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Journal Articles

Line wiggling due to plasma-induced film stress and prevention by surface roughness modification

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Amelia Turnquist, Naoyuki Kofuji, Joseph Sebastian, Hiroshi Kou, Takahiro Arai, Hideaki Fukuda, Yoann Tomczak, Yiting Sun, Daniele Piumi, David De Roest
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 012203 (2025)
https://doi.org/10.1116/6.0004116
Published: January 2025
View article titled, Line wiggling due to plasma-induced film stress and prevention by surface roughness modification
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Journal Articles

Co-optimizing of H-curing, stress, and thermal annealing—A more effective way for realizing FEOL-BEOL compatible eMRAM chip

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Zhimeng Yu, Xiaolei Yang, Xiaonan Zhao, Yanjie Li, Shikun He, Yewu Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062202 (2024)
https://doi.org/10.1116/6.0003934
Published: October 2024
View article titled, Co-optimizing of H-curing, stress, and thermal annealing—A more effective way for realizing FEOL-BEOL compatible eMRAM chip
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Journal Articles

Effect of varying threading dislocation densities on the optical properties of InGaN/GaN quantum wells with intentionally created V-shaped pits

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Kaitian Zhang, Chenxi Hu, Vijay Gopal Thirupakuzi Vangipuram, Lingyu Meng, Christopher Chae, Menglin Zhu, Jinwoo Hwang, Kathleen Kash, Hongping Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062207 (2023)
https://doi.org/10.1116/6.0003141
Published: November 2023
View article titled, Effect of varying threading dislocation densities on the optical properties of InGaN/GaN quantum wells with intentionally created V-shaped pits
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Journal Articles

Nanoscale strain gauges on flexible polymer substrates

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Devin K. Brown, Isha Lodhi, Biya Haile, David R. Myers, Wilbur A. Lam, Oliver Brand
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 063001 (2023)
https://doi.org/10.1116/6.0003030
Published: October 2023
View article titled, Nanoscale strain gauges on flexible polymer substrates
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Includes: Supplementary data
Journal Articles

Rapid detection of radiation susceptible regions in electronics

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Sergei P. Stepanoff, Aman Haque, Fan Ren, Stephen Pearton, Douglas E. Wolfe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044005 (2023)
https://doi.org/10.1116/6.0002689
Published: June 2023
View article titled, Rapid detection of radiation susceptible regions in electronics
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Journal Articles

Color control of titanium nitride thin films

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Aian B. Ontoria, Magdaleno R. Vasquez, Jr.
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032204 (2023)
https://doi.org/10.1116/6.0002511
Published: April 2023
View article titled, Color control of titanium nitride thin films
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High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining

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Roghayeh Nikbakht, Xitong Xie, Arnaud Weck, Raphael St-Gelais
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 023002 (2023)
https://doi.org/10.1116/5.0124150
Published: March 2023
View article titled, High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining
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Journal Articles

In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires

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Lucas B. Spejo, José L. Arrieta-Concha, Marcos V. Puydinger dos Santos, Angélica D. Barros, José A. Diniz, Renato A. Minamisawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 024002 (2023)
https://doi.org/10.1116/6.0002246
Published: March 2023
View article titled, In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires
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Includes: Supplementary data
Journal Articles

Grain growth of Cu wires during Joule heat welding

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Hironori Tohmyoh, Taiga Sakatoku
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012206 (2023)
https://doi.org/10.1116/6.0002337
Published: January 2023
View article titled, Grain growth of Cu wires during Joule heat welding
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Journal Articles

Gamma radiation on gallium nitride high electron mobility transistors at ON, OFF, and prestressed conditions

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Md Abu Jafar Rasel, Sergei Stepanoff, Aman Haque, Douglas E. Wolfe, Fan Ren, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 063204 (2022)
https://doi.org/10.1116/6.0002216
Published: November 2022
View article titled, Gamma radiation on gallium nitride high electron mobility transistors at ON, OFF, and prestressed conditions
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Journal Articles

Structure optimization of Spindt-type emitter fabricated by triode high power pulsed magnetron sputtering

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Takeo Nakano, Hyuga Taniguchi, Nanako Dei, Makoto Ozawa, Md. Suruz Mian, Kei Oya, Katsuhisa Murakami, Masayoshi Nagao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 063201 (2022)
https://doi.org/10.1116/6.0002201
Published: November 2022
View article titled, Structure optimization of Spindt-type emitter fabricated by triode high power pulsed magnetron sputtering
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Journal Articles

Observation of interfacial strain relaxation and electron beam damage thresholds in Al0.3In0.7N/GaN heterostructures by transmission electron microscopy

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Keisuke Motoki, Zachary Engel, Christopher M. Matthews, Habib Ahmad, Timothy M. McCrone, Kohei Harada, W. Alan Doolittle
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052210 (2022)
https://doi.org/10.1116/6.0001974
Published: September 2022
View article titled, Observation of interfacial strain relaxation and electron beam damage thresholds in Al0.3In0.7N/GaN heterostructures by transmission electron microscopy
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Journal Articles

Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films

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Antony Premkumar Peter, Alfonso Sepulveda Marquez, Johan Meersschaut, Praveen Dara, Timothee Blanquart, Takayama Tomomi, Ebisudani Taishi, Shiba Elichiro, Yosuke Kimura, Sander van Gompel, Pierre Morin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 054001 (2022)
https://doi.org/10.1116/6.0001922
Published: August 2022
View article titled, Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films
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Journal Articles

Effects of iCVD organic passivation in oxide thin-film transistors under repetitive bending stress for electrical and mechanical stability

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Taeseung Jung, Sanghun Jeon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 042201 (2022)
https://doi.org/10.1116/6.0001800
Published: May 2022
View article titled, Effects of iCVD organic passivation in oxide thin-film transistors under repetitive bending stress for electrical and mechanical stability
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Journal Articles

Strain engineering in III-V photonic components through structuration of SiNx films

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Brahim Ahammou, Aysegul Abdelal, Jean-Pierre Landesman, Christophe Levallois, Peter Mascher
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 012202 (2022)
https://doi.org/10.1116/6.0001352
Published: December 2021
View article titled, Strain engineering in III-V photonic components through structuration of SiNx films
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Journal Articles

Intermetallic compound formation inhibiting electromigration-based micro/nanowire growth

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Yasuhiro Kimura, Yang Ju
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062803 (2021)
https://doi.org/10.1116/6.0001271
Published: October 2021
View article titled, Intermetallic compound formation inhibiting electromigration-based micro/nanowire growth
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Journal Articles

Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies

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Pavani Vamsi Krishna Nittala, Karthika Haridas, Shivam Nigam, Saba Tasneem, Prosenjit Sen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052207 (2021)
https://doi.org/10.1116/6.0001160
Published: August 2021
View article titled, Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies
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Journal Articles

Si-capping-induced surface roughening on the strip structures of Ge selectively grown on an Si substrate

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Riku Katamawari, Kazuki Kawashita, Takeshi Hizawa, Yasuhiko Ishikawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 042204 (2021)
https://doi.org/10.1116/6.0001142
Published: July 2021
View article titled, Si-capping-induced surface roughening on the strip structures of Ge selectively grown on an Si substrate
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Novel physics-based tool-prototype for electromigration assessment in commercial-grade power delivery networks

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Sofya Torosyan, Armen Kteyan, Valeriy Sukharev, Jun-Ho Choy, Farid N. Najm
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 013203 (2021)
https://doi.org/10.1116/6.0000617
Published: December 2020
View article titled, Novel physics-based tool-prototype for electromigration assessment in commercial-grade power delivery networks
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Journal Articles

Mechanical analysis of a flexible microelectronic system under twisting stress

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Cha-Hee Kim, Jae-Min Kim, Seung-Ho Seo, Jae-Hak Lee, Jun-Yeob Song, Won-Jun Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 063207 (2020)
https://doi.org/10.1116/6.0000665
Published: November 2020
View article titled, Mechanical analysis of a flexible microelectronic system under twisting stress
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