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Journal Articles

Alkali-fusion-based removal of vacuum-compatible heat-resistant epoxy resins using KOH-NaOH eutectic melt

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Yuto Nishiwaki, Toru Utsunomiya, Takashi Ichii
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 045001 (2025)
https://doi.org/10.1116/6.0004657
Published: July 2025
View article titled, Alkali-fusion-based removal of vacuum-compatible heat-resistant epoxy resins using KOH-NaOH eutectic melt
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Journal Articles

Compositionally graded Ba1−xSrxTiO3 thin film for SIMS applications

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J. Scola, J. Garcia, F. Jomard, E. Loire, J. Wolfman, B. Negulescu, G. Z. Liu, M.-A. Pinault-Thaury
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 044004 (2025)
https://doi.org/10.1116/6.0004549
Published: June 2025
View article titled, Compositionally graded Ba1−xSrxTiO3 thin film for SIMS applications
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Journal Articles

Study of zinc doped In0.53Ga0.47As/InP/InAlAs/InP heterostructures by time-of-flight; magnetic secondary ion spectrometry and high-energy x-ray photoelectron spectroscopy

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G. Tsamo Tagougue, M. Veillerot, E. Martinez, V. Thoréton, M. Martin, T. Baron, G. Lefevre, S. Cavalaglio, F. Bassani
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 033204 (2025)
https://doi.org/10.1116/6.0004489
Published: May 2025
View article titled, Study of zinc doped In0.53Ga0.47As/InP/InAlAs/InP heterostructures by time-of-flight; magnetic secondary ion spectrometry and high-energy x-ray photoelectron spectroscopy
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Journal Articles

Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel

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Aiman H. Al-Allaq, Md Abdullah Mamun, Matt Poelker, Abdelmageed Elmustafa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034203 (2025)
https://doi.org/10.1116/6.0004446
Published: April 2025
View article titled, Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel
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Journal Articles

Controlled preparation of tungsten diselenide thin films via chemical vapor deposition

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Pingfan Ning, Xuerong Li, Feifei Lan, Xiangyu Li, Yingmin Wang, Hongjuan Cheng, Yujian Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 030601 (2025)
https://doi.org/10.1116/6.0004352
Published: April 2025
View article titled, Controlled preparation of tungsten diselenide thin films via chemical vapor deposition
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Journal Articles

Photoresist ashing at room temperature using a large-area, atmospheric-pressure plasma

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Branden J. Bodner, Paul J. Froeter, Kuldeep Kalonia, R. Mohan Sankaran
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 012204 (2025)
https://doi.org/10.1116/6.0004147
Published: January 2025
View article titled, Photoresist ashing at room temperature using a large-area, atmospheric-pressure plasma
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Journal Articles

Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask

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Shiyang Li, Shuhu Huan, Tao Ren, Ying Liu, Yilin Hong, Shaojun Fu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062603 (2024)
https://doi.org/10.1116/6.0003946
Published: November 2024
View article titled, Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask
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Journal Articles

High-resolution chemical patterns from negative tone resists for the integration of extreme ultraviolet patterns of metal-oxide resists with directed self-assembly of block copolymers

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Kyunghyeon Lee, Emma Vargo, Christopher Eom, Ricardo Ruiz, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062804 (2024)
https://doi.org/10.1116/6.0004046
Published: October 2024
View article titled, High-resolution chemical patterns from negative tone resists for the integration of extreme ultraviolet patterns of metal-oxide resists with directed self-assembly of block copolymers
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Journal Articles

Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy

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Glenn G. Jernigan, John P. Murphy, Nadeemullah A. Mahadik, Alex J. Grede, Eric M. Jackson, Jill A. Nolde
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052209 (2024)
https://doi.org/10.1116/6.0003585
Published: September 2024
View article titled, Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy
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Journal Articles

Structural, surface, and upconversion luminescence properties of pulsed laser-deposited Y2O3:Ho3+,Yb3+ thin films

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Vhahangwele Makumbane, M. Y. A. Yagoub, E. Coetsee, R. E. Kroon, H. C. Swart
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 054004 (2024)
https://doi.org/10.1116/6.0003880
Published: September 2024
View article titled, Structural, surface, and upconversion luminescence properties of pulsed laser-deposited Y2O3:Ho3+,Yb3+ thin films
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Journal Articles

Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness

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Naoki Takano, Hiromasa Niinomi, Tomoya Oshikiri, Masaru Nakagawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042603 (2024)
https://doi.org/10.1116/6.0003779
Published: July 2024
View article titled, Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness
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Journal Articles

Roughness-generation mechanism of Ru etching using Cl2/O2-based plasma for advanced interconnect

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Miyako Matsui, Yohei Ishii, Lucas Kovatch, Kathryn Maier, Masaya Imai, Makoto Miura, Kenichi Kuwahara
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042208 (2024)
https://doi.org/10.1116/6.0003736
Published: July 2024
View article titled, Roughness-generation mechanism of Ru etching using Cl2/O2-based plasma for advanced interconnect
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Journal Articles

Development of aspect ratio trapping growth of GeSn on Si for midwave infrared applications

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Hryhorii Stanchu, Grey Abernathy, Joshua Grant, Fernando M. de Oliveira, Yuriy I. Mazur, Jifeng Liu, Wei Du, Baohua Li, Gregory J. Salamo, Shui-Qing Yu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042802 (2024)
https://doi.org/10.1116/6.0003734
Published: July 2024
View article titled, Development of aspect ratio trapping growth of GeSn on Si for midwave infrared applications
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Journal Articles

Research on the improvement of the adhesion strength of the Cu films deposited on the Al2O3 films

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Lingfeng Ouyang, Yin Gao, Huilong Zheng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 044203 (2024)
https://doi.org/10.1116/6.0003649
Published: July 2024
View article titled, Research on the improvement of the adhesion strength of the Cu films deposited on the Al2O3 films
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Journal Articles

Comparison of GeSn alloy films prepared by ion implantation and remote plasma-enhanced chemical vapor deposition methods

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X. Huang, S. Q. Lim, T. Ratcliff, L. A. Smillie, G. J. Grzybowski, B. B. Claflin, J. M. Warrender, J. S. Williams
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 044001 (2024)
https://doi.org/10.1116/6.0003668
Published: June 2024
View article titled, Comparison of GeSn alloy films prepared by ion implantation and remote plasma-enhanced chemical vapor deposition methods
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Journal Articles

Parylene-C-based flexible organic thin-film transistors and their reliability improvement using SU-8 passivation

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Ah-Hyun Hong, Yu Jung Park, Jung-Hwa Seo, Yoon Kim, Dong-Wook Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 033402 (2024)
https://doi.org/10.1116/5.0197032
Published: May 2024
View article titled, Parylene-C-based flexible organic thin-film transistors and their reliability improvement using SU-8 passivation
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Journal Articles

Study of defects population and contaminations in silica/tantala coated mirrors

Open Access
D. D’Ubaldo, M. Sbroscia, V. C. A. Ficca, E. Stellino, A. Pasqualetti, D. Sentenac, J. Gargiulo, L. Francescon, L. Pinard, E. Placidi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034003 (2024)
https://doi.org/10.1116/6.0003510
Published: April 2024
View article titled, Study of defects population and contaminations in silica/tantala coated mirrors
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Journal Articles

Wet and dry etching of ultrawide bandgap LiGa5O8 and LiGaO2

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Vijay Gopal Thirupakuzi Vangipuram, Kaitian Zhang, Hongping Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032204 (2024)
https://doi.org/10.1116/6.0003450
Published: April 2024
View article titled, Wet and dry etching of ultrawide bandgap LiGa5O8 and LiGaO2
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Journal Articles

Temperature-dependent morphology and composition of ultra-thin GeSn epilayers prepared by remote plasma enhanced chemical vapor deposition

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Jiechao Jiang, Nonso Martin Chetuya, Efstathios I. Meletis, Joseph H. Ngai, Gordon J. Grzybowski, Bruce Claflin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034001 (2024)
https://doi.org/10.1116/6.0003445
Published: March 2024
View article titled, Temperature-dependent morphology and composition of ultra-thin GeSn epilayers prepared by remote plasma enhanced chemical vapor deposition
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Journal Articles

Stable and low loss oxide layer on α-Ta (110) film for superconducting qubits

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Zengqian Ding, Boyi Zhou, Tao Wang, Lina Yang, Yanfu Wu, Xiao Cai, Kanglin Xiong, Jiagui Feng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022209 (2024)
https://doi.org/10.1116/6.0003368
Published: February 2024
View article titled, Stable and low loss oxide layer on α-Ta (110) film for superconducting qubits
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Includes: Supplementary data