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Journal Articles

Effect of sputtering-target composition on the structure, dielectric, ferroelectric, and energy storage properties of highly (00l)-oriented Ba(ZrxTi1–x)O3 films

Lei Li, Daili Gong, Fangren Hu, Hongbo Cheng, Wei Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 043801 (2023)
https://doi.org/10.1116/6.0002547
Published: June 2023
View article titled, Effect of sputtering-target composition on the structure, dielectric, ferroelectric, and energy storage properties of highly (00<em>l</em>)-oriented Ba(Zr<sub>x</sub>Ti<sub>1–x</sub>)O<sub>3</sub> films
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Journal Articles

Heat transfer mechanism of electrostatic chuck surface and wafer backside to improve wafer temperature uniformity

Tae Woong Yoon, Sung Il Cho, Minsuk Choi, Sang Jeen Hong
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044002 (2023)
https://doi.org/10.1116/6.0002737
Published: May 2023
View article titled, Heat transfer mechanism of electrostatic chuck surface and wafer backside to improve wafer temperature uniformity
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Journal Articles

Temperature dependence of the infrared dielectric function and the direct bandgap of InSb from 80 to 725 K

Melissa Rivero Arias, Carlos A. Armenta, Carola Emminger, Cesy M. Zamarripa, Nuwanjula S. Samarasingha, Jaden R. Love, Sonam Yadav, Stefan Zollner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022203 (2023)
https://doi.org/10.1116/6.0002326
Published: February 2023
View article titled, Temperature dependence of the infrared dielectric function and the direct bandgap of InSb from 80 to 725 K
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Includes: Supplementary data
Journal Articles

Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas

Dmitry Levko, Rochan R. Upadhyay, Kenta Suzuki, Laxminarayan L. Raja
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012205 (2023)
https://doi.org/10.1116/6.0002236
Published: December 2022
View article titled, Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas
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Journal Articles

Effect of Hf concentration on energy storage performance of lead-free BaHfxTi1−xO3 thin film capacitors

Tingzhi Duan, Tianyi Hu, Jing Jin, Chunrui Ma, Ming Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 062207 (2022)
https://doi.org/10.1116/6.0001967
Published: November 2022
View article titled, Effect of Hf concentration on energy storage performance of lead-free BaHf<em><sub>x</sub></em>Ti<sub>1−<em>x</em></sub>O<sub>3</sub> thin film capacitors
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Includes: Supplementary data
Journal Articles

Spectro-ellipsometric probing of wetting, nucleation, and dot/island formation during photo-excited chemical vapor deposition of Ge on SiO2 substrate

Housei Akazawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 062204 (2022)
https://doi.org/10.1116/6.0002067
Published: October 2022
View article titled, Spectro-ellipsometric probing of wetting, nucleation, and dot/island formation during photo-excited chemical vapor deposition of Ge on SiO<sub>2</sub> substrate
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Journal Articles

Low trap density of oxygen-rich HfO2/GaN interface for GaN MIS-HEMT applications

Wei-Chih Cheng, Jiaqi He, Minghao He, Zepeng Qiao, Yang Jiang, Fangzhou Du, Xiang Wang, Haimin Hong, Qing Wang, Hongyu Yu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022212 (2022)
https://doi.org/10.1116/6.0001654
Published: March 2022
View article titled, Low trap density of oxygen-rich HfO<sub>2</sub>/GaN interface for GaN MIS-HEMT applications
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Journal Articles

Identifying extreme ultraviolet lithography attenuated phase shifting mask absorber materials using effective media approximation modeling

Rajiv Sejpal, Bruce Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062604 (2021)
https://doi.org/10.1116/6.0001298
Published: November 2021
View article titled, Identifying extreme ultraviolet lithography attenuated phase shifting mask absorber materials using effective media approximation modeling
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Journal Articles

Temperature dependence of the optical phonon reflection band in GaP

Nuwanjula S. Samarasingha, Stefan Zollner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052201 (2021)
https://doi.org/10.1116/6.0001118
Published: July 2021
View article titled, Temperature dependence of the optical phonon reflection band in GaP
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Includes: Supplementary data
Journal Articles

Gate engineering in metal insulator semiconductor capacitors on native gallium nitride substrates for applications with high lifetime requirements

Kevin Dannecker, Jens Baringhaus
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 012201 (2021)
https://doi.org/10.1116/6.0000440
Published: December 2020
View article titled, Gate engineering in metal insulator semiconductor capacitors on native gallium nitride substrates for applications with high lifetime requirements
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Journal Articles

Postdeposition annealing effect on the reliability of atomic-layer-deposited Al2O3 films on GaN

Kiyotaka Horikawa (堀川清貴), 堀川清貴, Satoshi Okubo (大久保智), 大久保智, Hiroshi Kawarada (川原田洋), 川原田洋, Atsushi Hiraiwa (平岩篤), 平岩篤
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062207 (2020)
https://doi.org/10.1116/6.0000531
Published: October 2020
View article titled, Postdeposition annealing effect on the reliability of atomic-layer-deposited Al<sub>2</sub>O<sub>3</sub> films on GaN
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Journal Articles

Experimental reliability study of cumulative damage models on state-of-the-art semiconductor technologies for step-stress tests and mission profile stresses

A. Hirler, J. Biba, D. Lipp, H. Lochner, M. Siddabathula, S. Simon, T. Sulima, M. Wiatr, W. Hansch
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 064001 (2020)
https://doi.org/10.1116/6.0000504
Published: September 2020
View article titled, Experimental reliability study of cumulative damage models on state-of-the-art semiconductor technologies for step-stress tests and mission profile stresses
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Journal Articles

Dielectric breakdown in epitaxial BaTiO3 thin films

HsinWei Wu, Patrick Ponath, Edward L. Lin, Robert M. Wallace, Chadwin Young, John G. Ekerdt, Alexander A. Demkov, Martha R. McCartney, David J. Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 044007 (2020)
https://doi.org/10.1116/6.0000237
Published: July 2020
View article titled, Dielectric breakdown in epitaxial BaTiO<sub>3</sub> thin films
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Journal Articles

Thickness dependence of infrared lattice absorption and excitonic absorption in ZnO layers on Si and SiO2 grown by atomic layer deposition

Nuwanjula S. Samarasingha, Stefan Zollner, Dipayan Pal, Rinki Singh, Sudeshna Chattopadhyay
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 042201 (2020)
https://doi.org/10.1116/6.0000184
Published: May 2020
View article titled, Thickness dependence of infrared lattice absorption and excitonic absorption in ZnO layers on Si and SiO<sub>2</sub> grown by atomic layer deposition
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Includes: Supplementary data
Journal Articles

Band offsets at amorphous hydrogenated boron nitride/high-k oxide interfaces from x-ray photoelectron spectroscopy with charging effects analysis

Michelle M. Paquette, Anthony N. Caruso, Justin Brockman, Jeff Bielefeld, Markus Kuhn, Sean W. King
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 030601 (2020)
https://doi.org/10.1116/6.0000005
Published: April 2020
View article titled, Band offsets at amorphous hydrogenated boron nitride/high-<em>k</em> oxide interfaces from x-ray photoelectron spectroscopy with charging effects analysis
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Journal Articles

Multilayer film passivation for enhanced reliability of power semiconductor devices

Roberta Busca, Davide Cimmino, Sergio Ferrero, Luciano Scaltrito, Candido Fabrizio Pirri, Giovanni Richieri, Rossano Carta
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 022206 (2020)
https://doi.org/10.1116/1.5121880
Published: February 2020
View article titled, Multilayer film passivation for enhanced reliability of power semiconductor devices
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Journal Articles

Gaussian effective medium theory of dielectric properties of inhomogeneous systems

Agnieszka Chrzanowska, Sebastian Babiarz
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 022201 (2020)
https://doi.org/10.1116/1.5130010
Published: January 2020
View article titled, Gaussian effective medium theory of dielectric properties of inhomogeneous systems
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Journal Articles

Using electrochemistry-total internal reflection imaging ellipsometry to monitor biochemical oxygen demand with polyaniline modified electrode

Jia Shen, Wei Liu, Yu Niu, Meng Li, Gang Jin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 024001 (2020)
https://doi.org/10.1116/1.5129606
Published: January 2020
View article titled, Using electrochemistry-total internal reflection imaging ellipsometry to monitor biochemical oxygen demand with polyaniline modified electrode
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Includes: Supplementary data
Journal Articles

Effects of substrate-controlled-orientation on the electrical performance of sputtered BaTiO3 thin films

Wei Zhang, Fangren Hu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 012208 (2020)
https://doi.org/10.1116/1.5131542
Published: January 2020
View article titled, Effects of substrate-controlled-orientation on the electrical performance of sputtered BaTiO<sub>3</sub> thin films
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Journal Articles

Infrared spectroscopic ellipsometry and optical spectroscopy of plasmons in classic 3D topological insulators

Nazim T. Mamedov, Elvin H. Alizade, Zakir A. Jahangirli, Ziya S. Aliev, Nadir A. Abdullayev, Samir N. Mammadov, Imamaddin R. Amiraslanov, Yong-Gu Shim, Kazuki Wakita, Sadiyar S. Ragimov, Ayaz I. Bayramov, Mahammad B. Babanly, Alexander M. Shikin, Evgueni V. Chulkov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062602 (2019)
https://doi.org/10.1116/1.5122776
Published: November 2019
View article titled, Infrared spectroscopic ellipsometry and optical spectroscopy of plasmons in classic 3D topological insulators
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