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Journal Articles

Characterization of chemically amplified resists for soft x‐ray projection lithography

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Glenn D. Kubiak, Eric M. Kneedler, Robert Q. Hwang, Michelle T. Schulberg, Kurt W. Berger, J. E. Bjorkholm, W. M. Mansfield
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 10, 2593–2599 (1992)
https://doi.org/10.1116/1.586333
Published: November 1992
View articletitled, Characterization of chemically amplified resists for soft x‐ray projection lithography
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Journal Articles

In situ studies of the effect of various gaseous species and ultraviolet illumination on the dark currents of HgMnCdTe and HgCdTe short‐wavelength infrared diodes

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J. T. Cheung, S. H. Shin, J. G. Pasko, R. E. DeWames
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 10, 1538–1542 (1992)
https://doi.org/10.1116/1.586245
Published: July 1992
View articletitled, In situ studies of the effect of various gaseous species and ultraviolet illumination on the dark currents of HgMnCdTe and HgCdTe short‐wavelength infrared diodes
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Journal Articles

Pulsed ultraviolet laser stimulated chlorination mechanisms for Si(111)

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Carlotta Paulsen‐Boaz, William L. O’Brien, Thor Rhodin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 10, 216–220 (1992)
https://doi.org/10.1116/1.586304
Published: January 1992
View articletitled, Pulsed ultraviolet laser stimulated chlorination mechanisms for Si(111)
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Journal Articles

Reaction of silicon with chlorine and ultraviolet laser induced chemical etching mechanisms

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W. Sesselmann, E. Hudeczek, F. Bachmann
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 7, 1284–1294 (1989)
https://doi.org/10.1116/1.584474
Published: September 1989
View articletitled, Reaction of silicon with chlorine and ultraviolet laser induced chemical etching mechanisms
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Journal Articles

Surface photochemical phenomena in laser chemical vapor deposition

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G. S. Higashi, L. J. Rothberg
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 3, 1460–1463 (1985)
https://doi.org/10.1116/1.582966
Published: September 1985
View articletitled, Surface photochemical phenomena in laser chemical vapor deposition
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Journal Articles

Photodesorption and adsorbate–surface interactions stimulated by laser radiation

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T. J. Chuang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 3, 1408–1420 (1985)
https://doi.org/10.1116/1.583001
Published: September 1985
View articletitled, Photodesorption and adsorbate–surface interactions stimulated by laser radiation
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Journal Articles

Selective laser‐stimulated desorption of molecules by internal vibration excitation

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C. Jedrzejek
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 3, 1431–1435 (1985)
https://doi.org/10.1116/1.583004
Published: September 1985
View articletitled, Selective laser‐stimulated desorption of molecules by internal vibration excitation
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Journal Articles

Infrared laser‐induced photodesorption and ultraviolet laser‐induced thermal desorption of methylfluoride and carbon monoxide from polycrystalline copper

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Ingo Hussla, R. Viswanathan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 3, 1520–1524 (1985)
https://doi.org/10.1116/1.582977
Published: September 1985
View articletitled, Infrared laser‐induced photodesorption and ultraviolet laser‐induced thermal desorption of methylfluoride and carbon monoxide from polycrystalline copper
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