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Journal Articles

Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films

Nguyen Khac Binh, Pham Ngoc Yen Nhi, Tran Bao Quan, Pham Minh Tam, Nguyen Ngoc Phuong, Dao Minh Tuan, Pham Thi Kim Hang, Pham Hoai Phuong
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062205 (2024)
https://doi.org/10.1116/6.0003939
Published: November 2024
View article titled, Impact of <em>in situ</em> heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films
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Journal Articles

Aperiodic multilayer masks for M3D mitigation in high- and hyper-NA extreme ultraviolet lithography

Editor’s Pick
W. Ethan Maguire, Bruce W. Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062601 (2024)
https://doi.org/10.1116/6.0003927
Published: September 2024
View article titled, Aperiodic multilayer masks for M3D mitigation in high- and hyper-NA extreme ultraviolet lithography
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Journal Articles

Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy

Glenn G. Jernigan, John P. Murphy, Nadeemullah A. Mahadik, Alex J. Grede, Eric M. Jackson, Jill A. Nolde
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052209 (2024)
https://doi.org/10.1116/6.0003585
Published: September 2024
View article titled, Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy
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Journal Articles

Compositional dependence of direct transition energies in SixGe1−x−ySny alloys lattice-matched to Ge/GaAs

Editor’s Pick
Phoebe M. Pearce, Sheau Wei Ong, Andrew D. Johnson, Eng Soon Tok, Nicholas J. Ekins-Daukes
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042206 (2024)
https://doi.org/10.1116/6.0003737
Published: June 2024
View article titled, Compositional dependence of direct transition energies in Si<sub><em>x</em></sub>Ge<sub>1−<em>x</em>−<em>y</em></sub>Sn<sub><em>y</em></sub> alloys lattice-matched to Ge/GaAs
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Journal Articles

5.0 μm emitting interband cascade lasers with superlattice and bulk AlGaAsSb claddings

B. Petrović, A. Bader, J. Nauschütz, T. Sato, S. Birner, R. Weih, F. Hartmann, S. Höfling
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 043202 (2024)
https://doi.org/10.1116/6.0003584
Published: June 2024
View article titled, 5.0 <em>μ</em>m emitting interband cascade lasers with superlattice and bulk AlGaAsSb claddings
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Journal Articles

Electronic and optical properties of lithium-doped boron nitride nanoribbons using density functional theory

Farzaneh Safdarian, Farzad Ahmadian, Rohollah Zare Hasan Abad, Hojat Allah Badehian
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042201 (2024)
https://doi.org/10.1116/6.0003635
Published: May 2024
View article titled, Electronic and optical properties of lithium-doped boron nitride nanoribbons using density functional theory
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Journal Articles

Continuous wave interband cascade lasers near 13 μm

Editor’s Pick
Yixuan Shen, Rui Q. Yang, S. D. Hawkins, A. J. Muhowski
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022206 (2024)
https://doi.org/10.1116/6.0003365
Published: February 2024
View article titled, Continuous wave interband cascade lasers near 13 <em>μ</em>m
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Journal Articles

Strain-tuned optical properties of bilayer silicon at midinfrared wavelengths

Editor’s Pick
K. Vishal, Z. H. Ji, Y. Zhuang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022201 (2024)
https://doi.org/10.1116/6.0003202
Published: February 2024
View article titled, Strain-tuned optical properties of bilayer silicon at midinfrared wavelengths
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Journal Articles

Optical properties of copper oxide thin films implanted with chromium ions

Katarzyna Ungeheuer, Konstanty W. Marszalek
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062208 (2023)
https://doi.org/10.1116/6.0003135
Published: December 2023
View article titled, Optical properties of copper oxide thin films implanted with chromium ions
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Journal Articles

Retraction: “Dependence of structural and optical properties of In0.23Ga0.77As/GaAs quantum wells on misfit dislocations: Different critical thickness for dislocation generation and degradation of optical properties” [J. Vac. Sci. Technol. B 8 , 751–757 (1990)]

M. Grundmann, U. Lienert, J. Christen, D. Bimberg, A. Fischer-Colbrie, J. N. Miller
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 063402 (2023)
https://doi.org/10.1116/6.0003220
Published: November 2023
View article titled, Retraction: “Dependence of structural and optical properties of In<sub>0.23</sub>Ga<sub>0.77</sub>As/GaAs quantum wells on misfit dislocations: Different critical thickness for dislocation generation and degradation of optical properties” [J. Vac. Sci. Technol. B 8 , 751–757 (1990)]
Open the PDF for Retraction: “Dependence of structural and optical properties of In<sub>0.23</sub>Ga<sub>0.77</sub>As/GaAs quantum wells on misfit dislocations: Different critical thickness for dislocation generation and degradation of optical properties” [J. Vac. Sci. Technol. B 8 , 751–757 (1990)] in another window
Journal Articles

Effect of varying threading dislocation densities on the optical properties of InGaN/GaN quantum wells with intentionally created V-shaped pits

Kaitian Zhang, Chenxi Hu, Vijay Gopal Thirupakuzi Vangipuram, Lingyu Meng, Christopher Chae, Menglin Zhu, Jinwoo Hwang, Kathleen Kash, Hongping Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062207 (2023)
https://doi.org/10.1116/6.0003141
Published: November 2023
View article titled, Effect of varying threading dislocation densities on the optical properties of InGaN/GaN quantum wells with intentionally created V-shaped pits
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Journal Articles

Deposition and optical properties investigation of components for multilayer electrochromic system

Janusz Rybak, Konstanty W. Marszalek
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 063401 (2023)
https://doi.org/10.1116/6.0003138
Published: October 2023
View article titled, Deposition and optical properties investigation of components for multilayer electrochromic system
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Journal Articles

Fabrication of pyramid-shaped gold tip for adiabatic nanofocusing of surface plasmon polaritons

Jamal Kheiro Khalaf, Diyar Sadiq
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 054201 (2023)
https://doi.org/10.1116/6.0002505
Published: August 2023
View article titled, Fabrication of pyramid-shaped gold tip for adiabatic nanofocusing of surface plasmon polaritons
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Includes: Supplementary data
Journal Articles

High-quality GeSn thin-film resonant cavities for short-wave infrared applications

Editor’s Pick
Jheng-Ying Wu, Yu-Fu Wang, Chia-You Liu, Shin-Chun Kuo, Tzu-Hsuan Chen, Jiun-Yun Li, Chin-Ya Huang, Chien-Hao Liu, Jung-Yen Yang, Chun-Chieh Chang, Tzu-Hsuan Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042202 (2023)
https://doi.org/10.1116/6.0002525
Published: June 2023
View article titled, High-quality GeSn thin-film resonant cavities for short-wave infrared applications
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Includes: Supplementary data
Journal Articles

Large-area 1D selective emitter for thermophotovoltaic applications in the mid-infrared

Minsu Oh, Kevin Grossklaus, Thomas E. Vandervelde
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012203 (2023)
https://doi.org/10.1116/6.0002198
Published: December 2022
View article titled, Large-area 1D selective emitter for thermophotovoltaic applications in the mid-infrared
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Journal Articles

High-temperature characteristics of GaN/InGaN multiple-quantum-well UV photodetectors fabricated on sapphire substrate: Analysis of photovoltaic and carrier transit time properties

Featured
Pradip Dalapati, Takashi Egawa, Makoto Miyoshi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 062210 (2022)
https://doi.org/10.1116/6.0002101
Published: November 2022
View article titled, High-temperature characteristics of GaN/InGaN multiple-quantum-well UV photodetectors fabricated on sapphire substrate: Analysis of photovoltaic and carrier transit time properties
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Includes: Supplementary data
Journal Articles

Scanning electron microscope imaging by selective e-beaming using photoelectron beams from semiconductor photocathodes

Tomohiro Nishitani, Yuta Arakawa, Shotaro Noda, Atsushi Koizumi, Daiki Sato, Haruka Shikano, Hokuto Iijima, Yoshio Honda, Hiroshi Amano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 064203 (2022)
https://doi.org/10.1116/6.0002111
Published: November 2022
View article titled, Scanning electron microscope imaging by selective e-beaming using photoelectron beams from semiconductor photocathodes
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Journal Articles

Si nanocone structure fabricated by a relatively high-pressure hydrogen plasma in the range of 3.3–27 kPa

Editor’s Pick
Toshimitsu Nomura, Kenta Kimoto, Hiroaki Kakiuchi, Kiyoshi Yasutake, Hiromasa Ohmi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 032801 (2022)
https://doi.org/10.1116/6.0001676
Published: April 2022
View article titled, Si nanocone structure fabricated by a relatively high-pressure hydrogen plasma in the range of 3.3–27 kPa
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Journal Articles

Optical properties of Mo and amorphous MoOx, and application to antireflection coatings for metals

David V. Tsu, Matthias Muehle, Harald Köstenbauer, Christian Linke, Jörg Winkler
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022209 (2022)
https://doi.org/10.1116/6.0001659
Published: March 2022
View article titled, Optical properties of Mo and amorphous MoOx, and application to antireflection coatings for metals
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Journal Articles

Fabrication of black GaAs by maskless inductively coupled plasma etching in Cl2/BCl3/O2/Ar chemistry

Editor’s Pick
Yidi Bao, Wen Liu, Yongqiang Zhao, Lei Wei, Xiaoling Chen, Fuhua Yang, Xiaodong Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022205 (2022)
https://doi.org/10.1116/6.0001570
Published: February 2022
View article titled, Fabrication of black GaAs by maskless inductively coupled plasma etching in Cl<sub>2</sub>/BCl<sub>3</sub>/O<sub>2</sub>/Ar chemistry
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