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Journal Articles
Low-temperature (<300 °C) crystalline Al2O3 thin film deposition by resistive thermal evaporation
Open Access
J. Vac. Sci. Technol. B 43, 032206 (2025)
Published: May 2025
Journal Articles
Effect of low-pressure postannealing on the electrical properties of VO2 thin films
J. Vac. Sci. Technol. B 43, 022807 (2025)
Published: March 2025
Journal Articles
Methods for automatically obtaining the sputtering-induced roughness upon depth profiling of polycrystalline films
Available to Purchase
J. Vac. Sci. Technol. B 43, 024006 (2025)
Published: February 2025
Journal Articles
Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering
J. Vac. Sci. Technol. B 43, 023203 (2025)
Published: February 2025
Journal Articles
Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates
J. Vac. Sci. Technol. B 42, 052204 (2024)
Published: August 2024
Journal Articles
One-step formation of ZrON thin film on surface of carbon fine particles for membrane electrode assembly
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J. Vac. Sci. Technol. B 42, 034202 (2024)
Published: May 2024
Journal Articles
Calibrated in-vacuum quantum efficiency system for metallic and III-V thin-film photocathodes
J. Vac. Sci. Technol. B 41, 064006 (2023)
Published: December 2023
Journal Articles
Microstructure, creep properties, and electrical resistivity of magnetron sputtering deposited SAC305 thin films
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J. Vac. Sci. Technol. B 41, 052205 (2023)
Published: September 2023
Journal Articles
AlGe wafer bonding in ultra-high vacuum environment
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J. Vac. Sci. Technol. B 41, 042802 (2023)
Published: June 2023
Journal Articles
Improvement of electrical characteristics of flexible AZO/Ag/Cu/AZO transparent conductive films by Cu deposition
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J. Vac. Sci. Technol. B 41, 022205 (2023)
Published: March 2023
Journal Articles
A novel thermionic crystal electron emission effect similar to Kikuchi lines
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J. Vac. Sci. Technol. B 41, 010602 (2023)
Published: January 2023
Journal Articles
Grain growth of Cu wires during Joule heat welding
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J. Vac. Sci. Technol. B 41, 012206 (2023)
Published: January 2023
Journal Articles
M. C. Sullivan, Zachary R. Robinson, Karsten Beckmann, Alex Powell, Ted Mburu, Katherine Pittman, Nathaniel Cady
J. Vac. Sci. Technol. B 40, 063202 (2022)
Published: November 2022
Journal Articles
Piezoelectric effect of crystal nanodomains on the friction force
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J. Vac. Sci. Technol. B 40, 052803 (2022)
Published: September 2022
Journal Articles
Enhanced focused ion beam milling with use of nested raster patterns
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J. Vac. Sci. Technol. B 40, 014002 (2022)
Published: January 2022
Journal Articles
Comparative study of thermal desorption and pumping performance for TiZrV-, Pd-, or Pd/TiZrV-coated copper tubes
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J. Vac. Sci. Technol. B 39, 064202 (2021)
Published: November 2021
Journal Articles
Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution
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J. Vac. Sci. Technol. B 39, 064005 (2021)
Published: October 2021
Includes: Supplementary data
Journal Articles
Electroforming and threshold switching characteristics of NbOx films with crystalline NbO2 phase
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J. Vac. Sci. Technol. B 39, 053206 (2021)
Published: September 2021
Journal Articles
Effects of polymer residue on the pull-in of suspended graphene
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J. Vac. Sci. Technol. B 38, 023001 (2020)
Published: March 2020
Journal Articles
Influence of unintentionally incorporated Ar atoms on the crystalline polarity of magnetron-sputtered Al-doped ZnO polycrystalline films on glass and sapphire substrates
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J. Vac. Sci. Technol. B 38, 022202 (2020)
Published: January 2020
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