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Journal Articles

Tensile-strained self-assembly of InGaAs on InAs(111)A

Kevin D. Vallejo, Trent A. Garrett, Carlos I. Cabrera, Baolai Liang, Kevin A. Grossklaus, Paul J. Simmonds
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062809 (2021)
https://doi.org/10.1116/6.0001481
Published: November 2021
View article titled, Tensile-strained self-assembly of InGaAs on InAs(111)A
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Journal Articles

Dielectric breakdown in epitaxial BaTiO3 thin films

HsinWei Wu, Patrick Ponath, Edward L. Lin, Robert M. Wallace, Chadwin Young, John G. Ekerdt, Alexander A. Demkov, Martha R. McCartney, David J. Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 044007 (2020)
https://doi.org/10.1116/6.0000237
Published: July 2020
View article titled, Dielectric breakdown in epitaxial BaTiO<sub>3</sub> thin films
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Journal Articles

Amorphous sulfide heterostructure precursors prepared by radio frequency sputtering

Dennice M. Roberts, John D. Perkins, Andrew G. Norman, Conrad R. Stoldt, Andriy Zakutayev, Sage R. Bauers
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 051201 (2019)
https://doi.org/10.1116/1.5099502
Published: August 2019
View article titled, Amorphous sulfide heterostructure precursors prepared by radio frequency sputtering
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Journal Articles

Band alignment of atomic layer deposited SiO2 on (010) (Al0.14Ga0.86)2O3

Chaker Fares, F. Ren, Eric Lambers, David C. Hays, B. P. Gila, S. J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 061207 (2018)
https://doi.org/10.1116/1.5052620
Published: October 2018
View article titled, Band alignment of atomic layer deposited SiO<sub>2</sub> on (010) (Al<sub>0.14</sub>Ga<sub>0.86</sub>)<sub>2</sub>O<sub>3</sub>
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Journal Articles

Evaluation of electron optics with an offset cylindrical lens: Application to a monochromator or energy analyzer

Takashi Ogawa, Yoshizo Takai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 032902 (2018)
https://doi.org/10.1116/1.5025775
Published: May 2018
View article titled, Evaluation of electron optics with an offset cylindrical lens: Application to a monochromator or energy analyzer
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Includes: Supplementary data
Journal Articles

Characterization of thin carbon films capable of low-field electron emission

Alexander Andronov, Ekaterina Budylina, Pavel Shkitun, Pavel Gabdullin, Nikolay Gnuchev, Olga Kvashenkina, Alexander Arkhipov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 02C108 (2018)
https://doi.org/10.1116/1.5009906
Published: January 2018
View article titled, Characterization of thin carbon films capable of low-field electron emission
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Journal Articles

Study of shot noise in photoresists for extreme ultraviolet lithography through comparative analysis of line edge roughness in electron beam and extreme ultraviolet lithography

Suchit Bhattarai, Andrew R. Neureuther, Patrick P. Naulleau
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 061602 (2017)
https://doi.org/10.1116/1.4991054
Published: November 2017
View article titled, Study of shot noise in photoresists for extreme ultraviolet lithography through comparative analysis of line edge roughness in electron beam and extreme ultraviolet lithography
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Journal Articles

Conduction and valence band offsets of LaAl2O3 with (−201) β-Ga2O3

Patrick H. Carey, IV, Fan Ren, David C. Hays, Brent P. Gila, Stephen J. Pearton, Soohwan Jang, Akito Kuramata
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 041201 (2017)
https://doi.org/10.1116/1.4984097
Published: May 2017
View article titled, Conduction and valence band offsets of LaAl<sub>2</sub>O<sub>3</sub> with (−201) β-Ga<sub>2</sub>O<sub>3</sub>
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Journal Articles

Effect of deposition conditions and composition on band offsets in atomic layer deposited HfxSi1−xOy on InGaZnO4

David C. Hays, Brent P. Gila, Stephen J. Pearton, Andres Trucco, Ryan Thorpe, Fan Ren
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 011206 (2017)
https://doi.org/10.1116/1.4973882
Published: January 2017
View article titled, Effect of deposition conditions and composition on band offsets in atomic layer deposited Hf<sub>x</sub>Si<sub>1−x</sub>O<sub>y</sub> on InGaZnO<sub>4</sub>
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Journal Articles

Plasma and photon interactions with organosilicon polymers for directed self-assembly patterning applications

Laurent Azarnouche, Stephen M. Sirard, William J. Durand, Gregory Blachut, Emir Gurer, Diane J. Hymes, Christopher J. Ellison, Carlton G. Willson, David B. Graves
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 061602 (2016)
https://doi.org/10.1116/1.4964885
Published: October 2016
View article titled, Plasma and photon interactions with organosilicon polymers for directed self-assembly patterning applications
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Includes: Supplementary data
Journal Articles

Improvement of electron field emission properties of nanocrystalline diamond films by a plasma post-treatment process for cathode application in microplasma devices

Sheng-Chang Lin, Chien-Jui Yeh, Keh-Chyang Leou, Divinah Manoharan, I-Nan Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 02G106 (2016)
https://doi.org/10.1116/1.4944006
Published: March 2016
View article titled, Improvement of electron field emission properties of nanocrystalline diamond films by a plasma post-treatment process for cathode application in microplasma devices
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Journal Articles

Incorporation of Be dopant in GaAs core and core–shell nanowires by molecular beam epitaxy

Sai Krishna Ojha, Pavan Kumar Kasanaboina, Claude Lewis Reynolds, Jr., Thomas A. Rawdanowicz, Yang Liu, Ryan M. White, Shanthi Iyer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 02L114 (2016)
https://doi.org/10.1116/1.4943600
Published: March 2016
View article titled, Incorporation of Be dopant in GaAs core and core–shell nanowires by molecular beam epitaxy
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Journal Articles

Study of the electrical and chemical properties of the multistep deposited and two-step (ultraviolet ozone cum rapid thermal) annealed HfO2 gate stack

Kwang Sing Yew, Diing Shenp Ang, Lei Jun Tang, Jisheng Pan
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 011205 (2016)
https://doi.org/10.1116/1.4936893
Published: December 2015
View article titled, Study of the electrical and chemical properties of the multistep deposited and two-step (ultraviolet ozone cum rapid thermal) annealed HfO<sub>2</sub> gate stack
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Journal Articles

Band offsets in HfSiO4/IGZO heterojunctions

David C. Hays, Brent P. Gila, Stephen J. Pearton, Fan Ren
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 061209 (2015)
https://doi.org/10.1116/1.4936117
Published: November 2015
View article titled, Band offsets in HfSiO<sub>4</sub>/IGZO heterojunctions
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Journal Articles

Crystal thickness and extinction distance measurements by convergent beam electron diffraction fitting and application in quantitative TEM holography analysis on p-n junctions

Jie Zhu, Pik Kee Tan, Hao Tan, Dan Dan Wang, Ya Min Huang, Chang Qing Chen, Bing Hai Liu, Eddie Er, Si Ping Zhao, Jeffrey Lam, Zhi Hong Mai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 052209 (2015)
https://doi.org/10.1116/1.4929987
Published: September 2015
View article titled, Crystal thickness and extinction distance measurements by convergent beam electron diffraction fitting and application in quantitative TEM holography analysis on <em>p-n</em> junctions
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Journal Articles

Energy band alignments of Al2O3–HfO2/Al2O3 nanolaminates–SiO2–p-type Si structures

Abdulloh Rifai, Siddheswar Maikap, Yoshio Nakamura
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 051812 (2015)
https://doi.org/10.1116/1.4931027
Published: September 2015
View article titled, Energy band alignments of Al<sub>2</sub>O<sub>3</sub>–HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> nanolaminates–SiO<sub>2</sub>–p-type Si structures
Open the PDF for Energy band alignments of Al<sub>2</sub>O<sub>3</sub>–HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> nanolaminates–SiO<sub>2</sub>–p-type Si structures in another window
Journal Articles

Band offsets in Sc2O3/ZnO heterostructures deposited by RF magnetron sputtering

David C. Hays, Brent P. Gila, Stephen J. Pearton, Byung-Jae Kim, Fan Ren, Tae Sung Jang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 051218 (2015)
https://doi.org/10.1116/1.4931035
Published: September 2015
View article titled, Band offsets in Sc<sub>2</sub>O<sub>3</sub>/ZnO heterostructures deposited by RF magnetron sputtering
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Journal Articles

Arc plasma synthesized Si nanotubes: A promising low turn on field emission source

Padmashree D. Joshi, Chiti M. Tank, Shalaka A. Kamble, Dilip S. Joag, Sudha V. Bhoraskar, Vikas L. Mathe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 021806 (2015)
https://doi.org/10.1116/1.4914959
Published: March 2015
View article titled, Arc plasma synthesized Si nanotubes: A promising low turn on field emission source
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Journal Articles

Investigation of atomic layer deposited beryllium oxide material properties for high-k dielectric applications

Donghyi Koh, Jung-Hwan Yum, Sanjay K. Banerjee, Todd W. Hudnall, Christopher Bielawski, William A. Lanford, Benjamin L. French, Marc French, Patrick Henry, Han Li, Markus Kuhn, Sean W. King
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 03D117 (2014)
https://doi.org/10.1116/1.4867436
Published: March 2014
View article titled, Investigation of atomic layer deposited beryllium oxide material properties for high-k dielectric applications
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Journal Articles

Development of diamond cathode materials for enhancing the electron field emission and plasma characteristics using two-step microwave plasma enhanced chemical vapor deposition process

Shiu-Cheng Lou, Chulung Chen, Srinivasu Kunuku, Keh-Chyang Leou, Chi-Young Lee, Huang-Chin Chen, I-Nan Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 32, 021202 (2014)
https://doi.org/10.1116/1.4864067
Published: February 2014
View article titled, Development of diamond cathode materials for enhancing the electron field emission and plasma characteristics using two-step microwave plasma enhanced chemical vapor deposition process
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