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Journal Articles

Evolution of graphene nanoflake size and morphology in atmospheric pressure microwave plasma

Parker Hays, Dhruval Patel, Michael Stowell, Dren Qerimi, David Ruzic

J. Vac. Sci. Technol. B 43, 042801 (2025)

https://doi.org/10.1116/6.0004741

Published: July 2025

View articletitled, Evolution of graphene nanoflake size and morphology in atmospheric pressure microwave plasma

Journal Articles

Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel

Aiman H. Al-Allaq, Md Abdullah Mamun, Matt Poelker, Abdelmageed Elmustafa

J. Vac. Sci. Technol. B 43, 034203 (2025)

https://doi.org/10.1116/6.0004446

Published: April 2025

View articletitled, Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel

Journal Articles

Investigation of tilted etching of Si₃N₄ using CF₄/O₂ plasma: Process development and mechanism study

Zhihong Gao, Leyi Zhang, Yongzhi Fang, Dongyu Cen, Maoxiang Liu, Wenli Wu, Yan Ding

J. Vac. Sci. Technol. B 43, 032801 (2025)

https://doi.org/10.1116/6.0004412

Published: April 2025

View articletitled, Investigation of tilted etching of Si3N4 using CF4/O2 plasma: Process development and mechanism study

Journal Articles

Resistive switching effect of HfO₂/Nb:SrTiO₃ under the influence of nanodefects and varying atmospheric conditions

Chengang Dong, Jianbo Liu, Dongqing Liu, Xiaowei Han

J. Vac. Sci. Technol. B 43, 022214 (2025)

https://doi.org/10.1116/6.0004231

Published: March 2025

View articletitled, Resistive switching effect of HfO2/Nb:SrTiO3 under the influence of nanodefects and varying atmospheric conditions

Journal Articles

Does the blue luminescence of Eu-doped β-NaYF₄ originate from Eu²⁺ ions?

Robin E. Kroon, Mamello P. Mabe

J. Vac. Sci. Technol. B 43, 022213 (2025)

https://doi.org/10.1116/6.0004282

Published: March 2025

View articletitled, Does the blue luminescence of Eu-doped β-NaYF4 originate from Eu2+ ions?

Journal Articles

Thermal evaporation of thin Li films

Andrew S. Westover, Ritu Sahore, Katie L. Browning, Sergiy Kalnaus

J. Vac. Sci. Technol. B 43, 022401 (2025)

https://doi.org/10.1116/6.0004174

Published: March 2025

View articletitled, Thermal evaporation of thin Li films

Journal Articles

Aspect ratio and height estimation in critical dimension scanning electron microscope metrology using deep learning combined with features of proximity effect

Delong Chen, Qingmao Zhang, Zhuming Liu

J. Vac. Sci. Technol. B 43, 024004 (2025)

https://doi.org/10.1116/6.0004025

Published: February 2025

View articletitled, Aspect ratio and height estimation in critical dimension scanning electron microscope metrology using deep learning combined with features of proximity effect

Journal Articles

Viability of HFO-1234ze(E) (trans-1,3,3,3-tetrafluoropropene) as a low global warming potential silicon dioxide etch gas

Aaron J. Windsor, Jeremy C. Clark, George McMurdy, Eric A. Joseph, Robert G. Syvret, Ronald J. Olson, Jr., Judy J. Cha

J. Vac. Sci. Technol. B 43, 022206 (2025)

https://doi.org/10.1116/6.0004194

Published: February 2025

View articletitled, Viability of HFO-1234ze(E) (trans-1,3,3,3-tetrafluoropropene) as a low global warming potential silicon dioxide etch gas

Journal Articles

Fabrication of microstructures on porous nanolattices

Nayoung Kim, Saurav Mohanty, Vijay Anirudh Premnath, Ethan Flores, Chih-Hao Chang

J. Vac. Sci. Technol. B 43, 022601 (2025)

https://doi.org/10.1116/6.0004054

Published: February 2025

View articletitled, Fabrication of microstructures on porous nanolattices

Journal Articles

Auto-ponderomotive beam guiding up to 9.5 keV

F. D. F. Schmidt-Kaler, J. Walther, M. Seidling, R. Zimmermann, P. Hommelhoff

J. Vac. Sci. Technol. B 43, 023202 (2025)

https://doi.org/10.1116/6.0004293

Published: February 2025

View articletitled, Auto-ponderomotive beam guiding up to 9.5 keV

Journal Articles

Exploring SiC CVD growth parameters compatible with remote epitaxy

Daniel J. Pennachio, Jenifer R. Hajzus, Rachael L. Myers-Ward

J. Vac. Sci. Technol. B 43, 022205 (2025)

https://doi.org/10.1116/6.0004106

Published: February 2025

View articletitled, Exploring SiC CVD growth parameters compatible with remote epitaxy

Journal Articles

Photoluminescence lifetime of perovskites on modified substrates

Xavier Vorhies, Jessica M. Andriolo, Joseph J. Thiebes, Emma K. Orcutt, Erik M. Grumstrup, Jack L. Skinner

J. Vac. Sci. Technol. B 43, 022203 (2025)

https://doi.org/10.1116/6.0004115

Published: February 2025

View articletitled, Photoluminescence lifetime of perovskites on modified substrates

Journal Articles

Film characteristics of atmospheric pressure plasma-treated chitosan solution

Vera Angela Siao, Christian Lorenz Mahinay, Catherine Joy Dela Cruz, Kathrina Lois Taaca

J. Vac. Sci. Technol. B 43, 024001 (2025)

https://doi.org/10.1116/6.0004076

Published: January 2025

View articletitled, Film characteristics of atmospheric pressure plasma-treated chitosan solution

Journal Articles

Influence of O content on exothermic and self-propagating characteristics of Ti/SiO_x multilayer films

Ryota Fukuda, Takahiro Namazu

J. Vac. Sci. Technol. B 43, 022801 (2025)

https://doi.org/10.1116/6.0004192

Published: January 2025

View articletitled, Influence of O content on exothermic and self-propagating characteristics of Ti/SiOx multilayer films

Journal Articles

Self-aligned fabrication of vertical, fin-based structures

Joshua Perozek, Tomás Palacios

J. Vac. Sci. Technol. B 42, 063209 (2024)

https://doi.org/10.1116/6.0004047

Published: December 2024

View articletitled, Self-aligned fabrication of vertical, fin-based structures

Journal Articles

Epitaxial SiGeSn grown on Si by ion implantation

Chinenye U. Ekeruche, Mikayla Davila, Peter J. Simpson, Karen L. Kavanagh, Lyudmila V. Goncharova

J. Vac. Sci. Technol. B 42, 062206 (2024)

https://doi.org/10.1116/6.0003933

Published: November 2024

View articletitled, Epitaxial SiGeSn grown on Si by ion implantation

Journal Articles

Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films

Nguyen Khac Binh, Pham Ngoc Yen Nhi, Tran Bao Quan, Pham Minh Tam, Nguyen Ngoc Phuong, Dao Minh Tuan, Pham Thi Kim Hang, Pham Hoai Phuong

J. Vac. Sci. Technol. B 42, 062205 (2024)

https://doi.org/10.1116/6.0003939

Published: November 2024

View articletitled, Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films

Journal Articles

Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask

Shiyang Li, Shuhu Huan, Tao Ren, Ying Liu, Yilin Hong, Shaojun Fu

J. Vac. Sci. Technol. B 42, 062603 (2024)

https://doi.org/10.1116/6.0003946

Published: November 2024

View articletitled, Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask

Journal Articles

Fabrication of model ultrafiltration membranes with uniform, high aspect ratio pores

Wen Chen, Soonmin Yim, Nestor J. Zaluzec, Gordon S. W. Craig, Seth B. Darling, Paul F. Nealey

J. Vac. Sci. Technol. B 42, 062803 (2024)

https://doi.org/10.1116/6.0004050

Published: October 2024

View articletitled, Fabrication of model ultrafiltration membranes with uniform, high aspect ratio pores

Journal Articles

Constant period line gratings as a metric for patterning fidelity in electron beam lithography

C. R. Fasano, F. Cruz Aguirre, C. T. DeRoo, K. Hoadley, J. A. B. Termini

J. Vac. Sci. Technol. B 42, 064001 (2024)

https://doi.org/10.1116/6.0003958

Published: October 2024

View articletitled, Constant period line gratings as a metric for patterning fidelity in electron beam lithography

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Evolution of graphene nanoflake size and morphology in atmospheric pressure microwave plasma

Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel

Investigation of tilted etching of Si₃N₄ using CF₄/O₂ plasma: Process development and mechanism study

Resistive switching effect of HfO₂/Nb:SrTiO₃ under the influence of nanodefects and varying atmospheric conditions

Does the blue luminescence of Eu-doped β-NaYF₄ originate from Eu²⁺ ions?

Thermal evaporation of thin Li films

Aspect ratio and height estimation in critical dimension scanning electron microscope metrology using deep learning combined with features of proximity effect

Viability of HFO-1234ze(E) (trans-1,3,3,3-tetrafluoropropene) as a low global warming potential silicon dioxide etch gas

Fabrication of microstructures on porous nanolattices

Auto-ponderomotive beam guiding up to 9.5 keV

Exploring SiC CVD growth parameters compatible with remote epitaxy

Photoluminescence lifetime of perovskites on modified substrates

Film characteristics of atmospheric pressure plasma-treated chitosan solution

Influence of O content on exothermic and self-propagating characteristics of Ti/SiO_x multilayer films

Self-aligned fabrication of vertical, fin-based structures

Epitaxial SiGeSn grown on Si by ion implantation

Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films

Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask

Fabrication of model ultrafiltration membranes with uniform, high aspect ratio pores

Constant period line gratings as a metric for patterning fidelity in electron beam lithography

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