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Journal Articles

Low-temperature (<300 °C) crystalline Al2O3 thin film deposition by resistive thermal evaporation

Open Access
Kunal Kumar, Marc Cahay
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 032206 (2025)
https://doi.org/10.1116/6.0004424
Published: May 2025
View articletitled, Low-temperature (&lt;300 °C) crystalline Al2O3 thin film deposition by resistive thermal evaporation
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Journal Articles

Effect of low-pressure postannealing on the electrical properties of VO2 thin films

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Xin Lin, Wanyu Jiang, Detao Mu, Yongfeng Jia, Shuoshuo Wang, Linhong Cao, Yajun Fu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022807 (2025)
https://doi.org/10.1116/6.0004435
Published: March 2025
View articletitled, Effect of low-pressure postannealing on the electrical properties of VO2 thin films
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Journal Articles

Methods for automatically obtaining the sputtering-induced roughness upon depth profiling of polycrystalline films

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Gong-Wen Liu, Jin-Peng Ye, Zhi-Rou Tan, Song-You Lian, Xin-Liang Yan, Jiang-Yong Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024006 (2025)
https://doi.org/10.1116/6.0004323
Published: February 2025
View articletitled, Methods for automatically obtaining the sputtering-induced roughness upon depth profiling of polycrystalline films
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Journal Articles

Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering

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Akihiro Shimizu, Kazuhiro Fukada, Shinichi Endo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023203 (2025)
https://doi.org/10.1116/6.0004239
Published: February 2025
View articletitled, Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering
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Journal Articles

Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates

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B. Claflin, G. J. Grzybowski, S. Zollner, B. R. Rogers, T. A. Cooper, D. C. Look
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052204 (2024)
https://doi.org/10.1116/6.0003689
Published: August 2024
View articletitled, Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates
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Journal Articles

One-step formation of ZrON thin film on surface of carbon fine particles for membrane electrode assembly

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Yudai Aihara, Takashi Iida, Kakeru Kodama, Hiroshi Iwata, Takao Sekiya
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034202 (2024)
https://doi.org/10.1116/6.0003542
Published: May 2024
View articletitled, One-step formation of ZrON thin film on surface of carbon fine particles for membrane electrode assembly
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Journal Articles

Calibrated in-vacuum quantum efficiency system for metallic and III-V thin-film photocathodes

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Atif Rasheed, Christopher Benjamin, Ibrahim Elhoussieny, Yorck A. Ramachers, Gavin R. Bell
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 064006 (2023)
https://doi.org/10.1116/6.0002904
Published: December 2023
View articletitled, Calibrated in-vacuum quantum efficiency system for metallic and III-V thin-film photocathodes
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Journal Articles

Microstructure, creep properties, and electrical resistivity of magnetron sputtering deposited SAC305 thin films

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Manish Ojha, Yousuf Mohammed, D. S. Stone, A. A. Elmustafa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052205 (2023)
https://doi.org/10.1116/6.0002949
Published: September 2023
View articletitled, Microstructure, creep properties, and electrical resistivity of magnetron sputtering deposited SAC305 thin films
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Journal Articles

AlGe wafer bonding in ultra-high vacuum environment

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Thomas Stöttinger, Bernhard Rebhan, Kurt Hingerl
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042802 (2023)
https://doi.org/10.1116/6.0002539
Published: June 2023
View articletitled, AlGe wafer bonding in ultra-high vacuum environment
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Journal Articles

Improvement of electrical characteristics of flexible AZO/Ag/Cu/AZO transparent conductive films by Cu deposition

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Atsushi Nitta, Yuuki Uwatoko, Teppei Nagata, Yukio Yoshimura
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022205 (2023)
https://doi.org/10.1116/6.0002389
Published: March 2023
View articletitled, Improvement of electrical characteristics of flexible AZO/Ag/Cu/AZO transparent conductive films by Cu deposition
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Journal Articles

A novel thermionic crystal electron emission effect similar to Kikuchi lines

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Victor Katsap
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 010602 (2023)
https://doi.org/10.1116/6.0002375
Published: January 2023
View articletitled, A novel thermionic crystal electron emission effect similar to Kikuchi lines
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Journal Articles

Grain growth of Cu wires during Joule heat welding

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Hironori Tohmyoh, Taiga Sakatoku
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012206 (2023)
https://doi.org/10.1116/6.0002337
Published: January 2023
View articletitled, Grain growth of Cu wires during Joule heat welding
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Journal Articles

Threshold switching stabilization of NbO2 films via nanoscale devices

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M. C. Sullivan, Zachary R. Robinson, Karsten Beckmann, Alex Powell, Ted Mburu, Katherine Pittman, Nathaniel Cady
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 063202 (2022)
https://doi.org/10.1116/6.0002129
Published: November 2022
View articletitled, Threshold switching stabilization of NbO2 films via nanoscale devices
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Journal Articles

Piezoelectric effect of crystal nanodomains on the friction force

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Michiko Sasaki, Masahiro Goto
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052803 (2022)
https://doi.org/10.1116/6.0001881
Published: September 2022
View articletitled, Piezoelectric effect of crystal nanodomains on the friction force
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Journal Articles

Enhanced focused ion beam milling with use of nested raster patterns

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Roberto Garcia, Lucille A. Giannuzzi, Fred A. Stevie, Phillip Strader
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 014002 (2022)
https://doi.org/10.1116/6.0001411
Published: January 2022
View articletitled, Enhanced focused ion beam milling with use of nested raster patterns
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Journal Articles

Comparative study of thermal desorption and pumping performance for TiZrV-, Pd-, or Pd/TiZrV-coated copper tubes

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Xiuguang Jin, Takashi Uchiyama, Yasunori Tanimoto, Tohru Honda
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 064202 (2021)
https://doi.org/10.1116/6.0001475
Published: November 2021
View articletitled, Comparative study of thermal desorption and pumping performance for TiZrV-, Pd-, or Pd/TiZrV-coated copper tubes
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Journal Articles

Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution

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Elizabeth M. Ashley, Peter J. Duda, III, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 064005 (2021)
https://doi.org/10.1116/6.0001287
Published: October 2021
View articletitled, Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution
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Includes: Supplementary data
Journal Articles

Electroforming and threshold switching characteristics of NbOx films with crystalline NbO2 phase

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Jimin Lee, Jaeyeon Kim, Juyoung Jeong, Hyunchul Sohn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 053206 (2021)
https://doi.org/10.1116/6.0001215
Published: September 2021
View articletitled, Electroforming and threshold switching characteristics of NbOx films with crystalline NbO2 phase
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Journal Articles

Effects of polymer residue on the pull-in of suspended graphene

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Jimmy Ng, Talmage Jones, Isaac Martinez-Velis, Albert Wang, Jonathan Hopkins, Ya-Hong Xie
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 023001 (2020)
https://doi.org/10.1116/1.5126439
Published: March 2020
View articletitled, Effects of polymer residue on the pull-in of suspended graphene
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Journal Articles

Influence of unintentionally incorporated Ar atoms on the crystalline polarity of magnetron-sputtered Al-doped ZnO polycrystalline films on glass and sapphire substrates

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Junichi Nomoto, Tomohiko Nakajima, Iwao Yamaguchi, Tetsuo Tsuchiya
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 022202 (2020)
https://doi.org/10.1116/1.5129684
Published: January 2020
View articletitled, Influence of unintentionally incorporated Ar atoms on the crystalline polarity of magnetron-sputtered Al-doped ZnO polycrystalline films on glass and sapphire substrates
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