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Journal Articles

Large-field and high-resolution low-voltage scanning electron microscopy with correction of beam-image-shift-induced chromatic deflection aberration

S. Kizawa, D. Bizen, K. Suzuki, S. Mizutani, R. Watanabe, Y. Kasai, Y. Mizuhara
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 054003 (2024)
https://doi.org/10.1116/6.0003891
Published: August 2024
View article titled, Large-field and high-resolution low-voltage scanning electron microscopy with correction of beam-image-shift-induced chromatic deflection aberration
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Journal Articles

Focused ion beams from GaBiLi liquid metal alloy ion sources for nanofabrication and ion imaging

Achim Nadzeyka, Torsten Richter, Paul Mazarov, Fabian Meyer, Alexander Ost, Lars Bruchhaus
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062802 (2023)
https://doi.org/10.1116/6.0002918
Published: October 2023
View article titled, Focused ion beams from GaBiLi liquid metal alloy ion sources for nanofabrication and ion imaging
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Journal Articles

Low-energy scanning electron microscope using a monochromator with double-offset cylindrical lenses

Takashi Ogawa, Boklae Cho, Sang Jung Ahn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 06FJ01 (2015)
https://doi.org/10.1116/1.4931933
Published: October 2015
View article titled, Low-energy scanning electron microscope using a monochromator with double-offset cylindrical lenses
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Journal Articles

Modeling of counter streaming charged beams in MICHELLE-eBEAM

Serguei G. Ovtchinnikov, Simon J. Cooke, Masis M. Mkrtchyan, Roman Shtokhamer, Christopher Kostas, John J. Petillo, Paul F. Petric, Mark A. McCord, Alexander N. Vlasov, Baruch Levush
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06F406 (2013)
https://doi.org/10.1116/1.4827189
Published: October 2013
View article titled, Modeling of counter streaming charged beams in MICHELLE-eBEAM
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Journal Articles

Improved single ion implantation with scanning probe alignment

Michael Ilg, Christoph D. Weis, Julian Schwartz, Arun Persaud, Qing Ji, Cheuk Chi Lo, Jeffrey Bokor, Alex Hegyi, Elshad Guliyev, Ivo W. Rangelow, Thomas Schenkel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06FD04 (2012)
https://doi.org/10.1116/1.4767233
Published: November 2012
View article titled, Improved single ion implantation with scanning probe alignment
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Journal Articles

Mass filtered plasma focused ion beam system

Charles E. Otis, Anthony Graupera, Dustin Laur, Shouyin Zhang, Sean Kellogg, Greg Schwind
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06F604 (2012)
https://doi.org/10.1116/1.4764920
Published: November 2012
View article titled, Mass filtered plasma focused ion beam system
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Journal Articles

High-current electron optical design for reflective electron beam lithography direct write lithography

Mark McCord, Shinichi Kojima, Paul Petric, Alan Brodie, Jeff Sun
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C6C1–C6C5 (2010)
https://doi.org/10.1116/1.3505130
Published: November 2010
View article titled, High-current electron optical design for reflective electron beam lithography direct write lithography
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Journal Articles

Production of noble gas ion beams in a focused ion beam machine using an electron beam ion trap

Falk Ullmann, Frank Grossmann, Vladimir P. Ovsyannikov, Jacques Gierak, Eric Bourhis, Jacques Ferré, Jean Pierre Jamet, Alexandra Mougin, Günter Zschornack
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 25, 2162–2167 (2007)
https://doi.org/10.1116/1.2799971
Published: December 2007
View article titled, Production of noble gas ion beams in a focused ion beam machine using an electron beam ion trap
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Journal Articles

Low‐voltage electron‐optical system for the high‐speed inspection of integrated circuits

W. D. Meisburger, A. D. Brodie, A. A. Desai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 10, 2804–2808 (1992)
https://doi.org/10.1116/1.586006
Published: November 1992
View article titled, Low‐voltage electron‐optical system for the high‐speed inspection of integrated circuits
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Journal Articles

Requirements and performance of an electron‐beam column designed for x‐ray mask inspection

W. D. Meisburger, A. A. Desai, A. D. Brodie
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 9, 3010–3014 (1991)
https://doi.org/10.1116/1.585359
Published: November 1991
View article titled, Requirements and performance of an electron‐beam column designed for x‐ray mask inspection
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Journal Articles

Computer simulations of submicron FIB system optics

W. Thompson, I. Honjo, Mark Utlaut, H. Enge
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 1, 1125–1128 (1983)
https://doi.org/10.1116/1.582648
Published: October 1983
View article titled, Computer simulations of submicron FIB system optics
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