1-20 of 773
Crystallographic defects
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit

Haolin Jia, Boyi zhou, Tao Wang, Yanfu Wu, Lina Yang, Zengqian Ding, Shuming Li, Xiao Cai, Kanglin Xiong, Jiagui Feng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052210 (2023)
https://doi.org/10.1116/6.0002886
Published: September 2023
View article titled, Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit
Open the PDF for Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit in another window
Includes: Supplementary data
Journal Articles

Plasma processing and annealing for defect management at SiO2/Si interface

Shota Nunomura, Takayoshi Tsutsumi, Isao Sakata, Masaru Hori
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052202 (2023)
https://doi.org/10.1116/6.0002822
Published: August 2023
View article titled, Plasma processing and annealing for defect management at SiO<sub>2</sub>/Si interface
Open the PDF for Plasma processing and annealing for defect management at SiO<sub>2</sub>/Si interface in another window
Journal Articles

Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing

Nicholas Nunn, Sergey Milikisiyants, Marco D. Torelli, Richard Monge, Tom Delord, Alexander I. Shames, Carlos A. Meriles, Ashok Ajoy, Alex I. Smirnov, Olga A. Shenderova
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042206 (2023)
https://doi.org/10.1116/6.0002797
Published: June 2023
View article titled, Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing
Open the PDF for Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing in another window
Includes: Supplementary data
Journal Articles

Defect formation in InGaAs/AlSb/InAs memory devices

Aurelia Trevisan, Peter D. Hodgson, Dominic Lane, Manus Hayne, Paul M. Koenraad
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044001 (2023)
https://doi.org/10.1116/6.0002677
Published: May 2023
View article titled, Defect formation in InGaAs/AlSb/InAs memory devices
Open the PDF for Defect formation in InGaAs/AlSb/InAs memory devices in another window
Journal Articles

Morphologic and electronic changes induced by thermally supported hydrogen cleaning of GaAs(110) facets

D. S. Rosenzweig, M. Schnedler, R. E. Dunin-Borkowski, Ph. Ebert, H. Eisele
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044202 (2023)
https://doi.org/10.1116/6.0002733
Published: May 2023
View article titled, Morphologic and electronic changes induced by thermally supported hydrogen cleaning of GaAs(110) facets
Open the PDF for Morphologic and electronic changes induced by thermally supported hydrogen cleaning of GaAs(110) facets in another window
Journal Articles

Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication

Chen Zhu, Edward C. Kinzel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 033601 (2023)
https://doi.org/10.1116/6.0002557
Published: May 2023
View article titled, Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication
Open the PDF for Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication in another window
Journal Articles

Chemical and electrical modifications of few-layer graphene films via sub-10 keV electron beam irradiation

Karla Moyano, Carlos Reinoso, Steven Núñez, Beatriz Pérez, Cristian Santacruz, César Costa, Esteban Irribarra
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022804 (2023)
https://doi.org/10.1116/6.0002123
Published: March 2023
View article titled, Chemical and electrical modifications of few-layer graphene films via sub-10 keV electron beam irradiation
Open the PDF for Chemical and electrical modifications of few-layer graphene films via sub-10 keV electron beam irradiation in another window
Journal Articles

Observation of interfacial strain relaxation and electron beam damage thresholds in Al0.3In0.7N/GaN heterostructures by transmission electron microscopy

Keisuke Motoki, Zachary Engel, Christopher M. Matthews, Habib Ahmad, Timothy M. McCrone, Kohei Harada, W. Alan Doolittle
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052210 (2022)
https://doi.org/10.1116/6.0001974
Published: September 2022
View article titled, Observation of interfacial strain relaxation and electron beam damage thresholds in Al<sub>0.3</sub>In<sub>0.7</sub>N/GaN heterostructures by transmission electron microscopy
Open the PDF for Observation of interfacial strain relaxation and electron beam damage thresholds in Al<sub>0.3</sub>In<sub>0.7</sub>N/GaN heterostructures by transmission electron microscopy in another window
Journal Articles

Photoinduced carrier transport mechanism in pn- and nn-GaN/GaON heterojunctions

Xiaojun Sun, Chao Wu, Yachao Wang, Daoyou Guo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 012204 (2022)
https://doi.org/10.1116/6.0001601
Published: January 2022
View article titled, Photoinduced carrier transport mechanism in <em>pn</em>- and <em>nn</em>-GaN/GaON heterojunctions
Open the PDF for Photoinduced carrier transport mechanism in <em>pn</em>- and <em>nn</em>-GaN/GaON heterojunctions in another window
Journal Articles

Electrical conductivity across the alumina support layer following carbon nanotube growth

Berg Dodson, Guohai Chen, Robert Davis, Richard Vanfleet
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052803 (2021)
https://doi.org/10.1116/6.0001115
Published: August 2021
View article titled, Electrical conductivity across the alumina support layer following carbon nanotube growth
Open the PDF for Electrical conductivity across the alumina support layer following carbon nanotube growth in another window
Journal Articles

Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga2O3 with neutron irradiation and forming gas anneals

Hantian Gao, Shreyas Muralidharan, Md Rezaul Karim, Lei R. Cao, Kevin D. Leedy, Hongping Zhao, Siddharth Rajan, David C. Look, Leonard J. Brillson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052205 (2021)
https://doi.org/10.1116/6.0001240
Published: August 2021
View article titled, Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga<sub>2</sub>O<sub>3</sub> with neutron irradiation and forming gas anneals
Open the PDF for Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga<sub>2</sub>O<sub>3</sub> with neutron irradiation and forming gas anneals in another window
Journal Articles

Hydrogen etching of the SiC(0001) surface at moderate temperature

Toshiya Hamasaki, Kazuma Yagyu, Hisashi Mitani, Takashi Nishida, Hiroshi Tochihara, Takayuki Suzuki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052801 (2021)
https://doi.org/10.1116/6.0001147
Published: July 2021
View article titled, Hydrogen etching of the SiC(0001) surface at moderate temperature
Open the PDF for Hydrogen etching of the SiC(0001) surface at moderate temperature in another window
Journal Articles

Electrical characterization of gate stack charge traps in floating body gate-all-around field-effect-transistors

Manh-Cuong Nguyen, An Hoang-Thuy Nguyen, Jiyong Yim, Anh-Duy Nguyen, Mingyu Kim, Jeonghan Kim, Jongyeon Beak, Rino Choi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 032203 (2021)
https://doi.org/10.1116/6.0000906
Published: April 2021
View article titled, Electrical characterization of gate stack charge traps in floating body gate-all-around field-effect-transistors
Open the PDF for Electrical characterization of gate stack charge traps in floating body gate-all-around field-effect-transistors in another window
Journal Articles

Temperature dependence of the electrical characteristics of ZnO thin film transistor with high-k NbLaO gate dielectric

Hong-cheng Li, Yu-rong Liu, Kui-wei Geng, Wei-jing Wu, Ruo-he Yao, Pui-to Lai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 012202 (2021)
https://doi.org/10.1116/6.0000522
Published: December 2020
View article titled, Temperature dependence of the electrical characteristics of ZnO thin film transistor with high-<em>k</em> NbLaO gate dielectric
Open the PDF for Temperature dependence of the electrical characteristics of ZnO thin film transistor with high-<em>k</em> NbLaO gate dielectric in another window
Journal Articles

Design of a remote plasma-enhanced chemical vapor deposition system for growth of tin containing group-IV alloys

Gordon Grzybowski, Morgan E. Ware, Arnold Kiefer, Bruce Claflin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062209 (2020)
https://doi.org/10.1116/6.0000406
Published: November 2020
View article titled, Design of a remote plasma-enhanced chemical vapor deposition system for growth of tin containing group-IV alloys
Open the PDF for Design of a remote plasma-enhanced chemical vapor deposition system for growth of tin containing group-IV alloys in another window
Journal Articles

Evidence of hydrogen termination at grain boundaries in ultrananocrystalline diamond/hydrogenated amorphous carbon composite thin films synthesized via coaxial arc plasma

Naofumi Nishikawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 062803 (2020)
https://doi.org/10.1116/6.0000545
Published: November 2020
View article titled, Evidence of hydrogen termination at grain boundaries in ultrananocrystalline diamond/hydrogenated amorphous carbon composite thin films synthesized via coaxial arc plasma
Open the PDF for Evidence of hydrogen termination at grain boundaries in ultrananocrystalline diamond/hydrogenated amorphous carbon composite thin films synthesized via coaxial arc plasma in another window
Journal Articles

Selective lateral photoelectrochemical wet etching of InGaN nanorods

Chunyu Zhao, Xu Zhang, Chak Wah Tang, Jiannong Wang, Kei May Lau
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 060602 (2020)
https://doi.org/10.1116/6.0000527
Published: October 2020
View article titled, Selective lateral photoelectrochemical wet etching of InGaN nanorods
Open the PDF for Selective lateral photoelectrochemical wet etching of InGaN nanorods in another window
Journal Articles

Anomalous minority carrier behavior induced by chemical surface passivation solution in p-type GaSb metal–oxide–semiconductor capacitors on Si substrates

Shun Sasaki, Katherine Dropiewski, Shailesh Madisetti, Vadim Tokranov, Michael Yakimov, Serge Oktyabrsky
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 052204 (2020)
https://doi.org/10.1116/6.0000169
Published: August 2020
View article titled, Anomalous minority carrier behavior induced by chemical surface passivation solution in p-type GaSb metal–oxide–semiconductor capacitors on Si substrates
Open the PDF for Anomalous minority carrier behavior induced by chemical surface passivation solution in p-type GaSb metal–oxide–semiconductor capacitors on Si substrates in another window
Journal Articles

Dielectric breakdown in epitaxial BaTiO3 thin films

HsinWei Wu, Patrick Ponath, Edward L. Lin, Robert M. Wallace, Chadwin Young, John G. Ekerdt, Alexander A. Demkov, Martha R. McCartney, David J. Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 044007 (2020)
https://doi.org/10.1116/6.0000237
Published: July 2020
View article titled, Dielectric breakdown in epitaxial BaTiO<sub>3</sub> thin films
Open the PDF for Dielectric breakdown in epitaxial BaTiO<sub>3</sub> thin films in another window
Journal Articles

Quantum and transport lifetimes in optically induced GaN/AlGaN 2DEGs grown on bulk GaN

Luisa Krückeberg, Steffen Wirth, Victor V. Solovyev, Andreas Großer, Igor V. Kukushkin, Thomas Mikolajick, Stefan Schmult
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 042203 (2020)
https://doi.org/10.1116/1.5145198
Published: June 2020
View article titled, Quantum and transport lifetimes in optically induced GaN/AlGaN 2DEGs grown on bulk GaN
Open the PDF for Quantum and transport lifetimes in optically induced GaN/AlGaN 2DEGs grown on bulk GaN in another window