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Journal Articles

Real-time determination of sputtered TiC film composition using optical emission spectroscopy

Susumu Imashuku

J. Vac. Sci. Technol. B 43, 034002 (2025)

https://doi.org/10.1116/6.0004474

Published: May 2025

View articletitled, Real-time determination of sputtered TiC film composition using optical emission spectroscopy

Journal Articles

Effect of low-pressure postannealing on the electrical properties of VO₂ thin films

Xin Lin, Wanyu Jiang, Detao Mu, Yongfeng Jia, Shuoshuo Wang, Linhong Cao, Yajun Fu

J. Vac. Sci. Technol. B 43, 022807 (2025)

https://doi.org/10.1116/6.0004435

Published: March 2025

View articletitled, Effect of low-pressure postannealing on the electrical properties of VO2 thin films

Journal Articles

Thermal evaporation of thin Li films

Andrew S. Westover, Ritu Sahore, Katie L. Browning, Sergiy Kalnaus

J. Vac. Sci. Technol. B 43, 022401 (2025)

https://doi.org/10.1116/6.0004174

Published: March 2025

View articletitled, Thermal evaporation of thin Li films

Journal Articles

Optimized thermoelectric performance of porous Bi_0.5Sb_1.5Te₃ thin films through rapid thermal processing

Xujiang Tian, Rensheng Zhang, Jiapeng Yang, Shaojun Liang, Hanming Zhu, Song Yue

J. Vac. Sci. Technol. B 43, 022210 (2025)

https://doi.org/10.1116/6.0004322

Published: February 2025

View articletitled, Optimized thermoelectric performance of porous Bi0.5Sb1.5Te3 thin films through rapid thermal processing

Journal Articles

Behavior of bipolar pulsed high-power impulse magnetron sputtering plasma studied using Langmuir probe

Kam-Hong Chau, Yoshinobu Kawai, Jia-Lin Syu, Ying-Hung Chen, Chi-Wai Kan, Ju-Liang He

J. Vac. Sci. Technol. B 43, 024007 (2025)

https://doi.org/10.1116/6.0004188

Published: February 2025

View articletitled, Behavior of bipolar pulsed high-power impulse magnetron sputtering plasma studied using Langmuir probe

Journal Articles

Resistive switching characteristics of TiO₂ films prepared by DC magnetron sputtering: Effects of nitrogen composition and phase structure

Youzhuang Rong, Yongkang Yang, Mingjie Lv, Yao Liu, Changmin Wang, Dawei Cui, Yunyan Liu, Chang-Feng Yu, Gongxiang Wei

J. Vac. Sci. Technol. B 43, 022208 (2025)

https://doi.org/10.1116/6.0004216

Published: February 2025

View articletitled, Resistive switching characteristics of TiO2 films prepared by DC magnetron sputtering: Effects of nitrogen composition and phase structure

Journal Articles

Influence of O content on exothermic and self-propagating characteristics of Ti/SiO_x multilayer films

Ryota Fukuda, Takahiro Namazu

J. Vac. Sci. Technol. B 43, 022801 (2025)

https://doi.org/10.1116/6.0004192

Published: January 2025

View articletitled, Influence of O content on exothermic and self-propagating characteristics of Ti/SiOx multilayer films

Journal Articles

Effect of sputter power on red-shifted optoelectronic properties in magnetron sputtered Ag/ZnO thin films

GuruSampath Kumar A., Mahender C., Mahesh Kumar U., Obulapathi L., HemaChandra Rao B., Yamuna P., Thirupathi A., SomaSundar L. N. V. H., Venkata Ramana G.

J. Vac. Sci. Technol. B 42, 054002 (2024)

https://doi.org/10.1116/6.0003813

Published: August 2024

View articletitled, Effect of sputter power on red-shifted optoelectronic properties in magnetron sputtered Ag/ZnO thin films

Journal Articles

Research on the improvement of the adhesion strength of the Cu films deposited on the Al₂O₃ films

Lingfeng Ouyang, Yin Gao, Huilong Zheng

J. Vac. Sci. Technol. B 42, 044203 (2024)

https://doi.org/10.1116/6.0003649

Published: July 2024

View articletitled, Research on the improvement of the adhesion strength of the Cu films deposited on the Al2O3 films

Journal Articles

Effects of working pressure during magnetron sputtering on thermoelectric performance of flexible p-type Bi_0.5Sb_1.5Te₃ thin films

Ding Hu, Shaojun Liang, Yichun He, Rensheng Zhang, Song Yue

J. Vac. Sci. Technol. B 42, 032212 (2024)

https://doi.org/10.1116/6.0003631

Published: May 2024

View articletitled, Effects of working pressure during magnetron sputtering on thermoelectric performance of flexible p-type Bi0.5Sb1.5Te3 thin films

Includes: Supplementary data

Journal Articles

One-step formation of ZrON thin film on surface of carbon fine particles for membrane electrode assembly

Yudai Aihara, Takashi Iida, Kakeru Kodama, Hiroshi Iwata, Takao Sekiya

J. Vac. Sci. Technol. B 42, 034202 (2024)

https://doi.org/10.1116/6.0003542

Published: May 2024

View articletitled, One-step formation of ZrON thin film on surface of carbon fine particles for membrane electrode assembly

Journal Articles

Mid-infrared emission of germanium-tin films produced by sputtering

William W. Hernández-Montero, Carlos Zúñiga-Islas

J. Vac. Sci. Technol. B 42, 022210 (2024)

https://doi.org/10.1116/6.0003237

Published: March 2024

View articletitled, Mid-infrared emission of germanium-tin films produced by sputtering

Journal Articles

Electron emission properties of titanium nitride coated volcano-structured silicon emitters

Hiromasa Murata, Katsuhisa Murakami, Masayoshi Nagao

J. Vac. Sci. Technol. B 42, 013203 (2024)

https://doi.org/10.1116/6.0003234

Published: January 2024

View articletitled, Electron emission properties of titanium nitride coated volcano-structured silicon emitters

Journal Articles

Evaluation of the pumping performance of combinations of Ti–Zr–V–Hf alloy nonevaporable getter coatings with different morphologies, activation protocols controlled at cryogenic temperatures

Paul Smith, Sam Lodge, Andrew Chew

J. Vac. Sci. Technol. B 42, 014202 (2024)

https://doi.org/10.1116/6.0003152

Published: January 2024

View articletitled, Evaluation of the pumping performance of combinations of Ti–Zr–V–Hf alloy nonevaporable getter coatings with different morphologies, activation protocols controlled at cryogenic temperatures

Journal Articles

Optical properties of copper oxide thin films implanted with chromium ions

Katarzyna Ungeheuer, Konstanty W. Marszalek

J. Vac. Sci. Technol. B 41, 062208 (2023)

https://doi.org/10.1116/6.0003135

Published: December 2023

View articletitled, Optical properties of copper oxide thin films implanted with chromium ions

Journal Articles

Deposition and optical properties investigation of components for multilayer electrochromic system

Janusz Rybak, Konstanty W. Marszalek

J. Vac. Sci. Technol. B 41, 063401 (2023)

https://doi.org/10.1116/6.0003138

Published: October 2023

View articletitled, Deposition and optical properties investigation of components for multilayer electrochromic system

Journal Articles

Microstructure, creep properties, and electrical resistivity of magnetron sputtering deposited SAC305 thin films

Manish Ojha, Yousuf Mohammed, D. S. Stone, A. A. Elmustafa

J. Vac. Sci. Technol. B 41, 052205 (2023)

https://doi.org/10.1116/6.0002949

Published: September 2023

View articletitled, Microstructure, creep properties, and electrical resistivity of magnetron sputtering deposited SAC305 thin films

Journal Articles

Influence of processing conditions on the titanium–aluminum contact metallization on a silicon wafer for thermal management

Manish Singh, Lakshmi Narayanan Ramasubramanian, Raj N. Singh

J. Vac. Sci. Technol. B 41, 042208 (2023)

https://doi.org/10.1116/6.0002749

Published: June 2023

View articletitled, Influence of processing conditions on the titanium–aluminum contact metallization on a silicon wafer for thermal management

Journal Articles

Effect of sputtering-target composition on the structure, dielectric, ferroelectric, and energy storage properties of highly (00l)-oriented Ba(Zr_xTi_1–x)O₃ films

Lei Li, Daili Gong, Fangren Hu, Hongbo Cheng, Wei Zhang

J. Vac. Sci. Technol. B 41, 043801 (2023)

https://doi.org/10.1116/6.0002547

Published: June 2023

View articletitled, Effect of sputtering-target composition on the structure, dielectric, ferroelectric, and energy storage properties of highly (00l)-oriented Ba(ZrxTi1–x)O3 films

Journal Articles

Color control of titanium nitride thin films

Aian B. Ontoria, Magdaleno R. Vasquez, Jr.

J. Vac. Sci. Technol. B 41, 032204 (2023)

https://doi.org/10.1116/6.0002511

Published: April 2023

View articletitled, Color control of titanium nitride thin films

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Real-time determination of sputtered TiC film composition using optical emission spectroscopy

Effect of low-pressure postannealing on the electrical properties of VO₂ thin films

Thermal evaporation of thin Li films

Optimized thermoelectric performance of porous Bi_0.5Sb_1.5Te₃ thin films through rapid thermal processing

Behavior of bipolar pulsed high-power impulse magnetron sputtering plasma studied using Langmuir probe

Resistive switching characteristics of TiO₂ films prepared by DC magnetron sputtering: Effects of nitrogen composition and phase structure

Influence of O content on exothermic and self-propagating characteristics of Ti/SiO_x multilayer films

Effect of sputter power on red-shifted optoelectronic properties in magnetron sputtered Ag/ZnO thin films

Research on the improvement of the adhesion strength of the Cu films deposited on the Al₂O₃ films

Effects of working pressure during magnetron sputtering on thermoelectric performance of flexible p-type Bi_0.5Sb_1.5Te₃ thin films

One-step formation of ZrON thin film on surface of carbon fine particles for membrane electrode assembly

Mid-infrared emission of germanium-tin films produced by sputtering

Electron emission properties of titanium nitride coated volcano-structured silicon emitters

Evaluation of the pumping performance of combinations of Ti–Zr–V–Hf alloy nonevaporable getter coatings with different morphologies, activation protocols controlled at cryogenic temperatures

Optical properties of copper oxide thin films implanted with chromium ions

Deposition and optical properties investigation of components for multilayer electrochromic system

Microstructure, creep properties, and electrical resistivity of magnetron sputtering deposited SAC305 thin films

Influence of processing conditions on the titanium–aluminum contact metallization on a silicon wafer for thermal management

Effect of sputtering-target composition on the structure, dielectric, ferroelectric, and energy storage properties of highly (00l)-oriented Ba(Zr_xTi_1–x)O₃ films

Color control of titanium nitride thin films

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