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Journal Articles

Study of zinc doped In0.53Ga0.47As/InP/InAlAs/InP heterostructures by time-of-flight; magnetic secondary ion spectrometry and high-energy x-ray photoelectron spectroscopy

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G. Tsamo Tagougue, M. Veillerot, E. Martinez, V. Thoréton, M. Martin, T. Baron, G. Lefevre, S. Cavalaglio, F. Bassani
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 033204 (2025)
https://doi.org/10.1116/6.0004489
Published: May 2025
View articletitled, Study of zinc doped In0.53Ga0.47As/InP/InAlAs/InP heterostructures by time-of-flight; magnetic secondary ion spectrometry and high-energy x-ray photoelectron spectroscopy
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Journal Articles

Low-temperature (<300 °C) crystalline Al2O3 thin film deposition by resistive thermal evaporation

Open Access
Kunal Kumar, Marc Cahay
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 032206 (2025)
https://doi.org/10.1116/6.0004424
Published: May 2025
View articletitled, Low-temperature (&lt;300 °C) crystalline Al2O3 thin film deposition by resistive thermal evaporation
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Journal Articles

Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel

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Aiman H. Al-Allaq, Md Abdullah Mamun, Matt Poelker, Abdelmageed Elmustafa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034203 (2025)
https://doi.org/10.1116/6.0004446
Published: April 2025
View articletitled, Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel
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Journal Articles

Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring

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Lukáš Šilhan, Jon Ander Arregi, Tomáš Plichta, Ondřej Vaculík, Jan Novotný, Mojmír Šerý
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 034202 (2025)
https://doi.org/10.1116/6.0004296
Published: April 2025
View articletitled, Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring
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Journal Articles

Controlled preparation of tungsten diselenide thin films via chemical vapor deposition

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Pingfan Ning, Xuerong Li, Feifei Lan, Xiangyu Li, Yingmin Wang, Hongjuan Cheng, Yujian Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 030601 (2025)
https://doi.org/10.1116/6.0004352
Published: April 2025
View articletitled, Controlled preparation of tungsten diselenide thin films via chemical vapor deposition
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Journal Articles

Quantum efficiency characteristics of low-threading-dislocation-density InGaN photocathode grown on GaN substrate

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Mikiya Idei, Daiki Sato, Atsushi Koizumi, Tomohiro Nishitani, Yoshio Honda, Hiroshi Amano
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 032202 (2025)
https://doi.org/10.1116/6.0004199
Published: March 2025
View articletitled, Quantum efficiency characteristics of low-threading-dislocation-density InGaN photocathode grown on GaN substrate
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Journal Articles

TiN and TaN cointegration for 300 mm superconducting back end of line

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T. Chêne, R. Segaud, F. Nemouchi, P. Gergaud, S. Minoret, F. Gustavo, J. Garrione, T. Chevolleau
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022216 (2025)
https://doi.org/10.1116/6.0004316
Published: March 2025
View articletitled, TiN and TaN cointegration for 300 mm superconducting back end of line
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Journal Articles

Tracing degradation mechanisms of epitaxially grown GaAsSb on InP by InSb formation at elevated temperatures

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Leonid Miroshnik, Brian D. Rummel, Darryl M. Shima, Andrew Li, Ganesh Balakrishnan, Talid Sinno, Sang M. Han
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022215 (2025)
https://doi.org/10.1116/6.0004324
Published: March 2025
View articletitled, Tracing degradation mechanisms of epitaxially grown GaAsSb on InP by InSb formation at elevated temperatures
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Journal Articles

Resistive switching effect of HfO2/Nb:SrTiO3 under the influence of nanodefects and varying atmospheric conditions

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Chengang Dong, Jianbo Liu, Dongqing Liu, Xiaowei Han
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022214 (2025)
https://doi.org/10.1116/6.0004231
Published: March 2025
View articletitled, Resistive switching effect of HfO2/Nb:SrTiO3 under the influence of nanodefects and varying atmospheric conditions
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Journal Articles

Effect of low-pressure postannealing on the electrical properties of VO2 thin films

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Xin Lin, Wanyu Jiang, Detao Mu, Yongfeng Jia, Shuoshuo Wang, Linhong Cao, Yajun Fu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022807 (2025)
https://doi.org/10.1116/6.0004435
Published: March 2025
View articletitled, Effect of low-pressure postannealing on the electrical properties of VO2 thin films
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Journal Articles

Does the blue luminescence of Eu-doped β-NaYF4 originate from Eu2+ ions?

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Robin E. Kroon, Mamello P. Mabe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022213 (2025)
https://doi.org/10.1116/6.0004282
Published: March 2025
View articletitled, Does the blue luminescence of Eu-doped β-NaYF4 originate from Eu2+ ions?
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Journal Articles

Enzymatic degradation of cellulosic fabrics modified with atomic layer deposited aluminum oxide thin films

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Li Zhang, Yi Li, Leila Sun, Shuaib A. Balogun, Mark D. Losego
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022806 (2025)
https://doi.org/10.1116/6.0004299
Published: March 2025
View articletitled, Enzymatic degradation of cellulosic fabrics modified with atomic layer deposited aluminum oxide thin films
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Journal Articles

Suppressing oxygen vacancy formation in ZrO2 to improve electrical properties by employing MoO2 bottom electrode

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Jaehyeon Yun, Seungyeon Kim, Chaeyeong Hwang, Woojin Jeon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022209 (2025)
https://doi.org/10.1116/6.0004351
Published: February 2025
View articletitled, Suppressing oxygen vacancy formation in ZrO2 to improve electrical properties by employing MoO2 bottom electrode
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Journal Articles

Methods for automatically obtaining the sputtering-induced roughness upon depth profiling of polycrystalline films

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Gong-Wen Liu, Jin-Peng Ye, Zhi-Rou Tan, Song-You Lian, Xin-Liang Yan, Jiang-Yong Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024006 (2025)
https://doi.org/10.1116/6.0004323
Published: February 2025
View articletitled, Methods for automatically obtaining the sputtering-induced roughness upon depth profiling of polycrystalline films
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Journal Articles

Study on the etching mechanism of quartz using dual-frequency (60 MHz/400 KHz) capacitively coupled C4F8/Ar/O2 plasma

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Chan Li, Liyue Gong, Ziyan Tan, Na Li, Yongxin Liu, Fei Gao, Xianxiu Mei
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023601 (2025)
https://doi.org/10.1116/6.0004206
Published: February 2025
View articletitled, Study on the etching mechanism of quartz using dual-frequency (60 MHz/400 KHz) capacitively coupled C4F8/Ar/O2 plasma
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Journal Articles

High-precision thermal characterization technique with dual-laser Raman thermometry

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Yingtao Wang, Xian Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024005 (2025)
https://doi.org/10.1116/6.0004303
Published: February 2025
View articletitled, High-precision thermal characterization technique with dual-laser Raman thermometry
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Journal Articles

Method based on golden section search for reconstruction of nano layer structure directly from depth profiling data

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Gong-Wen Liu, Han-Wen Cao, Wei-Lian Li, Song-You Lian, Xin-Liang Yan, Jiang-Yong Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022804 (2025)
https://doi.org/10.1116/6.0004306
Published: February 2025
View articletitled, Method based on golden section search for reconstruction of nano layer structure directly from depth profiling data
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Journal Articles

Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering

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Akihiro Shimizu, Kazuhiro Fukada, Shinichi Endo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 023203 (2025)
https://doi.org/10.1116/6.0004239
Published: February 2025
View articletitled, Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering
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Journal Articles

Exploring SiC CVD growth parameters compatible with remote epitaxy

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Daniel J. Pennachio, Jenifer R. Hajzus, Rachael L. Myers-Ward
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 022205 (2025)
https://doi.org/10.1116/6.0004106
Published: February 2025
View articletitled, Exploring SiC CVD growth parameters compatible with remote epitaxy
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Journal Articles

Cathodoluminescence from Y2O3:Er3+: A metal oxide-based green nanophosphor for field emission displays

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Shivaramu Nagarasanakote Jayaramu, Divya Janardhana, Elizabeth Coetsee, Hendrik C. Swart
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 43, 024201 (2025)
https://doi.org/10.1116/6.0004125
Published: February 2025
View articletitled, Cathodoluminescence from Y2O3:Er3+: A metal oxide-based green nanophosphor for field emission displays
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