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Journal Articles

Effect of Ag layer thickness and annealing treatment on the transmittance and conductivity of transparent antennas fabricated using ITO/Ag/ITO structures

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Yoji Yasuda, Yuka Saitou, Fukuro Koshiji, Takayuki Uchida
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 042204 (2025)
https://doi.org/10.1116/6.0004573
Published: June 2025
View articletitled, Effect of Ag layer thickness and annealing treatment on the transmittance and conductivity of transparent antennas fabricated using ITO/Ag/ITO structures
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Journal Articles

Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon

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Taeseung Jung, Seungyeob Kim, Sangho Lee, Jinho Ahn, Sanghun Jeon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 063202 (2024)
https://doi.org/10.1116/6.0003901
Published: October 2024
View articletitled, Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon
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Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit

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Haolin Jia, Boyi zhou, Tao Wang, Yanfu Wu, Lina Yang, Zengqian Ding, Shuming Li, Xiao Cai, Kanglin Xiong, Jiagui Feng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052210 (2023)
https://doi.org/10.1116/6.0002886
Published: September 2023
View articletitled, Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit
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Includes: Supplementary data
Journal Articles

Rubidium focused ion beam induced platinum deposition

Open Access
Y. Li, S. Xu, M. Sezen, F. Bakan Misirlioglu, E. J. D. Vredenbregt
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042803 (2023)
https://doi.org/10.1116/6.0002609
Published: June 2023
View articletitled, Rubidium focused ion beam induced platinum deposition
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Journal Articles

Ohmic contact structures on β-Ga2O3 with n+ β-Ga2O3 pulsed laser deposition layers

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Elizabeth V. Favela, Hyung Min Jeon, Kevin D. Leedy, Kun Zhang, Szu-Wei Tung, Francelia Sanchez Escobar, C. V. Ramana, Lisa M. Porter
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032205 (2023)
https://doi.org/10.1116/6.0002620
Published: May 2023
View articletitled, Ohmic contact structures on β-Ga2O3 with n+ β-Ga2O3 pulsed laser deposition layers
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Includes: Supplementary data
Journal Articles

Apparent size effects on dopant activation in nanometer-wide Si fins

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Steven Folkersma, Janusz Bogdanowicz, Paola Favia, Lennaert Wouters, Dirch Hjorth Petersen, Ole Hansen, Henrik Hartmann Henrichsen, Peter Former Nielsen, Lior Shiv, Wilfried Vandervorst
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 023202 (2021)
https://doi.org/10.1116/6.0000921
Published: March 2021
View articletitled, Apparent size effects on dopant activation in nanometer-wide Si fins
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Journal Articles

β-Ga2O3 Schottky diodes based strain gauges with high resistance, large gauge factor, and high operating temperature

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Bo-You Liu, Jian V. Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 012206 (2021)
https://doi.org/10.1116/6.0000776
Published: January 2021
View articletitled, β-Ga2O3 Schottky diodes based strain gauges with high resistance, large gauge factor, and high operating temperature
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Journal Articles

Effects of oxygen on the resistivity in Au thin films with Ti-Al adhesion layer

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Chiara D. Nascimento, Everton G. Souza, Cesar Aguzzoli, Rafael L. Cruz
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 052202 (2019)
https://doi.org/10.1116/1.5119099
Published: August 2019
View articletitled, Effects of oxygen on the resistivity in Au thin films with Ti-Al adhesion layer
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Journal Articles

Oxidation and wet-etching behavior of MoAlTi thin films deposited by sputtering from a rotatable MoAlTi compound target

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Roland Lorenz, Michael O’Sullivan, Dietmar Sprenger, Bernhard Lang, Harald Köstenbauer, Jörg Winkler, Christian Mitterer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 021202 (2019)
https://doi.org/10.1116/1.5079866
Published: February 2019
View articletitled, Oxidation and wet-etching behavior of MoAlTi thin films deposited by sputtering from a rotatable MoAlTi compound target
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Journal Articles

Effects of oxygen-inserted layers and oxide capping layer on dopant activation for the formation of ultrashallow p-n junctions in silicon

Open Access
Xi Zhang, Daniel Connelly, Hideki Takeuchi, Marek Hytha, Robert J. Mears, Leonard M. Rubin, Tsu-Jae King Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 061211 (2018)
https://doi.org/10.1116/1.5062366
Published: December 2018
View articletitled, Effects of oxygen-inserted layers and oxide capping layer on dopant activation for the formation of ultrashallow p-n junctions in silicon
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Journal Articles

Three-wire method to characterize the thermoelectric properties of one-dimensional materials

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Weigang Ma, Shaoyi Shi, Xing Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 022903 (2018)
https://doi.org/10.1116/1.5022118
Published: January 2018
View articletitled, Three-wire method to characterize the thermoelectric properties of one-dimensional materials
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Journal Articles

In situ annealing of III1-xMnxV ferromagnetic semiconductors

Free
Xinyu Liu, Seul-Ki Bac, Pitambar Sapkota, Cameron Gorsak, Xiang Li, Sining Dong, Sanghoon Lee, Sylwia Ptasinska, Jacek K. Furdyna, Margaret Dobrowolska
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 02D102 (2018)
https://doi.org/10.1116/1.5014983
Published: January 2018
View articletitled, In situ annealing of III1-xMnxV ferromagnetic semiconductors
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Journal Articles

In situ resistance measurements during physical vapor deposition of ultrathin metal films on Si(111) at room temperature

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Bernhard Lutzer, Ole Bethge, Christina Zimmermann, Jürgen Smoliner, Emmerich Bertagnolli
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 051802 (2017)
https://doi.org/10.1116/1.5001669
Published: September 2017
View articletitled, In situ resistance measurements during physical vapor deposition of ultrathin metal films on Si(111) at room temperature
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Journal Articles

Enhanced recrystallization and dopant activation of P+ ion-implanted super-thin Ge layers by RF hydrogen plasma treatment

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Alexei N. Nazarov, Volodymyr O. Yukhymchuk, Yurii V. Gomeniuk, Sergiy B. Kryvyi, Pavel N. Okholin, Petro M. Lytvyn, Vasyl P. Kladko, Volodymyr S. Lysenko, Volodymyr I. Glotov, Illya E. Golentus, Enrico Napolitani, Ray Duffy
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 051203 (2017)
https://doi.org/10.1116/1.4996139
Published: August 2017
View articletitled, Enhanced recrystallization and dopant activation of P+ ion-implanted super-thin Ge layers by RF hydrogen plasma treatment
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Journal Articles

Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers

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Imane Souli, Velislava L. Terziyska, Jozef Keckes, Werner Robl, Johannes Zechner, Christian Mitterer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 022201 (2017)
https://doi.org/10.1116/1.4975805
Published: February 2017
View articletitled, Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers
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Journal Articles

Structure compensation and illumination uniformity improvement through inkjet printing in organic light-emitting diode subpixels

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Chin-Yen Lin, Li-Wen Wang, Kuan-Hsun Liao, Cheng-Yao Lo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 020601 (2017)
https://doi.org/10.1116/1.4974932
Published: January 2017
View articletitled, Structure compensation and illumination uniformity improvement through inkjet printing in organic light-emitting diode subpixels
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Journal Articles

Barrier tuning of atomic layer deposited Ta2O5 and Al2O3 in double dielectric diodes

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Ibrahim Nemr Noureddine, Naser Sedghi, Ivona Z. Mitrovic, Steve Hall
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 01A117 (2017)
https://doi.org/10.1116/1.4974219
Published: January 2017
View articletitled, Barrier tuning of atomic layer deposited Ta2O5 and Al2O3 in double dielectric diodes
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Journal Articles

Direct transfer of corrugated graphene sheets as stretchable electrodes

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Junjun Ding, Frank T. Fisher, Eui-Hyeok Yang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 051205 (2016)
https://doi.org/10.1116/1.4961594
Published: August 2016
View articletitled, Direct transfer of corrugated graphene sheets as stretchable electrodes
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Journal Articles

Comparative study of the differential resistance of GaAs- and GaN-based laser diodes

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Xiang Li, Zongshun Liu, Degang Zhao, Desheng Jiang, Ping Chen, Jianjun Zhu, Jing Yang, Lingcong Le, Wei Liu, Xiaoguang He, Xiaojing Li, Feng Liang, Liqun Zhang, Jianping Liu, Hui Yang, Yuantao Zhang, Guotong Du
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 041211 (2016)
https://doi.org/10.1116/1.4950746
Published: May 2016
View articletitled, Comparative study of the differential resistance of GaAs- and GaN-based laser diodes
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Journal Articles

Multiwalled carbon nanotube and graphene–polystyrene nanocomposites for bolometric detection

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Ibrahim El-chami, Oberon Dixon-Luinenburg, Behraad Bahreyni
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 042001 (2016)
https://doi.org/10.1116/1.4945804
Published: April 2016
View articletitled, Multiwalled carbon nanotube and graphene–polystyrene nanocomposites for bolometric detection
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