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Journal Articles
Alkali-fusion-based removal of vacuum-compatible heat-resistant epoxy resins using KOH-NaOH eutectic melt
Available to Purchase
J. Vac. Sci. Technol. B 43, 045001 (2025)
Published: July 2025
Journal Articles
J. Vac. Sci. Technol. B 43, 044004 (2025)
Published: June 2025
Journal Articles
Study of zinc doped In0.53Ga0.47As/InP/InAlAs/InP heterostructures by time-of-flight; magnetic secondary ion spectrometry and high-energy x-ray photoelectron spectroscopy
Available to PurchaseG. Tsamo Tagougue, M. Veillerot, E. Martinez, V. Thoréton, M. Martin, T. Baron, G. Lefevre, S. Cavalaglio, F. Bassani
J. Vac. Sci. Technol. B 43, 033204 (2025)
Published: May 2025
Journal Articles
Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel
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J. Vac. Sci. Technol. B 43, 034203 (2025)
Published: April 2025
Journal Articles
Controlled preparation of tungsten diselenide thin films via chemical vapor deposition
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J. Vac. Sci. Technol. B 43, 030601 (2025)
Published: April 2025
Journal Articles
Photoresist ashing at room temperature using a large-area, atmospheric-pressure plasma
Available to Purchase
J. Vac. Sci. Technol. B 43, 012204 (2025)
Published: January 2025
Journal Articles
Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask
J. Vac. Sci. Technol. B 42, 062603 (2024)
Published: November 2024
Journal Articles
High-resolution chemical patterns from negative tone resists for the integration of extreme ultraviolet patterns of metal-oxide resists with directed self-assembly of block copolymers
J. Vac. Sci. Technol. B 42, 062804 (2024)
Published: October 2024
Journal Articles
Glenn G. Jernigan, John P. Murphy, Nadeemullah A. Mahadik, Alex J. Grede, Eric M. Jackson, Jill A. Nolde
J. Vac. Sci. Technol. B 42, 052209 (2024)
Published: September 2024
Journal Articles
Structural, surface, and upconversion luminescence properties of pulsed laser-deposited Y2O3:Ho3+,Yb3+ thin films
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J. Vac. Sci. Technol. B 42, 054004 (2024)
Published: September 2024
Journal Articles
Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness
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J. Vac. Sci. Technol. B 42, 042603 (2024)
Published: July 2024
Journal Articles
Roughness-generation mechanism of Ru etching using Cl2/O2-based plasma for advanced interconnect
Available to PurchaseMiyako Matsui, Yohei Ishii, Lucas Kovatch, Kathryn Maier, Masaya Imai, Makoto Miura, Kenichi Kuwahara
J. Vac. Sci. Technol. B 42, 042208 (2024)
Published: July 2024
Journal Articles
Development of aspect ratio trapping growth of GeSn on Si for midwave infrared applications
Hryhorii Stanchu, Grey Abernathy, Joshua Grant, Fernando M. de Oliveira, Yuriy I. Mazur, Jifeng Liu, Wei Du, Baohua Li, Gregory J. Salamo, Shui-Qing Yu
J. Vac. Sci. Technol. B 42, 042802 (2024)
Published: July 2024
Journal Articles
Research on the improvement of the adhesion strength of the Cu films deposited on the Al2O3 films
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J. Vac. Sci. Technol. B 42, 044203 (2024)
Published: July 2024
Journal Articles
X. Huang, S. Q. Lim, T. Ratcliff, L. A. Smillie, G. J. Grzybowski, B. B. Claflin, J. M. Warrender, J. S. Williams
J. Vac. Sci. Technol. B 42, 044001 (2024)
Published: June 2024
Journal Articles
Parylene-C-based flexible organic thin-film transistors and their reliability improvement using SU-8 passivation
Available to Purchase
J. Vac. Sci. Technol. B 42, 033402 (2024)
Published: May 2024
Journal Articles
D. D’Ubaldo, M. Sbroscia, V. C. A. Ficca, E. Stellino, A. Pasqualetti, D. Sentenac, J. Gargiulo, L. Francescon, L. Pinard, E. Placidi
J. Vac. Sci. Technol. B 42, 034003 (2024)
Published: April 2024
Journal Articles
Wet and dry etching of ultrawide bandgap LiGa5O8 and LiGaO2
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J. Vac. Sci. Technol. B 42, 032204 (2024)
Published: April 2024
Journal Articles
Temperature-dependent morphology and composition of ultra-thin GeSn epilayers prepared by remote plasma enhanced chemical vapor deposition
Jiechao Jiang, Nonso Martin Chetuya, Efstathios I. Meletis, Joseph H. Ngai, Gordon J. Grzybowski, Bruce Claflin
J. Vac. Sci. Technol. B 42, 034001 (2024)
Published: March 2024
Journal Articles
J. Vac. Sci. Technol. B 42, 022209 (2024)
Published: February 2024
Includes: Supplementary data
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