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Journal Articles

Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source

Qi Liu, Zufang Lin, Guichen Song, Song Kang, Chengyun Wang, Shaozhi Deng, Ningsheng Xu, Jun Chen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023201 (2025)
https://doi.org/10.1116/6.0004123
Published: January 2025
View articletitled, Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source
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Journal Articles

Study of fluoride-ion-assisted hydroxide catalyzed bonding of MgF2 to fused silica

Zhichao Hu, Dongfang Zhu, Zixuan Guo, Xudi Wang, Hailin Bi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 010601 (2025)
https://doi.org/10.1116/6.0004122
Published: January 2025
View articletitled, Study of fluoride-ion-assisted hydroxide catalyzed bonding of MgF2 to fused silica
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Journal Articles

Structural, surface, and upconversion luminescence properties of pulsed laser-deposited Y2O3:Ho3+,Yb3+ thin films

Vhahangwele Makumbane, M. Y. A. Yagoub, E. Coetsee, R. E. Kroon, H. C. Swart
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 054004 (2024)
https://doi.org/10.1116/6.0003880
Published: September 2024
View articletitled, Structural, surface, and upconversion luminescence properties of pulsed laser-deposited Y2O3:Ho3+,Yb3+ thin films
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Journal Articles

Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates

Editor’s Pick
B. Claflin, G. J. Grzybowski, S. Zollner, B. R. Rogers, T. A. Cooper, D. C. Look
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052204 (2024)
https://doi.org/10.1116/6.0003689
Published: August 2024
View articletitled, Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates
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Journal Articles

Fabrication of slanted gratings by using glancing angle deposition

Hongwen Wu, Aixi Pan, Chenxu Zhu, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 023002 (2024)
https://doi.org/10.1116/6.0003479
Published: March 2024
View articletitled, Fabrication of slanted gratings by using glancing angle deposition
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Journal Articles

Integrated silicon electron source for high vacuum microelectromechanical system devices

Michał Krysztof, Paweł Miera, Paweł Urbański, Tomasz Grzebyk, Matthias Hausladen, Rupert Schreiner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 023001 (2024)
https://doi.org/10.1116/6.0003385
Published: March 2024
View articletitled, Integrated silicon electron source for high vacuum microelectromechanical system devices
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Journal Articles

Electron transport in macroscopic borosilicate capillaries with bending angles of 90° and 360°

Hai-Dang Nguyen, Jan-Philipp Wulfkühler, Martin Tajmar
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 034203 (2023)
https://doi.org/10.1116/6.0002281
Published: May 2023
View articletitled, Electron transport in macroscopic borosilicate capillaries with bending angles of 90° and 360°
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Journal Articles

Spongy TiO2 layers deposited by gig-lox sputtering processes: Contact angle measurements

C. Spampinato, S. Valastro, E. Smecca, V. Arena, G. Mannino, A. La Magna, C. Corsaro, F. Neri, E. Fazio, A. Alberti
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012802 (2023)
https://doi.org/10.1116/6.0002225
Published: December 2022
View articletitled, Spongy TiO2 layers deposited by gig-lox sputtering processes: Contact angle measurements
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Journal Articles

Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies

Pavani Vamsi Krishna Nittala, Karthika Haridas, Shivam Nigam, Saba Tasneem, Prosenjit Sen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 052207 (2021)
https://doi.org/10.1116/6.0001160
Published: August 2021
View articletitled, Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies
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Journal Articles

Optimization of a continuous hot embossing process for fabrication of micropyramid structures in thermoplastic sheets

Luke Haponow, Jeff Kettle, John Allsop
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 012203 (2021)
https://doi.org/10.1116/6.0000551
Published: December 2020
View articletitled, Optimization of a continuous hot embossing process for fabrication of micropyramid structures in thermoplastic sheets
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Journal Articles

Sol-gel synthesized indium tin oxide as a transparent conducting oxide with solution-processed black phosphorus for its integration into solar-cells

Ravindra Mehta, Misook Min, Anupama B. Kaul
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 063203 (2020)
https://doi.org/10.1116/6.0000471
Published: October 2020
View articletitled, Sol-gel synthesized indium tin oxide as a transparent conducting oxide with solution-processed black phosphorus for its integration into solar-cells
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Journal Articles

Mechanically reliable hybrid organosilicate glasses for advanced interconnects

Karsu Ipek Kilic, Reinhold H. Dauskardt
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 060601 (2020)
https://doi.org/10.1116/6.0000517
Published: October 2020
View articletitled, Mechanically reliable hybrid organosilicate glasses for advanced interconnects
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Journal Articles

Atomic spectroscopy and laser frequency stabilization with scalable micrometer and sub-micrometer vapor cells

Eliran Talker, Roy Zektzer, Yefim Barash, Noa Mazurski, Uriel Levy
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 050601 (2020)
https://doi.org/10.1116/6.0000416
Published: August 2020
View articletitled, Atomic spectroscopy and laser frequency stabilization with scalable micrometer and sub-micrometer vapor cells
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Journal Articles

Ellipsometric characterization of Bi and Al2O3 coatings for plasmon excitation in an optical fiber sensor

Eva Rodríguez-Schwendtner, Alberto Álvarez-Herrero, Antonio Mariscal, Rosalía Serna, Agustín González-Cano, María-Cruz Navarrete, Natalia Díaz-Herrera
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 062914 (2019)
https://doi.org/10.1116/1.5121590
Published: October 2019
View articletitled, Ellipsometric characterization of Bi and Al2O3 coatings for plasmon excitation in an optical fiber sensor
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Journal Articles

Neural network-based model of photoresist reflow

Charmaine Chia, Joel Martis, Stefanie S. Jeffrey, Roger T. Howe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 061604 (2019)
https://doi.org/10.1116/1.5116857
Published: October 2019
View articletitled, Neural network-based model of photoresist reflow
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Journal Articles

Charge-induced pattern displacement in E-beam lithography

Kerim T. Arat, Thomas Klimpel, Aernout C. Zonnevylle, Wilhelmus S. M. M. Ketelaars, Carel Th. H. Heerkens,, Cornelis W. Hagen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 051603 (2019)
https://doi.org/10.1116/1.5120631
Published: September 2019
View articletitled, Charge-induced pattern displacement in E-beam lithography
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Includes: Supplementary data
Journal Articles

Maskless production of neural-recording graphene microelectrode arrays

Editor’s Pick
Vanessa Pereira Gomes, Aline Maria Pascon, Roberto Ricardo Panepucci, Jacobus Willibrordus Swart
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 022202 (2019)
https://doi.org/10.1116/1.5048216
Published: February 2019
View articletitled, Maskless production of neural-recording graphene microelectrode arrays
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Journal Articles

Flexible vertical-channel thin-film transistors using In-Ga-Zn-O active channel and polyimide spacer on poly(ethylene naphthalate) substrate

Hyeong-Rae Kim, Ji-Hee Yang, Gi-Heon Kim, Sung-Min Yoon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 010602 (2019)
https://doi.org/10.1116/1.5082898
Published: January 2019
View articletitled, Flexible vertical-channel thin-film transistors using In-Ga-Zn-O active channel and polyimide spacer on poly(ethylene naphthalate) substrate
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Journal Articles

Structural effects on the performance of epoxide-based negative-tone molecular resists

Brandon L. Sharp, Hannah L. Narcross, Peter Ludovice, Laren M. Tolbert, Clifford L. Henderson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 011604 (2019)
https://doi.org/10.1116/1.5057741
Published: January 2019
View articletitled, Structural effects on the performance of epoxide-based negative-tone molecular resists
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Includes: Supplementary data
Journal Articles

Phenol-functionalized polymerization control additives for negative tone epoxide crosslinking molecular resists

Hannah Narcross, Brandon L. Sharp, Peter J. Ludovice, Laren M. Tolbert, Clifford L. Henderson
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 06JC02 (2018)
https://doi.org/10.1116/1.5057442
Published: November 2018
View articletitled, Phenol-functionalized polymerization control additives for negative tone epoxide crosslinking molecular resists
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