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Journal Articles

New coating with superior corrosion and wear performances: Parylene C/CrN duplex coating

Xiaoyan Guan, Siwen Cui, Yiwei Cao, Liuxue Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 064003 (2023)
https://doi.org/10.1116/6.0002982
Published: October 2023
View article titled, New coating with superior corrosion and wear performances: Parylene C/CrN duplex coating
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Journal Articles

Review of microarc oxidation of titanium implant

Guang Yang, Yulu Meng, Chenghui Qian, Xiaohong Chen, Ping Liu, Honglei Zhou, Binbin Kang, Xiangpeng Tang, Lanjuan Diao, Fanfan Zhou
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 060801 (2023)
https://doi.org/10.1116/6.0002941
Published: October 2023
View article titled, Review of microarc oxidation of titanium implant
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Journal Articles

Color control of titanium nitride thin films

Aian B. Ontoria, Magdaleno R. Vasquez, Jr.
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032204 (2023)
https://doi.org/10.1116/6.0002511
Published: April 2023
View article titled, Color control of titanium nitride thin films
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Journal Articles

Multilayer film passivation for enhanced reliability of power semiconductor devices

Roberta Busca, Davide Cimmino, Sergio Ferrero, Luciano Scaltrito, Candido Fabrizio Pirri, Giovanni Richieri, Rossano Carta
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 022206 (2020)
https://doi.org/10.1116/1.5121880
Published: February 2020
View article titled, Multilayer film passivation for enhanced reliability of power semiconductor devices
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Journal Articles

Corrosion behavior of Ag film lines in atmospheric conditions estimated by means of electrical resistance technique

Takahiro Sasaki, Hironori Tohmyoh
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014011 (2020)
https://doi.org/10.1116/1.5132765
Published: December 2019
View article titled, Corrosion behavior of Ag film lines in atmospheric conditions estimated by means of electrical resistance technique
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Journal Articles

Effect of bilayer period on the oxidation and corrosion resistance of Pb-Ti/MoS2 nanoscale multilayer films

Hao Li, Mingling Xie, Xiaojun Xu, Xiaoqiang Fan, Renhui Zhang, Qi Sun, Guangan Zhang, Minhao Zhu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 051804 (2019)
https://doi.org/10.1116/1.5115773
Published: September 2019
View article titled, Effect of bilayer period on the oxidation and corrosion resistance of Pb-Ti/MoS<sub>2</sub> nanoscale multilayer films
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Journal Articles

Oxidation and wet-etching behavior of MoAlTi thin films deposited by sputtering from a rotatable MoAlTi compound target

Roland Lorenz, Michael O’Sullivan, Dietmar Sprenger, Bernhard Lang, Harald Köstenbauer, Jörg Winkler, Christian Mitterer
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 021202 (2019)
https://doi.org/10.1116/1.5079866
Published: February 2019
View article titled, Oxidation and wet-etching behavior of MoAlTi thin films deposited by sputtering from a rotatable MoAlTi compound target
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Journal Articles

Electrolyte-insulator-semiconductor devices with different integrated reference electrodes for pH detection

Rodrigo Reigota César, Aline Maria Pascon, Ioshiaki Doi, José Alexandre Diniz
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 03E106 (2018)
https://doi.org/10.1116/1.5022160
Published: May 2018
View article titled, Electrolyte-insulator-semiconductor devices with different integrated reference electrodes for <em>p</em>H detection
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Journal Articles

Visualizing ion transport mechanisms through oxide scales grown on mixed nickel- and cobalt-base model alloys at 900 °C using FIB-SIMS techniques

Richard J. Chater, Martin Weiser, Sannakaisa Virtanen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 03F116 (2018)
https://doi.org/10.1116/1.5012274
Published: February 2018
View article titled, Visualizing ion transport mechanisms through oxide scales grown on mixed nickel- and cobalt-base model alloys at 900 °C using FIB-SIMS techniques
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Journal Articles

ToF-SIMS and other surface spectroscopies applied to the study of ancient artifacts: Preliminary investigation of a tetradrachm of Claudius

Editor’s Pick
Rana N. S. Sodhi, Peter Brodersen, Sal Boccia, Amandina Anastassiades, Cristiana Zaccagnino
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 03F104 (2018)
https://doi.org/10.1116/1.5013613
Published: January 2018
View article titled, ToF-SIMS and other surface spectroscopies applied to the study of ancient artifacts: Preliminary investigation of a tetradrachm of Claudius
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Journal Articles

Effect of alumina coatings on corrosion protection of steels in molten lead

Espedito Vassallo, Matteo Pedroni, Valentina Spampinato, Silvia Maria Deambrosis, Enrico Miorin, Enrica Ricci, Valentina Zin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 01A105 (2018)
https://doi.org/10.1116/1.4993286
Published: December 2017
View article titled, Effect of alumina coatings on corrosion protection of steels in molten lead
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Journal Articles

Chemical mechanical polishing of Ge2Sb2Te5 in alkaline slurry

Hai-bo Wang, Shi-bin Lu, Jin Yang, Xian-wei Jiang, Zhi-tang Song, Wei-li Liu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 041204 (2017)
https://doi.org/10.1116/1.4986473
Published: June 2017
View article titled, Chemical mechanical polishing of Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> in alkaline slurry
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Journal Articles

Milling a silicon nitride membrane by focused ion beam

Antti Peltonen, Hung Q. Nguyen, Juha T. Muhonen, Jukka P. Pekola
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 062201 (2016)
https://doi.org/10.1116/1.4963895
Published: October 2016
View article titled, Milling a silicon nitride membrane by focused ion beam
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Journal Articles

Impact of template stiffness during peeling release in nanoimprint lithography

Florian Chalvin, Naoto Nakamura, Takamitsu Tochino, Masaaki Yasuda, Hiroaki Kawata, Yoshihiko Hirai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 06K403 (2016)
https://doi.org/10.1116/1.4962742
Published: September 2016
View article titled, Impact of template stiffness during peeling release in nanoimprint lithography
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Journal Articles

Magnesium-gold binary alloy for organic light-emitting diodes with high corrosion resistance

Hiroya Arai, Hajime Nakanotani, Kei Morimoto, Chihaya Adachi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 34, 040607 (2016)
https://doi.org/10.1116/1.4952408
Published: May 2016
View article titled, Magnesium-gold binary alloy for organic light-emitting diodes with high corrosion resistance
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Journal Articles

Fabrication of low grass, smooth sidewall InGaAsP by methane–hydrogen inductively coupled plasma RIE through a metal lift-off mask patterned by e-beam lithography

Viswas Sadasivan, Shikha Dagar, Utpal Das
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 051210 (2015)
https://doi.org/10.1116/1.4929437
Published: August 2015
View article titled, Fabrication of low grass, smooth sidewall InGaAsP by methane–hydrogen inductively coupled plasma RIE through a metal lift-off mask patterned by e-beam lithography
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Journal Articles

Influence of composite oxidation on electron emission characteristics of thick porous silicon

Xiaoning Zhang, Li He, Wenjiang Wang, Xiao Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 33, 031211 (2015)
https://doi.org/10.1116/1.4918376
Published: April 2015
View article titled, Influence of composite oxidation on electron emission characteristics of thick porous silicon
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Journal Articles

193 nm excimer laser lift-off for AlGaN/GaN high electron mobility transistors

Xiaotie Wang, Chien-Fong Lo, Lu Liu, Camilo V. Cuervo, Ren Fan, Stephen J. Pearton, Brent Gila, Michael R. Johnson, Lin Zhou, David J. Smith, Jihyun Kim, Oleg Laboutin, Yu Cao, Jerry W. Johnson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 051209 (2012)
https://doi.org/10.1116/1.4751278
Published: September 2012
View article titled, 193 nm excimer laser lift-off for AlGaN/GaN high electron mobility transistors
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Journal Articles

Nanoscale scratching of platinum thin films using atomic force microscopy with DLC tips

Xiaohong Jiang, Guoyun Wu, Zuliang Du, Keng-Jeng Ma, Jun-ichi Shirakashi, Ampere A. Tseng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 30, 021605 (2012)
https://doi.org/10.1116/1.3694242
Published: March 2012
View article titled, Nanoscale scratching of platinum thin films using atomic force microscopy with DLC tips
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Journal Articles

Metal electrode influence on the wet selective etching of GaAs/AlGaAs

Wang Jie, Han Qin, Yang Xiao-Hong, Wang Xiu-Ping, Ni Hai-Qiao, He Ji-Fang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 29, 041208 (2011)
https://doi.org/10.1116/1.3610969
Published: August 2011
View article titled, Metal electrode influence on the wet selective etching of GaAs/AlGaAs
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