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Journal Articles

Cu1−xAlx films as alternatives to copper for advanced interconnect metallization

Jean-Philippe Soulié, Kiroubanand Sankaran, Geoffrey Pourtois, Johan Swerts, Zsolt Tőkei, Christoph Adelmann
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 043203 (2024)
https://doi.org/10.1116/6.0003634
Published: June 2024
View article titled, Cu<sub>1−x</sub>Al<sub>x</sub> films as alternatives to copper for advanced interconnect metallization
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Journal Articles

Monitoring of rapid thermal anneal with secondary ion mass spectrometry

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Z. X. Jiang, A. Ravi, T. Breeden, K. Khmelnitskiy, A. Duncan, D. Huynh, S. Butler, B. Granados, D. Acker, J. Luebbe, D. Sieloff, S. Bolton, G. Prieto
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034007 (2024)
https://doi.org/10.1116/6.0003599
Published: May 2024
View article titled, Monitoring of rapid thermal anneal with secondary ion mass spectrometry
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Journal Articles

Effects of high-temperature annealing on vacancy complexes and luminescence properties in multilayer periodic structures with elastically strained GeSiSn layers

Vyacheslav Timofeev, Ilya Skvortsov, Vladimir Mashanov, Alexandr Nikiforov, Dmitry Kolyada, Dmitry Firsov, Oleg Komkov, Samir Samadov, Alexey Sidorin, Oleg Orlov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 030601 (2024)
https://doi.org/10.1116/6.0003557
Published: April 2024
View article titled, Effects of high-temperature annealing on vacancy complexes and luminescence properties in multilayer periodic structures with elastically strained GeSiSn layers
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Journal Articles

Comparing the properties and growth of graphene on electrolytic and rolled Cu foils by chemical vapor deposition

Woo Jin Lee, Sang Ho Kim, Jun Sun Eom, Arnaud Caron
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 024002 (2024)
https://doi.org/10.1116/6.0002893
Published: February 2024
View article titled, Comparing the properties and growth of graphene on electrolytic and rolled Cu foils by chemical vapor deposition
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Includes: Supplementary data
Journal Articles

Room-temperature nanostructured PbSe/CdSe mid-infrared photodetector: Annealing effects

Milad Rastkar Mirzaei, Zhisheng Shi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 012204 (2024)
https://doi.org/10.1116/6.0003193
Published: January 2024
View article titled, Room-temperature nanostructured PbSe/CdSe mid-infrared photodetector: Annealing effects
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Journal Articles

Plasma-assisted annealing of Pt-doped rutile TiO2 nanoparticles for enhanced decomposition and bacterial inactivation under general lighting

Retsuo Kawakami, Yuta Makino, Shin-ichiro Yanagiya, Akihiro Shirai, Masahito Niibe, Yoshitaka Nakano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 012203 (2024)
https://doi.org/10.1116/6.0003101
Published: January 2024
View article titled, Plasma-assisted annealing of Pt-doped rutile TiO<sub>2</sub> nanoparticles for enhanced decomposition and bacterial inactivation under general lighting
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Journal Articles

Influence of vacuum annealing on mechanical characteristics of focused ion beam fabricated silicon nanowires

Hiromichi Ando, Takahiro Namazu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062808 (2023)
https://doi.org/10.1116/6.0002983
Published: November 2023
View article titled, Influence of vacuum annealing on mechanical characteristics of focused ion beam fabricated silicon nanowires
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Journal Articles

Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy

A. R. Chourasia, D. R. Chopra
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062806 (2023)
https://doi.org/10.1116/6.0002922
Published: November 2023
View article titled, Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy
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Journal Articles

E-mode AlGaN/GaN HEMTs using p-NiO gates

Chao-Ching Chiang, Hsiao-Hsuan Wan, Jian-Sian Li, Fan Ren, Timothy Jinsoo Yoo, Honggyu Kim, S. J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062205 (2023)
https://doi.org/10.1116/6.0003119
Published: November 2023
View article titled, E-mode AlGaN/GaN HEMTs using p-NiO gates
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Journal Articles

Effect of annealing on focused ion beam induced surface damages in silicon analyzed by micro-Raman spectroscopy

Yoshiharu Goshima, Shinsuke Kashiwagi, Takahiro Namazu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 054001 (2023)
https://doi.org/10.1116/6.0002895
Published: September 2023
View article titled, Effect of annealing on focused ion beam induced surface damages in silicon analyzed by micro-Raman spectroscopy
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Journal Articles

Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing

Nicholas Nunn, Sergey Milikisiyants, Marco D. Torelli, Richard Monge, Tom Delord, Alexander I. Shames, Carlos A. Meriles, Ashok Ajoy, Alex I. Smirnov, Olga A. Shenderova
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042206 (2023)
https://doi.org/10.1116/6.0002797
Published: June 2023
View article titled, Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing
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Includes: Supplementary data
Journal Articles

Enhancement of electrical properties of a-IGZO thin film transistor by low temperature (150 °C) microwave annealing for flexible electronics

Taeseung Jung, Jung Hoon Han, Sooji Nam, Sanghun Jeon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032201 (2023)
https://doi.org/10.1116/6.0002343
Published: April 2023
View article titled, Enhancement of electrical properties of a-IGZO thin film transistor by low temperature (150 °C) microwave annealing for flexible electronics
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Journal Articles

Physical vapor deposition of Yb-doped Cs2AgSbBr6 films

Yukun Liu, Minh N. Tran, Iver J. Cleveland, Eray S. Aydil
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022206 (2023)
https://doi.org/10.1116/6.0002475
Published: March 2023
View article titled, Physical vapor deposition of Yb-doped Cs<sub>2</sub>AgSbBr<sub>6</sub> films
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Includes: Supplementary data
Journal Articles

Spongy TiO2 layers deposited by gig-lox sputtering processes: Contact angle measurements

C. Spampinato, S. Valastro, E. Smecca, V. Arena, G. Mannino, A. La Magna, C. Corsaro, F. Neri, E. Fazio, A. Alberti
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012802 (2023)
https://doi.org/10.1116/6.0002225
Published: December 2022
View article titled, Spongy TiO<sub>2</sub> layers deposited by gig-lox sputtering processes: Contact angle measurements
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Journal Articles

Threshold switching stabilization of NbO2 films via nanoscale devices

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M. C. Sullivan, Zachary R. Robinson, Karsten Beckmann, Alex Powell, Ted Mburu, Katherine Pittman, Nathaniel Cady
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 063202 (2022)
https://doi.org/10.1116/6.0002129
Published: November 2022
View article titled, Threshold switching stabilization of NbO<sub>2</sub> films via nanoscale devices
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Journal Articles

Study of lateral junction drive-in after annealing in ion implanted HgCdTe

Zhikai Gan, Yu Zhao, Chun Lin, Quanzhi Sun, Xi Wang, Xun Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 062206 (2022)
https://doi.org/10.1116/5.0117753
Published: November 2022
View article titled, Study of lateral junction drive-in after annealing in ion implanted HgCdTe
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Journal Articles

Enhanced optoelectronic properties of magnetron sputtered ITO/Ag/ITO multilayers by electro-annealing

Zemzem Uyanik, Fulya Turkoglu, Hasan Koseoglu, Merve Ekmekcioglu, Bengu Ata, Yasemin Demirhan, Mehtap Ozdemir, Gulnur Aygun, Lutfi Ozyuzer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 042204 (2022)
https://doi.org/10.1116/6.0001868
Published: June 2022
View article titled, Enhanced optoelectronic properties of magnetron sputtered ITO/Ag/ITO multilayers by electro-annealing
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Journal Articles

Supercapacitor characteristics of MoS2 and MoOx coated onto honeycomb-shaped carbon nanotubes

Wei Li, Yung-Jui Huang, Pao-Hung Lin, Liang-Chiun Chao, Kuei-Yi Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 032401 (2022)
https://doi.org/10.1116/6.0001773
Published: April 2022
View article titled, Supercapacitor characteristics of MoS<sub>2</sub> and MoO<sub>x</sub> coated onto honeycomb-shaped carbon nanotubes
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Journal Articles

Plasma-assisted thermal-cyclic atomic-layer etching of tungsten and control of its selectivity to titanium nitride

Editor’s Pick
Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, Yuko Hanaoka, Masaru Izawa, Kenji Ishikawa, Masaru Hori
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022201 (2022)
https://doi.org/10.1116/6.0001660
Published: February 2022
View article titled, Plasma-assisted thermal-cyclic atomic-layer etching of tungsten and control of its selectivity to titanium nitride
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Journal Articles

Quantitative thermodynamic investigation of thermal stability and diffusion barrier property of an amorphous cobalt alloy interlayer

Yuki Yamada, Masataka Yahagi, Junichi Koike
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 013204 (2022)
https://doi.org/10.1116/6.0001536
Published: January 2022
View article titled, Quantitative thermodynamic investigation of thermal stability and diffusion barrier property of an amorphous cobalt alloy interlayer
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