1-20 of 860
Materials heat treatment
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Effect of annealing on focused ion beam induced surface damages in silicon analyzed by micro-Raman spectroscopy

Yoshiharu Goshima, Shinsuke Kashiwagi, Takahiro Namazu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 054001 (2023)
https://doi.org/10.1116/6.0002895
Published: September 2023
View article titled, Effect of annealing on focused ion beam induced surface damages in silicon analyzed by micro-Raman spectroscopy
Open the PDF for Effect of annealing on focused ion beam induced surface damages in silicon analyzed by micro-Raman spectroscopy in another window
Journal Articles

Electrochemical bulk and film-type oxygen sensors: Strategies for detecting extremely low concentration in hydrogen environments

Soon-Won Jung, Min Hyuk Chang, Kyeong-Joon Jo, Mi-Hee Jung, Seung-Yun Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052201 (2023)
https://doi.org/10.1116/6.0002631
Published: July 2023
View article titled, Electrochemical bulk and film-type oxygen sensors: Strategies for detecting extremely low concentration in hydrogen environments
Open the PDF for Electrochemical bulk and film-type oxygen sensors: Strategies for detecting extremely low concentration in hydrogen environments in another window
Journal Articles

Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing

Nicholas Nunn, Sergey Milikisiyants, Marco D. Torelli, Richard Monge, Tom Delord, Alexander I. Shames, Carlos A. Meriles, Ashok Ajoy, Alex I. Smirnov, Olga A. Shenderova
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042206 (2023)
https://doi.org/10.1116/6.0002797
Published: June 2023
View article titled, Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing
Open the PDF for Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing in another window
Includes: Supplementary data
Journal Articles

Surface and functional characterization of nanostructured thin films for environmental remediation

Enrica Maria Malannata, Alessandro Auditore, Antonino Licciardello
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044008 (2023)
https://doi.org/10.1116/6.0002611
Published: June 2023
View article titled, Surface and functional characterization of nanostructured thin films for environmental remediation
Open the PDF for Surface and functional characterization of nanostructured thin films for environmental remediation in another window
Includes: Supplementary data
Journal Articles

Enhancement of electrical properties of a-IGZO thin film transistor by low temperature (150 °C) microwave annealing for flexible electronics

Taeseung Jung, Jung Hoon Han, Sooji Nam, Sanghun Jeon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032201 (2023)
https://doi.org/10.1116/6.0002343
Published: April 2023
View article titled, Enhancement of electrical properties of a-IGZO thin film transistor by low temperature (150 °C) microwave annealing for flexible electronics
Open the PDF for Enhancement of electrical properties of a-IGZO thin film transistor by low temperature (150 °C) microwave annealing for flexible electronics in another window
Journal Articles

Physical vapor deposition of Yb-doped Cs2AgSbBr6 films

Yukun Liu, Minh N. Tran, Iver J. Cleveland, Eray S. Aydil
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022206 (2023)
https://doi.org/10.1116/6.0002475
Published: March 2023
View article titled, Physical vapor deposition of Yb-doped Cs<sub>2</sub>AgSbBr<sub>6</sub> films
Open the PDF for Physical vapor deposition of Yb-doped Cs<sub>2</sub>AgSbBr<sub>6</sub> films in another window
Includes: Supplementary data
Journal Articles

Ultra high vacuum beam pipe of the Einstein Telescope project: Challenges and perspectives

Aniello Grado, Emanuele Tofani, Marco Angelucci, Roberto Cimino, Julien Gargiulo, Fedor Getman, Andrea Liedl, Luca Limatola, Vito Mennella, Antonio Pasqualetti, Fulvio Ricci, Daniel Sentenac, Luisa Spallino
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 024201 (2023)
https://doi.org/10.1116/6.0002323
Published: February 2023
View article titled, Ultra high vacuum beam pipe of the Einstein Telescope project: Challenges and perspectives
Open the PDF for Ultra high vacuum beam pipe of the Einstein Telescope project: Challenges and perspectives in another window
Journal Articles

Spongy TiO2 layers deposited by gig-lox sputtering processes: Contact angle measurements

C. Spampinato, S. Valastro, E. Smecca, V. Arena, G. Mannino, A. La Magna, C. Corsaro, F. Neri, E. Fazio, A. Alberti
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012802 (2023)
https://doi.org/10.1116/6.0002225
Published: December 2022
View article titled, Spongy TiO<sub>2</sub> layers deposited by gig-lox sputtering processes: Contact angle measurements
Open the PDF for Spongy TiO<sub>2</sub> layers deposited by gig-lox sputtering processes: Contact angle measurements in another window
Journal Articles

Threshold switching stabilization of NbO2 films via nanoscale devices

M. C. Sullivan, Zachary R. Robinson, Karsten Beckmann, Alex Powell, Ted Mburu, Katherine Pittman, Nathaniel Cady
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 063202 (2022)
https://doi.org/10.1116/6.0002129
Published: November 2022
View article titled, Threshold switching stabilization of NbO<sub>2</sub> films via nanoscale devices
Open the PDF for Threshold switching stabilization of NbO<sub>2</sub> films via nanoscale devices in another window
Journal Articles

Study of lateral junction drive-in after annealing in ion implanted HgCdTe

Zhikai Gan, Yu Zhao, Chun Lin, Quanzhi Sun, Xi Wang, Xun Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 062206 (2022)
https://doi.org/10.1116/5.0117753
Published: November 2022
View article titled, Study of lateral junction drive-in after annealing in ion implanted HgCdTe
Open the PDF for Study of lateral junction drive-in after annealing in ion implanted HgCdTe in another window
Journal Articles

Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films

Antony Premkumar Peter, Alfonso Sepulveda Marquez, Johan Meersschaut, Praveen Dara, Timothee Blanquart, Takayama Tomomi, Ebisudani Taishi, Shiba Elichiro, Yosuke Kimura, Sander van Gompel, Pierre Morin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 054001 (2022)
https://doi.org/10.1116/6.0001922
Published: August 2022
View article titled, Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films
Open the PDF for Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films in another window
Journal Articles

Enhanced optoelectronic properties of magnetron sputtered ITO/Ag/ITO multilayers by electro-annealing

Zemzem Uyanik, Fulya Turkoglu, Hasan Koseoglu, Merve Ekmekcioglu, Bengu Ata, Yasemin Demirhan, Mehtap Ozdemir, Gulnur Aygun, Lutfi Ozyuzer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 042204 (2022)
https://doi.org/10.1116/6.0001868
Published: June 2022
View article titled, Enhanced optoelectronic properties of magnetron sputtered ITO/Ag/ITO multilayers by electro-annealing
Open the PDF for Enhanced optoelectronic properties of magnetron sputtered ITO/Ag/ITO multilayers by electro-annealing in another window
Journal Articles

Supercapacitor characteristics of MoS2 and MoOx coated onto honeycomb-shaped carbon nanotubes

Wei Li, Yung-Jui Huang, Pao-Hung Lin, Liang-Chiun Chao, Kuei-Yi Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 032401 (2022)
https://doi.org/10.1116/6.0001773
Published: April 2022
View article titled, Supercapacitor characteristics of MoS<sub>2</sub> and MoO<sub>x</sub> coated onto honeycomb-shaped carbon nanotubes
Open the PDF for Supercapacitor characteristics of MoS<sub>2</sub> and MoO<sub>x</sub> coated onto honeycomb-shaped carbon nanotubes in another window
Journal Articles

Plasma atomic layer etching for titanium nitride at low temperatures

Dahee Shim, Jihyun Kim, Yongjae Kim, Heeyeop Chae
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022208 (2022)
https://doi.org/10.1116/6.0001602
Published: February 2022
View article titled, Plasma atomic layer etching for titanium nitride at low temperatures
Open the PDF for Plasma atomic layer etching for titanium nitride at low temperatures in another window
Journal Articles

Plasma-assisted thermal-cyclic atomic-layer etching of tungsten and control of its selectivity to titanium nitride

Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, Yuko Hanaoka, Masaru Izawa, Kenji Ishikawa, Masaru Hori
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022201 (2022)
https://doi.org/10.1116/6.0001660
Published: February 2022
View article titled, Plasma-assisted thermal-cyclic atomic-layer etching of tungsten and control of its selectivity to titanium nitride
Open the PDF for Plasma-assisted thermal-cyclic atomic-layer etching of tungsten and control of its selectivity to titanium nitride in another window
Journal Articles

Quantitative thermodynamic investigation of thermal stability and diffusion barrier property of an amorphous cobalt alloy interlayer

Yuki Yamada, Masataka Yahagi, Junichi Koike
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 013204 (2022)
https://doi.org/10.1116/6.0001536
Published: January 2022
View article titled, Quantitative thermodynamic investigation of thermal stability and diffusion barrier property of an amorphous cobalt alloy interlayer
Open the PDF for Quantitative thermodynamic investigation of thermal stability and diffusion barrier property of an amorphous cobalt alloy interlayer in another window
Journal Articles

Maintaining atomically smooth GaAs surfaces after high-temperature processing for precise interdiffusion analysis and materials engineering

Leonid Miroshnik, Brian D. Rummel, Andrew B. Li, Ganesh Balakrishnan, Talid Sinno, Sang M. Han
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062212 (2021)
https://doi.org/10.1116/6.0001399
Published: November 2021
View article titled, Maintaining atomically smooth GaAs surfaces after high-temperature processing for precise interdiffusion analysis and materials engineering
Open the PDF for Maintaining atomically smooth GaAs surfaces after high-temperature processing for precise interdiffusion analysis and materials engineering in another window
Includes: Supplementary data
Journal Articles

Postdeposition annealing effect on atomic-layer-deposited Al2O3 gate insulator on (001) β-Ga2O3

Atsushi Hiraiwa (平岩篤), 平岩篤, Kiyotaka Horikawa (堀川清貴), 堀川清貴, Hiroshi Kawarada (川原田洋), 川原田洋, Motohisa Kado (加渡幹尚), 加渡幹尚, Katsunori Danno (旦野克典), 旦野克典
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062205 (2021)
https://doi.org/10.1116/6.0001360
Published: October 2021
View article titled, Postdeposition annealing effect on atomic-layer-deposited Al<sub>2</sub>O<sub>3</sub> gate insulator on (001) β-Ga<sub>2</sub>O<sub>3</sub>
Open the PDF for Postdeposition annealing effect on atomic-layer-deposited Al<sub>2</sub>O<sub>3</sub> gate insulator on (001) β-Ga<sub>2</sub>O<sub>3</sub> in another window
Journal Articles

Electroforming and threshold switching characteristics of NbOx films with crystalline NbO2 phase

Jimin Lee, Jaeyeon Kim, Juyoung Jeong, Hyunchul Sohn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 053206 (2021)
https://doi.org/10.1116/6.0001215
Published: September 2021
View article titled, Electroforming and threshold switching characteristics of NbO<sub>x</sub> films with crystalline NbO<sub>2</sub> phase
Open the PDF for Electroforming and threshold switching characteristics of NbO<sub>x</sub> films with crystalline NbO<sub>2</sub> phase in another window
Journal Articles

Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint

Sijia Xie, Jan Erjawetz, Christine Schuster, Helmut Schift
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052603 (2021)
https://doi.org/10.1116/6.0001206
Published: September 2021
View article titled, Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint
Open the PDF for Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint in another window