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Journal Articles
Evolution of graphene nanoflake size and morphology in atmospheric pressure microwave plasma
J. Vac. Sci. Technol. B 43, 042801 (2025)
Published: July 2025
Journal Articles
Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel
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J. Vac. Sci. Technol. B 43, 034203 (2025)
Published: April 2025
Journal Articles
Investigation of tilted etching of Si3N4 using CF4/O2 plasma: Process development and mechanism study
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J. Vac. Sci. Technol. B 43, 032801 (2025)
Published: April 2025
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Resistive switching effect of HfO2/Nb:SrTiO3 under the influence of nanodefects and varying atmospheric conditions
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J. Vac. Sci. Technol. B 43, 022214 (2025)
Published: March 2025
Journal Articles
J. Vac. Sci. Technol. B 43, 022213 (2025)
Published: March 2025
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Thermal evaporation of thin Li films
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J. Vac. Sci. Technol. B 43, 022401 (2025)
Published: March 2025
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Aspect ratio and height estimation in critical dimension scanning electron microscope metrology using deep learning combined with features of proximity effect
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J. Vac. Sci. Technol. B 43, 024004 (2025)
Published: February 2025
Journal Articles
Viability of HFO-1234ze(E) (trans-1,3,3,3-tetrafluoropropene) as a low global warming potential silicon dioxide etch gas
Available to PurchaseAaron J. Windsor, Jeremy C. Clark, George McMurdy, Eric A. Joseph, Robert G. Syvret, Ronald J. Olson, Jr., Judy J. Cha
J. Vac. Sci. Technol. B 43, 022206 (2025)
Published: February 2025
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Fabrication of microstructures on porous nanolattices
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J. Vac. Sci. Technol. B 43, 022601 (2025)
Published: February 2025
Journal Articles
Auto-ponderomotive beam guiding up to 9.5 keV
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J. Vac. Sci. Technol. B 43, 023202 (2025)
Published: February 2025
Journal Articles
J. Vac. Sci. Technol. B 43, 022205 (2025)
Published: February 2025
Journal Articles
Photoluminescence lifetime of perovskites on modified substrates
Available to PurchaseXavier Vorhies, Jessica M. Andriolo, Joseph J. Thiebes, Emma K. Orcutt, Erik M. Grumstrup, Jack L. Skinner
J. Vac. Sci. Technol. B 43, 022203 (2025)
Published: February 2025
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Film characteristics of atmospheric pressure plasma-treated chitosan solution
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J. Vac. Sci. Technol. B 43, 024001 (2025)
Published: January 2025
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Influence of O content on exothermic and self-propagating characteristics of Ti/SiOx multilayer films
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J. Vac. Sci. Technol. B 43, 022801 (2025)
Published: January 2025
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J. Vac. Sci. Technol. B 42, 063209 (2024)
Published: December 2024
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Epitaxial SiGeSn grown on Si by ion implantation
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J. Vac. Sci. Technol. B 42, 062206 (2024)
Published: November 2024
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Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films
Available to PurchaseNguyen Khac Binh, Pham Ngoc Yen Nhi, Tran Bao Quan, Pham Minh Tam, Nguyen Ngoc Phuong, Dao Minh Tuan, Pham Thi Kim Hang, Pham Hoai Phuong
J. Vac. Sci. Technol. B 42, 062205 (2024)
Published: November 2024
Journal Articles
Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask
J. Vac. Sci. Technol. B 42, 062603 (2024)
Published: November 2024
Journal Articles
Fabrication of model ultrafiltration membranes with uniform, high aspect ratio pores
J. Vac. Sci. Technol. B 42, 062803 (2024)
Published: October 2024
Journal Articles
Constant period line gratings as a metric for patterning fidelity in electron beam lithography
J. Vac. Sci. Technol. B 42, 064001 (2024)
Published: October 2024
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