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Journal Articles

Effect of low-pressure postannealing on the electrical properties of VO2 thin films

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Xin Lin, Wanyu Jiang, Detao Mu, Yongfeng Jia, Shuoshuo Wang, Linhong Cao, Yajun Fu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022807 (2025)
https://doi.org/10.1116/6.0004435
Published: March 2025
View articletitled, Effect of low-pressure postannealing on the electrical properties of VO2 thin films
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Journal Articles

Optimized thermoelectric performance of porous Bi0.5Sb1.5Te3 thin films through rapid thermal processing

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Xujiang Tian, Rensheng Zhang, Jiapeng Yang, Shaojun Liang, Hanming Zhu, Song Yue
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022210 (2025)
https://doi.org/10.1116/6.0004322
Published: February 2025
View articletitled, Optimized thermoelectric performance of porous Bi0.5Sb1.5Te3 thin films through rapid thermal processing
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Journal Articles

Carbon impurities in oxide thin films: The effect of annealing and laser irradiation

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Syeed E. Ahmed, Cody Ingraham, Matthew D. McCluskey, Jesse Huso, Violet M. Poole
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022204 (2025)
https://doi.org/10.1116/6.0004193
Published: February 2025
View articletitled, Carbon impurities in oxide thin films: The effect of annealing and laser irradiation
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Journal Articles

Photoluminescence lifetime of perovskites on modified substrates

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Xavier Vorhies, Jessica M. Andriolo, Joseph J. Thiebes, Emma K. Orcutt, Erik M. Grumstrup, Jack L. Skinner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022203 (2025)
https://doi.org/10.1116/6.0004115
Published: February 2025
View articletitled, Photoluminescence lifetime of perovskites on modified substrates
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Journal Articles

Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing

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Geonhyeong Kang, Hunbeom Shin, Seungyeob Kim, Lingwei Zhang, Giuk Kim, Sujeong Lee, Yunseok Nam, Chaeheon Kim, Hoon Kim, Jinho Ahn, Sanghun Jeon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 012206 (2025)
https://doi.org/10.1116/6.0004086
Published: January 2025
View articletitled, Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing
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Journal Articles

Observation of low-resistance Al and Ni p-type ohmic contacts to dilute GeC and GeCSn alloys

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Jibesh K. Saha, Saif A. A. Taqy, Pallab K. Sarkar, Imteaz Rahaman, Augustus W. Arbogast, Tuhin Dey, Andrei Dolocan, Md. Reaz Rahman Munna, Khorshed Alam, Daniel Wasserman, Seth R. Bank, Mark A. Wistey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062211 (2024)
https://doi.org/10.1116/6.0003739
Published: December 2024
View articletitled, Observation of low-resistance Al and Ni p-type ohmic contacts to dilute GeC and GeCSn alloys
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Journal Articles

Epitaxial SiGeSn grown on Si by ion implantation

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Chinenye U. Ekeruche, Mikayla Davila, Peter J. Simpson, Karen L. Kavanagh, Lyudmila V. Goncharova
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062206 (2024)
https://doi.org/10.1116/6.0003933
Published: November 2024
View articletitled, Epitaxial SiGeSn grown on Si by ion implantation
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Journal Articles

Co-optimizing of H-curing, stress, and thermal annealing—A more effective way for realizing FEOL-BEOL compatible eMRAM chip

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Zhimeng Yu, Xiaolei Yang, Xiaonan Zhao, Yanjie Li, Shikun He, Yewu Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062202 (2024)
https://doi.org/10.1116/6.0003934
Published: October 2024
View articletitled, Co-optimizing of H-curing, stress, and thermal annealing—A more effective way for realizing FEOL-BEOL compatible eMRAM chip
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Journal Articles

Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response

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Kyeong Joon Jo, Soon-Won Jung, Ji Eun Jung, Ga-Eun Lee, Seong-Cheol Kim, Seung-Yun Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 055001 (2024)
https://doi.org/10.1116/6.0003829
Published: August 2024
View articletitled, Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response
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Journal Articles

Cu1−xAlx films as alternatives to copper for advanced interconnect metallization

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Jean-Philippe Soulié, Kiroubanand Sankaran, Geoffrey Pourtois, Johan Swerts, Zsolt Tőkei, Christoph Adelmann
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 043203 (2024)
https://doi.org/10.1116/6.0003634
Published: June 2024
View articletitled, Cu1−xAlx films as alternatives to copper for advanced interconnect metallization
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Journal Articles

Monitoring of rapid thermal anneal with secondary ion mass spectrometry

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Z. X. Jiang, A. Ravi, T. Breeden, K. Khmelnitskiy, A. Duncan, D. Huynh, S. Butler, B. Granados, D. Acker, J. Luebbe, D. Sieloff, S. Bolton, G. Prieto
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034007 (2024)
https://doi.org/10.1116/6.0003599
Published: May 2024
View articletitled, Monitoring of rapid thermal anneal with secondary ion mass spectrometry
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Journal Articles

Effects of high-temperature annealing on vacancy complexes and luminescence properties in multilayer periodic structures with elastically strained GeSiSn layers

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Vyacheslav Timofeev, Ilya Skvortsov, Vladimir Mashanov, Alexandr Nikiforov, Dmitry Kolyada, Dmitry Firsov, Oleg Komkov, Samir Samadov, Alexey Sidorin, Oleg Orlov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 030601 (2024)
https://doi.org/10.1116/6.0003557
Published: April 2024
View articletitled, Effects of high-temperature annealing on vacancy complexes and luminescence properties in multilayer periodic structures with elastically strained GeSiSn layers
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Journal Articles

Treatment and aging studies of GaAs(111)B substrates for van der Waals chalcogenide film growth

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Mingyu Yu, Jiayang Wang, Sahani A. Iddawela, Molly McDonough, Jessica L. Thompson, Susan B. Sinnott, Danielle Reifsnyder Hickey, Stephanie Law
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 033201 (2024)
https://doi.org/10.1116/6.0003470
Published: March 2024
View articletitled, Treatment and aging studies of GaAs(111)B substrates for van der Waals chalcogenide film growth
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Includes: Supplementary data
Journal Articles

Comparing the properties and growth of graphene on electrolytic and rolled Cu foils by chemical vapor deposition

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Woo Jin Lee, Sang Ho Kim, Jun Sun Eom, Arnaud Caron
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 024002 (2024)
https://doi.org/10.1116/6.0002893
Published: February 2024
View articletitled, Comparing the properties and growth of graphene on electrolytic and rolled Cu foils by chemical vapor deposition
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Includes: Supplementary data
Journal Articles

Room-temperature nanostructured PbSe/CdSe mid-infrared photodetector: Annealing effects

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Milad Rastkar Mirzaei, Zhisheng Shi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 012204 (2024)
https://doi.org/10.1116/6.0003193
Published: January 2024
View articletitled, Room-temperature nanostructured PbSe/CdSe mid-infrared photodetector: Annealing effects
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Journal Articles

Plasma-assisted annealing of Pt-doped rutile TiO2 nanoparticles for enhanced decomposition and bacterial inactivation under general lighting

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Retsuo Kawakami, Yuta Makino, Shin-ichiro Yanagiya, Akihiro Shirai, Masahito Niibe, Yoshitaka Nakano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 012203 (2024)
https://doi.org/10.1116/6.0003101
Published: January 2024
View articletitled, Plasma-assisted annealing of Pt-doped rutile TiO2 nanoparticles for enhanced decomposition and bacterial inactivation under general lighting
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Journal Articles

Influence of vacuum annealing on mechanical characteristics of focused ion beam fabricated silicon nanowires

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Hiromichi Ando, Takahiro Namazu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062808 (2023)
https://doi.org/10.1116/6.0002983
Published: November 2023
View articletitled, Influence of vacuum annealing on mechanical characteristics of focused ion beam fabricated silicon nanowires
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Journal Articles

Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy

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A. R. Chourasia, D. R. Chopra
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062806 (2023)
https://doi.org/10.1116/6.0002922
Published: November 2023
View articletitled, Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy
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Journal Articles

E-mode AlGaN/GaN HEMTs using p-NiO gates

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Chao-Ching Chiang, Hsiao-Hsuan Wan, Jian-Sian Li, Fan Ren, Timothy Jinsoo Yoo, Honggyu Kim, S. J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062205 (2023)
https://doi.org/10.1116/6.0003119
Published: November 2023
View articletitled, E-mode AlGaN/GaN HEMTs using p-NiO gates
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Journal Articles

Effect of annealing on focused ion beam induced surface damages in silicon analyzed by micro-Raman spectroscopy

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Yoshiharu Goshima, Shinsuke Kashiwagi, Takahiro Namazu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 054001 (2023)
https://doi.org/10.1116/6.0002895
Published: September 2023
View articletitled, Effect of annealing on focused ion beam induced surface damages in silicon analyzed by micro-Raman spectroscopy
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