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Journal Articles

Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring

Lukáš Šilhan, Jon Ander Arregi, Tomáš Plichta, Ondřej Vaculík, Jan Novotný, Mojmír Šerý
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034202 (2025)
https://doi.org/10.1116/6.0004296
Published: April 2025
View articletitled, Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring
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Journal Articles

Influence of etching profile on pattern collapse in complementary metal oxide semiconductor image sensor pixel with deep trench isolation

Clément Sart, Jérôme Dubois, Emilie Prevost, Philippe Garnier, Benjamin Vianne, Frédéric Giovannoni, Caroline Bringolf-Penner, Sébastien Gallois-Garreignot
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 033203 (2025)
https://doi.org/10.1116/6.0004309
Published: April 2025
View articletitled, Influence of etching profile on pattern collapse in complementary metal oxide semiconductor image sensor pixel with deep trench isolation
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Journal Articles

Investigation of tilted etching of Si3N4 using CF4/O2 plasma: Process development and mechanism study

Zhihong Gao, Leyi Zhang, Yongzhi Fang, Dongyu Cen, Maoxiang Liu, Wenli Wu, Yan Ding
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 032801 (2025)
https://doi.org/10.1116/6.0004412
Published: April 2025
View articletitled, Investigation of tilted etching of Si3N4 using CF4/O2 plasma: Process development and mechanism study
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Journal Articles

Operational experiences and upgrade of China Spallation Neutron Source Linac vacuum system

Shunming Liu, Yigang Wang, Pengcheng Wang, Hong Song, Yuhui Guan, Jiaming Liu, Biao Tan, Xiaoyang Sun, Bangle Zhu, Ahong Li, Weidong Chen, Huafu Ouyang, Bo Li, Xiaolei Wu, Yongjia Lv
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034201 (2025)
https://doi.org/10.1116/6.0004393
Published: March 2025
View articletitled, Operational experiences and upgrade of China Spallation Neutron Source Linac vacuum system
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Journal Articles

TiN and TaN cointegration for 300 mm superconducting back end of line

T. Chêne, R. Segaud, F. Nemouchi, P. Gergaud, S. Minoret, F. Gustavo, J. Garrione, T. Chevolleau
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022216 (2025)
https://doi.org/10.1116/6.0004316
Published: March 2025
View articletitled, TiN and TaN cointegration for 300 mm superconducting back end of line
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Journal Articles

Extended model for chemically amplified resist with multiple photoacid generators

Editor’s Pick
Delong Yao, Lisong Dong, Yunyun Hao, Yayi Wei, Ming Fang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022603 (2025)
https://doi.org/10.1116/6.0004381
Published: March 2025
View articletitled, Extended model for chemically amplified resist with multiple photoacid generators
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Journal Articles

Effect of low-pressure postannealing on the electrical properties of VO2 thin films

Editor’s Pick
Xin Lin, Wanyu Jiang, Detao Mu, Yongfeng Jia, Shuoshuo Wang, Linhong Cao, Yajun Fu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022807 (2025)
https://doi.org/10.1116/6.0004435
Published: March 2025
View articletitled, Effect of low-pressure postannealing on the electrical properties of VO2 thin films
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Journal Articles

Focusing electrode effect on the EUV lighting technology based on C-beam irradiation technique

Iksu Kim, Umesh Balaso Apugade, So Min Oh, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022211 (2025)
https://doi.org/10.1116/6.0004301
Published: March 2025
View articletitled, Focusing electrode effect on the EUV lighting technology based on C-beam irradiation technique
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Journal Articles

In situ field emission study of TiN-coated ZnO nanowires

Xinran Li, Guichen Song, Guofu Zhang, Zhuoran Ou, Zhipeng Zhang, Shaozhi Deng, Ningsheng Xu, Jun Chen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023204 (2025)
https://doi.org/10.1116/6.0004234
Published: February 2025
View articletitled, In situ field emission study of TiN-coated ZnO nanowires
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Journal Articles

Experimental investigation of the feasibility of in situ plasma cleaning in normal-conducting copper cavities

Qianxu Xia, Lianmin Zheng, Yingchao Du
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023602 (2025)
https://doi.org/10.1116/6.0004012
Published: February 2025
View articletitled, Experimental investigation of the feasibility of in situ plasma cleaning in normal-conducting copper cavities
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Journal Articles

Study on the etching mechanism of quartz using dual-frequency (60 MHz/400 KHz) capacitively coupled C4F8/Ar/O2 plasma

Chan Li, Liyue Gong, Ziyan Tan, Na Li, Yongxin Liu, Fei Gao, Xianxiu Mei
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023601 (2025)
https://doi.org/10.1116/6.0004206
Published: February 2025
View articletitled, Study on the etching mechanism of quartz using dual-frequency (60 MHz/400 KHz) capacitively coupled C4F8/Ar/O2 plasma
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Journal Articles

Fluorescent flow analysis of in situ material exchange in two-photon 3D printing

Pratyaksh Yemulwar, Fatemeh Rajabasadi, Tanya Saxena, Man-Ho Wong, Josua Zscheile, Robert Kirchner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022602 (2025)
https://doi.org/10.1116/6.0004114
Published: February 2025
View articletitled, Fluorescent flow analysis of in situ material exchange in two-photon 3D printing
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Journal Articles

Viability of HFO-1234ze(E) (trans-1,3,3,3-tetrafluoropropene) as a low global warming potential silicon dioxide etch gas

Aaron J. Windsor, Jeremy C. Clark, George McMurdy, Eric A. Joseph, Robert G. Syvret, Ronald J. Olson, Jr., Judy J. Cha
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022206 (2025)
https://doi.org/10.1116/6.0004194
Published: February 2025
View articletitled, Viability of HFO-1234ze(E) (trans-1,3,3,3-tetrafluoropropene) as a low global warming potential silicon dioxide etch gas
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Journal Articles

Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering

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Akihiro Shimizu, Kazuhiro Fukada, Shinichi Endo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023203 (2025)
https://doi.org/10.1116/6.0004239
Published: February 2025
View articletitled, Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering
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Journal Articles

Carbon impurities in oxide thin films: The effect of annealing and laser irradiation

Syeed E. Ahmed, Cody Ingraham, Matthew D. McCluskey, Jesse Huso, Violet M. Poole
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022204 (2025)
https://doi.org/10.1116/6.0004193
Published: February 2025
View articletitled, Carbon impurities in oxide thin films: The effect of annealing and laser irradiation
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Journal Articles

Photoluminescence lifetime of perovskites on modified substrates

Xavier Vorhies, Jessica M. Andriolo, Joseph J. Thiebes, Emma K. Orcutt, Erik M. Grumstrup, Jack L. Skinner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022203 (2025)
https://doi.org/10.1116/6.0004115
Published: February 2025
View articletitled, Photoluminescence lifetime of perovskites on modified substrates
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Journal Articles

Rate-controlled cycle etching of GaN by cycle exposure to BCl3 and F2-added Ar plasma at a substrate temperature of 400 °C

Editor’s Pick
Shohei Nakamura, Atsushi Tanide, Soichi Nadahara, Kenji Ishikawa, Masaru Hori
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022202 (2025)
https://doi.org/10.1116/5.0239755
Published: January 2025
View articletitled, Rate-controlled cycle etching of GaN by cycle exposure to BCl3 and F2-added Ar plasma at a substrate temperature of 400 °C
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Journal Articles

Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source

Qi Liu, Zufang Lin, Guichen Song, Song Kang, Chengyun Wang, Shaozhi Deng, Ningsheng Xu, Jun Chen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023201 (2025)
https://doi.org/10.1116/6.0004123
Published: January 2025
View articletitled, Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source
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Journal Articles

Selective metal-carbides hardmask strip with chlorine and oxygen plasma

Wan Soo Song, Paul Yang, Karam Ahn, Chiyoung Lee, Yun Young Lee, Jin Cheol Son, Sang Jeen Hong
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022201 (2025)
https://doi.org/10.1116/6.0003984
Published: January 2025
View articletitled, Selective metal-carbides hardmask strip with chlorine and oxygen plasma
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Journal Articles

Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet

Catherine Joy Enrile Antipuesto, Catherine Joy M. Dela Cruz, Christian Lorenz S. Mahinay
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022802 (2025)
https://doi.org/10.1116/6.0004081
Published: January 2025
View articletitled, Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet
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