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Journal Articles (1289)

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Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE (9)
Conference Collection: 20th Workshop on Dielectrics in Microelectronics (6)
Reliability and Stress-related Phenomena in Nano and Microelectronics (2)
64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021 (1)
Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019) (1)
Conference Collection: XXIV AIV 2019 Conference of the Association of Science and Technology (1)
Honoring Dr. Gary McGuire’s Research and Leadership as Editor of the Journal of Vacuum Science & Technology for Three Decades (1)
Neuromorphic Materials, Devices, and Processing (1)
Papers from the 47th Conference on the Physics and Chemistry of Surfaces and Interfaces (PCSI-47) 2020 (1)
Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (1)

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Statistical physics
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Editor’s Pick (15)
Review Articles (5)
Perspectives (1)
Scilight (1)

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Journal of Vacuum Science & Technology B (1289)

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Research Article (1233)
Letter (39)
Brief Report (9)
Review Article (5)
Product Review (2)
Abstract (1)

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Regular Articles (157)
REGULAR ARTICLES (119)
Electronic & Optoelectronic Materials, Devices & Processing (91)
ARTICLES (59)
Microelectronic & Nanoelectronic Devices (52)
PAPERS FROM THE 15TH WORKSHOP ON DIELECTRICS IN MICROELECTRONICS (47)
Letters (43)
Articles (34)
Electronic and Optoelectronic Materials, Devices and Processing (21)
Special Issue: High-k Dielectrics (18)
Nanometer Science & Technology (16)
17th Workshop on Dielectrics in Microelectronics 2012 (WoDiM) (12)
Measurement and Characterization (12)
Papers from the 19th Workshop on Dielectrics in Microelectronics (WODIM 2016) (11)
18th Workshop on Dielectrics in Microelectronics (18th WoDiM 2014) (10)
Nanoelectronics (9)
Electrical Characterisation and Reliability of Devices with Alternative Dielectrics (8)
High-k Dielectrics for DRAM (8)
Lithography (8)
Si-Dielectric Interfaces; Gate Oxides (8)

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