Page 1 | Search Results | Journal of Vacuum Science & Technology B

1-20 of 1046

Sort by

Sort Order Select

Journal Articles

Observation of low-resistance Al and Ni p-type ohmic contacts to dilute GeC and GeCSn alloys

Jibesh K. Saha, Saif A. A. Taqy, Pallab K. Sarkar, Imteaz Rahaman, Augustus W. Arbogast, Tuhin Dey, Andrei Dolocan, Md. Reaz Rahman Munna, Khorshed Alam, Daniel Wasserman, Seth R. Bank, Mark A. Wistey

J. Vac. Sci. Technol. B 42, 062211 (2024)

https://doi.org/10.1116/6.0003739

Published: December 2024

View article titled, Observation of low-resistance Al and Ni p-type ohmic contacts to dilute GeC and GeCSn alloys

Journal Articles

Comparative studies of metamorphic and strained InGaAs p-type semiconductor - intrinsic absorption layer - n-type semiconductor photodetector for low-temperature CH₄ detection

Xueting Du, Kai Niu, Wei Mi, Di Wang, Yan Zhu, Lin’an He, Liwei Zhou, Juan Wang, Xingcheng Zhang, Jinshi Zhao

J. Vac. Sci. Technol. B 42, 062207 (2024)

https://doi.org/10.1116/6.0004069

Published: November 2024

View article titled, Comparative studies of metamorphic and strained InGaAs p-type semiconductor - intrinsic absorption layer - n-type semiconductor photodetector for low-temperature CH4 detection

Journal Articles

Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films

Nguyen Khac Binh, Pham Ngoc Yen Nhi, Tran Bao Quan, Pham Minh Tam, Nguyen Ngoc Phuong, Dao Minh Tuan, Pham Thi Kim Hang, Pham Hoai Phuong

J. Vac. Sci. Technol. B 42, 062205 (2024)

https://doi.org/10.1116/6.0003939

Published: November 2024

View article titled, Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films

Journal Articles

Anomalous resistive switching effect in La_0.8Ca_0.2MnO₃/Nb:SrTiO₃ structure

Zhiquan Wang, Chengang Dong, Xin Wang

J. Vac. Sci. Technol. B 42, 064004 (2024)

https://doi.org/10.1116/6.0004095

Published: November 2024

View article titled, Anomalous resistive switching effect in La0.8Ca0.2MnO3/Nb:SrTiO3 structure

Journal Articles

Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon

Taeseung Jung, Seungyeob Kim, Sangho Lee, Jinho Ahn, Sanghun Jeon

J. Vac. Sci. Technol. B 42, 063202 (2024)

https://doi.org/10.1116/6.0003901

Published: October 2024

View article titled, Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon

Journal Articles

Aperiodic multilayer masks for M3D mitigation in high- and hyper-NA extreme ultraviolet lithography

W. Ethan Maguire, Bruce W. Smith

J. Vac. Sci. Technol. B 42, 062601 (2024)

https://doi.org/10.1116/6.0003927

Published: September 2024

View article titled, Aperiodic multilayer masks for M3D mitigation in high- and hyper-NA extreme ultraviolet lithography

Journal Articles

Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy

Glenn G. Jernigan, John P. Murphy, Nadeemullah A. Mahadik, Alex J. Grede, Eric M. Jackson, Jill A. Nolde

J. Vac. Sci. Technol. B 42, 052209 (2024)

https://doi.org/10.1116/6.0003585

Published: September 2024

View article titled, Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy

Journal Articles

Effect of sputter power on red-shifted optoelectronic properties in magnetron sputtered Ag/ZnO thin films

GuruSampath Kumar A., Mahender C., Mahesh Kumar U., Obulapathi L., HemaChandra Rao B., Yamuna P., Thirupathi A., SomaSundar L. N. V. H., Venkata Ramana G.

J. Vac. Sci. Technol. B 42, 054002 (2024)

https://doi.org/10.1116/6.0003813

Published: August 2024

View article titled, Effect of sputter power on red-shifted optoelectronic properties in magnetron sputtered Ag/ZnO thin films

Journal Articles

Role of the oxidation conditions on the orientation of TiN_xO_y grown by atomic layer deposition: Impact on the optical and electrical properties

Kou Ihara, Julien Cardin, Maxime Leménager, Xavier Portier, Hind Bousbia, Christophe Labbé

J. Vac. Sci. Technol. B 42, 054001 (2024)

https://doi.org/10.1116/6.0003646

Published: August 2024

View article titled, Role of the oxidation conditions on the orientation of TiNxOy grown by atomic layer deposition: Impact on the optical and electrical properties

Journal Articles

Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates

B. Claflin, G. J. Grzybowski, S. Zollner, B. R. Rogers, T. A. Cooper, D. C. Look

J. Vac. Sci. Technol. B 42, 052204 (2024)

https://doi.org/10.1116/6.0003689

Published: August 2024

View article titled, Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates

Journal Articles

Magneto-transport study on Sn-rich Sn_1−xGe_x thin films enabled by CdTe buffer layer

Rabindra Basnet, Dinesh Upreti, Tyler T. McCarthy, Zheng Ju, Allison M. McMinn, M. M. Sharma, Yong-Hang Zhang, Jin Hu

J. Vac. Sci. Technol. B 42, 042210 (2024)

https://doi.org/10.1116/6.0003564

Published: July 2024

View article titled, Magneto-transport study on Sn-rich Sn1−xGex thin films enabled by CdTe buffer layer

Journal Articles

Development of aspect ratio trapping growth of GeSn on Si for midwave infrared applications

Hryhorii Stanchu, Grey Abernathy, Joshua Grant, Fernando M. de Oliveira, Yuriy I. Mazur, Jifeng Liu, Wei Du, Baohua Li, Gregory J. Salamo, Shui-Qing Yu

J. Vac. Sci. Technol. B 42, 042802 (2024)

https://doi.org/10.1116/6.0003734

Published: July 2024

View article titled, Development of aspect ratio trapping growth of GeSn on Si for midwave infrared applications

Journal Articles

Cu_1−xAl_x films as alternatives to copper for advanced interconnect metallization

Jean-Philippe Soulié, Kiroubanand Sankaran, Geoffrey Pourtois, Johan Swerts, Zsolt Tőkei, Christoph Adelmann

J. Vac. Sci. Technol. B 42, 043203 (2024)

https://doi.org/10.1116/6.0003634

Published: June 2024

View article titled, Cu1−xAlx films as alternatives to copper for advanced interconnect metallization

Journal Articles

Compositional dependence of direct transition energies in Si_xGe_1−x−ySn_y alloys lattice-matched to Ge/GaAs

Phoebe M. Pearce, Sheau Wei Ong, Andrew D. Johnson, Eng Soon Tok, Nicholas J. Ekins-Daukes

J. Vac. Sci. Technol. B 42, 042206 (2024)

https://doi.org/10.1116/6.0003737

Published: June 2024

View article titled, Compositional dependence of direct transition energies in SixGe1−x−ySny alloys lattice-matched to Ge/GaAs

Journal Articles

Effects of working pressure during magnetron sputtering on thermoelectric performance of flexible p-type Bi_0.5Sb_1.5Te₃ thin films

Ding Hu, Shaojun Liang, Yichun He, Rensheng Zhang, Song Yue

J. Vac. Sci. Technol. B 42, 032212 (2024)

https://doi.org/10.1116/6.0003631

Published: May 2024

View article titled, Effects of working pressure during magnetron sputtering on thermoelectric performance of flexible p-type Bi0.5Sb1.5Te3 thin films

Includes: Supplementary data

Journal Articles

One-step formation of ZrON thin film on surface of carbon fine particles for membrane electrode assembly

Yudai Aihara, Takashi Iida, Kakeru Kodama, Hiroshi Iwata, Takao Sekiya

J. Vac. Sci. Technol. B 42, 034202 (2024)

https://doi.org/10.1116/6.0003542

Published: May 2024

View article titled, One-step formation of ZrON thin film on surface of carbon fine particles for membrane electrode assembly

Journal Articles

Molecular beam epitaxy growth and characterization of GePb alloys

Tyler T. McCarthy, Allison M. McMinn, Xiaoyang Liu, Razine Hossain, Xin Qi, Zheng Ju, Mark Mangus, Shui-Qing Yu, Yong-Hang Zhang

J. Vac. Sci. Technol. B 42, 032210 (2024)

https://doi.org/10.1116/6.0003567

Published: May 2024

View article titled, Molecular beam epitaxy growth and characterization of GePb alloys

Journal Articles

Evolution of hard carbon layers on Ti-45Al-2Nb-2Mn-1B by plasma enhanced chemical vapor deposition of hydrocarbons and hydrogen

Ahmad Reza Rastkar, Mehdi Sadri Kandjani

J. Vac. Sci. Technol. B 42, 034006 (2024)

https://doi.org/10.1116/6.0003483

Published: May 2024

View article titled, Evolution of hard carbon layers on Ti-45Al-2Nb-2Mn-1B by plasma enhanced chemical vapor deposition of hydrocarbons and hydrogen

Journal Articles

Experimental study of flake graphite large-area explosion electron emission cathode performance based on particle size discrepancy

Tingxu Chen, Tianming Li, Liu Yang, Hao Li, Haiyang Wang, Renjie Cheng, Jiaoyin Wang, Hao Zhou, Biao Hu, Hao Fu

J. Vac. Sci. Technol. B 42, 032205 (2024)

https://doi.org/10.1116/6.0003373

Published: April 2024

View article titled, Experimental study of flake graphite large-area explosion electron emission cathode performance based on particle size discrepancy

Includes: Supplementary data

Journal Articles

Wet and dry etching of ultrawide bandgap LiGa₅O₈ and LiGaO₂

Vijay Gopal Thirupakuzi Vangipuram, Kaitian Zhang, Hongping Zhao

J. Vac. Sci. Technol. B 42, 032204 (2024)

https://doi.org/10.1116/6.0003450

Published: April 2024

View article titled, Wet and dry etching of ultrawide bandgap LiGa5O8 and LiGaO2

NARROW

Topics

Observation of low-resistance Al and Ni p-type ohmic contacts to dilute GeC and GeCSn alloys

Comparative studies of metamorphic and strained InGaAs p-type semiconductor - intrinsic absorption layer - n-type semiconductor photodetector for low-temperature CH₄ detection

Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films

Anomalous resistive switching effect in La_0.8Ca_0.2MnO₃/Nb:SrTiO₃ structure

Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon

Aperiodic multilayer masks for M3D mitigation in high- and hyper-NA extreme ultraviolet lithography

Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy

Effect of sputter power on red-shifted optoelectronic properties in magnetron sputtered Ag/ZnO thin films

Role of the oxidation conditions on the orientation of TiN_xO_y grown by atomic layer deposition: Impact on the optical and electrical properties

Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates

Magneto-transport study on Sn-rich Sn_1−xGe_x thin films enabled by CdTe buffer layer

Development of aspect ratio trapping growth of GeSn on Si for midwave infrared applications

Cu_1−xAl_x films as alternatives to copper for advanced interconnect metallization

Compositional dependence of direct transition energies in Si_xGe_1−x−ySn_y alloys lattice-matched to Ge/GaAs

Effects of working pressure during magnetron sputtering on thermoelectric performance of flexible p-type Bi_0.5Sb_1.5Te₃ thin films

One-step formation of ZrON thin film on surface of carbon fine particles for membrane electrode assembly

Molecular beam epitaxy growth and characterization of GePb alloys

Evolution of hard carbon layers on Ti-45Al-2Nb-2Mn-1B by plasma enhanced chemical vapor deposition of hydrocarbons and hydrogen

Experimental study of flake graphite large-area explosion electron emission cathode performance based on particle size discrepancy

Wet and dry etching of ultrawide bandgap LiGa₅O₈ and LiGaO₂

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

This Feature Is Available To Subscribers Only