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Journal Articles

Synthesis of silver-decorated titanium dioxide nanostructured films for enhanced visible light photocatalysis

Laika Jayne C. Montefalcon, Arantxa Danielle S. Montallana, Aian B. Ontoria, Motoi Wada, Magdaleno R. Vasquez, Jr.
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062210 (2024)
https://doi.org/10.1116/6.0003913
Published: December 2024
View article titled, Synthesis of silver-decorated titanium dioxide nanostructured films for enhanced visible light photocatalysis
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Journal Articles

Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films

Nguyen Khac Binh, Pham Ngoc Yen Nhi, Tran Bao Quan, Pham Minh Tam, Nguyen Ngoc Phuong, Dao Minh Tuan, Pham Thi Kim Hang, Pham Hoai Phuong
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062205 (2024)
https://doi.org/10.1116/6.0003939
Published: November 2024
View article titled, Impact of <em>in situ</em> heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films
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Journal Articles

Effect of sputter power on red-shifted optoelectronic properties in magnetron sputtered Ag/ZnO thin films

GuruSampath Kumar A., Mahender C., Mahesh Kumar U., Obulapathi L., HemaChandra Rao B., Yamuna P., Thirupathi A., SomaSundar L. N. V. H., Venkata Ramana G.
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 054002 (2024)
https://doi.org/10.1116/6.0003813
Published: August 2024
View article titled, Effect of sputter power on red-shifted optoelectronic properties in magnetron sputtered Ag/ZnO thin films
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Journal Articles

Research on the improvement of the adhesion strength of the Cu films deposited on the Al2O3 films

Lingfeng Ouyang, Yin Gao, Huilong Zheng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 044203 (2024)
https://doi.org/10.1116/6.0003649
Published: July 2024
View article titled, Research on the improvement of the adhesion strength of the Cu films deposited on the Al<sub>2</sub>O<sub>3</sub> films
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Journal Articles

One-step formation of ZrON thin film on surface of carbon fine particles for membrane electrode assembly

Yudai Aihara, Takashi Iida, Kakeru Kodama, Hiroshi Iwata, Takao Sekiya
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034202 (2024)
https://doi.org/10.1116/6.0003542
Published: May 2024
View article titled, One-step formation of ZrON thin film on surface of carbon fine particles for membrane electrode assembly
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Journal Articles

Comment on “Restoration of the original depth distribution from the SIMS profile using the depth resolution function in framework of RMR model” [J. Vac. Sci. Technol. B 41, 024003 (2023)]

Siegfried Hofmann, JiangYong Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 056002 (2023)
https://doi.org/10.1116/6.0002779
Published: July 2023
View article titled, Comment on “Restoration of the original depth distribution from the SIMS profile using the depth resolution function in framework of RMR model” [J. Vac. Sci. Technol. B 41, 024003 (2023)]
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Journal Articles

Effect of sputtering-target composition on the structure, dielectric, ferroelectric, and energy storage properties of highly (00l)-oriented Ba(ZrxTi1–x)O3 films

Lei Li, Daili Gong, Fangren Hu, Hongbo Cheng, Wei Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 043801 (2023)
https://doi.org/10.1116/6.0002547
Published: June 2023
View article titled, Effect of sputtering-target composition on the structure, dielectric, ferroelectric, and energy storage properties of highly (00<em>l</em>)-oriented Ba(Zr<sub>x</sub>Ti<sub>1–x</sub>)O<sub>3</sub> films
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Journal Articles

In situ determination of sputtered Ni–Cu film composition from emission intensities

Susumu Imashuku
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 034002 (2023)
https://doi.org/10.1116/6.0002480
Published: April 2023
View article titled, <em>In situ</em> determination of sputtered Ni–Cu film composition from emission intensities
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Journal Articles

Spongy TiO2 layers deposited by gig-lox sputtering processes: Contact angle measurements

C. Spampinato, S. Valastro, E. Smecca, V. Arena, G. Mannino, A. La Magna, C. Corsaro, F. Neri, E. Fazio, A. Alberti
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012802 (2023)
https://doi.org/10.1116/6.0002225
Published: December 2022
View article titled, Spongy TiO<sub>2</sub> layers deposited by gig-lox sputtering processes: Contact angle measurements
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Journal Articles

Structure optimization of Spindt-type emitter fabricated by triode high power pulsed magnetron sputtering

Takeo Nakano, Hyuga Taniguchi, Nanako Dei, Makoto Ozawa, Md. Suruz Mian, Kei Oya, Katsuhisa Murakami, Masayoshi Nagao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 063201 (2022)
https://doi.org/10.1116/6.0002201
Published: November 2022
View article titled, Structure optimization of Spindt-type emitter fabricated by triode high power pulsed magnetron sputtering
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Journal Articles

Comment on “ZnO/Ag/graphene transparent conductive oxide film with ultrathin Ag layer” [J. Vac. Sci. Technol. B 39, 052208 (2021)]

B. L. Zhu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 056001 (2022)
https://doi.org/10.1116/6.0001934
Published: July 2022
View article titled, Comment on “ZnO/Ag/graphene transparent conductive oxide film with ultrathin Ag layer” [J. Vac. Sci. Technol. B 39, 052208 (2021)]
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Journal Articles

Device feasibility and performance improvement methodologies for thin film transistors using In-Ga-Sn-O channels prepared by atomic-layer deposition

Editor’s Pick
Shin-Ho Noh, Hyo-Eun Kim, Young-Ha Kwon, Nak-Jin Seong, Kyu-Jeong Choi, Sung-Min Yoon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 040602 (2022)
https://doi.org/10.1116/6.0001945
Published: June 2022
View article titled, Device feasibility and performance improvement methodologies for thin film transistors using In-Ga-Sn-O channels prepared by atomic-layer deposition
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Journal Articles

Tailoring of structual, optical, and electrical properties of Cu films by sputtering power and deposition atmosphere

Bailin Zhu, Jinhua Yin, Junmin Ma, Jun Wu, Xinwei Shi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022211 (2022)
https://doi.org/10.1116/6.0001673
Published: March 2022
View article titled, Tailoring of structual, optical, and electrical properties of Cu films by sputtering power and deposition atmosphere
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Includes: Supplementary data
Journal Articles

Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks

Editor’s Pick
Tobias Gergs, Borislav Borislavov, Jan Trieschmann
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 012802 (2022)
https://doi.org/10.1116/6.0001485
Published: December 2021
View article titled, Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks
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Journal Articles

Magnetron co-sputtered μm-thick Mo–Cu films as structural material with low heat extension for key parts of high-power millimeter-band vacuum microelectronic devices

Andrey V. Starodubov, Alexey A. Serdobintsev, Viktor V. Galushka, Ilya O. Kozhevnikov, Anton M. Pavlov, Giacomo Ulisse, Viktor Krozer, Nikita M. Ryskin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 014201 (2022)
https://doi.org/10.1116/6.0001552
Published: December 2021
View article titled, Magnetron co-sputtered <em>μ</em>m-thick Mo–Cu films as structural material with low heat extension for key parts of high-power millimeter-band vacuum microelectronic devices
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Journal Articles

Anomalous enhancement of focused ion beam etching by single raster propagating toward ion beam at glancing incidence

Joseph Favata, Valery Ray, Sina Shahbazmohamadi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062807 (2020)
https://doi.org/10.1116/6.0000555
Published: December 2020
View article titled, Anomalous enhancement of focused ion beam etching by single raster propagating toward ion beam at glancing incidence
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Journal Articles

Stability of TiO2-coated ZnO photocatalytic thin films for photodegradation of methylene blue

Rogel Jan B. Butalid, Anna Patricia S. Cristobal, Arantxa Danielle S. Montallana, Magdaleno R. Vasquez, Jr.
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062205 (2020)
https://doi.org/10.1116/6.0000306
Published: October 2020
View article titled, Stability of TiO<sub>2</sub>-coated ZnO photocatalytic thin films for photodegradation of methylene blue
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Journal Articles

Energy distributions of secondary ions for the Ar ion beam sputtering of indium tin oxide

Carsten Bundesmann, Anke Hellmich
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 064002 (2020)
https://doi.org/10.1116/6.0000516
Published: October 2020
View article titled, Energy distributions of secondary ions for the Ar ion beam sputtering of indium tin oxide
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Journal Articles

Bismuth vanadate photoanodes for water splitting deposited by radio frequency plasma reactive co-sputtering

Editor’s Pick
Matteo Pedroni, Gian Luca Chiarello, Niloofar Haghshenas, Maurizio Canetti, Dario Ripamonti, Elena Selli, Espedito Vassallo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 012203 (2020)
https://doi.org/10.1116/1.5129612
Published: December 2019
View article titled, Bismuth vanadate photoanodes for water splitting deposited by radio frequency plasma reactive co-sputtering
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Journal Articles

Optical, electrical, and structural properties of single-phase Ti2 − xN films deposited by cathodic cage

C. H. Verbeno, A. C. Kröhling, M. C. Miranda, T. C. Freitas, V. P. Nascimento, E. C. Passamani, L. C. Gontijo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061214 (2019)
https://doi.org/10.1116/1.5120836
Published: November 2019
View article titled, Optical, electrical, and structural properties of single-phase Ti<sub>2 − x</sub>N films deposited by cathodic cage
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