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Journal Articles

Effect of varying threading dislocation densities on the optical properties of InGaN/GaN quantum wells with intentionally created V-shaped pits

Kaitian Zhang, Chenxi Hu, Vijay Gopal Thirupakuzi Vangipuram, Lingyu Meng, Christopher Chae, Menglin Zhu, Jinwoo Hwang, Kathleen Kash, Hongping Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062207 (2023)
https://doi.org/10.1116/6.0003141
Published: November 2023
View article titled, Effect of varying threading dislocation densities on the optical properties of InGaN/GaN quantum wells with intentionally created V-shaped pits
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Journal Articles

Study of surface damage in silicon by irradiation with focused rubidium ions using a cold-atom ion source

S. Xu, Y. Li, M. A. Verheijen, E. R. Kieft, E. J. D. Vredenbregt
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042804 (2023)
https://doi.org/10.1116/6.0002643
Published: June 2023
View article titled, Study of surface damage in silicon by irradiation with focused rubidium ions using a cold-atom ion source
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Includes: Supplementary data
Journal Articles

Ohmic contact structures on β-Ga2O3 with n+ β-Ga2O3 pulsed laser deposition layers

Elizabeth V. Favela, Hyung Min Jeon, Kevin D. Leedy, Kun Zhang, Szu-Wei Tung, Francelia Sanchez Escobar, C. V. Ramana, Lisa M. Porter
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032205 (2023)
https://doi.org/10.1116/6.0002620
Published: May 2023
View article titled, Ohmic contact structures on <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> with n+ <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> pulsed laser deposition layers
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Includes: Supplementary data
Journal Articles

Characterization of GaN structures for power electronics by secondary ion mass spectrometry and atomic force microscope approach

Tarek Spelta, Marc Veillerot, Eugénie Martinez, Nicolas Chevalier, Denis Mariolle, Roselyne Templier, Bassem Salem, Pedro Fernandes Paes Pinto Rocha, Laura Vauche, Sarah Boubenia, Bérangère Hyot
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 034003 (2023)
https://doi.org/10.1116/6.0002573
Published: April 2023
View article titled, Characterization of GaN structures for power electronics by secondary ion mass spectrometry and atomic force microscope approach
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Journal Articles

Thickness dependent field emission study of LaB6 coated Si nanowire arrays

Amol Deore, Krishna Jagtap, Onkar Bhorade, Angela Vella, Mahendra More
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022806 (2023)
https://doi.org/10.1116/6.0002464
Published: March 2023
View article titled, Thickness dependent field emission study of LaB<sub>6</sub> coated Si nanowire arrays
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Includes: Supplementary data
Journal Articles

Implementation of high-performance and high-yield nanoscale hafnium zirconium oxide based ferroelectric tunnel junction devices on 300 mm wafer platform

Maximilian Liehr, Jubin Hazra, Karsten Beckmann, Vineetha Mukundan, Ioannis Alexandrou, Timothy Yeow, Joseph Race, Kandabara Tapily, Steven Consiglio, Santosh K. Kurinec, Alain C. Diebold, Nathaniel Cady
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012805 (2023)
https://doi.org/10.1116/6.0002097
Published: January 2023
View article titled, Implementation of high-performance and high-yield nanoscale hafnium zirconium oxide based ferroelectric tunnel junction devices on 300 mm wafer platform
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Journal Articles

System for interpolating work function for a cold-field emitter

A. Bahm
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 014201 (2023)
https://doi.org/10.1116/6.0002283
Published: December 2022
View article titled, System for interpolating work function for a cold-field emitter
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Journal Articles

Impact of the growth environment in inductively coupled plasma on the synthesis and morphologies of carbon nanohorns

Fanny Casteignau, Taki Aissou, Jérôme Menneveux, Jocelyn Veilleux, Richard Martel, Nadi Braidy
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 062806 (2022)
https://doi.org/10.1116/6.0002134
Published: November 2022
View article titled, Impact of the growth environment in inductively coupled plasma on the synthesis and morphologies of carbon nanohorns
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Includes: Supplementary data
Journal Articles

Predicting the effects of plasma-induced damage on p–n junction leakage and its application in the characterization of defect distribution

Yoshihiro Sato, Satoshi Shibata, Kazuko Nishimura, Masayuki Yamasaki, Masashi Murakami, Keiichiro Urabe, Koji Eriguchi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 062209 (2022)
https://doi.org/10.1116/6.0002181
Published: November 2022
View article titled, Predicting the effects of plasma-induced damage on p–n junction leakage and its application in the characterization of defect distribution
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Journal Articles

Hafnium oxide films grown on silicon substrates by electron beam-induced deposition

Shunsuke Kobayashi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 060602 (2022)
https://doi.org/10.1116/6.0002140
Published: November 2022
View article titled, Hafnium oxide films grown on silicon substrates by electron beam-induced deposition
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Includes: Supplementary data
Journal Articles

Outgassing properties of 304 stainless steel electropolished by wiping method

Tsuyoshi Fujino, Naoki Fukumuro, Vijay Chouhan, Muneaki Ida, Yoshiaki Ida, Shinji Yae
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 064201 (2022)
https://doi.org/10.1116/6.0002070
Published: October 2022
View article titled, Outgassing properties of 304 stainless steel electropolished by wiping method
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Journal Articles

Observation of interfacial strain relaxation and electron beam damage thresholds in Al0.3In0.7N/GaN heterostructures by transmission electron microscopy

Keisuke Motoki, Zachary Engel, Christopher M. Matthews, Habib Ahmad, Timothy M. McCrone, Kohei Harada, W. Alan Doolittle
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052210 (2022)
https://doi.org/10.1116/6.0001974
Published: September 2022
View article titled, Observation of interfacial strain relaxation and electron beam damage thresholds in Al<sub>0.3</sub>In<sub>0.7</sub>N/GaN heterostructures by transmission electron microscopy
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Journal Articles

Application of deep-learning based techniques for automatic metrology on scanning and transmission electron microscopy images

J. Baderot, M. Grould, D. Misra, N. Clément, A. Hallal, S. Martinez, J. Foucher
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 054003 (2022)
https://doi.org/10.1116/6.0001988
Published: September 2022
View article titled, Application of deep-learning based techniques for automatic metrology on scanning and transmission electron microscopy images
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Journal Articles

Highly repeatable dry etch corner rounding solution for 0.11 μm shallow trench isolation

Wenwen Zhang, Yongzhi Fang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052204 (2022)
https://doi.org/10.1116/6.0001897
Published: September 2022
View article titled, Highly repeatable dry etch corner rounding solution for 0.11 <em>μ</em>m shallow trench isolation
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Journal Articles

Extreme contact shrink for back end of line connectivity

Filip Schleicher, Sara Paolillo, Stefan Decoster, Chen Wu, Victor Vega-Gonzalez, Mahmudul Hasan, Christophe Beral, Frédéric Lazzarino
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 032803 (2022)
https://doi.org/10.1116/6.0001757
Published: May 2022
View article titled, Extreme contact shrink for back end of line connectivity
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Journal Articles

Si nanocone structure fabricated by a relatively high-pressure hydrogen plasma in the range of 3.3–27 kPa

Toshimitsu Nomura, Kenta Kimoto, Hiroaki Kakiuchi, Kiyoshi Yasutake, Hiromasa Ohmi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 032801 (2022)
https://doi.org/10.1116/6.0001676
Published: April 2022
View article titled, Si nanocone structure fabricated by a relatively high-pressure hydrogen plasma in the range of 3.3–27 kPa
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Journal Articles

Morphology of Ge thin films crystallized by Au-induced layer exchange at low temperature (220 °C)

Narin Sunthornpan, Kenjiro Kimura, Kentaro Kyuno
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 030601 (2022)
https://doi.org/10.1116/6.0001774
Published: April 2022
View article titled, Morphology of Ge thin films crystallized by Au-induced layer exchange at low temperature (220 °C)
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Journal Articles

Low trap density of oxygen-rich HfO2/GaN interface for GaN MIS-HEMT applications

Wei-Chih Cheng, Jiaqi He, Minghao He, Zepeng Qiao, Yang Jiang, Fangzhou Du, Xiang Wang, Haimin Hong, Qing Wang, Hongyu Yu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022212 (2022)
https://doi.org/10.1116/6.0001654
Published: March 2022
View article titled, Low trap density of oxygen-rich HfO<sub>2</sub>/GaN interface for GaN MIS-HEMT applications
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Journal Articles

Fabrication of ultrathin suspended membranes from atomic layer deposition films

Michael J. Elowson, Rohan Dhall, Adam Schwartzberg, Stephanie Y. Chang, Vittoria Tommasini, Sardar B. Alam, Emory M. Chan, Stefano Cabrini, Shaul Aloni
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 023001 (2022)
https://doi.org/10.1116/6.0001309
Published: February 2022
View article titled, Fabrication of ultrathin suspended membranes from atomic layer deposition films
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Includes: Supplementary data
Journal Articles

Enhanced focused ion beam milling with use of nested raster patterns

Roberto Garcia, Lucille A. Giannuzzi, Fred A. Stevie, Phillip Strader
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 014002 (2022)
https://doi.org/10.1116/6.0001411
Published: January 2022
View article titled, Enhanced focused ion beam milling with use of nested raster patterns
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