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Journal Articles

Microstructure, creep properties, and electrical resistivity of magnetron sputtering deposited SAC305 thin films

Manish Ojha, Yousuf Mohammed, D. S. Stone, A. A. Elmustafa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052205 (2023)
https://doi.org/10.1116/6.0002949
Published: September 2023
View article titled, Microstructure, creep properties, and electrical resistivity of magnetron sputtering deposited SAC305 thin films
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Journal Articles

Improvement of electrical characteristics of flexible AZO/Ag/Cu/AZO transparent conductive films by Cu deposition

Atsushi Nitta, Yuuki Uwatoko, Teppei Nagata, Yukio Yoshimura
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022205 (2023)
https://doi.org/10.1116/6.0002389
Published: March 2023
View article titled, Improvement of electrical characteristics of flexible AZO/Ag/Cu/AZO transparent conductive films by Cu deposition
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Journal Articles

A novel thermionic crystal electron emission effect similar to Kikuchi lines

Victor Katsap
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 010602 (2023)
https://doi.org/10.1116/6.0002375
Published: January 2023
View article titled, A novel thermionic crystal electron emission effect similar to Kikuchi lines
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Journal Articles

Grain growth of Cu wires during Joule heat welding

Hironori Tohmyoh, Taiga Sakatoku
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012206 (2023)
https://doi.org/10.1116/6.0002337
Published: January 2023
View article titled, Grain growth of Cu wires during Joule heat welding
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Journal Articles

Threshold switching stabilization of NbO2 films via nanoscale devices

M. C. Sullivan, Zachary R. Robinson, Karsten Beckmann, Alex Powell, Ted Mburu, Katherine Pittman, Nathaniel Cady
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 063202 (2022)
https://doi.org/10.1116/6.0002129
Published: November 2022
View article titled, Threshold switching stabilization of NbO<sub>2</sub> films via nanoscale devices
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Journal Articles

Piezoelectric effect of crystal nanodomains on the friction force

Michiko Sasaki, Masahiro Goto
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052803 (2022)
https://doi.org/10.1116/6.0001881
Published: September 2022
View article titled, Piezoelectric effect of crystal nanodomains on the friction force
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Journal Articles

Enhanced focused ion beam milling with use of nested raster patterns

Roberto Garcia, Lucille A. Giannuzzi, Fred A. Stevie, Phillip Strader
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 014002 (2022)
https://doi.org/10.1116/6.0001411
Published: January 2022
View article titled, Enhanced focused ion beam milling with use of nested raster patterns
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Journal Articles

Comparative study of thermal desorption and pumping performance for TiZrV-, Pd-, or Pd/TiZrV-coated copper tubes

Xiuguang Jin, Takashi Uchiyama, Yasunori Tanimoto, Tohru Honda
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 064202 (2021)
https://doi.org/10.1116/6.0001475
Published: November 2021
View article titled, Comparative study of thermal desorption and pumping performance for TiZrV-, Pd-, or Pd/TiZrV-coated copper tubes
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Journal Articles

Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution

Elizabeth M. Ashley, Peter J. Duda, III, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 064005 (2021)
https://doi.org/10.1116/6.0001287
Published: October 2021
View article titled, Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution
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Includes: Supplementary data
Journal Articles

Electroforming and threshold switching characteristics of NbOx films with crystalline NbO2 phase

Jimin Lee, Jaeyeon Kim, Juyoung Jeong, Hyunchul Sohn
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 053206 (2021)
https://doi.org/10.1116/6.0001215
Published: September 2021
View article titled, Electroforming and threshold switching characteristics of NbO<sub>x</sub> films with crystalline NbO<sub>2</sub> phase
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Journal Articles

Effects of polymer residue on the pull-in of suspended graphene

Jimmy Ng, Talmage Jones, Isaac Martinez-Velis, Albert Wang, Jonathan Hopkins, Ya-Hong Xie
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 023001 (2020)
https://doi.org/10.1116/1.5126439
Published: March 2020
View article titled, Effects of polymer residue on the pull-in of suspended graphene
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Journal Articles

Influence of unintentionally incorporated Ar atoms on the crystalline polarity of magnetron-sputtered Al-doped ZnO polycrystalline films on glass and sapphire substrates

Junichi Nomoto, Tomohiko Nakajima, Iwao Yamaguchi, Tetsuo Tsuchiya
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 022202 (2020)
https://doi.org/10.1116/1.5129684
Published: January 2020
View article titled, Influence of unintentionally incorporated Ar atoms on the crystalline polarity of magnetron-sputtered Al-doped ZnO polycrystalline films on glass and sapphire substrates
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Journal Articles

Assessing stability of metal tellurides as alternative photomask materials for extreme ultraviolet lithography

Vu Luong, Vicky Philipsen, Karl Opsomer, Jens Rip, Eric Hendrickx, Marc Heyns, Christophe Detavernier, Christian Laubis, Frank Scholze
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061607 (2019)
https://doi.org/10.1116/1.5125662
Published: November 2019
View article titled, Assessing stability of metal tellurides as alternative photomask materials for extreme ultraviolet lithography
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Journal Articles

Ellipsometric analysis of concentration gradients induced in semiconductor crystals by pulsed laser induced epitaxy

Jon Schlipf, Elena Martín, Michel Stchakovsky, Alessandro Benedetti, Inga A. Fischer, Jörg Schulze, Stefano Chiussi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061213 (2019)
https://doi.org/10.1116/1.5122777
Published: November 2019
View article titled, Ellipsometric analysis of concentration gradients induced in semiconductor crystals by pulsed laser induced epitaxy
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Journal Articles

Optical constants of polycrystalline Ni from 0.06 to 6.0 eV at 300 K

Farzin Abadizaman, Stefan Zollner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062920 (2019)
https://doi.org/10.1116/1.5118841
Published: November 2019
View article titled, Optical constants of polycrystalline Ni from 0.06 to 6.0 eV at 300 K
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Includes: Supplementary data
Journal Articles

Completing an experimental nondepolarizing Mueller matrix whose column or row is missing

Razvigor Ossikovski, Oriol Arteaga
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 052905 (2019)
https://doi.org/10.1116/1.5120342
Published: September 2019
View article titled, Completing an experimental nondepolarizing Mueller matrix whose column or row is missing
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Journal Articles

Diffusion of implanted Ge and Sn in β-Ga2O3

Ribhu Sharma, Mark E. Law, Minghan Xian, Marko Tadjer, Elaf A. Anber, Daniel Foley, Andrew C. Lang, James L. Hart, James Nathaniel, Mitra L. Taheri, Fan Ren, S. J. Pearton, A. Kuramata
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 051204 (2019)
https://doi.org/10.1116/1.5118001
Published: August 2019
View article titled, Diffusion of implanted Ge and Sn in β-Ga<sub>2</sub>O<sub>3</sub>
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Journal Articles

Nanostructures of type-II topological Dirac semimetal NiTe2

Rajendra P. Dulal, Bishnu R. Dahal, Andrew Forbes, Niraj Bhattarai, Ian L. Pegg, John Philip
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 042903 (2019)
https://doi.org/10.1116/1.5111331
Published: July 2019
View article titled, Nanostructures of type-II topological Dirac semimetal NiTe<sub>2</sub>
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Journal Articles

Enhanced uniformity of III-nitride nanowire arrays on bulk metallic glass and nanocrystalline substrates

Brelon J. May, Elline C. Hettiaratchy, Camelia Selcu, Binbin Wang, Bryan D. Esser, David W. McComb, Roberto C. Myers
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 031212 (2019)
https://doi.org/10.1116/1.5086184
Published: April 2019
View article titled, Enhanced uniformity of III-nitride nanowire arrays on bulk metallic glass and nanocrystalline substrates
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Journal Articles

High-voltage metal-insulator-metal capacitor based on crystalline HfAlOx film grown by atomic layer deposition

Michael Lisiansky, Inna Popov, Vladimir Uvarov, Valentina Korchnoy, Boris Meyler, Svetlana Yofis, Yacov Shneider
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 011209 (2019)
https://doi.org/10.1116/1.5054848
Published: January 2019
View article titled, High-voltage metal-insulator-metal capacitor based on crystalline HfAlO<em><sub>x</sub></em> film grown by atomic layer deposition
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