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Journal Articles

Investigation of tilted etching of Si3N4 using CF4/O2 plasma: Process development and mechanism study

Zhihong Gao, Leyi Zhang, Yongzhi Fang, Dongyu Cen, Maoxiang Liu, Wenli Wu, Yan Ding
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 032801 (2025)
https://doi.org/10.1116/6.0004412
Published: April 2025
View articletitled, Investigation of tilted etching of Si3N4 using CF4/O2 plasma: Process development and mechanism study
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Journal Articles

Extended model for chemically amplified resist with multiple photoacid generators

Editor’s Pick
Delong Yao, Lisong Dong, Yunyun Hao, Yayi Wei, Ming Fang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022603 (2025)
https://doi.org/10.1116/6.0004381
Published: March 2025
View articletitled, Extended model for chemically amplified resist with multiple photoacid generators
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Journal Articles

Does the blue luminescence of Eu-doped β-NaYF4 originate from Eu2+ ions?

Robin E. Kroon, Mamello P. Mabe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022213 (2025)
https://doi.org/10.1116/6.0004282
Published: March 2025
View articletitled, Does the blue luminescence of Eu-doped β-NaYF4 originate from Eu2+ ions?
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Journal Articles

Focusing electrode effect on the EUV lighting technology based on C-beam irradiation technique

Iksu Kim, Umesh Balaso Apugade, So Min Oh, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022211 (2025)
https://doi.org/10.1116/6.0004301
Published: March 2025
View articletitled, Focusing electrode effect on the EUV lighting technology based on C-beam irradiation technique
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Journal Articles

Fabrication of microstructures on porous nanolattices

Nayoung Kim, Saurav Mohanty, Vijay Anirudh Premnath, Ethan Flores, Chih-Hao Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022601 (2025)
https://doi.org/10.1116/6.0004054
Published: February 2025
View articletitled, Fabrication of microstructures on porous nanolattices
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Journal Articles

Cathodoluminescence from Y2O3:Er3+: A metal oxide-based green nanophosphor for field emission displays

Shivaramu Nagarasanakote Jayaramu, Divya Janardhana, Elizabeth Coetsee, Hendrik C. Swart
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024201 (2025)
https://doi.org/10.1116/6.0004125
Published: February 2025
View articletitled, Cathodoluminescence from Y2O3:Er3+: A metal oxide-based green nanophosphor for field emission displays
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Journal Articles

Study of fluoride-ion-assisted hydroxide catalyzed bonding of MgF2 to fused silica

Zhichao Hu, Dongfang Zhu, Zixuan Guo, Xudi Wang, Hailin Bi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 010601 (2025)
https://doi.org/10.1116/6.0004122
Published: January 2025
View articletitled, Study of fluoride-ion-assisted hydroxide catalyzed bonding of MgF2 to fused silica
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Journal Articles

Electrochemically fabricated ultrafine nickel masks for the fabrication of MoS2-based devices

Jianwen Zhong, Zhao Sun, Han Li, Zhuofei Gan, Chuying Sun, Yi Wan, Lain-Jong Li, Wen-Di Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062213 (2024)
https://doi.org/10.1116/6.0004053
Published: December 2024
View articletitled, Electrochemically fabricated ultrafine nickel masks for the fabrication of MoS2-based devices
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Journal Articles

Novel approach for KrF chemically amplified resist optimization assisted by deep learning

Editor’s Pick
Chen Tang, Toshiaki Tanaka, Atsushi Sekiguchi, Yoshihiko Hirai, Masaaki Yasuda
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062606 (2024)
https://doi.org/10.1116/6.0004096
Published: December 2024
View articletitled, Novel approach for KrF chemically amplified resist optimization assisted by deep learning
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Journal Articles

AC thin-film electroluminescence: A historical overview with a look ahead

Dirk Poelman
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 060801 (2024)
https://doi.org/10.1116/6.0004083
Published: October 2024
View articletitled, AC thin-film electroluminescence: A historical overview with a look ahead
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Journal Articles

Investigating pathways for deep-UV photolithography of large-area nanopost-based metasurfaces with high feature-size contrast

Skyler Palatnick, Demis John, Maxwell Millar-Blanchaer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062602 (2024)
https://doi.org/10.1116/6.0003947
Published: October 2024
View articletitled, Investigating pathways for deep-UV photolithography of large-area nanopost-based metasurfaces with high feature-size contrast
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Journal Articles

Scalable fabrication approach and fill factor optimization for single pixel microlens arrays

Featured
Jens Bonitz, Christian Helke, Nils Dittmar, Sebastian Schermer, Micha Haase, Lutz Hofmann, Danny Reuter
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062203 (2024)
https://doi.org/10.1116/6.0004036
Published: October 2024
View articletitled, Scalable fabrication approach and fill factor optimization for single pixel microlens arrays
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Journal Articles

Carbon nanotube collimator as an vacuum ultraviolet window

S. C. Olsen, D. D. Allred, R. R. Vanfleet
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 043001 (2024)
https://doi.org/10.1116/6.0003675
Published: June 2024
View articletitled, Carbon nanotube collimator as an vacuum ultraviolet window
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Journal Articles

Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications

Editor’s Pick
Haochen Zhao, Suho Park, Guangyang Lin, Yuying Zhang, Tuofu Zhama, Chandan Samanta, Lorry Chang, Xiaofeng Zhu, Xu Feng, Kevin O. Díaz-Aponte, Lin Cong, Yuping Zeng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042205 (2024)
https://doi.org/10.1116/6.0003561
Published: June 2024
View articletitled, Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications
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Includes: Supplementary data
Journal Articles

Performance evaluation of atomic layer deposited TiO2/TiN nanolaminates used as infrared photodetectors

G. Scarel, O. Kokhan, V. D. Wheeler
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 023401 (2024)
https://doi.org/10.1116/6.0003139
Published: February 2024
View articletitled, Performance evaluation of atomic layer deposited TiO2/TiN nanolaminates used as infrared photodetectors
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Includes: Supplementary data
Journal Articles

Room-temperature nanostructured PbSe/CdSe mid-infrared photodetector: Annealing effects

Milad Rastkar Mirzaei, Zhisheng Shi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 012204 (2024)
https://doi.org/10.1116/6.0003193
Published: January 2024
View articletitled, Room-temperature nanostructured PbSe/CdSe mid-infrared photodetector: Annealing effects
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Journal Articles

Rapid prototyping of etch test structures for hard mask development using electron beam lithography

Barbara A. Kazanowska, Aaron M. Dangerfield, Han Wang, Gene Lee, Luisa D. Bozano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 012601 (2024)
https://doi.org/10.1116/6.0003215
Published: January 2024
View articletitled, Rapid prototyping of etch test structures for hard mask development using electron beam lithography
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Journal Articles

New method of fabrication of suspended metallic single electron transistor (SET)

Mohammad Istiaque Rahaman, G. P. Szakmany, A. O. Orlov, G. L. Snider
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 013201 (2024)
https://doi.org/10.1116/6.0003025
Published: January 2024
View articletitled, New method of fabrication of suspended metallic single electron transistor (SET)
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Journal Articles

Calibrated in-vacuum quantum efficiency system for metallic and III-V thin-film photocathodes

Editor’s Pick
Atif Rasheed, Christopher Benjamin, Ibrahim Elhoussieny, Yorck A. Ramachers, Gavin R. Bell
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 064006 (2023)
https://doi.org/10.1116/6.0002904
Published: December 2023
View articletitled, Calibrated in-vacuum quantum efficiency system for metallic and III-V thin-film photocathodes
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Journal Articles

Direct writing immersion laser lithography on graphene monolayers using two-photon absorption

Jianran Zhang, Carsten Strobel, Kathrin Estel, Thomas Mikolajick, Robert Kirchner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062604 (2023)
https://doi.org/10.1116/6.0003017
Published: November 2023
View articletitled, Direct writing immersion laser lithography on graphene monolayers using two-photon absorption
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