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Journal Articles

Phase-shifted counterpropagating atmospheric pressure plasma jets: Characterization and interaction with materials

Editor’s Pick
Michael J. Johnson, Gabriel H. Brown, David R. Boris, Tzvetelina B. Petrova, Scott G. Walton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034004 (2024)
https://doi.org/10.1116/6.0003485
Published: April 2024
View article titled, Phase-shifted counterpropagating atmospheric pressure plasma jets: Characterization and interaction with materials
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Journal Articles

Development of 3D tomosynthesis technique for nondestructive technology application using vertically aligned carbon nanotube-based high-resolution cold cathode electron beam

Jaydip Sawant, Yi Yin Yu, Ketan Bhotkar, Hyun-Jung Jung, Gi Joon Nam, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 033201 (2023)
https://doi.org/10.1116/6.0002286
Published: March 2023
View article titled, Development of 3D tomosynthesis technique for nondestructive technology application using vertically aligned carbon nanotube-based high-resolution cold cathode electron beam
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Journal Articles

Application of deep-learning based techniques for automatic metrology on scanning and transmission electron microscopy images

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J. Baderot, M. Grould, D. Misra, N. Clément, A. Hallal, S. Martinez, J. Foucher
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 054003 (2022)
https://doi.org/10.1116/6.0001988
Published: September 2022
View article titled, Application of deep-learning based techniques for automatic metrology on scanning and transmission electron microscopy images
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Journal Articles

Selective growth of graphene films on gallium-focused ion beam irradiated domains

Editor’s Pick
Jacques Gierak, Gilles Raynaud, Caroline Guiziou, Jean René Coudevylle, Ali Madouri, Lars Bruchhaus, Achim Nadzeyka, Björn Whittman, Ralf Jede, Christophe David, Jean Christophe Girard
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052602 (2022)
https://doi.org/10.1116/6.0002104
Published: September 2022
View article titled, Selective growth of graphene films on gallium-focused ion beam irradiated domains
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Journal Articles

On the brightness, transverse emittance, and transverse coherence of field emission beam

Featured
Soichiro Tsujino
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 030801 (2022)
https://doi.org/10.1116/6.0001776
Published: April 2022
View article titled, On the brightness, transverse emittance, and transverse coherence of field emission beam
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Journal Articles

Flexible refractive and diffractive micro-optical films shaped by fitting aspherical microprofiles with featured aperture and depth and their spatial arrangement for imaging applications

Wenhai Huang, Taige Liu, Zhe Wang, Xiangdong Yuan, Bo Zhang, Chai Hu, Kewei Liu, Jiashuo Shi, Xinyu Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 022804 (2022)
https://doi.org/10.1116/6.0001586
Published: March 2022
View article titled, Flexible refractive and diffractive micro-optical films shaped by fitting aspherical microprofiles with featured aperture and depth and their spatial arrangement for imaging applications
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Journal Articles

Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser

Editor’s Pick
Vineeth Sasidharan, Alexander Neumann, S. R. J. Brueck
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062603 (2021)
https://doi.org/10.1116/6.0001377
Published: November 2021
View article titled, Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser
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Journal Articles

Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution

Elizabeth M. Ashley, Peter J. Duda, III, Paul F. Nealey
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 064005 (2021)
https://doi.org/10.1116/6.0001287
Published: October 2021
View article titled, Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution
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Includes: Supplementary data
Journal Articles

Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy

Min-Ho Rim, Emil Agocs, Ronald Dixson, Prem Kavuri, András E. Vladár, Ravi Kiran Attota
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 050602 (2020)
https://doi.org/10.1116/6.0000352
Published: August 2020
View article titled, Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy
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Journal Articles

Field emission microscopy of carbon nanotube fibers: Evaluating and interpreting spatial emission

Editor’s Pick
Taha Y. Posos, Steven B. Fairchild, Jeongho Park, Sergey V. Baryshev
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 024006 (2020)
https://doi.org/10.1116/1.5140602
Published: March 2020
View article titled, Field emission microscopy of carbon nanotube fibers: Evaluating and interpreting spatial emission
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Journal Articles

Dynamic Stokes polarimetric imaging system with dual-wavelength operation

Chien-Yuan Han, Meng-Ting Chen, Hong-Bin Lai, Shih-Hsiang Lai, Shih-Chin Lin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 014010 (2020)
https://doi.org/10.1116/1.5129301
Published: December 2019
View article titled, Dynamic Stokes polarimetric imaging system with dual-wavelength operation
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Journal Articles

Empirical modeling and Monte Carlo simulation of secondary electron yield reduction of laser drilled microporous gold surfaces

Asif Iqbal, Jonathan Ludwick, Steven Fairchild, Marc Cahay, Daniel Gortat, Martin Sparkes, William O’Neill, Tyson C. Back, Peng Zhang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 38, 013801 (2020)
https://doi.org/10.1116/1.5130683
Published: December 2019
View article titled, Empirical modeling and Monte Carlo simulation of secondary electron yield reduction of laser drilled microporous gold surfaces
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Journal Articles

Maskless random antireflective nanotexturing of single crystal SiC

Lars F. Voss, Clint D. Frye, Mihail Bora, David L. Hall, Paulius V. Grivickas, Adam M. Conway
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 37, 040601 (2019)
https://doi.org/10.1116/1.5108513
Published: May 2019
View article titled, Maskless random antireflective nanotexturing of single crystal SiC
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Journal Articles

Bevel depth profiling by high-spatial-resolution sputtered neutral mass spectrometry with laser postionization

Takahiro Kashiwagi, Satoru Nagashima, Takeharu Ishikawa, Akio Takano, Suet-Yi Liu, Hisataka Takenaka, Katsumi Endo, Masaaki Fujii
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 03F133 (2018)
https://doi.org/10.1116/1.5019692
Published: May 2018
View article titled, Bevel depth profiling by high-spatial-resolution sputtered neutral mass spectrometry with laser postionization
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Journal Articles

Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors

Olaf C. Haenssler, Sergej Fatikow, Didier Theron
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 36, 022901 (2018)
https://doi.org/10.1116/1.5006161
Published: January 2018
View article titled, Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors
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Journal Articles

Batch fabrication of AFM probes with direct positioning capability

Shuo Zheng, Chenxu Zhu, Ripon Kumar Dey, Bo Cui
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06GC02 (2017)
https://doi.org/10.1116/1.5010814
Published: November 2017
View article titled, Batch fabrication of AFM probes with direct positioning capability
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Journal Articles

Tip-to-tip variation mitigation in extreme ultraviolet lithography for 7 nm and beyond metallization layers and design rule analysis

Yulu Chen, Lei Sun, Zhengqing John Qi, Shuo Zhao, Francis Goodwin, Itty Matthew, Vince Plachecki
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G601 (2017)
https://doi.org/10.1116/1.4994908
Published: November 2017
View article titled, Tip-to-tip variation mitigation in extreme ultraviolet lithography for 7 nm and beyond metallization layers and design rule analysis
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Journal Articles

Isofocal dose based proximity effect correction tolerance to the effective process blur

Gerald G. Lopez, Mohsen Azadi, Meredith G. Metzler, Nikola Belic, Ulrich Hofmann
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G505 (2017)
https://doi.org/10.1116/1.4995421
Published: November 2017
View article titled, Isofocal dose based proximity effect correction tolerance to the effective process blur
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Journal Articles

Coaxial hybrid perovskite fibers: Synthesis and encapsulation in situ via electrospinning

John P. Murphy, Jessica M. Andriolo, Nathan J. Sutton, Molly C. Brockway, Jack L. Skinner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 06G402 (2017)
https://doi.org/10.1116/1.4991724
Published: October 2017
View article titled, Coaxial hybrid perovskite fibers: Synthesis and encapsulation <em>in situ</em> via electrospinning
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Journal Articles

Monte Carlo simulations of secondary electron emission due to ion beam milling

Kyle Mahady, Shida Tan, Yuval Greenzweig, Richard Livengood, Amir Raveh, Jason D. Fowlkes, Philip Rack
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 35, 041805 (2017)
https://doi.org/10.1116/1.4994801
Published: July 2017
View article titled, Monte Carlo simulations of secondary electron emission due to ion beam milling
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Includes: Supplementary data