J. Vac. Sci. Technol. B 41, 064202 (2023)
Published: November 2023
Journal Articles
Water-soluble bio-sourced resist interactions with fluorinated etching plasmas during the photolithography process
Available to PurchasePaule Durin, Olha Sysova, Alexandre Téolis, Stéphane Trombotto, Samar Hajjar-Garreau, Thierry Delair, Isabelle Servin, Névine Rochat, Raluca Tiron, Corinne Gablin, Olivier Soppera, Aziz Benamrouche, Thomas Géhin, Didier Léonard, Jean-Louis Leclercq, Yann Chevolot
J. Vac. Sci. Technol. B 41, 062204 (2023)
Published: October 2023
Includes: Supplementary data
Journal Articles
Deviation of photoelectron intensity from Beer-Lambert law in near-ambient pressure hard x-ray photoelectron spectroscopy
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J. Vac. Sci. Technol. B 41, 044204 (2023)
Published: June 2023
Journal Articles
Fabrication of plasma-reduced silver coupled with titanium dioxide nanoparticles for visible light-driven photocatalysis
Available to PurchaseArantxa Danielle S. Montallana, Joven Paolo D. Angeles, Jinn P. Chu, Matthew P. Sherburne, Magdaleno R. Vasquez, Jr., Motoi Wada
J. Vac. Sci. Technol. B 41, 042204 (2023)
Published: June 2023
Journal Articles
Sputtering produced by vacuum electrospray droplet ions with different sizes and charges
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J. Vac. Sci. Technol. B 41, 032807 (2023)
Published: April 2023
Includes: Supplementary data
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