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Journal Articles
Kaitian Zhang, Chenxi Hu, Vijay Gopal Thirupakuzi Vangipuram, Lingyu Meng, Christopher Chae, Menglin Zhu, Jinwoo Hwang, Kathleen Kash, Hongping Zhao
J. Vac. Sci. Technol. B 41, 062207 (2023)
Published: November 2023
Journal Articles
J. Vac. Sci. Technol. B 41, 063401 (2023)
Published: October 2023
Journal Articles
J. Vac. Sci. Technol. B 41, 054201 (2023)
Published: August 2023
Includes: Supplementary data
Journal Articles
Jheng-Ying Wu, Yu-Fu Wang, Chia-You Liu, Shin-Chun Kuo, Tzu-Hsuan Chen, Jiun-Yun Li, Chin-Ya Huang, Chien-Hao Liu, Jung-Yen Yang, Chun-Chieh Chang, Tzu-Hsuan Chang
J. Vac. Sci. Technol. B 41, 042202 (2023)
Published: June 2023
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. B 41, 012203 (2023)
Published: December 2022
Journal Articles
J. Vac. Sci. Technol. B 40, 062210 (2022)
Published: November 2022
Includes: Supplementary data
Journal Articles
Tomohiro Nishitani, Yuta Arakawa, Shotaro Noda, Atsushi Koizumi, Daiki Sato, Haruka Shikano, Hokuto Iijima, Yoshio Honda, Hiroshi Amano
J. Vac. Sci. Technol. B 40, 064203 (2022)
Published: November 2022
Journal Articles
J. Vac. Sci. Technol. B 40, 032801 (2022)
Published: April 2022
Journal Articles
J. Vac. Sci. Technol. B 40, 022209 (2022)
Published: March 2022
Journal Articles
Fabrication of black GaAs by maskless inductively coupled plasma etching in Cl2/BCl3/O2/Ar chemistry
J. Vac. Sci. Technol. B 40, 022205 (2022)
Published: February 2022
Journal Articles
Deming Meng, Yifei Wang, Hao Yang, Buyun Chen, Pan Hu, Boxiang Song, Yunxiang Wang, Zerui Liu, Tse-Hsien Ou, Ximing Zheng, Yichen Gong, Wei Wu
J. Vac. Sci. Technol. B 39, 064001 (2021)
Published: October 2021
Journal Articles
Hantian Gao, Shreyas Muralidharan, Md Rezaul Karim, Lei R. Cao, Kevin D. Leedy, Hongping Zhao, Siddharth Rajan, David C. Look, Leonard J. Brillson
J. Vac. Sci. Technol. B 39, 052205 (2021)
Published: August 2021
Journal Articles
J. Vac. Sci. Technol. B 39, 052201 (2021)
Published: July 2021
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. B 39, 022803 (2021)
Published: February 2021
Journal Articles
J. Vac. Sci. Technol. B 38, 062804 (2020)
Published: November 2020
Journal Articles
Sefako J. Mofokeng, Luyanda L. Noto, Kingsly O. Obodo, Odireleng M. Ntwaeaborwa, Robin E. Kroon, Mkhotjwa S. Dhlamini
J. Vac. Sci. Technol. B 38, 052802 (2020)
Published: July 2020
Journal Articles
Arnoud J. Onnink, Ramazan O. Apaydin, Antonius A. I. Aarnink, Michel P. de Jong, Dirk J. Gravesteijn, Alexey Y. Kovalgin
J. Vac. Sci. Technol. B 38, 044009 (2020)
Published: July 2020
Includes: Supplementary data
Journal Articles
J. Vac. Sci. Technol. B 38, 042201 (2020)
Published: May 2020
Includes: Supplementary data
Journal Articles
M. K. Indika Senevirathna, Michael D. Williams, Graham A. Cooke, Alexander Kozhanov, Mark Vernon, Garnett B. Cross
J. Vac. Sci. Technol. B 38, 034015 (2020)
Published: April 2020
Journal Articles
J. Vac. Sci. Technol. B 38, 034012 (2020)
Published: April 2020
Includes: Supplementary data
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