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Journal Articles

Growth mode and characterizations of electrodeposited Re thick films from aqueous solutions with additives on Cu (110) + (311) substrates

Wangping Wu, Sheng Lin, Qinqin Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044003 (2023)
https://doi.org/10.1116/6.0002691
Published: June 2023
View article titled, Growth mode and characterizations of electrodeposited Re thick films from aqueous solutions with additives on Cu (110) + (311) substrates
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Includes: Supplementary data
Journal Articles

Electron transport in macroscopic borosilicate capillaries with bending angles of 90° and 360°

Hai-Dang Nguyen, Jan-Philipp Wulfkühler, Martin Tajmar
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 034203 (2023)
https://doi.org/10.1116/6.0002281
Published: May 2023
View article titled, Electron transport in macroscopic borosilicate capillaries with bending angles of 90° and 360°
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Journal Articles

Electron transport mechanisms in amorphous zinc oxysulfide thin films

Masato Tsuchii, Zhen Chen, Yasushi Hirose, Tetsuya Hasegawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022201 (2023)
https://doi.org/10.1116/5.0104988
Published: January 2023
View article titled, Electron transport mechanisms in amorphous zinc oxysulfide thin films
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Includes: Supplementary data
Journal Articles

Spongy TiO2 layers deposited by gig-lox sputtering processes: Contact angle measurements

C. Spampinato, S. Valastro, E. Smecca, V. Arena, G. Mannino, A. La Magna, C. Corsaro, F. Neri, E. Fazio, A. Alberti
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012802 (2023)
https://doi.org/10.1116/6.0002225
Published: December 2022
View article titled, Spongy TiO<sub>2</sub> layers deposited by gig-lox sputtering processes: Contact angle measurements
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Journal Articles

Dysprosium liquid metal alloy ion source for magnetic nanostructures

Lothar Bischoff, Nico Klingner, Paul Mazarov, Kilian Lenz, Ryszard Narkowicz, Wolfgang Pilz, Fabian Meyer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052802 (2022)
https://doi.org/10.1116/6.0001837
Published: August 2022
View article titled, Dysprosium liquid metal alloy ion source for magnetic nanostructures
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Journal Articles

Optical properties of Mo and amorphous MoOx, and application to antireflection coatings for metals

David V. Tsu, Matthias Muehle, Harald Köstenbauer, Christian Linke, Jörg Winkler
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022209 (2022)
https://doi.org/10.1116/6.0001659
Published: March 2022
View article titled, Optical properties of Mo and amorphous MoOx, and application to antireflection coatings for metals
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Journal Articles

Quantitative thermodynamic investigation of thermal stability and diffusion barrier property of an amorphous cobalt alloy interlayer

Yuki Yamada, Masataka Yahagi, Junichi Koike
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 013204 (2022)
https://doi.org/10.1116/6.0001536
Published: January 2022
View article titled, Quantitative thermodynamic investigation of thermal stability and diffusion barrier property of an amorphous cobalt alloy interlayer
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Journal Articles

Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies

Pavani Vamsi Krishna Nittala, Karthika Haridas, Shivam Nigam, Saba Tasneem, Prosenjit Sen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052207 (2021)
https://doi.org/10.1116/6.0001160
Published: August 2021
View article titled, Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies
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Journal Articles

Optimization of a continuous hot embossing process for fabrication of micropyramid structures in thermoplastic sheets

Luke Haponow, Jeff Kettle, John Allsop
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 012203 (2021)
https://doi.org/10.1116/6.0000551
Published: December 2020
View article titled, Optimization of a continuous hot embossing process for fabrication of micropyramid structures in thermoplastic sheets
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Journal Articles

Sol-gel synthesized indium tin oxide as a transparent conducting oxide with solution-processed black phosphorus for its integration into solar-cells

Ravindra Mehta, Misook Min, Anupama B. Kaul
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 063203 (2020)
https://doi.org/10.1116/6.0000471
Published: October 2020
View article titled, Sol-gel synthesized indium tin oxide as a transparent conducting oxide with solution-processed black phosphorus for its integration into solar-cells
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Journal Articles

Mechanically reliable hybrid organosilicate glasses for advanced interconnects

Karsu Ipek Kilic, Reinhold H. Dauskardt
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 060601 (2020)
https://doi.org/10.1116/6.0000517
Published: October 2020
View article titled, Mechanically reliable hybrid organosilicate glasses for advanced interconnects
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Journal Articles

Atomic spectroscopy and laser frequency stabilization with scalable micrometer and sub-micrometer vapor cells

Eliran Talker, Roy Zektzer, Yefim Barash, Noa Mazurski, Uriel Levy
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 050601 (2020)
https://doi.org/10.1116/6.0000416
Published: August 2020
View article titled, Atomic spectroscopy and laser frequency stabilization with scalable micrometer and sub-micrometer vapor cells
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Journal Articles

Ellipsometric characterization of Bi and Al2O3 coatings for plasmon excitation in an optical fiber sensor

Eva Rodríguez-Schwendtner, Alberto Álvarez-Herrero, Antonio Mariscal, Rosalía Serna, Agustín González-Cano, María-Cruz Navarrete, Natalia Díaz-Herrera
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062914 (2019)
https://doi.org/10.1116/1.5121590
Published: October 2019
View article titled, Ellipsometric characterization of Bi and Al<sub>2</sub>O<sub>3</sub> coatings for plasmon excitation in an optical fiber sensor
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Journal Articles

Neural network-based model of photoresist reflow

Charmaine Chia, Joel Martis, Stefanie S. Jeffrey, Roger T. Howe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061604 (2019)
https://doi.org/10.1116/1.5116857
Published: October 2019
View article titled, Neural network-based model of photoresist reflow
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Journal Articles

Charge-induced pattern displacement in E-beam lithography

Kerim T. Arat, Thomas Klimpel, Aernout C. Zonnevylle, Wilhelmus S. M. M. Ketelaars, Carel Th. H. Heerkens,, Cornelis W. Hagen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 051603 (2019)
https://doi.org/10.1116/1.5120631
Published: September 2019
View article titled, Charge-induced pattern displacement in E-beam lithography
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Includes: Supplementary data
Journal Articles

Enhanced uniformity of III-nitride nanowire arrays on bulk metallic glass and nanocrystalline substrates

Brelon J. May, Elline C. Hettiaratchy, Camelia Selcu, Binbin Wang, Bryan D. Esser, David W. McComb, Roberto C. Myers
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 031212 (2019)
https://doi.org/10.1116/1.5086184
Published: April 2019
View article titled, Enhanced uniformity of III-nitride nanowire arrays on bulk metallic glass and nanocrystalline substrates
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Journal Articles

Maskless production of neural-recording graphene microelectrode arrays

Vanessa Pereira Gomes, Aline Maria Pascon, Roberto Ricardo Panepucci, Jacobus Willibrordus Swart
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 022202 (2019)
https://doi.org/10.1116/1.5048216
Published: February 2019
View article titled, Maskless production of neural-recording graphene microelectrode arrays
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Journal Articles

Flexible vertical-channel thin-film transistors using In-Ga-Zn-O active channel and polyimide spacer on poly(ethylene naphthalate) substrate

Hyeong-Rae Kim, Ji-Hee Yang, Gi-Heon Kim, Sung-Min Yoon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 010602 (2019)
https://doi.org/10.1116/1.5082898
Published: January 2019
View article titled, Flexible vertical-channel thin-film transistors using In-Ga-Zn-O active channel and polyimide spacer on poly(ethylene naphthalate) substrate
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Journal Articles

Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity

Alexander P. Palov, Mikhail R. Baklanov, Shuhua Wei
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 010601 (2019)
https://doi.org/10.1116/1.5082781
Published: January 2019
View article titled, Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity
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Journal Articles

Structural effects on the performance of epoxide-based negative-tone molecular resists

Brandon L. Sharp, Hannah L. Narcross, Peter Ludovice, Laren M. Tolbert, Clifford L. Henderson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 011604 (2019)
https://doi.org/10.1116/1.5057741
Published: January 2019
View article titled, Structural effects on the performance of epoxide-based negative-tone molecular resists
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Includes: Supplementary data