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Journal Articles

Phase errors reduction in multi-angle illumination digital holographic microscopy

Junsheng Lu, Yanan Zeng, Xinyu Chang, Yujian Hong, Xiaodong Hu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 064003 (2020)
https://doi.org/10.1116/6.0000478
Published: October 2020
View article titled, Phase errors reduction in multi-angle illumination digital holographic microscopy
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Journal Articles

Three-dimensional photolithography using built-in lens mask

Toshiki Tanaka, Daiki Sugihara, Masaru Sasago, Hisao Kikuta, Hiroaki Kawata, Yoshihiko Hirai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G308 (2017)
https://doi.org/10.1116/1.4995693
Published: November 2017
View article titled, Three-dimensional photolithography using built-in lens mask
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Journal Articles

Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching

Pragya Tiwari, Puspen Mondal, A. K. Srivastava, Himanshu Srivastava, Rajnish Dhawan, Sanjay Rai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 051602 (2017)
https://doi.org/10.1116/1.4999933
Published: August 2017
View article titled, Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching
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Journal Articles

Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching

Kenan Li, Michael J. Wojcik, Ralu Divan, Leonidas E. Ocola, Bing Shi, Daniel Rosenmann, Chris Jacobsen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G901 (2017)
https://doi.org/10.1116/1.4991794
Published: August 2017
View article titled, Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching
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Journal Articles

Crystal thickness and extinction distance measurements by convergent beam electron diffraction fitting and application in quantitative TEM holography analysis on p-n junctions

Jie Zhu, Pik Kee Tan, Hao Tan, Dan Dan Wang, Ya Min Huang, Chang Qing Chen, Bing Hai Liu, Eddie Er, Si Ping Zhao, Jeffrey Lam, Zhi Hong Mai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 052209 (2015)
https://doi.org/10.1116/1.4929987
Published: September 2015
View article titled, Crystal thickness and extinction distance measurements by convergent beam electron diffraction fitting and application in quantitative TEM holography analysis on <em>p-n</em> junctions
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Journal Articles

Three-dimensional particle tracking by pixel difference method of optical path length based on digital holographic microscopy

Yanan Zeng, Xinyu Chang, Hai Lei, Xiaodong Hu, Xiaotang Hu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 051808 (2015)
https://doi.org/10.1116/1.4929690
Published: September 2015
View article titled, Three-dimensional particle tracking by pixel difference method of optical path length based on digital holographic microscopy
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Journal Articles

Optical proximity correction using holographic imaging technique

Artak Isoyan, Lawrence S. Melvin, III
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 06FK02 (2014)
https://doi.org/10.1116/1.4901417
Published: November 2014
View article titled, Optical proximity correction using holographic imaging technique
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Journal Articles

Vertical directionality-controlled metal-assisted chemical etching for ultrahigh aspect ratio nanoscale structures

Richard C. Tiberio, Michael J. Rooks, Chieh Chang, Clifford F. Knollenberg, Elizabeth A. Dobisz, Anne Sakdinawat
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 06FI01 (2014)
https://doi.org/10.1116/1.4898199
Published: October 2014
View article titled, Vertical directionality-controlled metal-assisted chemical etching for ultrahigh aspect ratio nanoscale structures
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Journal Articles

Transfer patterning of large-area graphene nanomesh via holographic lithography and plasma etching

Junjun Ding, Ke Du, Ishan Wathuthanthri, Chang-Hwan Choi, Frank T. Fisher, Eui-Hyeok Yang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 06FF01 (2014)
https://doi.org/10.1116/1.4895667
Published: September 2014
View article titled, Transfer patterning of large-area graphene nanomesh via holographic lithography and plasma etching
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Journal Articles

Magnetic field superimposed cold field emission gun under extreme-high vacuum

Keigo Kasuya, Takeshi Kawasaki, Noboru Moriya, Makoto Arai, Tadao Furutsu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 031802 (2014)
https://doi.org/10.1116/1.4869545
Published: March 2014
View article titled, Magnetic field superimposed cold field emission gun under extreme-high vacuum
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Journal Articles

Reorientation of photoreactive liquid crystalline polymer pattern fabricated by hybrid nanoimprinting

Makoto Okada, Yuichi Haruyama, Shinji Matsui, Emi Nishioka, Risa Hosoda, Mizuho Kondo, Nobuhiro Kawatsuki, Tomoyuki Sasaki, Hiroshi Ono
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06FB04 (2013)
https://doi.org/10.1116/1.4828635
Published: November 2013
View article titled, Reorientation of photoreactive liquid crystalline polymer pattern fabricated by hybrid nanoimprinting
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Journal Articles

Silicon nitride zoneplates and packaging for extreme ultraviolet instruments

Erik H. Anderson, Weilun Chao, Eric M. Gullikson, Senajith Rekawa, Nord Andresen, Patrick Naulleau
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06F606 (2013)
https://doi.org/10.1116/1.4826695
Published: October 2013
View article titled, Silicon nitride zoneplates and packaging for extreme ultraviolet instruments
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Journal Articles

Three-dimensional hologram-read-only memory duplication by nanoimprint lithography

Noriyuki Unno, Shuhei Yoshida, Hideaki Akamatsu, Manabu Yamamoto, Shin-ichi Satake, Jun Taniguchi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 06FB01 (2013)
https://doi.org/10.1116/1.4821654
Published: September 2013
View article titled, Three-dimensional hologram-read-only memory duplication by nanoimprint lithography
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Journal Articles

Modified knife-edge method for current density distribution measurements in e-beam writers

Jan Bok, Vladimír Kolařík, Miroslav Horáček, Milan Matějka, František Matějka
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 31, 031603 (2013)
https://doi.org/10.1116/1.4802920
Published: May 2013
View article titled, Modified knife-edge method for current density distribution measurements in e-beam writers
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Journal Articles

Dual applications of free-standing holographic nanopatterns for lift-off and stencil lithography

Ke Du, Yuyang Liu, Ishan Wathuthanthri, Chang-Hwan Choi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06FF04 (2012)
https://doi.org/10.1116/1.4757110
Published: October 2012
View article titled, Dual applications of free-standing holographic nanopatterns for lift-off and stencil lithography
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Journal Articles

Fabrication of digital planar holograms into high refractive index waveguide core for spectroscopy-on-chip applications

Cosimo Calò, Valeria Lacatena, Scott D. Dhuey, Stefano Cabrini, Sergey Babin, Christophe Peroz, Alexander Koshelev, Igor Ivonin, Alexander Goltsov, Vladimir Yankov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 06FE01 (2012)
https://doi.org/10.1116/1.4750038
Published: September 2012
View article titled, Fabrication of digital planar holograms into high refractive index waveguide core for spectroscopy-on-chip applications
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Journal Articles

Actinic characterization of extreme ultraviolet bump-type phase defects

Kenneth A. Goldberg, Iacopo Mochi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 06F502 (2011)
https://doi.org/10.1116/1.3653257
Published: October 2011
View article titled, Actinic characterization of extreme ultraviolet bump-type phase defects
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Journal Articles

13 nm high-efficiency nickel-germanium soft x-ray zone plates

Julia Reinspach, Magnus Lindblom, Michael Bertilson, Olov von Hofsten, Hans M. Hertz, Anders Holmberg
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 011012 (2011)
https://doi.org/10.1116/1.3520457
Published: January 2011
View article titled, 13 nm high-efficiency nickel-germanium soft x-ray zone plates
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Journal Articles

Compact holographic lithography system for photonic-crystal structure

Mei-Li Hsieh, Shawn-Yu Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 011015 (2011)
https://doi.org/10.1116/1.3522658
Published: January 2011
View article titled, Compact holographic lithography system for photonic-crystal structure
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Journal Articles

Development of a simple, compact, low-cost interference lithography system

Hasan Korre, Corey P. Fucetola, Jeremy A. Johnson, Karl K. Berggren
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 28, C6Q20–C6Q24 (2010)
https://doi.org/10.1116/1.3504498
Published: December 2010
View article titled, Development of a simple, compact, low-cost interference lithography system
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