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Journal Articles

Study of zinc doped In0.53Ga0.47As/InP/InAlAs/InP heterostructures by time-of-flight; magnetic secondary ion spectrometry and high-energy x-ray photoelectron spectroscopy

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G. Tsamo Tagougue, M. Veillerot, E. Martinez, V. Thoréton, M. Martin, T. Baron, G. Lefevre, S. Cavalaglio, F. Bassani
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 033204 (2025)
https://doi.org/10.1116/6.0004489
Published: May 2025
View articletitled, Study of zinc doped In0.53Ga0.47As/InP/InAlAs/InP heterostructures by time-of-flight; magnetic secondary ion spectrometry and high-energy x-ray photoelectron spectroscopy
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Journal Articles

TiN and TaN cointegration for 300 mm superconducting back end of line

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T. Chêne, R. Segaud, F. Nemouchi, P. Gergaud, S. Minoret, F. Gustavo, J. Garrione, T. Chevolleau
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022216 (2025)
https://doi.org/10.1116/6.0004316
Published: March 2025
View articletitled, TiN and TaN cointegration for 300 mm superconducting back end of line
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Journal Articles

Does the blue luminescence of Eu-doped β-NaYF4 originate from Eu2+ ions?

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Robin E. Kroon, Mamello P. Mabe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022213 (2025)
https://doi.org/10.1116/6.0004282
Published: March 2025
View articletitled, Does the blue luminescence of Eu-doped β-NaYF4 originate from Eu2+ ions?
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Journal Articles

Enzymatic degradation of cellulosic fabrics modified with atomic layer deposited aluminum oxide thin films

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Li Zhang, Yi Li, Leila Sun, Shuaib A. Balogun, Mark D. Losego
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022806 (2025)
https://doi.org/10.1116/6.0004299
Published: March 2025
View articletitled, Enzymatic degradation of cellulosic fabrics modified with atomic layer deposited aluminum oxide thin films
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Journal Articles

Suppressing oxygen vacancy formation in ZrO2 to improve electrical properties by employing MoO2 bottom electrode

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Jaehyeon Yun, Seungyeon Kim, Chaeyeong Hwang, Woojin Jeon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022209 (2025)
https://doi.org/10.1116/6.0004351
Published: February 2025
View articletitled, Suppressing oxygen vacancy formation in ZrO2 to improve electrical properties by employing MoO2 bottom electrode
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Journal Articles

Cathodoluminescence from Y2O3:Er3+: A metal oxide-based green nanophosphor for field emission displays

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Shivaramu Nagarasanakote Jayaramu, Divya Janardhana, Elizabeth Coetsee, Hendrik C. Swart
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024201 (2025)
https://doi.org/10.1116/6.0004125
Published: February 2025
View articletitled, Cathodoluminescence from Y2O3:Er3+: A metal oxide-based green nanophosphor for field emission displays
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Journal Articles

Rate-controlled cycle etching of GaN by cycle exposure to BCl3 and F2-added Ar plasma at a substrate temperature of 400 °C

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Shohei Nakamura, Atsushi Tanide, Soichi Nadahara, Kenji Ishikawa, Masaru Hori
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022202 (2025)
https://doi.org/10.1116/5.0239755
Published: January 2025
View articletitled, Rate-controlled cycle etching of GaN by cycle exposure to BCl3 and F2-added Ar plasma at a substrate temperature of 400 °C
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Journal Articles

Epitaxial SiGeSn grown on Si by ion implantation

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Chinenye U. Ekeruche, Mikayla Davila, Peter J. Simpson, Karen L. Kavanagh, Lyudmila V. Goncharova
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062206 (2024)
https://doi.org/10.1116/6.0003933
Published: November 2024
View articletitled, Epitaxial SiGeSn grown on Si by ion implantation
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Journal Articles

Structural, surface, and upconversion luminescence properties of pulsed laser-deposited Y2O3:Ho3+,Yb3+ thin films

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Vhahangwele Makumbane, M. Y. A. Yagoub, E. Coetsee, R. E. Kroon, H. C. Swart
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 054004 (2024)
https://doi.org/10.1116/6.0003880
Published: September 2024
View articletitled, Structural, surface, and upconversion luminescence properties of pulsed laser-deposited Y2O3:Ho3+,Yb3+ thin films
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Journal Articles

X-ray photoelectron spectroscopy surface oxidation study of remote plasma-enhanced chemical vapor deposition-grown Ge1−xSnx/Si alloys

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Kevin Choe, Jeremy Hunter, Christopher Sutphin, Daniel Felker, Bruce Claflin, Gordon Grzybowski, Christina Dugan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042207 (2024)
https://doi.org/10.1116/6.0003688
Published: July 2024
View articletitled, X-ray photoelectron spectroscopy surface oxidation study of remote plasma-enhanced chemical vapor deposition-grown Ge1−xSnx/Si alloys
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Journal Articles

Study of defects population and contaminations in silica/tantala coated mirrors

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D. D’Ubaldo, M. Sbroscia, V. C. A. Ficca, E. Stellino, A. Pasqualetti, D. Sentenac, J. Gargiulo, L. Francescon, L. Pinard, E. Placidi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034003 (2024)
https://doi.org/10.1116/6.0003510
Published: April 2024
View articletitled, Study of defects population and contaminations in silica/tantala coated mirrors
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Journal Articles

Treatment and aging studies of GaAs(111)B substrates for van der Waals chalcogenide film growth

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Mingyu Yu, Jiayang Wang, Sahani A. Iddawela, Molly McDonough, Jessica L. Thompson, Susan B. Sinnott, Danielle Reifsnyder Hickey, Stephanie Law
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 033201 (2024)
https://doi.org/10.1116/6.0003470
Published: March 2024
View articletitled, Treatment and aging studies of GaAs(111)B substrates for van der Waals chalcogenide film growth
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Includes: Supplementary data
Journal Articles

Stable and low loss oxide layer on α-Ta (110) film for superconducting qubits

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Zengqian Ding, Boyi Zhou, Tao Wang, Lina Yang, Yanfu Wu, Xiao Cai, Kanglin Xiong, Jiagui Feng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022209 (2024)
https://doi.org/10.1116/6.0003368
Published: February 2024
View articletitled, Stable and low loss oxide layer on α-Ta (110) film for superconducting qubits
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Includes: Supplementary data
Journal Articles

Electron emission properties of titanium nitride coated volcano-structured silicon emitters

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Hiromasa Murata, Katsuhisa Murakami, Masayoshi Nagao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 013203 (2024)
https://doi.org/10.1116/6.0003234
Published: January 2024
View articletitled, Electron emission properties of titanium nitride coated volcano-structured silicon emitters
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Journal Articles

Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy

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A. R. Chourasia, D. R. Chopra
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062806 (2023)
https://doi.org/10.1116/6.0002922
Published: November 2023
View articletitled, Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy
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Journal Articles

Effect of atomic-scale microstructures on TiZrV non-evaporable getter film activation

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Qingzhi Shi, Sihui Wang, Pengcheng Wang, Yongsheng Ma, Biao Tan, Shiyuan Shi, Tao Huang, Tao Huang, Fei Sun, Lixin Wang, Xiaoguang Zhao, Shuping Chen, Meitong Lu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 064202 (2023)
https://doi.org/10.1116/6.0002992
Published: November 2023
View articletitled, Effect of atomic-scale microstructures on TiZrV non-evaporable getter film activation
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Journal Articles

Water-soluble bio-sourced resist interactions with fluorinated etching plasmas during the photolithography process

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Paule Durin, Olha Sysova, Alexandre Téolis, Stéphane Trombotto, Samar Hajjar-Garreau, Thierry Delair, Isabelle Servin, Névine Rochat, Raluca Tiron, Corinne Gablin, Olivier Soppera, Aziz Benamrouche, Thomas Géhin, Didier Léonard, Jean-Louis Leclercq, Yann Chevolot
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062204 (2023)
https://doi.org/10.1116/6.0002934
Published: October 2023
View articletitled, Water-soluble bio-sourced resist interactions with fluorinated etching plasmas during the photolithography process
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Includes: Supplementary data
Journal Articles

Deviation of photoelectron intensity from Beer-Lambert law in near-ambient pressure hard x-ray photoelectron spectroscopy

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Kento Takenaka, Koji Takahara, Tomoki Eguchi, Hirosuke Sumida, Satoru Suzuki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044204 (2023)
https://doi.org/10.1116/6.0002662
Published: June 2023
View articletitled, Deviation of photoelectron intensity from Beer-Lambert law in near-ambient pressure hard x-ray photoelectron spectroscopy
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Journal Articles

Fabrication of plasma-reduced silver coupled with titanium dioxide nanoparticles for visible light-driven photocatalysis

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Arantxa Danielle S. Montallana, Joven Paolo D. Angeles, Jinn P. Chu, Matthew P. Sherburne, Magdaleno R. Vasquez, Jr., Motoi Wada
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042204 (2023)
https://doi.org/10.1116/6.0002510
Published: June 2023
View articletitled, Fabrication of plasma-reduced silver coupled with titanium dioxide nanoparticles for visible light-driven photocatalysis
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Journal Articles

Sputtering produced by vacuum electrospray droplet ions with different sizes and charges

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Satoshi Ninomiya, Lee Chuin Chen, Kenzo Hiraoka
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032807 (2023)
https://doi.org/10.1116/6.0002529
Published: April 2023
View articletitled, Sputtering produced by vacuum electrospray droplet ions with different sizes and charges
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Includes: Supplementary data