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Journal Articles

Defects in zinc-implanted ZnO thin films

Matthias Schmidt, Martin Ellguth, Christian Czekalla, Holger v. Wenckstern, Rainer Pickenhain, Marius Grundmann, Gerhard Brauer, Wolfgang Skorupa, Manfred Helm, Qilin Gu, Chi Chung Ling
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 27, 1597–1600 (2009)
https://doi.org/10.1116/1.3086659
Published: May 2009
View article titled, Defects in zinc-implanted ZnO thin films
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