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Journal Articles

High-resolution chemical patterns from negative tone resists for the integration of extreme ultraviolet patterns of metal-oxide resists with directed self-assembly of block copolymers

Editor’s Pick
Kyunghyeon Lee, Emma Vargo, Christopher Eom, Ricardo Ruiz, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062804 (2024)
https://doi.org/10.1116/6.0004046
Published: October 2024
View article titled, High-resolution chemical patterns from negative tone resists for the integration of extreme ultraviolet patterns of metal-oxide resists with directed self-assembly of block copolymers
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Journal Articles

Fabrication of model ultrafiltration membranes with uniform, high aspect ratio pores

Editor’s Pick
Wen Chen, Soonmin Yim, Nestor J. Zaluzec, Gordon S. W. Craig, Seth B. Darling, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062803 (2024)
https://doi.org/10.1116/6.0004050
Published: October 2024
View article titled, Fabrication of model ultrafiltration membranes with uniform, high aspect ratio pores
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Journal Articles

Nanoimprint lithography guiding templates for advanced magnetic media fabrication

Editor’s Pick
Daniel Staaks, Yautzong Hsu, Kim Y. Lee, Philip L. Steiner, Zhaoning Yu, Jason J. Wu, ShuaiGang Xiao, XiaoMin Yang, Thomas Y. Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 013801 (2024)
https://doi.org/10.1116/6.0003210
Published: January 2024
View article titled, Nanoimprint lithography guiding templates for advanced magnetic media fabrication
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Includes: Supplementary data
Journal Articles

Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies

Sumit Choudhary, Midathala Yogesh, Daniel Schwarz, Hannes S. Funk, Subrata Ghosh, Satinder K. Sharma, Jörg Schulze, Kenneth E. Gonsalves
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052203 (2023)
https://doi.org/10.1116/6.0002767
Published: August 2023
View article titled, Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies
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Includes: Supplementary data
Journal Articles

Synergy of cold development and electron-beam exposure for Si nanotip patterning in quantum-electronic devices

I-Hsiang Wang, Pei-Wen Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052601 (2023)
https://doi.org/10.1116/6.0002845
Published: August 2023
View article titled, Synergy of cold development and electron-beam exposure for Si nanotip patterning in quantum-electronic devices
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Journal Articles

Evaluation of quality of thick photoresist film by acoustic resonant imaging technique

Hyelin Kim, Hironori Tohmyoh
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022601 (2023)
https://doi.org/10.1116/6.0002459
Published: February 2023
View article titled, Evaluation of quality of thick photoresist film by acoustic resonant imaging technique
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Journal Articles

Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices

Editor’s Pick
Kaustubh Vyas, Kashif M. Awan, Ksenia Dolgaleva
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012804 (2023)
https://doi.org/10.1116/6.0002167
Published: January 2023
View article titled, Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices
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Journal Articles

Persistent iodine contamination resulting from thermal evaporation of inorganic perovskites

FeaturedScilight
Quinn C. Burlingame, Alan B. Kaplan, Tianran Liu, Yueh-Lin Loo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 060601 (2022)
https://doi.org/10.1116/6.0002174
Published: October 2022
View article titled, Persistent iodine contamination resulting from thermal evaporation of inorganic perovskites
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Journal Articles

Combined ultraviolet- and electron-beam lithography with Micro-Resist-Technology GmbH ma-N1400 resist

D. J. Thoen, V. Murugesan, A. Pascual Laguna, K. Karatsu, A. Endo, J. J. A. Baselmans
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052603 (2022)
https://doi.org/10.1116/6.0001918
Published: September 2022
View article titled, Combined ultraviolet- and electron-beam lithography with Micro-Resist-Technology GmbH ma-N1400 resist
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Journal Articles

Seesaw-type modulation of secondary electron emission characteristics of polytetrafluoroethylene-MgO composite coating

Yahui Cai, Dan Wang, Wen Zhang, Yongning He
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 044001 (2022)
https://doi.org/10.1116/6.0001921
Published: June 2022
View article titled, Seesaw-type modulation of secondary electron emission characteristics of polytetrafluoroethylene-MgO composite coating
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Journal Articles

Stochastic defect removal coating for high-performance extreme ultraviolet lithography

Young Joo Choi, Ran Namgung, Jun Soo Kim, Dae Seok Song, Hyeon Park, Shin-hyo Bae, Min-Ki Chon, Min Soo Kim, Hyun-Ji Song, Hyun-Woo Kim, Suk Koo Hong
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 042602 (2022)
https://doi.org/10.1116/6.0001723
Published: May 2022
View article titled, Stochastic defect removal coating for high-performance extreme ultraviolet lithography
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Journal Articles

Nondestructive x-ray reflectivity analysis of Al distributions of ultraviolet-cured spin-coated resist films hybridized with trimethylaluminum

Kohei Chiba, Masaru Nakagawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 032601 (2022)
https://doi.org/10.1116/6.0001747
Published: April 2022
View article titled, Nondestructive x-ray reflectivity analysis of Al distributions of ultraviolet-cured spin-coated resist films hybridized with trimethylaluminum
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Includes: Supplementary data
Journal Articles

Investigating the pattern transfer fidelity of Norland Optical Adhesive 81 for nanogrooves by microtransfer molding

Rahman Sabahi-Kaviani, Regina Luttge
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062810 (2021)
https://doi.org/10.1116/6.0001333
Published: December 2021
View article titled, Investigating the pattern transfer fidelity of Norland Optical Adhesive 81 for nanogrooves by microtransfer molding
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Includes: Supplementary data
Journal Articles

Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser

Editor’s Pick
Vineeth Sasidharan, Alexander Neumann, S. R. J. Brueck
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062603 (2021)
https://doi.org/10.1116/6.0001377
Published: November 2021
View article titled, Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser
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Journal Articles

Lithographically patterned stretchable metallic microwiring on electrospun nanofiber mats

Scilight
Yutika Badhe, Pedro E. Rocha-Flores, Walter E. Voit, David Remer, Lauren Costella, Alexandra Joshi-Imre
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062801 (2021)
https://doi.org/10.1116/6.0001279
Published: October 2021
View article titled, Lithographically patterned stretchable metallic microwiring on electrospun nanofiber mats
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Journal Articles

Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint

Editor’s Pick
Sijia Xie, Jan Erjawetz, Christine Schuster, Helmut Schift
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052603 (2021)
https://doi.org/10.1116/6.0001206
Published: September 2021
View article titled, Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint
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Journal Articles

Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies

Pavani Vamsi Krishna Nittala, Karthika Haridas, Shivam Nigam, Saba Tasneem, Prosenjit Sen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052207 (2021)
https://doi.org/10.1116/6.0001160
Published: August 2021
View article titled, Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies
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Journal Articles

Fabrication of high aspect ratio and tilted nanostructures using extreme ultraviolet and soft x-ray interference lithography

Nassir Mojarad, Dimitrios Kazazis, Yasin Ekinci
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 042601 (2021)
https://doi.org/10.1116/6.0001089
Published: July 2021
View article titled, Fabrication of high aspect ratio and tilted nanostructures using extreme ultraviolet and soft x-ray interference lithography
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Journal Articles

Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application

Editor’s Pick
Maria Gabriela Gusmão Cacho, Khatia Benotmane, Patricia Pimenta-Barros, Charlotte Bouet, Guido Rademaker, Maxime Argoud, Christophe Navarro, Raluca Tiron, Nicolas Possémé
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 042801 (2021)
https://doi.org/10.1116/6.0001102
Published: June 2021
View article titled, Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application
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Journal Articles

Behavior of photoexcited electrons in hole-transport material-free perovskite solar cells

Editor’s Pick
Makoto Hirai, Yuji Takagi, Naoyuki Fujita
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 032202 (2021)
https://doi.org/10.1116/6.0000913
Published: April 2021
View article titled, Behavior of photoexcited electrons in hole-transport material-free perovskite solar cells
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