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Journal Articles

Large-area fabrication of nanometer-scale features on GaN using e-beam lithography

Firat Yasar, Richard E. Muller, Arezou Khoshakhlagh, Sam A. Keo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022801 (2024)
https://doi.org/10.1116/6.0003270
Published: February 2024
View article titled, Large-area fabrication of nanometer-scale features on GaN using e-beam lithography
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Journal Articles

Fabrication of three-dimensional opal nanolattices using template-directed colloidal assembly

Editor’s Pick
Vijay Anirudh Premnath, I.-Te Chen, Kun-Chieh Chien, Chih-Hao Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 062803 (2022)
https://doi.org/10.1116/6.0002112
Published: November 2022
View article titled, Fabrication of three-dimensional opal nanolattices using template-directed colloidal assembly
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Journal Articles

Optimal design and fabrication of ITO photonic crystal using e-beam patterned hydrogen silsesquioxane resist

Jeanne Solard, Mahmoud Chakaroun, Azzedine Boudrioua
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 022802 (2020)
https://doi.org/10.1116/1.5142533
Published: March 2020
View article titled, Optimal design and fabrication of ITO photonic crystal using e-beam patterned hydrogen silsesquioxane resist
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Journal Articles

Direct laser writing of birefringent photonic crystals for the infrared spectral range

Editor’s Pick
Marc Lata, Yanzeng Li, Serang Park, Micheal J. McLamb, Tino Hofmann
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062905 (2019)
https://doi.org/10.1116/1.5122991
Published: October 2019
View article titled, Direct laser writing of birefringent photonic crystals for the infrared spectral range
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Journal Articles

Improvement of silicon waveguide transmission by advanced e-beam lithography data fracturing strategies

Shane Patrick, Richard J. Bojko, Stefan J. H. Stammberger, Enxiao Luan, Lukas Chrostowski
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G504 (2017)
https://doi.org/10.1116/1.4991900
Published: October 2017
View article titled, Improvement of silicon waveguide transmission by advanced e-beam lithography data fracturing strategies
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Journal Articles

Synthesis and self-assembly of low χ block copolymers with large periodicity

Caleb L. Breaux, Clifford L. Henderson, Haibo Li, Bing Li, Mark Neisser
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06GI02 (2017)
https://doi.org/10.1116/1.4991874
Published: October 2017
View article titled, Synthesis and self-assembly of low χ block copolymers with large periodicity
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Journal Articles

Patterning of electrically tunable light-emitting photonic structures demonstrating bound states in the continuum

Editor’s Pick
Erika Penzo, Silvia Romano, Yu Wang, Scott Dhuey, Luca Dal Negro, Vito Mocella, Stefano Cabrini
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G401 (2017)
https://doi.org/10.1116/1.4994849
Published: September 2017
View article titled, Patterning of electrically tunable light-emitting photonic structures demonstrating bound states in the continuum
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Journal Articles

Optimized process for fabrication of free-standing silicon nanophotonic devices

Paul Seidler
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 031209 (2017)
https://doi.org/10.1116/1.4983173
Published: May 2017
View article titled, Optimized process for fabrication of free-standing silicon nanophotonic devices
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Journal Articles

Large-scale fabrication of a simple cubic metal-oxide photonic crystal for light-trapping applications

Brian J. Frey, Ping Kuang, Shawn-Yu Lin, Jian-Hua Jiang, Sajeev John
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 021804 (2015)
https://doi.org/10.1116/1.4913873
Published: March 2015
View article titled, Large-scale fabrication of a simple cubic metal-oxide photonic crystal for light-trapping applications
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Journal Articles

Photonic microstructures in lithium niobate by potassium hydroxide-assisted ion beam-enhanced etching

Reinhard Geiss, Juliane Brandt, Holger Hartung, Andreas Tünnermann, Thomas Pertsch, Ernst-Bernhard Kley, Frank Schrempel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 010601 (2015)
https://doi.org/10.1116/1.4902087
Published: November 2014
View article titled, Photonic microstructures in lithium niobate by potassium hydroxide-assisted ion beam-enhanced etching
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Journal Articles

Clinical probe utilizing surface enhanced Raman scattering

Jeonghwan Kim, Dooyoung Hah, Theda Daniels-Race, Martin Feldman
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 06FD02 (2014)
https://doi.org/10.1116/1.4896479
Published: September 2014
View article titled, Clinical probe utilizing surface enhanced Raman scattering
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Journal Articles

Fabrication of high quality factor GaAs/InAsSb photonic crystal microcavities by inductively coupled plasma etching and fast wet etching

Iván Prieto González, Luis Enrique Muñoz Camuñez, Alfonso González Taboada, Carmen Robles Urdiales, Jose María Ripalda Cobián, Pablo Aitor Postigo Resa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 011204 (2014)
https://doi.org/10.1116/1.4836517
Published: December 2013
View article titled, Fabrication of high quality factor GaAs/InAsSb photonic crystal microcavities by inductively coupled plasma etching and fast wet etching
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Journal Articles

Nanostructuring of free-standing, dielectric membranes using electron-beam lithography

Jon Olav Grepstad, Martin M. Greve, Thomas Reisinger, Bodil Holst
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06F402 (2013)
https://doi.org/10.1116/1.4820019
Published: September 2013
View article titled, Nanostructuring of free-standing, dielectric membranes using electron-beam lithography
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Journal Articles

Fabrication of transferrable, fully suspended silicon photonic crystal nanomembranes exhibiting vivid structural color and high-Q guided resonance

Chenxi Lin, Luis Javier Martínez, Michelle L. Povinelli
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 050606 (2013)
https://doi.org/10.1116/1.4819297
Published: August 2013
View article titled, Fabrication of transferrable, fully suspended silicon photonic crystal nanomembranes exhibiting vivid structural color and high-Q guided resonance
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Journal Articles

Enhanced light output from light emitting diodes with two-dimensional cone-shape nanostructured surface

Benzhong Wang, Soo-Jin Chua
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 032205 (2013)
https://doi.org/10.1116/1.4804406
Published: May 2013
View article titled, Enhanced light output from light emitting diodes with two-dimensional cone-shape nanostructured surface
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Journal Articles

Analyzing pattern retention for multilayer focused ion beam induced quantum dot structures

Marta Luengo-Kovac, Timothy W. Saucer, Andrew J. Martin, Joanna Millunchick, Vanessa Sih
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 031208 (2013)
https://doi.org/10.1116/1.4804278
Published: May 2013
View article titled, Analyzing pattern retention for multilayer focused ion beam induced quantum dot structures
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Journal Articles

Crystallographic dependence of the lateral undercut wet etch rate of Al0.5In0.5P in diluted HCl for III–V sacrificial release

Thor Ansbæk, Elizaveta S. Semenova, Kresten Yvind, Ole Hansen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 011209 (2013)
https://doi.org/10.1116/1.4771971
Published: December 2012
View article titled, Crystallographic dependence of the lateral undercut wet etch rate of Al<sub>0.5</sub>In<sub>0.5</sub>P in diluted HCl for III–V sacrificial release
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Journal Articles

Large-area fabrication of high aspect ratio tantalum photonic crystals for high-temperature selective emitters

Veronika Rinnerbauer, Sidy Ndao, Yi Xiang Yeng, Jay J. Senkevich, Klavs F. Jensen, John D. Joannopoulos, Marin Soljačić, Ivan Celanovic, Robert D. Geil
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 011802 (2013)
https://doi.org/10.1116/1.4771901
Published: December 2012
View article titled, Large-area fabrication of high aspect ratio tantalum photonic crystals for high-temperature selective emitters
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Journal Articles

Gas chopping etching process for InP based nanostructures with high aspect ratios

Sohaib Afzal, Johann Peter Reithmaier
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 060601 (2012)
https://doi.org/10.1116/1.4754293
Published: September 2012
View article titled, Gas chopping etching process for InP based nanostructures with high aspect ratios
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Journal Articles

Fabrication of digital planar holograms into high refractive index waveguide core for spectroscopy-on-chip applications

Cosimo Calò, Valeria Lacatena, Scott D. Dhuey, Stefano Cabrini, Sergey Babin, Christophe Peroz, Alexander Koshelev, Igor Ivonin, Alexander Goltsov, Vladimir Yankov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06FE01 (2012)
https://doi.org/10.1116/1.4750038
Published: September 2012
View article titled, Fabrication of digital planar holograms into high refractive index waveguide core for spectroscopy-on-chip applications
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